CN210921897U - Three-layer core pipe water cooling device for MPCVD - Google Patents
Three-layer core pipe water cooling device for MPCVD Download PDFInfo
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- CN210921897U CN210921897U CN201921849547.3U CN201921849547U CN210921897U CN 210921897 U CN210921897 U CN 210921897U CN 201921849547 U CN201921849547 U CN 201921849547U CN 210921897 U CN210921897 U CN 210921897U
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Abstract
The utility model relates to a MPCVD equipment cooling technical field discloses a three-layer core pipe water cooling plant for MPCVD, blast pipe including vertical setting, still include the blast pipe outside nested radius crescent's inlet tube in order, the outlet pipe, the upper end of blast pipe is equipped with the base plate, the one side that is close to the blast pipe in the base plate is equipped with the chamber of catchmenting, a side level of keeping away from the blast pipe in the base plate is equipped with the heat exchange chamber, the tip of heat exchange chamber horizontal direction corresponds the intercommunication with the tip of chamber horizontal direction that catchments, the inlet tube independently communicates with the middle part in heat exchange chamber, the outlet pipe independently communicates with the middle part in the chamber that catchments. The utility model provides a current MPCVD reaction unit structure complicated, difficult installation, the not good problem of crystal cooling effect.
Description
Technical Field
The utility model relates to a MPCVD equipment cooling technical field, in particular to a three-layer core pipe water cooling plant for MPCVD.
Background
The MPCVD (microwave plasma chemical vapor deposition) method is one of the most potential methods for synthesizing high quality diamond. The MPCVD reaction equipment is characterized in that microwaves generated by a microwave generator enter a cavity (reaction cavity) of the reaction equipment through a waveguide transmission system, mixed gas of methane and hydrogen is introduced into the reaction cavity, glow discharge is generated in the reaction cavity under the excitation of the microwaves, molecules of the reaction gas are ionized to generate plasma, and the plasma is deposited on a substrate table to obtain the diamond film. The temperature uniformity of the substrate table influences the growth of the diamond film, and the uniform cooling of the substrate table is beneficial to maintaining the temperature uniformity of the substrate table, so that the diamond film with good quality is obtained.
In the existing cooling technology, a cooling liquid inlet pipe, a water outlet pipe and a gas outlet pipe are respectively installed, so that the problems of complex structure and difficulty in installation in the limited space of an MPCVD reaction cavity are caused, and meanwhile, the heat exchange between cooling water and a crystal growth base is uneven and insufficient, so that the cold and hot temperatures of the base are uneven, the expected cooling effect cannot be achieved, and the crystal growth quality is influenced.
In view of the above, it is desirable to design a three-layer core tube water cooling device for MPCVD to solve the above problems.
SUMMERY OF THE UTILITY MODEL
Based on above problem, the utility model provides a three-layer core pipe water-chilling plant for MPCVD, it is complicated to have solved current MPCVD reaction unit structure, difficult installation, the not good problem of crystal cooling effect.
For solving the above technical problem, the utility model discloses a technical scheme as follows:
the utility model provides a three-layer core pipe water cooling plant for MPCVD, blast pipe including vertical setting, still include the blast pipe outer nested radius crescent's in order inlet tube, the outlet pipe, the upper end of blast pipe is equipped with the base plate, the one side that is close to the blast pipe in the base plate is equipped with the chamber of catchmenting, the one side level of keeping away from the blast pipe in the base plate is equipped with the heat exchange chamber, the tip of heat exchange chamber horizontal direction corresponds the intercommunication with the tip of chamber horizontal direction that catchments, the inlet tube independently communicates with the middle part in heat exchange chamber, the outlet pipe independently communicates with the middle part in chamber.
The utility model discloses a principle and effect: the cooling liquid independently enters the water inlet pipe outside the exhaust pipe from the lower end of the water inlet pipe, enters the middle part of the heat exchange cavity in the substrate from the upper end of the water inlet pipe, flows to the end part in the horizontal direction in the middle part of the heat exchange cavity (flows in all directions of the heat exchange cavity), exchanges heat with the crystal above the substrate, enters the liquid collecting cavity after flowing to the end part in the horizontal direction of the heat exchange cavity, is converged in the middle part of the liquid collecting cavity to flow into the water outlet pipe outside the water inlet pipe, and is finally discharged through the lower end part of the water outlet pipe, the cooling liquid diffuses around the middle part of the heat exchange cavity in the substrate in the flowing process of the cooling liquid, so that the cooling liquid is dispersed in a large area, the contact area between the cooling liquid and the upper side of the substrate is increased, the contact area between the cooling liquid and the crystal is further increased, the heat exchange between the cooling liquid and the crystal, the water inlet pipe and the water outlet pipe are sequentially nested outside the exhaust pipe, so that the floor area of the water inlet pipe, the water outlet pipe and the air outlet pipe when the water inlet pipe, the water outlet pipe and the air outlet pipe are independently installed is reduced, and the problem of insufficient space utilization of an MPCVD reaction cavity is caused. The utility model discloses a design has solved current MPCVD reaction unit structure complicacy, difficult installation, the not good problem of crystal cooling effect.
As a preferred mode, the base plate comprises a concave red copper heat exchange disc, the concave groove of the red copper heat exchange disc faces the exhaust pipe, a water collecting disc in close fit with the concave groove is arranged at the lower end of the concave groove of the red copper heat exchange disc, a circular notch is formed in the bottom of the concave groove of the red copper heat exchange disc, a plurality of guide grooves are formed in the inner side of the notch of the red copper heat exchange disc along the circumferential direction of the notch, a water baffle is arranged on the bottom side of the concave groove of the red copper heat exchange disc, the caliber of the water baffle is larger than that of the notch of the red copper heat exchange disc, and the caliber of the water baffle is smaller than that of a surface formed outside the guide grooves.
As a preferred mode, a heat exchange cavity is formed between the water baffle and the notch and the diversion trench of the red copper heat exchange disc, and a water collecting cavity is formed between the water baffle and the water collecting plate.
As a preferred mode, the water inlet pipe, the water outlet pipe and the exhaust pipe are nested coaxially, the lower end of the exhaust pipe is connected with the air outlet pipe connector, the lower end of the water outlet pipe is provided with the water outlet pipe connector, and the water outlet pipe connector is provided with the water inlet and the water outlet which are respectively and independently communicated with the water inlet pipe and the water outlet pipe.
As a preferred mode, the upper end of the water inlet pipe is provided with a water inlet pipe joint, the water inlet pipe joint is provided with a gas guide hole which is independently communicated with the upper part of the red copper heat exchange disc and the exhaust pipe, the water inlet pipe joint is provided with a water inlet hole which is independently communicated with the concave space of the red copper heat exchange disc above the water baffle and the water inlet pipe joint, and the water inlet pipe joint is provided with a drain hole which is independently communicated with the concave space of the red copper heat exchange disc below the water outlet pipe.
As a preferred mode, the water inlet pipe joint and the water outlet pipe joint are cylindrical, the water inlet pipe joint and the water outlet pipe joint are covered at the end parts of the water inlet pipe or the water outlet pipe, and the water inlet pipe joint is embedded in the water baffle and the water collecting tray.
As a preferred mode, the water inlet pipe, the water outlet pipe and the exhaust pipe are all stainless steel core pipes.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model discloses a design has solved current MPCVD reaction unit structure complicacy, difficult installation, the not good problem of crystal cooling effect.
(2) The utility model discloses a base plate is including the red copper heat exchange disc that is concave shape, and the concave groove of red copper heat exchange disc is towards the blast pipe, the tip is equipped with rather than airtight complex water catch tray under the concave groove of red copper heat exchange disc, the concave groove bottom of red copper heat exchange disc is equipped with circular notch, the notch inboard of red copper heat exchange disc is equipped with a plurality of guiding gutters along its circumferencial direction, the bottom side of red copper heat exchange disc concave groove is equipped with the breakwater, the bore of breakwater is greater than the notch bore of red copper heat exchange disc, and the bore of breakwater is less than the bore of the face that forms outside a plurality of guiding gutters. The red copper is also called as a copper simple substance, copper is used as a heat exchange medium, the thermal conductivity of copper is second only to that of silver, the copper is a good thermal conductor, the heat exchange efficiency is high, and the copper is arranged on a red copper plate.
(3) The utility model discloses a form the heat exchange chamber between notch, the guiding gutter of breakwater and purple copper heat exchange dish, form the chamber that catchments between breakwater and the water-collecting plate. A plurality of guiding gutters are milled along the diameter direction so as to enable liquid to flow better, promote heat exchange efficiency and enable the crystal nucleus base to be more uniform in cooling and heating.
(4) The utility model discloses a inlet tube, outlet pipe, blast pipe coaxial line are nested, and the lower extreme of blast pipe is connected with the outlet pipe and connects, and the lower extreme of outlet pipe is equipped with the outlet pipe and connects, is equipped with water inlet, the delivery port that independently communicates respectively with inlet tube, outlet pipe on the outlet pipe connects. The water outlet pipe joint has a sealing effect on the lower ends of the water inlet pipe and the water outlet pipe, the design of the water inlet and the water outlet enables the water outlet pipe joint to have an independent drainage effect, drainage is facilitated, and the sealing ring is arranged when the water outlet pipe joint is connected with the water inlet pipe and the water outlet pipe, so that water leakage is avoided.
(5) The utility model discloses an upper end of inlet tube is equipped with the water inlet pipe joint, is equipped with the air guide hole of independent intercommunication red copper heat exchange dish top and blast pipe on the water inlet pipe joint, is equipped with the inlet opening of independent intercommunication inlet tube and breakwater top red copper heat exchange dish spill space on the water inlet pipe joint, is equipped with the wash port of independent intercommunication outlet pipe and breakwater below red copper heat exchange dish spill space on the water inlet pipe joint. The water inlet pipe joint plays a sealing role on the upper ends of the water inlet pipe and the water outlet pipe, the design of the water inlet hole and the water outlet hole enables the water inlet pipe joint to have an independent drainage function, drainage is convenient, and the sealing ring is arranged when the water inlet pipe joint is connected with the water inlet pipe and the water outlet pipe, so that water leakage is avoided.
(6) The utility model discloses a water inlet pipe connects, the outlet pipe connects is cylindricly, and water inlet pipe connects, the outlet pipe connects the cover to be established at inlet tube or outlet pipe tip, and the water inlet pipe connects the scarf joint in breakwater, water catch bowl. The water inlet holes and the water discharge holes are arranged along the circumferential direction of the water inlet holes and the water discharge holes, so that the water can be quickly drained.
(7) The utility model discloses a inlet tube, outlet pipe, blast pipe are stainless steel core pipe. Stainless steel (StainlessSteel) is short for stainless acid-resistant steel, and is called stainless steel by weak corrosion media such as air, steam, water and the like or stainless steel, so that the service lives of a water inlet pipe, a water outlet pipe and an exhaust pipe can be prolonged.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is an exploded view of the substrate of FIG. 1;
FIG. 4 is a bottom view of the red copper heat exchange plate of FIG. 3;
FIG. 5 is a top view of the water inlet joint of FIG. 1;
FIG. 6 is an isometric view of FIG. 1;
the labels in the figure are: 1-water outlet pipe, 2-water inlet, 3-water outlet, 4-water collecting tray, 5-water baffle, 6-red copper heat exchange tray, 601-notch, 602-diversion trench, 7-water inlet pipe joint, 701-air guide hole, 702-water inlet hole, 703-water outlet hole, 8-water inlet pipe, 9-exhaust pipe, 10-water collecting cavity, 11-heat exchange cavity, 12-substrate, 13-air outlet pipe joint and 14-water outlet pipe joint.
Detailed Description
The present invention will be further described with reference to the accompanying drawings. Embodiments of the present invention include, but are not limited to, the following examples.
Example 1:
the utility model provides a three-layer core pipe water cooling plant for MPCVD, blast pipe 9 including vertical setting, still include blast pipe 9 outer nested radius gradual increase's inlet tube 8 in order, outlet pipe 1, the upper end of blast pipe 9 is equipped with base plate 12, the one side that is close to blast pipe 9 in the base plate 12 is equipped with water collecting cavity 10, the one side level of keeping away from blast pipe 9 in the base plate 12 is equipped with heat exchange cavity 11, heat exchange cavity 11 horizontal direction's tip corresponds the intercommunication with water collecting cavity 10 horizontal direction's tip, inlet tube 8 independently communicates with heat exchange cavity 11's middle part, outlet pipe 1 independently communicates with water collecting cavity 10's middle part, blast pipe 9 independently communicates with base plate 12 top.
The utility model discloses a principle and effect: the cooling liquid independently enters the water inlet pipe 8 outside the exhaust pipe 9 from the lower end of the water inlet pipe 8, enters the middle part of the heat exchange cavity 11 in the substrate 12 from the upper end of the water inlet pipe 8, flows to the end part in the horizontal direction in the middle part of the heat exchange cavity 11 (flows in all directions of the heat exchange cavity 11), and simultaneously exchanges heat with the crystal above the substrate 12, enters the liquid collecting cavity after flowing to the end part in the horizontal direction of the heat exchange cavity 11, is converged to the middle part of the liquid collecting cavity and flows into the water outlet pipe 1 outside the water inlet pipe 8, and finally is discharged through the lower end part of the water outlet pipe 1, and in the flowing process of the cooling liquid, the cooling liquid diffuses to the periphery in the middle part of the heat exchange cavity 11 in the substrate 12, so that the cooling liquid is dispersed in a large area, the contact area between the cooling liquid and the upper side of the substrate 12 is increased, the contact, the problem of the crystal because the inhomogeneous cooling effect that leads to of heat exchange is not good is solved, inlet tube 8, outlet pipe 1 are nested in order outward to blast pipe 9, have reduced area when inlet tube 8, outlet pipe 1, the independent installation of outlet duct, cause MPCVD reaction cavity space to utilize inadequately is solved. The utility model discloses a design has solved current MPCVD reaction unit structure complicacy, difficult installation, the not good problem of crystal cooling effect.
Example 2:
the embodiment is further optimized on the basis of the embodiment 1, and specifically comprises the following steps:
the base plate 12 comprises a concave red copper heat exchange disc 6, the concave groove of the red copper heat exchange disc 6 faces the exhaust pipe 9, the lower end of the concave groove of the red copper heat exchange disc 6 is provided with a water collecting disc 4 in airtight fit with the concave groove, the bottom of the concave groove of the red copper heat exchange disc 6 is provided with a circular notch 601, the inner side of the notch 601 of the red copper heat exchange disc 6 is provided with a plurality of diversion trenches 602 along the circumferential direction, the bottom side of the concave groove of the red copper heat exchange disc 6 is provided with a water baffle plate 5, the caliber of the water baffle plate 5 is larger than the caliber of the notch 601 of the red copper heat exchange disc 6, and the caliber of the water baffle plate 5 is smaller than the calibers of the. The red copper is also called as a copper simple substance, copper is used as a heat exchange medium, the thermal conductivity of copper is second only to that of silver, the copper is a good thermal conductor, the heat exchange efficiency is high, and the copper is arranged on a red copper plate.
In a preferable mode, a heat exchange cavity 11 is formed between the water baffle 5 and the notch 601 and the diversion trench 602 of the red copper heat exchange disc 6, and a water collection cavity 10 is formed between the water baffle 5 and the water collection plate. A plurality of guiding grooves 602 are milled along the diameter direction so as to make the liquid flow better, promote the heat exchange efficiency and make the crystal nucleus base more uniform in cooling and heating.
As a preferred mode, the water inlet pipe 8, the water outlet pipe 1 and the exhaust pipe 9 are coaxially nested, the lower end of the exhaust pipe 9 is connected with an air outlet pipe joint 13, the lower end of the water outlet pipe 1 is provided with a water outlet pipe joint 14, and the water outlet pipe joint 14 is provided with a water inlet 2 and a water outlet 3 which are respectively and independently communicated with the water inlet pipe 8 and the water outlet pipe 1. The water outlet pipe joint 14 has a sealing effect on the lower ends of the water inlet pipe 8 and the water outlet pipe 1, the water inlet 2 and the water outlet 3 are designed, so that the water outlet pipe joint 14 has an independent drainage effect, drainage is facilitated, and the sealing ring is arranged when the water outlet pipe joint 14 is connected with the water inlet pipe 8 and the water outlet pipe 1, so that water leakage is avoided.
As a preferable mode, the upper end of the water inlet pipe 8 is provided with a water inlet pipe joint 7, the water inlet pipe joint 7 is provided with a gas guide hole 701 which is independently communicated with the upper part of the red copper heat exchange disc 6 and the exhaust pipe 9, the water inlet pipe joint 7 is provided with a water inlet hole 702 which is independently communicated with the concave space of the water inlet pipe 8 and the red copper heat exchange disc 6 above the water baffle 5, and the water inlet pipe joint 7 is provided with a water outlet hole 703 which is independently communicated with the concave space of the red copper heat exchange disc 6 below the water outlet pipe 1 and. The inlet tube connects 7 and plays sealed effect to inlet tube 8, outlet pipe 1 upper end, and the design of inlet opening 702, wash port 703 makes inlet tube connect 7 have independent drainage effect, and the drainage of being convenient for sets up the sealing washer when inlet tube connects 7 and inlet tube 8, outlet pipe 1 are connected, avoids leaking.
As a preferable mode, the water inlet pipe joint 7 and the water outlet pipe joint 14 are cylindrical, the water inlet pipe joint 7 and the water outlet pipe joint 14 are covered at the end part of the water inlet pipe 8 or the water outlet pipe 1, and the water inlet pipe joint 7 is embedded in the water baffle 5 and the water collecting tray 4. A plurality of water inlet holes 702 and a plurality of water outlet holes 703 are arranged along the circumferential direction of the water inlet holes and the water outlet holes so as to facilitate quick drainage.
As a preferable mode, the water inlet pipe 8, the water outlet pipe 1 and the exhaust pipe 9 are all stainless steel core pipes. Stainless Steel (Stainless Steel) is short for Stainless acid-resistant Steel, and is called Stainless Steel by weak corrosion media such as air, steam, water and the like or Stainless Steel, so that the service lives of the water inlet pipe 8, the water outlet pipe 1 and the exhaust pipe 9 can be prolonged.
The other parts of this embodiment are the same as embodiment 1, and are not described herein again.
The embodiment of the present invention is the above. The specific parameters in the above embodiments and examples are only for the purpose of clearly showing the verification process of the present invention, and are not used to limit the patent protection scope of the present invention, which is still subject to the claims, and all the equivalent structural changes made by using the contents of the specification and the drawings of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The utility model provides a three-layer core pipe water cooling plant for MPCVD, includes blast pipe (9) of vertical setting, its characterized in that, nested radius crescent's inlet tube (8), outlet pipe (1) are in order outward in blast pipe (9), the upper end of blast pipe (9) is equipped with base plate (12), one side that is close to blast pipe (9) in base plate (12) is equipped with water collection chamber (10), one side level of keeping away from blast pipe (9) in base plate (12) is equipped with heat exchange chamber (11), the tip of heat exchange chamber (11) horizontal direction corresponds the intercommunication with the tip of water collection chamber (10) horizontal direction, inlet tube (8) are independent with the middle part intercommunication of heat exchange chamber (11), outlet pipe (1) are independent with the middle part intercommunication in water collection chamber (10), blast pipe (9) are independent with base plate (12) top intercommunication.
2. The triple core tube water cooling device for MPCVD according to claim 1, characterized in that the base plate (12) comprises a concave-shaped red copper heat exchange plate (6), the concave groove of the red copper heat exchange disc (6) faces the exhaust pipe (9), the lower end part of the concave groove of the red copper heat exchange disc (6) is provided with a water collecting disc (4) which is hermetically matched with the concave groove, the bottom of the concave groove of the red copper heat exchange disc (6) is provided with a round notch (601), a plurality of diversion trenches (602) are arranged on the inner side of the notch (601) of the red copper heat exchange disc (6) along the circumferential direction, a water baffle (5) is arranged at the bottom side of the concave groove of the red copper heat exchange disc (6), the caliber of the water baffle (5) is larger than that of the notch (601) of the red copper heat exchange disc (6), and the caliber of the water baffle (5) is smaller than the caliber of the surface formed outside the guide grooves (602).
3. The three-layer core tube water cooling device for MPCVD according to claim 2, wherein a heat exchange cavity (11) is formed between the water baffle (5) and the notch (601) and the diversion trench (602) of the red copper heat exchange disc (6), and a water collection cavity (10) is formed between the water baffle (5) and the water collection plate.
4. The three-layer core tube water cooling device for MPCVD according to claim 3, wherein the water inlet tube (8), the water outlet tube (1) and the exhaust tube (9) are coaxially nested, the lower end of the exhaust tube (9) is connected with an air outlet tube joint (13), the lower end of the water outlet tube (1) is provided with a water outlet tube joint (14), and the water outlet tube joint (14) is provided with a water inlet (2) and a water outlet (3) which are respectively and independently communicated with the water inlet tube (8) and the water outlet tube (1).
5. The three-layer core pipe water cooling device for MPCVD according to claim 4, wherein the upper end of the water inlet pipe (8) is provided with a water inlet pipe joint (7), the water inlet pipe joint (7) is provided with a gas guide hole (701) which is independently communicated with the exhaust pipe (9) above the red copper heat exchange disc (6), the water inlet pipe joint (7) is provided with a water inlet hole (702) which is independently communicated with the concave space of the red copper heat exchange disc (6) above the water inlet pipe (8) and the water baffle (5), and the water inlet pipe joint (7) is provided with a water drain hole (703) which is independently communicated with the concave space of the red copper heat exchange disc (6) below the water outlet pipe (1) and the water baffle (5).
6. The three-layer core pipe water cooling device for MPCVD according to claim 5, wherein the water inlet pipe joint (7) and the water outlet pipe joint (14) are cylindrical, the water inlet pipe joint (7) and the water outlet pipe joint (14) are covered at the end of the water inlet pipe (8) or the water outlet pipe (1), and the water inlet pipe joint (7) is embedded in the water baffle plate (5) and the water collecting tray (4).
7. The three-layer core tube water cooling device for MPCVD according to claim 1, wherein the water inlet tube (8), the water outlet tube (1) and the gas outlet tube (9) are all stainless steel core tubes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921849547.3U CN210921897U (en) | 2019-10-30 | 2019-10-30 | Three-layer core pipe water cooling device for MPCVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921849547.3U CN210921897U (en) | 2019-10-30 | 2019-10-30 | Three-layer core pipe water cooling device for MPCVD |
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| Publication Number | Publication Date |
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| CN210921897U true CN210921897U (en) | 2020-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921849547.3U Active CN210921897U (en) | 2019-10-30 | 2019-10-30 | Three-layer core pipe water cooling device for MPCVD |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645749A (en) * | 2019-10-30 | 2020-01-03 | 四川三三零半导体有限公司 | Three-layer core pipe water cooling device for MPCVD |
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2019
- 2019-10-30 CN CN201921849547.3U patent/CN210921897U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645749A (en) * | 2019-10-30 | 2020-01-03 | 四川三三零半导体有限公司 | Three-layer core pipe water cooling device for MPCVD |
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