CN210936328U

CN210936328U - Cleaning device of small glass container for photoresist

Info

Publication number: CN210936328U
Application number: CN201921819634.4U
Authority: CN
Inventors: 邓淇; 黄珍荣; 张洪棋
Original assignee: Shenzhen Dalton Electronic Material Co ltd
Current assignee: Shenzhen Dalton Electronic Materials Co ltd
Priority date: 2019-10-28
Filing date: 2019-10-28
Publication date: 2020-07-07
Anticipated expiration: 2029-10-28

Abstract

The utility model discloses a belt cleaning device of small-size glass container for photoresist, including wasing the case, wash the inboard upper end fixedly connected with shunt tubes of case, the bottom fixedly connected with shower nozzle of shunt tubes, just shower nozzle evenly distributed, wash both ends fixedly connected with drain pipe about the inboard bottom of case, the port department fixedly connected with filter screen of drain pipe top, wash the middle fixedly connected with of department who washs case left surface and promote the jar, the left end swing joint that promotes the jar has the catch bar, just the catch bar runs through wash the case, the other end of catch bar rotates and is connected with first rotation piece. This kind of belt cleaning device of small-size glass container for photoresist promotes first splint through promoting the jar, through the clamping glass container of being convenient for of first splint and second splint, washs glass container through the pump body, drives glass container through the motor and rotates, to the all-round washing of glass container, improves the drain pipe and is convenient for retrieve the water source.

Description

Cleaning device of small glass container for photoresist

Technical Field

The utility model relates to a photoresist is with small-size glass container field specifically is a cleaning device of photoresist with small-size glass container.

Background

The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist.

The small glass container is needed to be used for cleaning the photoresist after the photoresist is used, most of the photoresist is cleaned manually at present, so that the cleaning efficiency is low, the cleaning degree is poor, and the conventional cleaning device cannot clean the glass container comprehensively.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a belt cleaning device of small-size glass container for photoresist has solved the problem that proposes among the background art.

In order to achieve the above object, the utility model provides a following technical scheme: a cleaning device for a small glass container for photoresist comprises a cleaning box, wherein a flow dividing pipe is fixedly connected to the upper end of the inner side of the cleaning box, a sprayer is fixedly connected to the bottom of the flow dividing pipe and is uniformly distributed, drain pipes are fixedly connected to the left end and the right end of the inner bottom of the cleaning box, a filter screen is fixedly connected to a port part above the drain pipes, and a pushing cylinder is fixedly connected to the middle of the left surface of the cleaning box;

the left end of the pushing cylinder is movably connected with a pushing rod, the pushing rod penetrates through the cleaning box, the other end of the pushing rod is rotatably connected with a first rotating piece, the other end of the first rotating piece is fixedly connected with a first clamping plate, the middle of the right surface of the cleaning box is fixedly connected with a motor, the middle of the right end of the inner side of the cleaning box is rotatably connected with a second rotating piece, the motor is connected with the second rotating piece through a transmission shaft, and the left end of the second rotating piece is fixedly connected with a second clamping plate;

wash the bottom fixedly connected with storage water tank of case, the inboard left side below fixedly connected with pump body of storage water tank, the pump body pass through the connecting pipe with the shunt tubes is connected, wash the positive centre department of case and seted up the spacing groove, the inboard fixedly connected with of spacing groove is sealed fills up, one side of spacing groove is rotated through the pivot and is connected with the cabinet door.

As an embodiment of the utility model, the right-hand member fixedly connected with control panel of washing case upper surface, just the propulsion jar the motor with the pump body all through the wire with the control panel is connected.

As a preferred embodiment of the present invention, the surface of the first splint and the surface of the second splint are fixedly connected with a protection pad, and the protection pad is made of rubber.

As an optimal implementation mode of the utility model, the left end fixedly connected with filling tube of storage water tank upper surface, the row's of bottom fixedly connected with material pipe of storage water tank right side surface.

As a preferred embodiment of the utility model, the cabinet door the size with the spacing groove is identical, the fixedly connected with observation window of department in the middle of cabinet door surface, just what the observation window adopted is the glass material.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a cleaning device of small-size glass container for photoresist, start the promotion jar through control panel, the promotion jar promotes the catch bar, the catch bar promotes first rotating member, first rotating member promotes first splint, be convenient for fix glass container through first splint and second splint, thereby the user of being convenient for carries out the clamping, through the protection pad that first splint and second splint surface were equipped with, avoid the surface of glass container impaired, play the guard action simultaneously, stability when improving the clamping;

2. the utility model discloses a cleaning device of small-size glass container for photoresist, start the pump body through control panel, through the pump body with wash water through connecting pipe transportation to the reposition of redundant personnel intraductal, through the shower nozzle blowout, wash the glass container through the shower nozzle, through control panel start motor, the motor drives the transmission shaft and rotates, the transmission shaft drives the second rotation piece and rotates, the second rotation piece drives the second splint and rotates, the second splint drive the glass container and rotate to all-round washing of glass container improves the cleaning performance;

3. the utility model discloses a cleaning device of small-size glass container for photoresist is convenient for retrieve the water source through the drain pipe that washs the bottom half portion and be equipped with, and the cyclic utilization of being convenient for avoids impurity to get into the storage water tank through the filter screen that drain pipe port department was equipped with, avoids taking place the jam, stability when improving cabinet door connection through the spacing groove, through the sealed pad that the spacing inslot side was equipped with, the leakproofness when doing the connection, this novel operation of being convenient for, comparatively practical is fit for extensively promoting and using.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is a front sectional view of a cleaning apparatus for a small glass container for photoresist according to the present invention;

FIG. 2 is an expanded view of the main view of the cleaning apparatus for a small glass container for photoresist according to the present invention.

In the figure: cleaning box 1, control panel 11, shunt tubes 12, shower nozzle 13, drain pipe 14, filter screen 15, promotion jar 2, catch bar 21, first commentaries on classics piece 22, first splint 23, motor 3, transmission shaft 31, second commentaries on classics piece 32, second splint 33, storage water tank 4, filling tube 41, arrange material pipe 42, the pump body 43, connecting pipe 44, protection pad 5, spacing groove 6, sealed pad 61, pivot 62, cabinet door 63, observation window 64.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

Referring to fig. 1-2, the present invention provides a technical solution: a cleaning device for a small glass container for photoresist comprises a cleaning box 1, wherein a flow dividing pipe 12 is fixedly connected to the upper end of the inner side of the cleaning box 1, a spray head 13 is fixedly connected to the bottom of the flow dividing pipe 12, the spray heads 13 are uniformly distributed, drain pipes 14 are fixedly connected to the left end and the right end of the inner side of the cleaning box 1, a filter screen 15 is fixedly connected to a port part above the drain pipes 14, and a pushing cylinder 2 is fixedly connected to the middle of the left surface of the cleaning box 1;

the left end of the pushing cylinder 2 is movably connected with a pushing rod 21, the pushing rod 21 penetrates through the cleaning box 1, the other end of the pushing rod 21 is rotatably connected with a first rotating piece 22, the other end of the first rotating piece 22 is fixedly connected with a first clamping plate 23, the middle of the right surface of the cleaning box 1 is fixedly connected with a motor 3, the middle of the right end of the inner side of the cleaning box 1 is rotatably connected with a second rotating piece 32, the motor 3 is connected with the second rotating piece 32 through a transmission shaft 31, and the left end of the second rotating piece 32 is fixedly connected with a second clamping plate 33;

the bottom of the cleaning box 1 is fixedly connected with a water storage tank 4, the inner left lower side of the water storage tank 4 is fixedly connected with a pump body 43, the pump body 43 is connected with the shunt pipe 12 through a connecting pipe 44, the front middle of the cleaning box 1 is provided with a limit groove 6, the inner side of the limit groove 6 is fixedly connected with a sealing gasket 61, one side of the limit groove 6 is rotatably connected with a cabinet door 63 through a rotating shaft 62, in the embodiment (as shown in fig. 1 and fig. 2), the control panel 11 is used for starting the push cylinder 2, the push cylinder 2 pushes the push rod 21, the push rod 21 pushes the first rotating part 22, the first rotating part 22 pushes the first clamping plate 23, and the glass container is conveniently fixed through the first clamping plate 23 and the second clamping plate 33, so that a user can conveniently clamp the glass container, and the surface of the glass container is prevented from being damaged through the protection pads, meanwhile, the protective effect is achieved, the stability during clamping is improved, the pump body 43 is started through the control panel 11, cleaning water is conveyed into the flow dividing pipe 12 through the connecting pipe 44 through the pump body 43, the cleaning water is sprayed out through the spray head 13, the glass container is cleaned through the spray head 13, the motor 3 is started through the control panel 11, the motor 3 drives the transmission shaft 31 to rotate, the transmission shaft 31 drives the second rotating piece 32 to rotate, the second rotating piece 32 drives the second clamping plate 33 to rotate, the second clamping plate 33 drives the glass container to rotate, therefore, the glass container is cleaned in all directions, the cleaning effect is improved, the water source is convenient to recycle through the drain pipe 14 arranged at the bottom of the cleaning box 1, impurities are prevented from entering the water storage tank 4 through the filter screen 15 arranged at the port of the drain pipe 14, the blockage is avoided, the stability during connection of the cabinet door 63 is improved, the tightness during connection is improved.

Referring to fig. 1, a control panel 11 is fixedly connected to the right end of the upper surface of the cleaning tank 1, and the pushing cylinder 2, the motor 3 and the pump body 43 are all connected to the control panel 11 through wires, and are controlled through the control panel 11.

Referring to fig. 1, the protection pads 5 are fixedly connected to the surfaces of the first clamping plate 23 and the second clamping plate 33, and the protection pads 5 are made of rubber, and are controlled by the protection pads 5.

Referring to fig. 1, a feed pipe 41 is fixedly connected to the left end of the upper surface of the water storage tank 4, a discharge pipe 42 is fixedly connected to the bottom of the right surface of the water storage tank 4, raw materials are added through the feed pipe 41, and discharge is performed through the discharge pipe 42.

Referring to fig. 2, the size of the cabinet door 63 is matched with the limiting groove 6, an observation window 64 is fixedly connected to the middle of the surface of the cabinet door 63, the observation window 64 is made of glass, and the inside condition of the cleaning tank 1 can be observed conveniently through the observation window 64.

The working principle is as follows: it should be noted that, the utility model relates to a cleaning device for photoresist small glass container, which comprises a cleaning box 1, a control panel 11, a shunt tube 12, a spray head 13, a drain pipe 14, a filter screen 15, a pushing cylinder 2, a push rod 21, a first rotating member 22, a first clamping plate 23, a motor 3, a transmission shaft 31, a second rotating member 32, a second clamping plate 33, a water storage tank 4, a charging pipe 41, a discharging pipe 42, a pump body 43, a connecting pipe 44, a protection pad 5, a limiting groove 6, a sealing pad 61, a rotating shaft 62, a cabinet door 63, an observation window 64, and components known by technicians in the field, wherein the structure and principle of the components are all known by technicians or by conventional experimental methods, when the utility model is used, a user starts the pushing cylinder 2 through the control panel 11, pushes the push rod 21 of the pushing cylinder 2, and pushes the first rotating member 22, the first rotating member 22 pushes the first clamping plate 23, the glass container is conveniently fixed through the first clamping plate 23 and the second clamping plate 33, so that a user can conveniently clamp the glass container, the protection pads arranged on the surfaces of the first clamping plate 23 and the second clamping plate 33 prevent the surface of the glass container from being damaged, and simultaneously play a role of protection, so that the stability during clamping is improved, the pump body 43 is started through the control panel 11, cleaning water is transported into the shunt pipe 12 through the connecting pipe 44 through the pump body 43 and is sprayed out through the spray head 13, the glass container is cleaned through the spray head 13, the motor 3 is started through the control panel 11, the motor 3 drives the transmission shaft 31 to rotate, the transmission shaft 31 drives the second rotating member 32 to rotate, the second rotating member 32 drives the second clamping plate 33 to rotate, the second clamping plate 33 drives the glass container to rotate, so that the glass container is comprehensively cleaned, the cleaning effect is improved, and a water source is, convenient to cyclic utilization, through the filter screen 15 that is equipped with in 14 ports of drain pipe, avoid impurity to get into storage water tank 4, avoid taking place to block up, improve the stability when cabinet door 63 connects through spacing groove 6, through the sealed pad 61 that is equipped with of spacing groove 6 inboard, the leakproofness when making up the connection.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a belt cleaning device of small-size glass container for photoetching glue, is including wasing case (1), its characterized in that: the upper end of the inner side of the cleaning box (1) is fixedly connected with a shunt pipe (12), the bottom of the shunt pipe (12) is fixedly connected with a spray head (13), the spray heads (13) are uniformly distributed, the left end and the right end of the inner side bottom of the cleaning box (1) are fixedly connected with drain pipes (14), a port opening above the drain pipes (14) is fixedly connected with a filter screen (15), and the middle of the left surface of the cleaning box (1) is fixedly connected with a pushing cylinder (2);

the left end of the pushing cylinder (2) is movably connected with a pushing rod (21), the pushing rod (21) penetrates through the cleaning box (1), the other end of the pushing rod (21) is rotatably connected with a first rotating piece (22), the other end of the first rotating piece (22) is fixedly connected with a first clamping plate (23), the middle of the right surface of the cleaning box (1) is fixedly connected with a motor (3), the middle of the right end of the inner side of the cleaning box (1) is rotatably connected with a second rotating piece (32), the motor (3) is connected with the second rotating piece (32) through a transmission shaft (31), and the left end of the second rotating piece (32) is fixedly connected with a second clamping plate (33);

wash bottom fixedly connected with storage water tank (4) of case (1), the left side below fixedly connected with pump body (43) of storage water tank (4) inboard, pump body (43) through connecting pipe (44) with shunt tubes (12) are connected, wash the positive centre department of case (1) and seted up spacing groove (6), the sealed pad (61) of inboard fixedly connected with of spacing groove (6), one side of spacing groove (6) is rotated through pivot (62) and is connected with cabinet door (63).

2. The apparatus for cleaning a small glass container for photoresist according to claim 1, wherein: wash the right-hand member fixedly connected with control panel (11) of case (1) upper surface, just push cylinder (2) motor (3) with pump body (43) all through the wire with control panel (11) are connected.

3. The apparatus for cleaning a small glass container for photoresist according to claim 1, wherein: the surface of the first clamping plate (23) and the surface of the second clamping plate (33) are fixedly connected with a protection pad (5), and the protection pad (5) is made of rubber.

4. The apparatus for cleaning a small glass container for photoresist according to claim 1, wherein: the left end fixedly connected with charging tube (41) of storage water tank (4) upper surface, the bottom fixedly connected with of storage water tank (4) right surface arranges material pipe (42).

5. The apparatus for cleaning a small glass container for photoresist according to claim 1, wherein: the size of the cabinet door (63) is matched with that of the limiting groove (6), an observation window (64) is fixedly connected to the middle of the surface of the cabinet door (63), and the observation window (64) is made of glass.