CN210966313U - Semiconductor wafer piece measuring machine dust cover - Google Patents
Semiconductor wafer piece measuring machine dust cover Download PDFInfo
- Publication number
- CN210966313U CN210966313U CN201921195515.6U CN201921195515U CN210966313U CN 210966313 U CN210966313 U CN 210966313U CN 201921195515 U CN201921195515 U CN 201921195515U CN 210966313 U CN210966313 U CN 210966313U
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- apron
- thing box
- semiconductor wafer
- sides
- measuring machine
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- 239000000428 dust Substances 0.000 title claims abstract description 22
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 230000000007 visual effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 6
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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Abstract
The utility model relates to the field of semiconductor technology, specifically be a semiconductor wafer piece measuring machine dust cover, including the fixed plate, the front surface of fixed plate is equipped with puts the thing box, and the front surface of fixed plate is located the top of putting the thing box and closely bonds and has the roof, and the roof is equipped with the apron with putting between the thing box, and the both sides of apron all closely bond and have the stopper, and the both sides that the apron is close to fixed plate one end closely bond and have the bolt, and the front surface of fixed plate is located the both sides of putting thing box top and all closely bonds and have the locating piece, is equipped with the. This quick-witted dust cover is surveyed to semiconductor wafer piece, the both sides of apron all are equipped with the stopper, the stopper slides in the roof through first spout and second spout and puts between the thing box, simultaneously, the apron takes out first spout and second spout outer back, and the apron will put the top opening of thing box and open, and the roof with put the opening between the thing box and be located towards the surface of putting the thing box, avoid the dust to fall into and put the thing box, solve the poor problem of the dustproof effect of the cover body of machine of measurationing.
Description
Technical Field
The utility model relates to the field of semiconductor technology, specifically a semiconductor wafer piece measuring machine dust cover.
Background
Before the semiconductor wafer is put into the market, a special measuring machine needs to measure the size and various parameters of the semiconductor wafer, but the conventional measuring machine adopts a flip cover body, so that the cover body has a larger opening and a poorer dustproof effect, dust is easy to fall into the measuring machine, the measuring result is influenced, and the semiconductor wafer is inconvenient to use. Accordingly, a dust cover for a semiconductor wafer measuring machine is provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor wafer chip measuring machine dust cover to the dustproof poor problem of effect of the cover body of the measuring machine who provides among the above-mentioned background art of solution.
In order to achieve the above object, the utility model provides a following technical scheme:
the utility model provides a semiconductor wafer disk measuration machine dust cover, includes the fixed plate, be equipped with square through hole on the fixed plate, square through hole runs through the fixed plate, the front surface of fixed plate is located square through hole's position department closely bonds and has put the thing box, the both sides of putting thing box top all are equipped with first spout, the front surface of fixed plate is located the top of putting the thing box closely bonds and has the roof, the lower surface both sides of roof all are equipped with the second spout, the roof with it is equipped with the apron to put between the thing box, the both sides of apron all closely bond and have the stopper, the apron is close to the both sides of fixed plate one end closely bond and have the bolt, the front surface of fixed plate is located the both sides of putting thing box top all closely bond and have the locating piece, be equipped with.
Preferably, the front surface of the storage box is provided with a visual window.
Preferably, the limiting block is located one end of the upper surface of the cover plate is connected with the top plate in a sliding mode through the second sliding groove, and the limiting block is located one end of the lower surface of the cover plate is connected with the storage box in a sliding mode through the first sliding groove.
Preferably, four corners of the fixing plate are provided with round holes, and bolts are arranged on the round holes.
Preferably, the front end of the cover plate is provided with a handle, and two ends of the handle are tightly bonded with the cover plate.
Preferably, the bolt is matched with the positioning block in a clamping manner through the clamping interface.
Compared with the prior art, the beneficial effects of the utility model are that: this quick-witted dust cover is measurationed to semiconductor wafer piece, the both sides of apron all are equipped with the stopper, the stopper slides in the roof and puts between the thing box through first spout and second spout, and simultaneously, the apron is taken out first spout and the outer back of second spout, the apron will be put the top opening of thing box and is opened, and the roof with put the opening between the thing box and be located the surface of putting the thing box towards, avoid the dust to fall into and put in the thing box, moreover, the steam generator is simple in structure, high durability and convenient use, the problem that the dustproof effect of the cover body of solving the machine.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic structural view of the fixing plate and the top plate of the present invention;
fig. 3 is a schematic structural view of a fixing plate of the present invention;
fig. 4 is a schematic structural diagram of the middle cover plate of the present invention.
In the figure: 1. a fixing plate; 11. a square through hole; 12. a storage box; 121. a first chute; 122. a visual window; 13. a circular hole; 131. a bolt; 2. a top plate; 21. a second chute; 3. a cover plate; 31. a limiting block; 32. a bolt; 33. positioning blocks; 331. a card interface; 34. a handle.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.
Example 1
The utility model provides a semiconductor wafer disk measuring machine dust cover, as shown in fig. 1-4, including fixed plate 1, be equipped with square through hole 11 on fixed plate 1, square through hole 11 runs through fixed plate 1, the position department that the front surface of fixed plate 1 is located square through hole 11 closely bonds and has put thing box 12, the both sides on putting thing box 12 top all are equipped with first spout 121, the front surface of fixed plate 1 is located the top of putting thing box 12 and closely bonds and has roof 2, the lower surface both sides of roof 2 all are equipped with second spout 21, roof 2 and put and be equipped with apron 3 between the thing box 12, the both sides of apron 3 all closely bond and have stopper 31, the both sides that apron 3 is close to fixed plate 1 one end closely bond and have bolt 32, the both sides that the front surface of fixed plate 1 is located thing box 12 tops all closely bond and have locating piece 33.
In this embodiment, fixed plate 1, roof 2 and apron 3 are whole all to adopt PVC (polyvinyl chloride) plastics material, and this material has good wear-resisting corrosion resistance, and the structure is firm, and advantages such as the cost is lower prolong its life.
Further, the one end that stopper 31 is located 3 upper surfaces of apron passes through second spout 21 and 2 sliding connection of roof, the one end that stopper 31 is located 3 lower surfaces of apron is through first spout 121 and put thing box 12 sliding connection, be convenient for utilize first spout 121 and second spout 21 to carry on spacingly to apron 3, and simultaneously, apron 3 slides into roof 2 and put between the thing box 12 through first spout 121 and second spout 21, the top opening that apron 3 will put thing box 12 is closed, roof 2 and the opening of putting between the thing box 12 are located the surface of putting thing box 12 towards, avoid the dust to fall into and put in the thing box 12.
In addition, the front end of apron 3 is equipped with handle 34, and the both ends of handle 34 all closely bond with apron 3, are convenient for utilize handle 34 pull apron 3 for apron 3 can insert roof 2 and put between the thing box 12.
It is worth to say that, the bolt 32 is in clamping fit with the positioning block 33 through the clamping interface 331, the opening end of the clamping interface 331 is narrow, and the opening end of the bottom end is wide, so that the bolt 32 is clamped into the positioning block 33, and the two ends of the cover plate 3 are conveniently fixed.
In this embodiment, the front surface of the fixing plate 1 is provided with the storage box 12, two sides of the top end of the storage box 12 are provided with the first sliding grooves 121, the top of the storage box 12 is provided with the top plate 2, two sides of the lower surface of the top plate 2 are provided with the second sliding grooves 21, the cover plate 3 is arranged between the top plate 2 and the storage box 12, two sides of the cover plate 3 are provided with the limiting blocks 31, one end of the limiting block 31, which is located on the upper surface of the cover plate 3, is slidably connected with the top plate 2 through the second sliding grooves 21, one end of the limiting block 31, which is located on the lower surface of the cover plate 3, is slidably connected with the storage box 12 through the first sliding grooves 121, so that the cover plate 3 can be limited by the first sliding grooves 121 and the second sliding grooves 21, when one end of the cover plate 3 slides to a position attached to the front surface of the fixing plate 1, the bolts 32, which are engaged with the engaging openings 331, the top opening that apron 3 will put thing box 12 opens, and roof 2 and the opening of putting between the thing box 12 lie in towards the surface of putting thing box 12, avoid the dust to fall into and put thing box 12 in, simple structure, convenient to use solves the dustproof poor problem of effect of the cover body of measuring the machine.
Example 2
As a second preferred embodiment of the present invention, the front surface of the storage box 12 is provided with a visual window 122, so that the visual window 122 can be used to observe the situation inside the storage box 12.
Example 3
As the utility model discloses a third kind preferred embodiment, the four corners of fixed plate 1 all is equipped with round hole 13, is equipped with bolt 131 on the round hole 13, is provided with the screw with bolt 131 looks adaptation at the measuring machine outer surface for bolt 131 and this screw threaded connection are convenient for fix fixed plate 1 at the surface of measuring the machine.
When the dustproof cover of the semiconductor wafer measuring machine of the utility model is used, the front surface of the fixing plate 1 is provided with the storage box 12, the two sides of the top end of the storage box 12 are both provided with the first sliding grooves 121, the top of the storage box 12 is provided with the top plate 2, the two sides of the lower surface of the top plate 2 are both provided with the second sliding grooves 21, the cover plate 3 is arranged between the top plate 2 and the storage box 12, the two sides of the cover plate 3 are both provided with the limiting blocks 31, one end of the limiting block 31 positioned on the upper surface of the cover plate 3 is connected with the top plate 2 in a sliding way through the second sliding grooves 21, one end of the limiting block 31 positioned on the lower surface of the cover plate 3 is connected with the storage box 12 in a sliding way through the first sliding grooves 121, the cover plate 3 can be limited by the first sliding grooves 121 and the second sliding grooves 21, when one end of the cover plate 3 slides to the position jointed with, simultaneously, apron 3 takes out first spout 121 and the outer back of second spout 21, and the top opening that apron 3 will put thing box 12 opens, and roof 2 and put the opening between the thing box 12 and be located towards the surface of putting thing box 12, avoids the dust to fall into and puts the thing box 12 in, simple structure, and convenient to use solves the poor problem of the dustproof effect of the cover body of measuring the machine, is convenient for popularize and promote.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. A semiconductor wafer piece measuring machine dust cover comprises a fixing plate (1), and is characterized in that: the fixing plate is characterized in that a square through hole (11) is formed in the fixing plate (1), the square through hole (11) penetrates through the fixing plate (1), the front surface of the fixing plate (1) is located at the position of the square through hole (11) and is tightly bonded with an object placing box (12), first sliding grooves (121) are formed in two sides of the top end of the object placing box (12), a top plate (2) is tightly bonded on the front surface of the fixing plate (1), second sliding grooves (21) are formed in two sides of the lower surface of the top plate (2), a cover plate (3) is arranged between the top plate (2) and the object placing box (12), limiting blocks (31) are tightly bonded on two sides of the cover plate (3) close to one end of the fixing plate (1) and are tightly bonded with bolts (32), and positioning blocks (33) are tightly bonded on two sides of the front surface of the fixing plate (1) located on the top end of the object placing box (12), the positioning block (33) is provided with a clamping interface (331).
2. The dust cover of semiconductor wafer measuring machine as claimed in claim 1, wherein: the front surface of the storage box (12) is provided with a visual window (122).
3. The dust cover of semiconductor wafer measuring machine as claimed in claim 1, wherein: the stopper (31) is located the one end of apron (3) upper surface passes through second spout (21) with roof (2) sliding connection, stopper (31) is located the one end of apron (3) lower surface passes through first spout (121) with put thing box (12) sliding connection.
4. The dust cover of semiconductor wafer measuring machine as claimed in claim 1, wherein: the four corners of the fixing plate (1) are provided with round holes (13), and the round holes (13) are provided with bolts (131).
5. The dust cover of semiconductor wafer measuring machine as claimed in claim 1, wherein: the front end of the cover plate (3) is provided with a handle (34), and two ends of the handle (34) are tightly bonded with the cover plate (3).
6. The dust cover of semiconductor wafer measuring machine as claimed in claim 1, wherein: the bolt (32) passes through the joint interface (331) with locating piece (33) joint cooperation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921195515.6U CN210966313U (en) | 2019-07-28 | 2019-07-28 | Semiconductor wafer piece measuring machine dust cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921195515.6U CN210966313U (en) | 2019-07-28 | 2019-07-28 | Semiconductor wafer piece measuring machine dust cover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210966313U true CN210966313U (en) | 2020-07-10 |
Family
ID=71445236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921195515.6U Active CN210966313U (en) | 2019-07-28 | 2019-07-28 | Semiconductor wafer piece measuring machine dust cover |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210966313U (en) |
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2019
- 2019-07-28 CN CN201921195515.6U patent/CN210966313U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231228 Address after: 212400 Building 8, 102 Chongming West Road, Jurong Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Jingdu Semiconductor Technology Co.,Ltd. Address before: No.102, Chongming West Road, Jurong Development Zone, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU YIDU TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |