CN210916237U

CN210916237U - Magnetron sputtering vacuum coating machine

Info

Publication number: CN210916237U
Application number: CN201921984471.5U
Authority: CN
Inventors: 宋泳东
Original assignee: Qingdao Dayue Titanium Stainless Steel Intelligent Technology Co ltd
Current assignee: Qingdao Dayue Titanium Stainless Steel Intelligent Technology Co ltd
Priority date: 2019-11-18
Filing date: 2019-11-18
Publication date: 2020-07-03
Anticipated expiration: 2029-11-18

Abstract

The utility model discloses a magnetron sputtering vacuum coating machine, including the control box, the upper surface rear side fixed mounting back jar of body of control box, the front surface of the back jar of body articulates there is the preceding jar of body, the front surface upside fixed mounting of the back jar of body has drive arrangement, cleaning device is installed to drive arrangement's downside, cleaning device includes the U-shaped frame, the lower extreme of U-shaped frame passes through the bearing and rotates the inside downside of installing the back jar of body, the outside fixed mounting of U-shaped frame has the scraper blade, the outside and the back jar of body of scraper blade, the internal surface of the preceding jar of body is closely laminated, the through-hole has evenly been seted up to the upper surface outside of the back jar of body and the preceding jar of body, the through-hole leans. Compared with the prior art, the device can automatically scrape and clean the sticky target and impurities on the inner wall of the cavity of the coating machine through the matching of the cleaning device and the driving device, manual cleaning is not needed, and the cleaning efficiency is improved.

Description

Magnetron sputtering vacuum coating machine

Technical Field

The utility model relates to a vacuum coating machine technical field specifically is a magnetron sputtering vacuum coating machine.

Background

The vacuum coating machine mainly refers to a type of coating which needs to be carried out under higher vacuum degree, the material to be coated is called a substrate, the material to be coated is called a target material, the substrate and the target material are in a vacuum chamber, and the sputtering type coating is simply understood as that electrons or high-energy laser is utilized to bombard the target material, surface components are sputtered out in the form of atomic groups or ions and finally deposited on the surface of the substrate, and a film is finally formed after a film forming process (scattering point-island structure-labyrinth structure-layered growth).

Similar magnetron sputtering vacuum coating machine in the existing market can glue at the inner wall of coating machine cavity and glue target and impurity after using for a long time, needs the inside rotating turret of loading and unloading usually, regularly maintains the cavity inner wall with artificial mode, and manual clearance is cleaned, wastes time and energy, and the cleaning efficiency is low, in order to solve above-mentioned problem, we provide a magnetron sputtering vacuum coating machine.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a magnetron sputtering vacuum coating machine to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a magnetron sputtering vacuum coating machine, includes the control box, the upper surface rear side fixed mounting back jar of body of control box, the preceding surface of the back jar of body articulates there is the preceding jar of body, the preceding surface upside fixed mounting of the back jar of body has drive arrangement, cleaning device is installed to drive arrangement's downside, cleaning device includes the U-shaped frame, the lower extreme of U-shaped frame passes through the bearing and rotates the inside downside of installing the back jar of body, the outside fixed mounting of U-shaped frame has the scraper blade, the outside of scraper blade closely laminates with the internal surface of the back jar of body, the preceding jar of body, the through-hole has evenly been seted up to the upper surface outside of the back jar of body and the preceding jar of body, the through-hole leans out from last to down, the inside.

Preferably, drive arrangement includes the semicircle board, the half slot that matches with the semicircle board is seted up to the front surface upside of the preceding jar of body, the pivot through-hole has been seted up to the upper surface of semicircle board, the last fixed surface of semicircle board installs protection casing and gear motor, the protection casing cup joints in gear motor's the outside, gear motor's output shaft rotates the inside of installing at the pivot through-hole, the lower extreme and the U-shaped frame fixed mounting of gear motor output shaft.

Preferably, the material collecting box is installed to the lower surface rear side of preceding jar of body, the material collecting box includes the discharge gate, the downside fixed mounting of discharge gate has outer solenoid, the outside spiro union of outer solenoid has the collection box.

Preferably, the inside left side fixed mounting of control box has washing case and pump, wash case fixed mounting on the right side of pump, the pump passes through hose and shower nozzle fixed assembly.

Preferably, the control box, the speed reduction motor and the pump are electrically connected through leads, and the control box is connected with an external power supply.

Compared with the prior art, the beneficial effects of the utility model are that: this magnetron sputtering vacuum coating machine can carry out the automatic clearance of scraping through cleaning device and drive arrangement's cooperation to coating machine cavity inner wall gluing glutinous target and impurity, does not need the manual cleaning of manpower, has promoted cleaning efficiency.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic plan view of the structure of the present invention.

In the figure: the cleaning device comprises a control box 1, a front tank body 2, a rear tank body 3, a cleaning device 4, a through hole 41, a spray head 42, a scraping plate 43, a U-shaped frame 44, a driving device 5, a semicircular groove 51, a semicircular plate 52, a rotating shaft through hole 53, a speed reducing motor 54, a protective cover 55, a pump 6, a material collecting box 7, a material outlet 71, an outer solenoid 72, a collecting box 73 and a cleaning box 8.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 and fig. 2, the present invention provides a technical solution: the utility model provides a magnetron sputtering vacuum coating machine, including control box 1, the upper surface rear side fixed mounting back jar of body 3 of control box 1, the front surface of the back jar of body 3 articulates there is preceding jar of body 2, the front surface upside fixed mounting of the back jar of body 3 has drive arrangement 5, cleaning device 4 is installed to drive arrangement 5's downside, cleaning device 4 includes U-shaped frame 44, the lower extreme of U-shaped frame 44 passes through the bearing and rotates the inside downside of installing at the back jar of body 3, the outside fixed mounting of U-shaped frame 44 has scraper blade 43, the outside and the back jar of body 3 of scraper blade 43, the internal surface of the preceding jar of body 2 closely laminates, through-hole 41 has evenly been seted up to the upper surface outside of the back jar of body 3 and preceding jar of body 2, through-hole 41 leans out from last to.

The front tank body 2 and the rear tank body 3 which are hinged are convenient to open and close, the driving device 5 can drive the U-shaped frame 44 and the scraper 43 in the cleaning device 4 to rotate, so that the scraper 43 scrapes the inner surfaces of the rear tank body 3 and the front tank body 2, the through hole 41 which is inclined outwards from top to bottom can be matched with the spray head 42, and cleaning solution is sprayed on the inner surfaces of the rear tank body 3 and the front tank body 2.

The driving device 5 comprises a semicircular plate 52, a semicircular groove 51 matched with the semicircular plate 52 is formed in the upper side of the front surface of the front tank body 2, a rotating shaft through hole 53 is formed in the upper surface of the semicircular plate 52, a protective cover 55 and a speed reducing motor 54 are fixedly installed on the upper surface of the semicircular plate 52, the protective cover 55 is covered on the outer side of the speed reducing motor 54, the output shaft of the speed reducing motor 54 rotates to be installed inside the rotating shaft through hole 53, and the lower end of the output shaft of the speed reducing motor 54 is fixedly assembled with the U-shaped frame 44.

The semicircular plate 52 in the driving device 5 plays a supporting role, the semicircular plate is matched with the semicircular groove 51, the cover of the rear tank body 3 and the front tank body 2 is not obstructed, the speed reducing motor 54 can drive the U-shaped frame 44 and the scraping plate 43 to rotate in the rear tank body 3 and the front tank body 2, and the protective cover 55 can protect the speed reducing motor 54 in the rear tank body 3 and the front tank body 2, so that the dustproof and protective effects are achieved.

The material collecting box 7 is installed at the rear side of the lower surface of the front tank body 2, the material collecting box 7 comprises a discharge hole 71, an outer spiral pipe 72 is fixedly installed on the lower side of the discharge hole 71, and a collecting box 73 is connected to the outer side of the outer spiral pipe 72 in a threaded mode.

The collection box 7 can conveniently collect and clean the scraps scraped by the cleaning device 4 through the discharge hole 71, the outer threaded pipe 72 and the collection box 73.

The inside left side fixed mounting of control box 1 has washing case 8 and pump 6, washs case 8 fixed mounting in the right side of pump 6, and pump 6 passes through hose and shower nozzle 42 fixed mounting.

The pump 6 can uniformly spray the cleaning liquid in the cleaning tank 8 onto the inner walls of the rear tank body 3 and the front tank body 2 through the hose and the spray head 42.

The control box 1, the reduction motor 54 and the pump 6 are electrically connected through wires, and the control box 1 is connected with an external power supply. The operating states of the speed reducing motor 54 and the pump 6 are controlled by the control box 1.

The working principle is as follows:

when the inner surfaces of the rear tank body 3 and the front tank body 2 need to be cleaned, the pump 6 is controlled by the control box 1, and the cleaning liquid in the cleaning box 8 is uniformly sprayed on the inner walls of the rear tank body 3 and the front tank body 2 through the hose and the inclined nozzle 42; meanwhile, the speed reducing motor 54 in the driving device 5 can drive the U-shaped frame 44 and the scraper 43 to rotate in the rear tank body 3 and the front tank body 2, so that the cleaning liquid and the substances on the inner wall are scraped off, and the cleaning liquid and the substances are conveniently collected and cleaned through the matching of the discharge hole 71 in the material collecting box 7, the outer threaded pipe 72 and the collecting box 73, so that the work of the rear pump 6 and the speed reducing motor 54 is stopped.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A magnetron sputtering vacuum coating machine is characterized in that: the cleaning device comprises a control box (1), wherein a rear tank body (3) is fixedly mounted on the rear side of the upper surface of the control box (1), a front tank body (2) is hinged to the front surface of the rear tank body (3), a driving device (5) is fixedly mounted on the upper side of the front surface of the rear tank body (3), and a cleaning device (4) is mounted on the lower side of the driving device (5);

cleaning device (4) include U-shaped frame (44), the lower extreme of U-shaped frame (44) passes through the bearing and rotates the inside downside of installing at the back jar of body (3), the outside fixed mounting of U-shaped frame (44) has scraper blade (43), the outside of scraper blade (43) closely laminates with the internal surface of the back jar of body (3), preceding jar of body (2), through-hole (41) have evenly been seted up to the upper surface outside of the back jar of body (3) and preceding jar of body (2), through-hole (41) are from last to leaning out down, the inside fixed mounting of through-hole (41) has shower nozzle (42).

2. The magnetron sputtering vacuum coating machine according to claim 1, characterized in that: drive arrangement (5) include semicircle board (52), semicircle groove (51) that matches with semicircle board (52) are seted up to the front surface upside of the preceding jar body (2), pivot through-hole (53) have been seted up to the upper surface of semicircle board (52), the last fixed surface of semicircle board (52) installs protection casing (55) and gear motor (54), protection casing (55) cup joints in the outside of gear motor (54), the output shaft of gear motor (54) rotates the inside of installing in pivot through-hole (53), the lower extreme and the U-shaped frame (44) fixed mounting of gear motor (54) output shaft.

3. The magnetron sputtering vacuum coating machine according to claim 1, characterized in that: preceding jar body (2) lower surface rear side installs collection box (7), collection box (7) include discharge gate (71), the downside fixed mounting of discharge gate (71) has outer solenoid (72), the outside spiro union of outer solenoid (72) has collection box (73).

4. The magnetron sputtering vacuum coating machine according to claim 1, characterized in that: inside left side fixed mounting of control box (1) has washing case (8) and pump (6), wash case (8) fixed mounting on the right side of pump (6), pump (6) are through hose and shower nozzle (42) fixed mounting.

5. The magnetron sputtering vacuum coating machine according to claim 1, characterized in that: the control box (1), the speed reducing motor (54) and the pump (6) are electrically connected through leads, and the control box (1) is connected with an external power supply.