CN211018775U - Nitrogen making system for thermal treatment of quartz crystal resonator - Google Patents
Nitrogen making system for thermal treatment of quartz crystal resonator Download PDFInfo
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- CN211018775U CN211018775U CN201922422436.0U CN201922422436U CN211018775U CN 211018775 U CN211018775 U CN 211018775U CN 201922422436 U CN201922422436 U CN 201922422436U CN 211018775 U CN211018775 U CN 211018775U
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Abstract
The utility model discloses a nitrogen system for quartz crystal syntonizer thermal treatment that nitrogen gas purity is high and nitrogen gas output pressure is stable. The utility model discloses an air compressor machine that connects gradually, first gas holder, cold machine of doing, the machine is inhaled futilely in the regeneration of little heat, the second gas holder, the nitrogen generation subassembly, nitrogen gas holder subassembly and roast gluey stove, a plurality of quartz crystal has been laid in the roast gluey stove, nitrogen gas holder subassembly includes first nitrogen gas holder and second nitrogen gas holder, be series connection between second nitrogen gas holder and the first nitrogen gas holder, first nitrogen gas holder and second nitrogen gas holder all are connected with roast gluey stove, and all be provided with the flowmeter between first nitrogen gas holder and the roast gluey stove and between second nitrogen gas holder and the roast gluey stove. The utility model discloses be applied to the technical field of nitrogen system.
Description
Technical Field
The utility model relates to a nitrogen system, in particular to a nitrogen system for quartz crystal syntonizer thermal treatment.
Background
The nitrogen making equipment for the heat treatment of the existing quartz crystal resonator is characterized in that an air compressor generates gas, dry air pressure gas is sent into an automatic nitrogen making machine, the automatic nitrogen making machine is provided with a tower A and a tower B for switching and regenerating to make nitrogen, when the tower A works, the air pressure gas is used for making pure nitrogen from the gas at the lower end of a tower valve through a molecular sieve and is connected with a gas storage tank through a pipeline, the nitrogen making operation time is 3 minutes, the tower A valve is switched to be closed, then the gas at the lower end of a tower valve through the molecular sieve is used for making pure nitrogen and is connected with the gas storage tank through the pipeline, the nitrogen making operation time is 3 minutes, the tower AB repeatedly exchanges the nitrogen making and the nitrogen making machine generates 150 gas per hour, the gas storage tank is connected through the pipeline, and. Because the flow rate of the nitrogen end is larger, the pressure of the baking oven is lower under the current situation, the output pressure of a 3-square gas storage tank is output by a group of flowmeters with the full range of 150 squares per hour, and actually, the output pressure of the flowmeters is only 70 squares per hour, so that the nitrogen pressure of the baking oven is between 0.15 and 0.19MPA, and the nitrogen pressure of the baking oven is required to be more than 0.3MPA to meet the requirement when the baking oven normally works. The quartz crystal resonator heat treatment equipment is provided with a glue baking furnace, a quartz crystal resonator passes through a high-temperature 280-DEG furnace chamber, pure nitrogen is required to fill the glue baking furnace chamber with nitrogen with the purity below 80PPM, and the nitrogen pressure is greater than 0.3MPA pressure, so that the quartz crystal resonator and a wafer surface silver layer can be ensured to be used as electrodes, but the existing equipment is easy to fluctuate due to unstable nitrogen pressure, and the quartz crystal resonator and the wafer surface silver layer in the glue baking furnace chamber are oxidized by the electrodes under the condition that the nitrogen injected into the glue baking furnace chamber is difficult to ensure the purity and the pressure, so that the qualification rate is reduced, and even the quartz crystal resonator in the whole glue baking furnace chamber is scrapped if the purity and the pressure cannot be recovered for a long time.
Disclosure of Invention
The utility model aims to solve the technical problem that overcome prior art not enough, provide a nitrogen system that is used for quartz crystal syntonizer thermal treatment that nitrogen gas purity is high and nitrogen gas output pressure is stable.
The utility model adopts the technical proposal that: the utility model comprises an air compressor, a first air storage tank, a cold drying machine, a micro-heat regeneration absorption drying machine, a second air storage tank, a nitrogen making component, a nitrogen gas storage tank component and a baking oven which are connected in sequence, wherein a plurality of quartz crystals are laid in the baking oven, the nitrogen making component comprises an A-tower automatic nitrogen making machine and a B-tower automatic nitrogen making machine, the A-tower automatic nitrogen making machine and the B-tower automatic nitrogen making machine are connected in parallel, a first electric valve is arranged between the second air storage tank and the A-tower automatic nitrogen making machine and between the second air storage tank and the B-tower automatic nitrogen making machine, the nitrogen gas storage tank component comprises a first nitrogen gas storage tank and a second nitrogen gas storage tank, the second nitrogen gas storage tank and the first nitrogen gas storage tank are connected in series, and the first nitrogen gas storage tank and the second nitrogen gas storage tank are both connected with the baking oven, and flow meters are arranged between the first nitrogen gas storage tank and the glue baking furnace and between the second nitrogen gas storage tank and the glue baking furnace.
Further, the nitrogen making system further comprises an MCU controller, and the MCU controller is electrically connected with the air compressor, the first air storage tank, the cold dryer, the micro-heat regeneration suction dryer, the second air storage tank, the nitrogen making assembly, the nitrogen gas storage tank assembly and the glue baking furnace.
Further, the volumes of the first nitrogen gas storage tank and the second nitrogen gas storage tank are both 3 cubic meters.
Further, the flowmeter is a glass rotameter, and the full range of the glass rotameter is 150 cubic meters per hour.
Furthermore, second electric valves are arranged between the first nitrogen gas storage tank and the automatic nitrogen generator of the tower A and between the first nitrogen gas storage tank and the automatic nitrogen generator of the tower B.
Further, a pressure detector is arranged in the glue baking furnace and electrically connected with the MCU controller.
The utility model has the advantages that: because the utility model comprises an air compressor, a first air storage tank, a cold drying machine, a micro-heat regeneration absorption drying machine, a second air storage tank, a nitrogen making component, a nitrogen gas storage tank component and a baking oven which are connected in sequence, a plurality of quartz crystals are laid in the baking oven, the nitrogen making component comprises an A-tower automatic nitrogen making machine and a B-tower automatic nitrogen making machine, the A-tower automatic nitrogen making machine and the B-tower automatic nitrogen making machine are connected in parallel, first electric valves are respectively arranged between the second air storage tank and the A-tower automatic nitrogen making machine and between the second air storage tank and the B-tower automatic nitrogen making machine, the nitrogen gas storage tank component comprises a first nitrogen gas storage tank and a second nitrogen gas storage tank, the second nitrogen gas storage tank and the first nitrogen gas storage tank are connected in series, and the first nitrogen gas storage tank and the second nitrogen gas storage tank are both connected with the baking oven, and the flow meters are arranged between the first nitrogen gas storage tank and the glue baking furnace and between the second nitrogen gas storage tank and the glue baking furnace, therefore, the utility model discloses a 3-square second nitrogen gas storage tank is added to be connected with a 3-square first nitrogen gas storage tank in series originally, the first nitrogen gas storage tank is connected by a nitrogen generator pipeline, after nitrogen is produced, the nitrogen is firstly sent to the first nitrogen gas storage tank, the first nitrogen gas storage tank is connected to the second nitrogen gas storage tank by a pipeline, the second nitrogen gas storage tank is used as a second-stage gas storage tank, and nitrogen equipment is output by the second-stage gas storage tank, therefore, the utility model discloses a gas storage tank output has two groups of 150-cubic glass flow rotor meters per hour, two glass flow rotor meters can respectively adjust output gas quantity, ensure output nitrogen pressure, prevent the air pressure fluctuation from causing the glue baking furnace instability, thereby reducing unnecessary product bad scrap, the utility model discloses an increase 3 sides second nitrogen gas holders and have 3 first nitrogen gas holders of side to establish ties rather than originally to make nitrogen gas output have two sets of per hour 150 cubic glass flow rotor meters, can adjust output gas volume respectively, optimize the nitrogen gas pipeline, and then ensure output nitrogen pressure and ensure the interior nitrogen gas purity of flow injection bakeout stove, thereby make the engineering defective rate descend 8% and improve per shift output 10%, the at utmost improves production efficiency.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Detailed Description
As shown in fig. 1, in this embodiment, the present invention includes an air compressor 1, a first air tank 2, a cold dryer 3, a micro-heat regeneration dryer 4, a second air tank 5, a nitrogen making component 6, a nitrogen gas tank component 7, and a baking oven 8 connected in sequence, wherein a plurality of quartz crystals are laid in the baking oven 8, the air compressor 1 is used for compressing air, the first air tank 2 is used for expanding and contracting the compressed air with heat and generating moisture, the cold dryer 3 is used for cooling the compressed air to normal temperature, keeping the air dry, and this nitrogen making system can improve the purity of nitrogen; the nitrogen making component 6 comprises an automatic nitrogen making machine 61 of a tower and an automatic nitrogen making machine 62 of a tower, the automatic nitrogen making machine 61 of a tower and the automatic nitrogen making machine 62 of a tower are connected in parallel, a second gas storage tank 5 is connected between the automatic nitrogen making machines 61 of a tower and a second gas storage tank 5 is connected between the automatic nitrogen making machines 62 of a tower and is provided with a first electric valve 63, the nitrogen gas storage tank component 7 comprises a first nitrogen gas storage tank 71 and a second nitrogen gas storage tank 72, the volumes of the first nitrogen gas storage tank 71 and the second nitrogen gas storage tank 72 are 3 cuboids, the second nitrogen gas storage tank 72 is connected between the first nitrogen gas storage tank 71 and the second nitrogen gas storage tank 72 in series, the first nitrogen gas storage tank 71 and the second nitrogen gas storage tank 72 are connected with the baking glue furnace 8, and a flow meter 73 is arranged between the first nitrogen gas storage tank 71 and the baking glue furnace 8 and between the second nitrogen gas storage tank 72 and the baking glue furnace 8, the flow meter 73 is a glass rotameter, the full range of which is 150 cubes per hour.
In this embodiment, the nitrogen making system still includes the MCU controller, the MCU controller all with the air compressor machine 1 first gas holder 2 the cold machine of doing 3 the little hot regeneration is inhaled futilely the machine 4 the second gas holder 5 the nitrogen making subassembly 6 nitrogen gas holder subassembly 7 and roast gluey stove 8 electric connection.
In this embodiment, second electric valves 64 are disposed between the first nitrogen gas storage tank 71 and the automatic nitrogen generator 61 of the a tower and between the first nitrogen gas storage tank 71 and the automatic nitrogen generator 62 of the B tower.
In this embodiment, a pressure detector is arranged in the glue baking oven 8, and the pressure detector is electrically connected with the MCU controller.
In this embodiment, roast gluey stove 8's furnace is long 4150mm, and wide 550mm, high 30mm, quartz crystal syntonizer is paved with to the product in the furnace, because quartz crystal syntonizer is small, so have about 5 ten thousand quartz crystal syntonizers in the furnace, so the utility model discloses can greatly reduced quartz crystal syntonizer's defective rate, improve the reliability of production.
In this embodiment, to sum up, the utility model discloses a second nitrogen gas holder 72 with be series connection between the first nitrogen gas holder 71 to come invariable output atmospheric pressure through two 3 sides nitrogen gas holders, two 3 sides nitrogen gas holder outputs have two sets of 150 cubic glass flow quantum meters per hour, can adjust output gas respectively, thereby further ensure output nitrogen gas pressure, prevent that atmospheric pressure fluctuation from causing the atmospheric pressure instability in the oven 8 of baking plastics, and then reduce unnecessary product harmfully scrap and maximum improvement production efficiency.
The utility model discloses be applied to the technical field of nitrogen system.
While the embodiments of the present invention have been described in terms of practical embodiments, they are not intended to limit the scope of the invention, and modifications of the embodiments and combinations with other embodiments will be apparent to those skilled in the art in light of the present description.
Claims (6)
1. A nitrogen generation system for thermal processing of a quartz crystal resonator, characterized by: it includes air compressor machine (1), first gas holder (2), cold dry machine (3), little hot regeneration dry machine (4), second gas holder (5), system nitrogen subassembly (6), nitrogen gas holder subassembly (7) and roast gluey stove (8) that connect gradually, it has laid a plurality of quartz crystal in the stove (8) to roast gluey, system nitrogen subassembly (6) are including the automatic nitrogen machine (61) of system of A tower and the automatic nitrogen machine (62) of system of B tower, the automatic nitrogen machine of system of A tower (61) with parallel connection between the automatic nitrogen machine of system of B tower (62), second gas holder (5) with between the automatic nitrogen machine of system of A tower (61) and second gas holder (5) with all be provided with first electric valve (63) between the automatic nitrogen machine of system of B tower (62), nitrogen gas holder subassembly (7) are including first gas holder (71) and second nitrogen gas holder (72), second nitrogen gas holder (72) with be series connection between first nitrogen gas holder (71), first nitrogen gas holder (71) with second nitrogen gas holder (72) all with roast gluey stove (8) are connected, just first nitrogen gas holder (71) with roast gluey stove (8) between with second nitrogen gas holder (72) with roast gluey stove (8) between all be provided with flowmeter (73).
2. The nitrogen generation system for thermal processing of the quartz crystal resonator according to claim 1, wherein: the nitrogen making system further comprises an MCU controller, wherein the MCU controller is electrically connected with the air compressor (1), the first air storage tank (2), the cold dryer (3), the micro-heat regeneration suction dryer (4), the second air storage tank (5), the nitrogen making assembly (6), the nitrogen air storage tank assembly (7) and the glue baking furnace (8).
3. The nitrogen generation system for thermal processing of the quartz crystal resonator according to claim 1, wherein: the volumes of the first nitrogen gas storage tank (71) and the second nitrogen gas storage tank (72) are both 3 cubic meters.
4. The nitrogen generation system for thermal processing of the quartz crystal resonator according to claim 2, wherein: the flow meter (73) is a glass rotameter, the full range of which is 150 cubes per hour.
5. The nitrogen generation system for thermal processing of the quartz crystal resonator according to claim 1, wherein: and second electric valves (64) are arranged between the first nitrogen gas storage tank (71) and the tower A automatic nitrogen making machine (61) and between the first nitrogen gas storage tank (71) and the tower B automatic nitrogen making machine (62).
6. The nitrogen generation system for thermal processing of the quartz crystal resonator according to claim 2, wherein: and a pressure detector is arranged in the glue baking furnace (8), and the pressure detector is electrically connected with the MCU controller.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922422436.0U CN211018775U (en) | 2019-12-30 | 2019-12-30 | Nitrogen making system for thermal treatment of quartz crystal resonator |
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| CN201922422436.0U CN211018775U (en) | 2019-12-30 | 2019-12-30 | Nitrogen making system for thermal treatment of quartz crystal resonator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111660021A (en) * | 2020-07-29 | 2020-09-15 | 吕鸿惠 | Nitrogen generator all-in-one machine for laser cutting machine |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111660021A (en) * | 2020-07-29 | 2020-09-15 | 吕鸿惠 | Nitrogen generator all-in-one machine for laser cutting machine |
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