CN210938687U

CN210938687U - Pressure detection system for linear hydraulic pressure polishing device

Info

Publication number: CN210938687U
Application number: CN201921990097.XU
Authority: CN
Inventors: 章益栋; 文东辉; 徐耀耀; 许鑫祺; 王辉
Original assignee: Zhejiang University of Technology ZJUT
Current assignee: Zhejiang University of Technology ZJUT
Priority date: 2019-11-18
Filing date: 2019-11-18
Publication date: 2020-07-07
Anticipated expiration: 2029-11-18

Abstract

The utility model discloses a pressure detection system for a linear hydraulic pressure polishing device, which comprises a frame, a transverse feeding mechanism, a longitudinal feeding mechanism and a rotary polishing mechanism, wherein the transverse feeding mechanism, the longitudinal feeding mechanism and the rotary polishing mechanism are arranged on the frame; the longitudinal feeding mechanism is used for adjusting the height of the rotary polishing mechanism, and the rotary polishing mechanism comprises a polishing roller; the pressure detection system comprises a pressure sensor, a transmitter and a data acquisition card; the pressure sensor is arranged on the transverse feeding mechanism and is in clearance fit with the surface of the polishing roller; the transverse feeding mechanism is used for feeding the pressure sensor; one end of the transmitter is electrically connected with the pressure sensor, and the other end of the transmitter is electrically connected with the data acquisition card. The utility model discloses a set up pressure sensor in small clearance, realized carrying out real-time measurement to the fluid pressure in small clearance.

Description

Pressure detection system for linear hydraulic pressure polishing device

Technical Field

The utility model belongs to non-contact polishing fluid pressure detection area, concretely relates to linear hydraulic pressure polishing fluid pressure's detecting system.

Background

The linear hydraulic polishing method is one kind of polishing method for super smooth surface. In the linear hydraulic pressure polishing process, a workpiece is fixed on a workpiece disc, a roller is semi-immersed in polishing liquid, and simultaneously, the roller is driven by a three-phase asynchronous motor to rotate and drive the polishing liquid to flow. The flowing polishing liquid acts to generate a liquid pressure on the workpiece disk, the magnitude and distribution of which has a significant effect on the surface material removal rate and surface uniformity of the workpiece sample. Therefore, pressure measurement of the workpiece area during the polishing process is one of the very effective ways to study its mechanism of action.

In linear hydrodynamic polishing, the gap between the workpiece and the roll is small, typically controlled to be 20-200 μm. Meanwhile, the surface of the polishing roller is provided with a microstructure which is uniformly distributed, and when the polishing wheel and the member to be polished move relatively in the polishing process, polishing liquid flows from a position with a larger gap between the member to be polished and the geometric groove to a position with a smaller gap to form a hydraulic lubricating film. The dynamic pressure generated by the hydrodynamic lubrication film is also periodically changed due to the periodically distributed microstructure on the surface of the polishing roller. At present, the liquid pressure measuring system cannot measure in the micron-sized gap. In order to efficiently and accurately obtain the periodic distribution of the fluid pressure in the small gap and to acquire the pressure in real time, a novel pressure detection device is required.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a linear hydraulic pressure polishing fluid pressure's detecting system in order to solve present liquid pressure measurement system and can't carry out measuring problem in the clearance of micron order.

In order to achieve the purpose of the utility model, the utility model adopts the following technical scheme:

a pressure detection system for a linear hydraulic polishing device comprises a frame, a transverse feeding mechanism, a longitudinal feeding mechanism and a rotary polishing mechanism, wherein the transverse feeding mechanism, the longitudinal feeding mechanism and the rotary polishing mechanism are arranged on the frame; the longitudinal feeding mechanism is used for adjusting the height of the rotary polishing mechanism, and the rotary polishing mechanism comprises a polishing roller; the pressure detection system comprises a pressure sensor, a transmitter and a data acquisition card; the pressure sensor is arranged on the transverse feeding mechanism and is in clearance fit with the surface of the polishing roller; the transverse feeding mechanism is used for feeding the pressure sensor; one end of the transmitter is electrically connected with the pressure sensor, and the other end of the transmitter is electrically connected with the data acquisition card.

Preferably, the pressure sensor further comprises a signal conditioning amplifier arranged between the pressure sensor and the transmitter.

Preferably, the transmitter is a high frequency pressure transmitter.

Preferably, the device further comprises a display, which is electrically connected with the data acquisition card and is used for displaying the pressure value of the hydraulic pressure in the gap.

Preferably, the longitudinal feeding mechanism comprises a threaded seat, a screw rod, a first worm wheel, a first worm, a rocking handle, a second worm wheel, a second worm and a fine adjustment knob; the screw rod is longitudinally arranged and can be rotatably arranged on the rack; the thread seat is in thread fit with the screw rod, and the rotary polishing mechanism is arranged on the thread seat; the first worm wheel is coaxially fixed at the bottom of the screw rod, the first worm is coaxially connected with the second worm wheel, and the rocking handle is used for driving the first worm and the second worm wheel to rotate; the first worm wheel is in linkage fit with the first worm; the second worm is in linkage fit with the second worm wheel, and the fine adjustment knob is used for driving the second worm wheel to rotate.

Preferably, the frame comprises a base and two upright posts fixed on the base; the base is provided with a first guide rail, the two upright posts are respectively provided with a second guide rail which is arranged oppositely, and the threaded seat is in sliding fit between the two second guide rails.

Preferably, the transverse feeding mechanism comprises a workbench, a polishing groove, a rack, a gear and a servo motor; the workbench is movably arranged on the first guide rail, and the rack is fixed on the workbench; the gear is arranged on the servo motor, the servo motor is arranged on the base, and the gear is in linkage fit with the rack; a fixed block is arranged in the polishing groove, an electromagnet is arranged in the fixed block, and a pressure sensor is limited by the electromagnet and arranged on the fixed block.

Preferably, the rotary polishing mechanism comprises a rotating motor and a polishing roller driven by the rotating motor, the rotating motor is fixed on the threaded seat, and the polishing roller is arranged in the polishing groove.

Preferably, the polishing roller is of a cylindrical structure, and micro-groove structures for generating dynamic pressure are uniformly distributed on the circumferential surface of the polishing roller; the microgroove structure comprises an arc part of the circumferential surface and a microgroove part extending along the circumferential direction of the circumferential surface, and the projection of the microgroove part along the axial direction of the polishing roller is a parabola or a straight line.

Preferably, the central angle of the projection of the micro-groove part of the micro-groove structure along the axial direction of the polishing roller is 12-18 degrees, the maximum depth of the micro-groove part is 1-3mm, and the number of the micro-groove structures is even.

Compared with the prior art, the utility model, beneficial effect is: by arranging the pressure sensor in the micro gap, the fluid pressure in the micro gap can be measured in real time. Meanwhile, the horizontal movement mechanism of the linear hydraulic polishing device can reciprocate, so that the hydrodynamic pressure at the edge position of the roller can be measured, the size and distribution uniformity of the hydrodynamic pressure under different parameter processes can be analyzed and researched, and the processing uniformity of workpieces is improved.

Drawings

Fig. 1 is a schematic structural diagram of a pressure detection system for a linear hydraulic polishing apparatus according to an embodiment of the present invention;

fig. 2 is a bottom view of a pressure sensing system for a linear hydraulic polishing apparatus according to an embodiment of the present invention;

fig. 3 is a rear view of a pressure sensing system for a linear hydraulic polishing apparatus according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of an infeed mechanism according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a longitudinal feeding mechanism according to an embodiment of the present invention;

FIG. 6 is a schematic view of a polishing roll according to an embodiment of the present invention;

fig. 7 is a schematic structural view of a rotary polishing mechanism according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of a pressure detection system according to an embodiment of the present invention.

Detailed Description

In order to more clearly illustrate the embodiments of the present invention, the following description will explain embodiments of the present invention with reference to the accompanying drawings. It is obvious that the drawings in the following description are only examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be obtained from these drawings without inventive effort.

A pressure detection system for a linear hydrodynamic polishing apparatus according to the present embodiment, as shown in fig. 1, includes a frame 10, a lateral feed mechanism 20, a longitudinal feed mechanism 30, and a rotary polishing mechanism 40. The transverse feeding mechanism 20 and the longitudinal feeding mechanism 30 are movably mounted on the frame 10, and the rotary polishing mechanism 40 is mounted on the longitudinal feeding mechanism 30. The longitudinal feeding mechanism 30 is used for adjusting the gap size between the rotary polishing mechanism 40 and the surface of the workpiece to be machined, and the rotary polishing mechanism comprises a polishing roller 42. The pressure sensor 51 of the pressure detection system is arranged on the workpiece holder 26 at the bottom of the polishing tank 22 and is in clearance fit with the surface of the polishing roller 42, and the polishing clearance is controlled to be 20-200 μm.

The frame 10 includes a base 11 and two vertical columns 12, the base 11 is horizontally disposed, and the two vertical columns 12 are disposed in parallel and fixed on the base 11. As shown in fig. 2, the base 11 has a first rail 18 for slidably mounting an infeed mechanism 20. As shown in fig. 3, the two columns 12 are respectively provided with second guide rails 19 arranged oppositely for slidably mounting the longitudinal feeding mechanism 30.

The traverse mechanism 20 includes a table 21, a polishing tank 22, a rack 23, a gear 24, and a servo motor 25. The workbench 21 is installed on the first guide rail 19 in a sliding fit mode, the cross section of the first guide rail is provided with a dovetail groove structure, the bottom of the workbench is provided with a tenon structure with the same cross section, and the workbench are installed in a sliding mode. A rack 23 is fixed on the side surface of the workbench 21, a gear 24 is arranged on the base 11, and the rack is connected with a servo motor 25 through a connecting rod and a coupling. As shown in FIG. 4, the gear 24 is engaged with the rack 23, and when the servo motor 25 is actuated, the table 21 is fed laterally. Contact inductors are arranged at the stroke limit positions at the two ends of the base 21, and limit columns are arranged at the two ends of the workbench. In order to realize reciprocating feeding of the base during polishing, contact sensors are arranged at two ends of the base, limiting columns are arranged at two ends of the workbench, and when the limiting columns move to the positions above the contact sensors, the limiting columns are triggered to send electric signals to the servo motor, so that the servo motor changes the rotating direction. When the workpiece is polished, the workbench can realize reciprocating feeding, so that polishing ripples on the surface of the workpiece can be eliminated, and uneven polishing of transverse points of the workpiece is avoided. The polishing tank 22 is provided with a workpiece holder 26, the workpiece holder 26 is provided with an electromagnet, and when the pressure sensor 51 is placed on the workpiece holder, the electromagnet is electrified to generate a magnetic field to fix the pressure sensor.

As shown in fig. 5, the longitudinal feeding mechanism 30 includes a screw holder 31, a lead screw 32, a first worm wheel 33, a first worm 34, a rocking handle 35, a second worm wheel 36, a second worm 37, and a fine adjustment knob 38. The screw 32 is longitudinally arranged and rotatably mounted to the frame 10. The threaded seat 31 is slidably fitted between the two second guide rails 19, the threaded seat 31 is threadedly fitted to the lead screw 32, and the rotary polishing mechanism 40 is mounted on the threaded seat 31. When the screw 32 is rotated, the rotation of the screw holder 31 in the horizontal plane is restricted by the second guide rail 19, which can only be fed longitudinally in the direction of the screw. Due to the uniformity of the screw threads of the screw rod, the longitudinal displacement of the screw seat is constant when the screw rod rotates for one circle. Further, the size of the longitudinal displacement can be adjusted by setting the thread pitch of the screw rod threads, namely when the longitudinal adjustment with higher precision is required, the screw rod and the thread seat with smaller thread pitch under the same screw rod diameter can be replaced, so that when the screw rod rotates for one circle, the longitudinal displacement of the thread seat is smaller. The first worm wheel 33 is coaxially fixed at the bottom of the screw 32 and is matched with a first worm 34, the first worm 34 is rotatably arranged on the base 11 and is connected with a rocking handle 35 through a connecting rod and a coupling. When the rocking handle 35 is rotated, the first worm 34 is linked with the first worm wheel 33 and drives the screw rod 32 to rotate, so that the longitudinal displacement of the threaded seat 31 is realized.

For the polishing roller based on the linear hydraulic pressure, the polishing gap is required to be controlled within 20-200 μm. In order to more accurately realize the longitudinal adjustment of the threaded seat, a worm gear is added on the basis of the transmission mechanism. The second worm wheel 36 is coaxially connected with the first worm 34, the second worm 37 is coaxially connected with the fine adjustment knob 38, and the second worm 37 is coupled with the second worm wheel 36 in a linkage manner. Due to the addition of the first worm gear, i.e., the second worm wheel 36 and the second worm 37, the reduction ratio from the rotation input end to the rotation output end is further increased, and fine adjustment with a precision of 10 μm can be realized, thereby improving the adjustment precision of the screw base. After the workpiece is placed in the station, the rocking handle 35 is rotated to enable the rotary polishing mechanism to rapidly enter the processing station, and then the fine adjustment knob 38 is rotated to adjust the polishing roller to a required polishing clearance.

The rotary polishing mechanism 40 comprises a rotating motor 41 and a polishing roller 42, wherein the rotating motor 41 is mounted on the threaded seat 31 of the longitudinal feeding mechanism, and the rotating motor 41 and the threaded seat 31 are integrated in the longitudinal box body. The shaft of the rotary motor 41 passes through the case, and a burnishing roller 42 is mounted on the end of the shaft. The polishing rollers 42 are disposed in the polishing receptacle 22 in a clearance fit with a workpiece to be polished mounted on the workpiece holder 26.

As shown in FIG. 6, the main body of the polishing roller 42 has a cylindrical structure with a diameter of 200mm and a thickness of 30mm, and is made of an aluminum alloy material. The circumferential surface of the micro-groove structure is uniformly distributed with micro-groove structures 43 used for generating dynamic pressure, the micro-groove structures 43 comprise arc parts 44 of the circumferential surface and micro-groove parts 45 extending along the circumferential direction of the circumferential surface, and the micro-groove parts are formed by wire cutting. When the polishing roller 42 and the workpiece to be polished move relatively during polishing, the polishing liquid flows from the micro-groove portion 45 with a large gap between the workpiece to be polished and the micro-groove structure to the arc portion 44 with a small gap to form a hydrodynamic lubrication film, and the surface material of the workpiece is uniformly and rapidly removed under the dual action of the abrasive particles and the hydrodynamic lubrication film. The microgrooves 45 are optimally designed and have a geometry that ensures that a strong and uniform hydrodynamic pressure is generated as the polishing roller 42 rotates. The projection of the micro-groove 45 along the axial direction of the polishing roller 42 is a parabola or a straight line, the central angle is 12-18 degrees, the optimum is 18 degrees, and the maximum depth of the micro-groove 45 is 1-3mm, the optimum is 1 mm. The parabolic micro-groove part 45 and the arc surface 44 with the radian not larger than the micro-groove part form a parabolic micro-groove structure, and the linear micro-groove part 45 and the arc surface 44 with the radian not larger than the micro-groove part form a wedge-shaped micro-groove structure. The number of micro-groove structures 43 is set to an even number, preferably twelve. In the twelve microgroove structures, the parabolic microgroove structures and the wedge-shaped microgroove structures are sequentially alternated, or the two parabolic microgroove structures and the two wedge-shaped microgroove structures are sequentially alternated, or the three parabolic microgroove structures and the three wedge-shaped microgroove structures are sequentially alternated, or the six parabolic microgroove structures and the six wedge-shaped microgroove structures are sequentially alternated. Wherein, the effect is the best when three parabola-shaped micro-groove structures and three wedge-shaped micro-groove structures are sequentially and alternately used. A30 mm unthreaded hole is formed in the center of the polishing roller, and a counter bore with the diameter of 110mm and the depth of 15mm is coaxially arranged and used for being connected with a shaft of the rotating motor 41.

As shown in FIG. 7, the pressure sensor 51 of the pressure detection system is disposed on the work holder 26 at the bottom of the polishing tank 22 in clearance fit with the surface of the polishing roller 42, and the polishing clearance is controlled to be 20-200 μm. As shown in FIG. 8, pressure sensing system 50 includes a pressure sensor 51, a transmitter 52, and a data acquisition card 53. One end of the transmitter 52 is electrically connected with the pressure sensor 51, and the other end is electrically connected with the data acquisition card 53. Further, pressure sensor 51 is a diffused silicon diaphragm pressure sensor, and transmitter 52 is a high frequency pressure transmitter. A signal conditioning amplifier may also be provided between pressure sensor 51 and transmitter 52 to amplify the collected micro-signals. The conditioned amplified signal is sent to a display or computer 54 which displays the detected pressure values and pressure cycle profiles.

The detection process comprises the following specific implementation steps:

fixing and early-stage preparation of a pressure detection system: the pressure sensor 51 is fixed at the center of the inside of the polishing tank 22 by electromagnetic attraction, and the polishing liquid is added into the polishing tank to a specified scale mark.

Transverse feeding: the servo motor 25 is started to drive the gear 24 to rotate through the shaft, and the rack 23 drives the transverse worktable 21 to perform transverse feeding along with the rotation, thereby moving the polishing trough 22 on the transverse worktable 21 to be right below the polishing roller 42.

Longitudinal feeding: the rocking handle 35 is rotated to transmit the torque to the turbine 33 fixed at the tail end of the screw rod 32 through a shaft, a connecting rod and a worm, the screw rod 32 rotates to drive the longitudinal box body fixed on the screw rod nut seat 31 to do longitudinal descending motion, and the polishing roller 42 also descends along with the longitudinal descending motion. When the burnishing roller approaches the pressure sensor 51, it is slightly advanced longitudinally by the worm 37 rotatably fixed to the protective cover. Until just touching the pressure sensor 51, the corresponding scale of the worm 37 is rotated reversely according to the polishing clearance required by the experiment, so that the polishing clearance feeding required by the experiment is accurately finished.

And (3) pressure detection: the rotary motor 41 is started to transmit power to the polishing roller 42 through the shaft, and the polishing roller is driven to rotate at a high speed. Meanwhile, the servo motor 25 is controlled to output positive and negative rotation power in a designated period, so that the workpiece in the polishing groove 22 can do reciprocating motion with small amplitude. The high-speed rotating polishing roller 42 with a composite structure can generate large and uniform linear pressure in a narrow polishing gap by virtue of the microstructure units on the circumferential surface, and a pressure sensor 51 detects a pressure signal, conditions the pressure signal, transmits the conditioned pressure signal to a high-frequency transmitter 52, and transmits the conditioned pressure signal to a computer 54 for storage through a data acquisition card 53.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims

1. A pressure detection system for a linear hydraulic polishing device comprises a frame, a transverse feeding mechanism, a longitudinal feeding mechanism and a rotary polishing mechanism, wherein the transverse feeding mechanism, the longitudinal feeding mechanism and the rotary polishing mechanism are arranged on the frame; the longitudinal feeding mechanism is used for adjusting the height of the rotary polishing mechanism, and the rotary polishing mechanism comprises a polishing roller; the pressure detection system is characterized by comprising a pressure sensor, a transmitter and a data acquisition card; the pressure sensor is arranged on the transverse feeding mechanism and is in clearance fit with the surface of the polishing roller; the transverse feeding mechanism is used for feeding the pressure sensor; one end of the transmitter is electrically connected with the pressure sensor, and the other end of the transmitter is electrically connected with the data acquisition card.

2. The pressure detecting system for a linear hydraulic polishing apparatus according to claim 1, further comprising a signal conditioning amplifier disposed between the pressure sensor and the transducer.

3. A pressure detecting system for a linear hydraulic pressure polishing apparatus according to claim 1, wherein said transducer is a high frequency pressure transducer.

4. The pressure detecting system of claim 1, further comprising a display electrically connected to the data collecting card for displaying the pressure value of the hydrodynamic pressure in the gap.

5. The pressure detecting system for a linear hydraulic polishing apparatus according to claim 1, wherein the longitudinal feeding mechanism comprises a screw seat, a lead screw, a first worm wheel, a first worm, a rocking handle, a second worm wheel, a second worm, and a fine adjustment knob; the screw rod is longitudinally arranged and can be rotatably arranged on the rack; the thread seat is in thread fit with the screw rod, and the rotary polishing mechanism is arranged on the thread seat; the first worm wheel is coaxially fixed at the bottom of the screw rod, the first worm is coaxially connected with the second worm wheel, and the rocking handle is used for driving the first worm and the second worm wheel to rotate; the first worm wheel is in linkage fit with the first worm; the second worm is in linkage fit with the second worm wheel, and the fine adjustment knob is used for driving the second worm wheel to rotate.

6. A pressure detecting system for a linear hydraulic pressure polishing apparatus as set forth in claim 5, wherein said frame includes a base and two vertical posts fixed to the base; the base is provided with a first guide rail, the two upright posts are respectively provided with a second guide rail which is arranged oppositely, and the threaded seat is in sliding fit between the two second guide rails.

7. A pressure detecting system for a linear hydrodynamic pressure polishing apparatus according to claim 5, wherein the traverse mechanism includes a table, a polishing groove, a rack, a gear, and a servo motor; the workbench is movably arranged on the first guide rail, and the rack is fixed on the workbench; the gear is arranged on the servo motor, the servo motor is arranged on the base, and the gear is in linkage fit with the rack; a fixed block is arranged in the polishing groove, an electromagnet is arranged in the fixed block, and a pressure sensor is limited by the electromagnet and arranged on the fixed block.

8. A pressure detecting system for a linear hydraulic polishing apparatus according to claim 5, wherein the rotary polishing mechanism includes a rotary motor and a polishing roller driven by the rotary motor, the rotary motor is fixed to the screw base, and the polishing roller is disposed in the polishing groove.

9. The pressure detecting system for a linear hydrodynamic pressure polishing apparatus as claimed in claim 8, wherein the polishing roller has a cylindrical structure, and micro-groove structures for generating dynamic pressure are uniformly distributed on the circumferential surface thereof; the microgroove structure comprises an arc part of the circumferential surface and a microgroove part extending along the circumferential direction of the circumferential surface, and the projection of the microgroove part along the axial direction of the polishing roller is a parabola or a straight line.

10. A pressure detecting system for a linear hydraulic pressure polishing apparatus according to claim 9, wherein a central angle of a projection of the micro groove portion of the micro groove structure in the axial direction of the polishing roll is 12 to 18 °, a maximum depth of the micro groove portion is 1 to 3mm, and the number of the micro groove structures is an even number.