CN210916232U - Physical vapor deposition device - Google Patents

Abstract

The utility model discloses a physical vapor deposition device, including first box and second box, the intercommunication has the connecting pipe between one side that first box and second box are relative, one side of first box is provided with the mobile device, the top of mobile device is provided with fixing device, one side of second box inner wall is provided with belt cleaning device, the top fixedly connected with vacuum pump frame of first box one side. The bottom fixedly connected with vacuum pump of vacuum pump frame inner wall, the inlet end intercommunication of vacuum pump has the exhaust tube to the inside of first box is run through and extends to the one end of exhaust tube, the first motor of bottom fixedly connected with of first motor incasement wall. A physical vapor deposition device, be equipped with belt cleaning device and mobile device, can wash workpiece surface before the deposit, can also reduce after the work piece washs with external contact, bring better use prospect.

Description

Physical vapor deposition device

Technical Field

The utility model relates to a physical vapor deposition technical field specifically is a physical vapor deposition device.

Background

The physical vapor deposition technology refers to a technology of gasifying a material source, a solid or a liquid surface into gaseous atoms, molecules or partially ionizing the gaseous atoms into ions under a vacuum condition by adopting a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process.

However, the general physical vapor deposition device can only singly perform object surface coating, and the object needs to be pretreated before coating, and the general pretreatment needs to clean the object surface to remove impurities and dirt on the object surface, so that the coating can be better attached, but the pretreated object is easily polluted in the transfer process, so that the vapor deposition is uneven, and the object quality is poor.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a to prior art not enough, the utility model provides a physical vapor deposition device possesses the transfer time that reduces after the preliminary treatment and reduces advantages such as the pollution among the transfer process, has solved the problem that the work piece received the pollution after the preliminary treatment.

(II) technical scheme

For the transfer time after realizing above-mentioned reduction preliminary treatment and the pollution purpose that reduces the transfer in-process, the utility model provides a following technical scheme: the utility model provides a physical vapor deposition device, includes first box and second box, the intercommunication has the connecting pipe between the relative one side of first box and second box, one side of first box is provided with the mobile device, the top of mobile device is provided with fixing device, one side of second box inner wall is provided with belt cleaning device, the top fixedly connected with vacuum pump frame of first box one side. The bottom fixedly connected with vacuum pump of vacuum pump frame inner wall, the inlet end intercommunication of vacuum pump has the exhaust tube to the one end of exhaust tube runs through first box and extends to the inside of first box.

Preferably, the mobile device includes first motor case, the first motor of bottom fixedly connected with of first motor incasement wall, the output shaft fixedly connected with threaded rod of first motor, the one end of threaded rod runs through first motor case and first box in proper order and extends to the inside of first box, the threaded rod extends to the inside one end of first box and rotates and be connected with the riser to the bottom of riser and the bottom fixed connection of second incasement wall, the surperficial threaded connection of threaded rod has the thread piece, the bottom fixedly connected with slide bar of thread piece, the equal fixedly connected with fixed plate in one side that first box and riser are relative.

Preferably, fixing device includes the backup pad, one side fixedly connected with second motor case at backup pad top, the bottom fixedly connected with second motor of second motor incasement wall, the opposite side fixedly connected with mounting panel at backup pad top, the one side of mounting panel is run through there is the fixed screw, the one end that the fixed screw is located the mounting panel opposite side is rotated and is connected with the stripper plate to the bottom of stripper plate and the top sliding connection of backup pad, the equal fixedly connected with dwang of one side of stripper plate and the output shaft of second motor, two the one end that the dwang is relative all is fixed with the connecting plate, the through-hole has been seted up on the surface of backup pad.

Preferably, belt cleaning device includes the diaphragm, one side fixedly connected with water pump at diaphragm top, the play water end intercommunication of water pump has the outlet pipe, the one end that the water pump was kept away from to the outlet pipe runs through the diaphragm and extends to the bottom of diaphragm, the shower nozzle is installed to the one end that the outlet pipe extends to the diaphragm bottom.

Preferably, the bottom fixedly connected with bottom plate between first box inner wall both sides, heating device is all installed to the both sides at bottom plate top, top fixedly connected with arc between first box inner wall both sides.

Preferably, the top fixedly connected with roof of second box one side, the bottom fixedly connected with electric telescopic handle of roof, electric telescopic handle's bottom fixedly connected with baffle, the bottom of baffle runs through the connecting pipe and extends to the inside of connecting pipe.

Preferably, the bottom of the inner wall of the second box body is connected with a water collecting frame in a sliding mode, and one side of the top of the second box body is communicated with a water inlet pipe.

(III) advantageous effects

Compared with the prior art, the utility model provides a physical vapor deposition device possesses following beneficial effect:

1. this physical vapor deposition device, setting through belt cleaning device, go into the outlet pipe with the cleaning solution pump through the water pump in, the rethread shower nozzle spouts to workpiece surface, wash the work piece, reach the purpose of clean workpiece surface, make the work piece can be better when carrying out physical vapor deposition laminate with the material of plating, guarantee sedimentary success rate, rethread fixing device's setting, it drives the stripper plate motion to rotate the set screw, the stripper plate drives the connecting plate motion, thereby fix the work piece, make the work piece bottom not contact with the backup pad, reach and wash more thorough purpose.

2. This physical vapor deposition device, setting through mobile device, it rotates to drive the threaded rod through first motor, the threaded rod drives the motion of thread piece, thereby make the work piece move, make the work piece can get into first box under the condition with external contact after accomplishing the washing, less work piece and external contact's time, thereby reduce the pollution to the work piece surface, reach the purpose of laminating more to work piece physical vapor deposition, and reduce the clearance that the work piece shifted, work efficiency has been accelerated to a certain extent, it rotates to drive the dwang through the second motor again, the dwang drives the work piece and rotates, make the abluent more thorough of work piece on the one hand, on the other hand makes can the moisture that spin-dries after the work piece washs, guarantee going on of physical vapor deposition.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a schematic structural view of the mobile device of the present invention;

FIG. 3 is a schematic view of the fixing device of the present invention;

fig. 4 is a schematic structural view of the cleaning device of the present invention.

In the figure: 1. a first case; 2. a second case; 3. a connecting pipe; 4. a mobile device; 41. a first motor case; 42. a first motor; 43. a threaded rod; 44. a thread block; 45. a vertical plate; 46. a slide bar; 47. a fixing plate; 5. a fixing device; 51. a second motor case; 52. a second motor; 53. rotating the rod; 54. a connecting plate; 55. a support plate; 56. mounting a plate; 57. fixing screws; 58. a pressing plate; 59. a through hole; 6. a cleaning device; 61. a transverse plate; 62. a water pump; 63. a water outlet pipe; 64. a spray head; 7. a vacuum pump frame; 8. a vacuum pump; 9. an air exhaust pipe; 10. a base plate; 11. a heating device; 12. an arc-shaped plate; 13. A top plate; 14. an electric telescopic rod; 15. a baffle plate; 16. a water collecting frame; 17. and (4) a water inlet pipe.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, a physical vapor deposition apparatus includes a first box 1 and a second box 2, wherein the surfaces of the first box 1 and the second box 2 are both provided with a box door, a connecting pipe 3 is communicated between one side of the first box 1 opposite to the second box 2, one side of the first box 1 is provided with a moving device 4, the top of the moving device 4 is provided with a fixing device 5, one side of the inner wall of the second box 2 is provided with a cleaning device 6, and the top of one side of the first box 1 is fixedly connected with a vacuum pump frame 7. The bottom fixedly connected with vacuum pump 8 of vacuum pump frame 7 inner wall, the inlet end intercommunication of vacuum pump 8 has exhaust tube 9 to the one end of exhaust tube 9 runs through first box 1 and extends to the inside of first box 1.

Further, the moving device 4 comprises a first motor box 41, a first motor 42 is fixedly connected to the bottom of the inner wall of the first motor box 41, the first motor 42 is a three-phase asynchronous motor with the model number of Y355L2-2 and is connected with an external power supply through a power line, a threaded rod 43 is fixedly connected to an output shaft of the first motor 42, one end of the threaded rod 43 sequentially penetrates through the first motor box 41 and the first box body 1 and extends into the first box body 1, one end of the threaded rod 43 extending into the first box body 1 is rotatably connected with a vertical plate 45, the bottom of the vertical plate 45 is fixedly connected with the bottom of the inner wall of the second box body 2, a threaded block 44 is connected to the surface of the threaded rod 43 in a threaded manner, a sliding rod 46 is fixedly connected to the bottom of the threaded block 44, a fixing plate 47 is fixedly connected to one side of the first box body 1 opposite to the vertical plate 45, a sliding groove matched, the threaded rod 43 is driven to rotate through the first motor 42, the threaded rod 43 drives the threaded block 44 to move, so that workpieces move, the workpieces can enter the first box body 1 without contacting with the outside after being cleaned, the time for contacting the workpieces with the outside is reduced, the pollution to the surfaces of the workpieces is reduced, the purpose of fitting the physical vapor deposition of the workpieces is achieved, the gaps for transferring the workpieces are reduced, and the working efficiency is accelerated to a certain extent.

Further, the fixing device 5 comprises a supporting plate 55, one side of the top of the supporting plate 55 is fixedly connected with a second motor box 51, the bottom of the inner wall of the second motor box 51 is fixedly connected with a second motor 52, the second motor 52 is a servo motor with the model number Y355L2-2 and is connected with an external power supply through a power line, the other side of the top of the supporting plate 55 is fixedly connected with a mounting plate 56, one side of the mounting plate 56 is penetrated with a fixing screw 57, one end of the fixing screw 57 at the other side of the mounting plate 56 is rotatably connected with a squeezing plate 58, the bottom of the squeezing plate 58 is slidably connected with the top of the supporting plate 55, one side of the squeezing plate 58 and an output shaft of the second motor 52 are both fixedly connected with rotating rods 53, one opposite ends of the two rotating rods 53 are both fixed with a connecting plate 54, a through hole 59, the workpiece is not accumulated on the supporting plate 55, the fixing screw 57 drives the extrusion plate 58 to move, and the extrusion plate 58 drives the connecting plate 54 to move, so that the workpiece is fixed, the bottom of the workpiece is not in contact with the supporting plate 55, and the purpose of more thorough cleaning is achieved.

Further, belt cleaning device 6 includes diaphragm 61, one side fixedly connected with water pump 62 at diaphragm 61 top, water pump 62's play water end intercommunication has outlet pipe 63, the one end that water pump 62 was kept away from to outlet pipe 63 runs through diaphragm 61 and extends to the bottom of diaphragm 61, shower nozzle 64 is installed to the one end that outlet pipe 63 extended to diaphragm 61 bottom, go into outlet pipe 63 with the cleaning solution pump through water pump 62, rethread shower nozzle 64 spouts to the work surface, wash the work piece, reach the purpose of clean work surface, make the work piece can be better when carrying out physical vapor deposition laminate with the coating, guarantee sedimentary success rate.

Further, the top fixedly connected with roof 13 of second box 2 one side, the bottom fixedly connected with electric telescopic handle 14 of roof 13, electric telescopic handle 14's bottom fixedly connected with baffle 15, baffle 15's shape and connecting pipe 3 looks adaptation, and wrap up threaded rod 43, the bottom of baffle 15 runs through connecting pipe 3 and extends to the inside of connecting pipe 3, when making the work piece wash and remove in first box 1, can separate first box 1 and second box 2, guarantee the vacuum in first box 1.

Further, the bottom of the inner wall of the second box body 2 is connected with a water collecting frame 16 in a sliding mode, cleaning liquid is collected, and one side of the top of the second box body 2 is communicated with a water inlet pipe 17 for adding the cleaning liquid.

The working principle is as follows: the physical vapor deposition device is characterized in that cleaning liquid is pumped into a water outlet pipe 63 through a water pump 62 by the arrangement of a cleaning device 6 and sprayed to the surface of a workpiece through a spray head 64 to clean the workpiece, so that the workpiece can be better attached to a coating material when the physical vapor deposition is carried out, the success rate of deposition is ensured, then a fixing device 5 is arranged, a fixing screw 57 is rotated to drive a squeezing plate 58 to move, the squeezing plate 58 drives a connecting plate 54 to move, so that the workpiece is fixed, the bottom of the workpiece is not contacted with a supporting plate 55, the purpose of more thorough cleaning is achieved, a threaded rod 43 is driven to rotate through a first motor 42 by the arrangement of a moving device 4, the threaded rod 43 drives a threaded block 44 to move, so that the workpiece moves, and the workpiece can enter a first box body 1 under the condition of not contacting with the outside after the cleaning is finished, less work piece and external contact's time to reduce the pollution to the work piece surface, reach the purpose of laminating more to work piece physical vapor deposition, and reduce the clearance that the work piece shifted, accelerated work efficiency to a certain extent, drive dwang 53 through second motor 52 again and rotate, dwang 53 drives the work piece and rotates, makes the abluent more thorough of work piece on the one hand, and on the other hand makes can the moisture that spin-dries after the work piece washs, guarantees going on of physical vapor deposition.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. A physical vapor deposition apparatus comprising a first casing (1) and a second casing (2), characterized in that: the utility model discloses a cleaning device for the refrigerator, including first box (1), second box (2), connecting pipe (3) and cleaning device, the intercommunication has between the relative one side of first box (1) and second box (2), one side of first box (1) is provided with mobile device (4), the top of mobile device (4) is provided with fixing device (5), one side of second box (2) inner wall is provided with belt cleaning device (6), the top fixedly connected with vacuum pump frame (7) of first box (1) one side, the bottom fixedly connected with vacuum pump (8) of vacuum pump frame (7) inner wall, the inlet end intercommunication of vacuum pump (8) has exhaust tube (9) to the one end of exhaust tube (9) runs through first box (1) and extends to the inside of first box (1).

2. The physical vapor deposition apparatus of claim 1, wherein: the moving device (4) comprises a first motor box (41), a first motor (42) is fixedly connected with the bottom of the inner wall of the first motor box (41), the output shaft of the first motor (42) is fixedly connected with a threaded rod (43), one end of the threaded rod (43) sequentially penetrates through the first motor box (41) and the first box body (1) and extends into the first box body (1), one end of the threaded rod (43) extending into the first box body (1) is rotatably connected with a vertical plate (45), and the bottom of the vertical plate (45) is fixedly connected with the bottom of the inner wall of the second box body (2), the surface of the threaded rod (43) is in threaded connection with a threaded block (44), the bottom of the threaded block (44) is fixedly connected with a sliding rod (46), the equal fixedly connected with fixed plate (47) in the relative one side of first box (1) and riser (45).

3. The physical vapor deposition apparatus of claim 1, wherein: the fixing device (5) comprises a supporting plate (55), one side of the top of the supporting plate (55) is fixedly connected with a second motor box (51), the bottom of the inner wall of the second motor box (51) is fixedly connected with a second motor (52), the other side of the top of the supporting plate (55) is fixedly connected with a mounting plate (56), a fixing screw (57) penetrates through one side of the mounting plate (56), one end of the fixing screw (57) positioned at the other side of the mounting plate (56) is rotatably connected with a squeezing plate (58), and the bottom of the pressing plate (58) is connected with the top of the supporting plate (55) in a sliding way, one side of stripper plate (58) and the equal fixedly connected with dwang (53) of output shaft of second motor (52), two the one end that dwang (53) are relative all is fixed with connecting plate (54), through-hole (59) have been seted up on the surface of backup pad (55).

4. The physical vapor deposition apparatus of claim 1, wherein: belt cleaning device (6) include diaphragm (61), one side fixedly connected with water pump (62) at diaphragm (61) top, the play water end intercommunication of water pump (62) has outlet pipe (63), the one end that water pump (62) were kept away from in outlet pipe (63) runs through diaphragm (61) and extends to the bottom of diaphragm (61), shower nozzle (64) are installed to the one end that outlet pipe (63) extended to diaphragm (61) bottom.

5. The physical vapor deposition apparatus of claim 1, wherein: bottom fixedly connected with bottom plate (10) between first box (1) inner wall both sides, heating device (11) are all installed to the both sides at bottom plate (10) top, top fixedly connected with arc (12) between first box (1) inner wall both sides.

6. The physical vapor deposition apparatus of claim 1, wherein: the top fixedly connected with roof (13) of second box (2) one side, the bottom fixedly connected with electric telescopic handle (14) of roof (13), the bottom fixedly connected with baffle (15) of electric telescopic handle (14), the inside that connecting pipe (3) and extended to connecting pipe (3) is run through to the bottom of baffle (15).

7. The physical vapor deposition apparatus of claim 1, wherein: the bottom sliding connection of second box (2) inner wall has catchment frame (16), one side intercommunication at second box (2) top has inlet tube (17).

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