CN211010372U

CN211010372U - Transmission unit for preventing plasma gas deposition

Info

Publication number: CN211010372U
Application number: CN201921658780.3U
Authority: CN
Inventors: 杨逸波
Original assignee: Wuxi Yingpulang Technology Co ltd
Current assignee: Wuxi Yingpulang Technology Co ltd
Priority date: 2019-09-30
Filing date: 2019-09-30
Publication date: 2020-07-14
Anticipated expiration: 2029-09-30

Abstract

The utility model relates to a gas transmission technical field discloses a transmission unit for preventing plasma gas deposition. The method comprises the following steps: the heating device comprises a pipe body with an inlet and an outlet, and a heating wire arranged in the pipe body; the heating wire extends from the inlet of the pipe body to the outlet of the pipe body; the heater strip includes that first body and cover establish the second body in the first body outside, first body is nichrome layer, the second body is the stainless steel layer. The utility model relates to a transmission unit for preventing plasma gas deposition can make plasma gas each department in the body can both be by continuous heating to can improve the gaseous rate of heating of peer, make plasma gas can rapid heating up to higher temperature of predetermineeing.

Description

Transmission unit for preventing plasma gas deposition

Technical Field

The utility model relates to a gas transmission technical field, specific be a transmission unit for preventing plasma gas deposition.

Background

The plasma gas is ionized gas. When plasma gas is transported, powder is easily deposited on the inner surface of a tube body for transport, thereby affecting the accuracy of plasma gas usage and the usability of the tube body. Research shows that plasma gas is heated to have certain temperature, so that deposition of the plasma gas on the inner wall of the tube body in the transmission process can be avoided. When plasma gas is transmitted, the pipe body for transmission needs to be connected with related equipment. Namely, one end of the pipe body is used for being connected with the gas generating device, and the other end of the pipe body is used for being connected with the gas receiving device. The connection of the tube to the gas generating means and the gas receiving means needs to be sealed to prevent loss and damage due to gas leakage. Therefore, the tube body and both end portions of the gas generating device and the gas receiving device need to be conveniently installed. If the heating jacket is arranged outside the tube body to heat the gas inside the tube body, the two ends of the heating jacket cannot extend to the two connecting end parts of the tube body, the gas generating device and the gas receiving device, otherwise the installation and connection of the tube body, the gas generating device and the gas receiving device can be influenced. Therefore, the gas temperature is reduced at the outlet of the pipe body due to no heating, and researches show that the problem can be effectively solved by arranging the heating wire inside the pipe body.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defect among the prior art, the utility model provides a transmission unit for preventing plasma gas deposition, it can improve the heating rate of heater strip to plasma gas, makes plasma gas can rapid heating up to higher temperature of predetermineeing.

The utility model discloses a transmission unit for preventing plasma gas deposition, include:

the heating device comprises a pipe body with an inlet and an outlet, and a heating wire arranged in the pipe body;

the heating wire extends from the inlet of the pipe body to the outlet of the pipe body;

the heater strip includes that first body and cover establish the second body in the first body outside, first body is nichrome layer, the second body is the stainless steel layer.

Preferably, the heating wires are distributed in a spiral shape inside the pipe body.

Further preferably, an axis of the spiral shape of the heating wire coincides with an axis of the pipe body.

Preferably, both ends of the heating wire are respectively disposed at the central positions of both ends of the pipe body.

Preferably, the heating wire is disposed in contact with an inner wall of the pipe body, and a plurality of contact points exist between the heating wire and the inner wall of the pipe body.

The utility model has the advantages as follows:

the utility model relates to a transmission unit for preventing plasma gas deposition has set up the heater strip through the inside at the body. The heating wire can heat the plasma gas flowing in the tube body to a certain temperature, so that the plasma gas is inhibited from generating powder deposition on the inner wall of the tube body.

The utility model relates to a transmission unit for preventing plasma gas deposit is through locating the inside of body with the heater strip, and the heater strip can extend to the exit of body from the import department of body, and each department of the plasma gas that flows in the body can both be heated promptly in the body to make plasma gas's temperature can not take place to descend, guarantee that plasma gas can keep presetting the temperature in the exit of body, facilitate the use, and can restrain plasma gas and take place the deposit at the body inner wall.

The utility model relates to a transmission unit for preventing plasma gas deposition is through locating the inside of body with the heater strip, and the heater strip direct action is in the plasma gas that flows in the body to can improve the heating rate of heater strip to plasma gas, make plasma gas can rapid heating up to higher temperature of predetermineeing.

The utility model relates to a transmission unit for preventing plasma gas deposition distributes in the inside of body with helical shape through making the heater strip to can distribute the longer heater strip of relative length in the inside certain space of body, thereby improve the heating effect. The heater strip distributes in the inside of body with the spiral shape, has enlarged the area of contact of heater strip with the inside plasma gas that flows of body, makes the heat can give plasma gas by the heater strip short-term transfer to the improvement heater strip that can very big limit is to the heating effect and the rate of heating of the inside plasma gas of body.

In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a transmission unit for preventing plasma gas deposition according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a heating wire in an embodiment of the present invention;

reference numerals of the above figures: 1-a pipe body; 2-heating wires; a 3-nichrome layer; 4-stainless steel layer.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

a pipe body 1 having an inlet and an outlet, a heater wire 2 disposed in the pipe body 1;

the heating wire 2 extends from the inlet of the pipe body 1 to the outlet of the pipe body 1;

the heater strip 2 comprises a first body and a second body, wherein the second body is arranged on the outer side of the first body in a sleeved mode, the first body is a nichrome layer 3, and the second body is a stainless steel layer 4.

Referring to fig. 1, the present embodiment provides a transfer unit for preventing deposition of plasma gas for transfer of plasma gas between devices. The transfer unit comprises a tubular body 1 having an inlet and an outlet. Two ends of the tube body 1 are respectively communicated with the gas generating device and the gas receiving device in a sealing way. Thus, the plasma gas is output from the gas generating device, enters the tube body 1 from the inlet of the tube body 1, passes through the outlet of the tube body 1 and is then transmitted to the gas receiving device.

Since the plasma gas is ionized, electrons, ions, and neutral particles are present in the plasma gas. In the process of transmitting the plasma gas, the plasma gas may deposit a large amount of powder on the inner wall of the tube body 1 to affect the use of the tube body 1. The plasma gas is heated and insulated, so that the powder deposition phenomenon can be well inhibited. The present embodiment thus provides the heating wire 2 inside the pipe body 1. The heating wire 2 can heat the plasma gas flowing in the pipe body 1 to a certain temperature, thereby suppressing the plasma gas from generating powder deposition on the inner wall of the pipe body 1.

Since the inlet and the outlet of the pipe body 1 are connected to the gas generating device and the gas receiving device, respectively, if the heater wires 2 are provided outside the pipe body 1, it is inconvenient to install both ends of the pipe body 1 with the gas generating device and the gas receiving device. In order to maintain the sealing installation of the pipe body 1 with the gas generating device and the gas receiving device and to facilitate the installation, the heating wire 2 cannot be provided at the portions of the pipe body 1 near both ends. Therefore, the plasma gas can not be continuously heated at the two ends of the tube body 1, so that the temperature of the plasma gas is reduced when the plasma gas flows to the position close to the outlet of the tube body 1, the preset temperature is not reached, and the plasma gas is easy to deposit on the inner wall of the tube body 1. This embodiment locates gas heating wire 2 in the inside of body 1, and heater wire 2 can extend to the exit of body 1 from the import department of body 1, and the plasma gas that flows in body 1 promptly can both be heated in each department in body 1 to make the gaseous temperature of plasma can not take place to descend, guarantee that the gaseous exit at body 1 of plasma can keep presetting the temperature, facilitate the use, and can restrain the gaseous deposit of taking place at body 1 inner wall of plasma.

In this embodiment, when the preset temperature is 150 ℃ and the plasma gas flow in the tube body 1 is 40lpm, the temperature of the plasma gas flowing in the tube body 1 at the position close to the inlet of the tube body 1 can reach 108 ℃, the temperature of the plasma gas flowing to the position close to the middle of the tube body 1 can reach 133 ℃, the temperature of the plasma gas flowing to the position close to the outlet of the tube body 1 can reach 149 ℃, and when the plasma gas reaches the outlet of the tube body 1, the temperature of the plasma gas can reach 152 ℃. Because the heater strip 2 is arranged in the pipe body 1 in, the heater strip 2 directly acts on the plasma gas flowing in the pipe body 1, thereby improving the heating speed of the heater strip 2 to the plasma gas and enabling the plasma gas to be heated up to a higher preset temperature quickly.

Heating wire 2 distributes in the inside of body 1 with spiral shape in this embodiment to can distribute the longer heater strip 2 of relative length in the inside certain space of body 1, thereby improve the heating effect. The heating wires 2 are distributed in the pipe body 1 in a spiral shape, so that the contact area between the heating wires 2 and plasma gas flowing in the pipe body 1 is enlarged, heat can be quickly transferred to the plasma gas through the heating wires 2, and the heating effect and the heating speed of the heating wires 2 on the plasma gas in the pipe body 1 can be greatly improved.

Referring to fig. 2, the heating wire 2 includes a first body and a second body sleeved outside the first body. The first body is a nichrome layer 3, and the second body is a stainless steel layer 4. The stainless steel layer 4 is arranged outside the heating wire 2, and the stainless steel layer 4 has good corrosion resistance and can inhibit the plasma gas from corroding the heating wire 2. The first body is made of a nickel-chromium alloy layer 3. The nichrome layer 3 has high resistivity and high-temperature strength, and is not easy to deform in high-temperature use. The nichrome layer 3 has good plasticity, and cannot become brittle after being heated, used and cooled for multiple times, so that the heating wire 2 has a long service life, and the nichrome layer 3 is used as the first body of the heating wire 2 in the embodiment and has reliability. The nichrome layer 3 used in this embodiment is a common nichrome, and the composition thereof is not changed.

The axis of the spiral shape of the heating wire 2 coincides with the axis of the pipe body 1, and the two ends of the heating wire 2 are respectively arranged at the central positions of the two ends of the pipe body 1, so that the heating wire 2 can be conveniently installed at the two ends of the pipe body 1. The heater strip 2 is the contact setting with the inner wall of body 1, and there are a plurality of contact points in heater strip 2 and the inner wall of body 1, and a plurality of contact points can play certain spacing fixed action to heater strip 2 in the inside of body 1, prevent that heater strip 2 warp.

The utility model discloses the principle and the implementation mode of the utility model are explained by applying the concrete embodiment, and the explanation of the above embodiment is only used for helping to understand the technical scheme and the core idea of the utility model; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the specific implementation and application scope, to sum up, the content of the present specification should not be understood as the limitation of the present invention.

Claims

1. A transport unit for preventing plasma gas deposition, comprising:

2. The transfer unit for preventing plasma gas deposition according to claim 1, wherein the heating wires are distributed in a spiral shape inside the pipe body.

3. The transfer unit for preventing plasma gas deposition according to claim 2, wherein an axis of the spiral shape of the heating wire coincides with an axis of the pipe body.

4. The transfer unit for preventing plasma gas deposition according to claim 1, wherein both ends of the heating wire are respectively disposed at central positions of both ends of the pipe body.

5. The transfer unit for preventing plasma gas deposition according to claim 1, wherein the heating wire is disposed in contact with an inner wall of the pipe body, and the heating wire has a plurality of contact points with the inner wall of the pipe body.