CN210894402U

CN210894402U - Measuring device

Info

Publication number: CN210894402U
Application number: CN201922264136.4U
Authority: CN
Inventors: 詹森雄; 江家谊
Original assignee: Manz Taiwan Ltd
Current assignee: Manz Taiwan Ltd
Priority date: 2019-12-17
Filing date: 2019-12-17
Publication date: 2020-06-30
Anticipated expiration: 2029-12-17

Abstract

The utility model relates to a measuring device, which is used for measuring the air outlet speed of an air knife structure and the deformation or flatness of a hard body; the utility model comprises a measuring platform, a wind speed measuring unit, a deformation measuring unit and a driving device; the utility model discloses mainly by automatic drive arrangement's design, effective drive carries the wind speed to measure the linear slide of unit and deformation measurement unit and carries out the air-out wind speed that length reaches 4000 mm's air knife structure and the action of measurationing of hard deformation, reaches really to utilize the automatic mode of measurationing to accomplish main advantages such as measuring of the wind speed of air knife structure and deformation homogeneity.

Description

Measuring device

Technical Field

The present invention relates to a measuring device, and more particularly to a measuring device for measuring the wind speed of the wind blade and the deformation or flatness of the hard body.

Background

With the advanced development of semiconductor process technology and electro-optical technology, the functions of electronic products such as liquid crystal displays, personal computers or notebook computers are more and more mature and diversified, and these electronic products need to be manufactured into light, thin, short and high-precision electronic products through multiple precise manufacturing procedures in the manufacturing process; in a common process of fabricating a liquid crystal display panel or a semiconductor device, a glass substrate or a semiconductor wafer is usually subjected to a plurality of wet processes alternating with other processes to fabricate a final liquid crystal display panel or a semiconductor device; however, in the conversion between the wet process and other processes, it is often necessary to completely remove the water or chemical solution remaining on the substrate in the wet process, otherwise the yield of the subsequent process will be affected, and the air knife is one of the devices for blowing and moving the chemical solution on the substrate, and since the liquid crystal display panel or the semiconductor device is in the nanometer scale, the air flow and angle of the air knife for blowing off the chemical solution are highly regarded; therefore, how to effectively achieve the original liquid removal effect by innovative hardware design and achieve the measurement of the wind speed and deformation uniformity of the wind knife by using semi-automatic or automatic measurement is still the subject to be continuously overcome and solved by the developers and related researchers of the wet etching machine and related industries.

SUMMERY OF THE UTILITY MODEL

The technical problem solved by the present invention is to provide a measuring device, especially, the air-out wind speed for measuring the air knife structure, and the measuring device of the hardware deformation or flatness, mainly by the hardware design of the automatic driving device, the linear slide carriage of the effective driving and carrying wind speed measuring unit and the deformation measuring unit can measure the air-out wind speed and the hardware deformation of the air knife structure with a length of 4000mm, thereby achieving the main advantages of measuring the wind speed and the deformation uniformity of the air knife structure by using the semi-automatic or automatic measuring method.

The technical means adopted by the utility model are as follows.

In order to achieve the above-mentioned objective, the present invention provides a measuring device for measuring the wind speed and deformation of a wind knife structure, the measuring device at least comprises a measuring platform, which comprises a base, a linear transfer device disposed above the base and a platform disposed on the linear transfer device; a wind speed measuring unit, which comprises a fixed frame arranged on the platform of the linear transfer device, an anemometer arranged at the upper end part of the fixed frame, a set of pitot tubes arranged at the upper end part of the fixed frame and connected with the anemometer, and a leaning piece arranged at the lower end part of the fixed frame and leaning against the air knife structure, wherein an air inlet interface of the pitot tube is arranged opposite to a knife edge of the air knife structure at a distance so as to measure the wind speed value of the outlet air of the knife edge and transmit the wind speed value to the anemometer for displaying, and the leaning piece is adjusted by an adjuster arranged on the fixed frame so as to prop against the air knife structure; the deformation measuring unit is arranged on the linear transfer device and is positioned at one end part of the wind speed measuring unit, the deformation measuring unit comprises a measuring piece, and the measuring piece is close to the side part of the wind knife structure and measures the deformation of the wind knife structure; and the driving device drives the linear transfer device to slide on the base so as to drive the wind speed measuring unit and the deformation measuring unit to measure the wind speed and the deformation of the wind knife structure.

In the above-mentioned measuring device, two supporting members are sequentially disposed on the base, one end of each of the supporting members is disposed with the linear transfer device, and the other supporting member is disposed with the air knife structure.

The above-mentioned measuring device, wherein an upper surface of the supporting member is further provided with a milling plane to provide a horizontal reference plane or a vertical reference plane.

The measuring device as described above, wherein the linear moving and loading device slides on the milling plane by at least two sliding rails.

The measuring device as described above, wherein an angle fixing block having an inclined plane for fixing the air knife structure is further disposed on the milling plane.

The above-mentioned measuring device, wherein the fixing frame is further provided with an angle fixer for adjusting the angle of the air inlet of the pitot tube aligning with the knife edge of the air knife structure.

The measuring device as described above, wherein the measuring component can be one of a measuring meter, an optical displacement meter, a laser displacement meter, etc.

The measuring device as described above, wherein the measuring member is a measuring meter, the measuring meter further includes a measuring probe and a meter connected to the measuring probe, and the measuring probe is close to the side of the air knife structure and measures the deformation of the air knife structure.

The measuring device as described above, wherein the measuring device may further include an alarm device electrically connected to the anemometer of the wind speed measuring unit and the scale of the deformation measuring unit, respectively, and the alarm device sends an alarm signal when the values displayed by the anemometer and the scale exceed a predetermined value.

The measuring device as described above, wherein the driving device is any one of a servo motor, a slide rail, a belt, and a ball screw.

The measuring device as described above, wherein the driving device further includes a servo motor, at least two rotating wheels connected to the servo motor, and a transmission belt sleeved on the rotating wheels and disposed at the lower end of the linear transfer device, the servo motor drives the rotating wheels to rotate so as to drive the transmission belt to rotate and drive the linear transfer device to slide back and forth on the supporting member.

The measurement apparatus as described above, further comprising a human-machine interface.

The measuring device as described above, wherein the measuring probe emits and receives a light, and the deformation of the air knife structure is calculated by the time of light reflection and transmitted to the human-machine interface.

The measurement device as described above, further comprising an air supply filter.

The linear transfer device is a linear slide or a ball screw.

In the above-mentioned measuring device, the measuring member may be a measuring meter, a gauge displacement meter, an optical displacement meter or a laser displacement meter.

The measurement apparatus as described above is semi-automated or automated.

The utility model discloses produced technological effect: therefore, the utility model discloses a measuring device mainly by the hardware design of automatic drive arrangement, effective drive carries the wind speed measuring unit and the linear slide of deformation measuring unit to carry out the air-out wind speed and the hard deformation volume of length reaching 4000 mm's air knife structure and measures the action, really reaches to utilize the main advantages such as the measurement of the wind speed of automatic measurement mode completion air knife structure and deformation homogeneity.

Drawings

FIG. 1: the present invention is a schematic view of an overall structure of one preferred embodiment of a measuring device.

FIG. 2: the present invention discloses a schematic view of a measuring platform of one preferred embodiment of the measuring device.

FIG. 3: the present invention is a schematic view of the linear slide and air knife structure of the measuring device in accordance with one preferred embodiment.

FIG. 4: the utility model discloses the wind speed measuring unit of measuring device one of which preferred embodiment sets up the schematic diagram.

FIG. 5: the present invention is a schematic view of the supporting member and the pitot tube of the preferred embodiment of the measuring device.

FIG. 6: the present invention is a schematic view of the supporting member and the adjuster of the measuring device in one preferred embodiment.

FIG. 7: the utility model discloses the wind speed measuring unit of its two preferred embodiments of measuring device sets up the schematic diagram.

FIG. 8: the utility model discloses the wind speed measuring unit of its three preferred embodiments of measuring device sets up the schematic diagram.

FIG. 9: the utility model discloses the deformation measuring unit of measuring device one of which preferred embodiment sets up the schematic diagram.

FIG. 10: the present invention is a schematic view of a driving device of one preferred embodiment of a measuring device.

FIG. 11: the present invention provides a flow chart of the steps of one preferred embodiment of the measuring method.

FIG. 12: the present invention provides a flow chart of the steps of two preferred embodiments of the measuring method.

Description of the figure numbers:

1 measuring device

11 measuring platform

111 base

1111 support element

1112 moving wheel

1113 support frame

1114 upper surface

112 linear transfer device

1121 sliding rail

113 platform

114 long milling plane

1141 horizontal reference plane

1142 vertical reference plane

115 angle fixed block

1151 inclined plane

12 wind speed measuring unit

121 fixing frame

1211 adjuster

12111 adjusting plate

12112 Elastomers

12113 slide block

1212 angle fixer

1213 front and rear adjuster

1214 height adjuster

122 wind velocity indicator

123 pitot tube

1231 air inlet interface

124 abutting piece

13 deformation measuring unit

130 measuring piece

131 measuring probe

132 gauge

14 drive device

141 servo motor

142 rotating wheel

143 drive belt

2 air knife structure

21 knife edge

3 air supply filter

31 gas source

32 pressure regulating valve

33 flow pressure display

34 gas inlet filtering device

35 pressure gauge

36 gas branch pipe

37 ball valve switch

38 flexible pipe

S1 step one

S2 step two

S3 step three

S4 step four

S5 step five

S6 step six

S7 step seven.

Detailed Description

Firstly, please refer to fig. 1, which is a schematic view of an overall structure of a preferred embodiment of the measuring device of the present invention, wherein the measuring device 1 of the present invention is used for measuring the wind speed and the deformation of a wind knife structure 2 with a length of 4000 millimeters (mm), the measuring device 1 includes a measuring platform 11, a wind speed measuring unit 12, a deformation measuring unit 13, and a driving device 14; the utility model discloses a measuring device mainly by the hardware design of automatic drive arrangement 14, effective drive and take advantage of this wind speed measuring unit 12 and this deformation measuring unit 13 linear move carry device 112 carry out length reach 4000 mm's air-out wind speed and the action of measurationing of hard deformation of air knife structure 2, reach really to utilize the main advantages such as the wind speed of this air knife structure (2) of automatic measurement mode completion and the measurationing of deformation homogeneity.

Please refer to fig. 2 and fig. 3 together, which are a schematic view of a measuring platform of a preferred embodiment of the measuring device of the present invention and a schematic view of a measuring platform of a preferred embodiment of the measuring device of the present invention, wherein the measuring platform 11 is composed of a base 111, two supporting members 1111, a linear transfer device 112 and a platform 113 disposed on the linear transfer device 112, wherein the base 111 is used to support the whole measuring device 1; in addition, the lower end of the base 111 can be further provided with a plurality of moving wheels 1112, the moving wheels 1112 can be mainly used by a user to conveniently move the measuring device 1; furthermore, the lower end of the base 111 can be further provided with a plurality of supports 1113, the supports 1113 mainly stabilize the measuring device 1, and prevent the measurement accuracy of the wind speed measuring unit 12 and the deformation measuring unit 13 from being affected by the shaking of the base 111, the measuring device 1 further comprises an air supply filtering device 3, the air supply filtering device 3 is used for filtering an inlet air source 31, wherein the air supply filtering device 3 further comprises at least one pressure regulating valve 32 connected with the inlet air source 31, at least one flow display 33 connected with the pressure regulating valve 32, at least one inlet air filtering device 34 connected with the flow display 33, at least one pressure gauge 35 connected with the inlet air filtering device 34, at least one gas branch pipe 36 connected with the pressure gauge 35, at least one ball valve switch 37 connected with the gas branch pipe 36, and a hose 38 connected with the ball valve switch 37, through the configuration of the pipeline, the inlet gas source is filtered and monitored layer by layer, so that the advantages of stable quality and flow can be achieved. In an embodiment of the present invention, the supporting member 1111 is any one of an i-beam, an H-beam, a U-beam, and a n-beam.

The supporting members 1111 are disposed on the upper surface 1114 of the base 111, and since the wind speed or the deformation of the air knife structure 2 is very important for the horizontal measurement, a dragon-milled plane 114 is disposed on the upper surface 1114 of each supporting member 1111 to provide a horizontal reference surface 1141 or a vertical reference surface 1142 for the linear transfer device 112 and the air knife structure 2 to be disposed, as shown in fig. 2 and 3, the linear transfer device 112 is disposed on the dragon-milled plane 114 of the supporting member 1111 on the left side, the linear transfer device 112 slides on the dragon-milled plane 114 by at least two sliding rails 1121, the air knife structure 2 is disposed on the dragon-milled plane 114 of the supporting member 1111 on the right side, and the air knife structure 2 and the linear transfer device 112 are both completely horizontal or completely vertical by the dragon-milled plane 114.

Please refer to fig. 4 to 5, which are schematic views of a wind speed measuring unit and a supporting member and a pitot tube of a preferred embodiment of the measuring device of the present invention, wherein the wind speed measuring unit 12 is further disposed above the platform 113, and the wind speed measuring unit 12 is formed by a fixing frame 121, an anemometer 122, a pitot tube 123 and a supporting member 124, wherein the fixing frame 121 is disposed on the linear transfer device 112, the anemometer 122 and the pitot tube 123 are disposed on the fixing frame 121 at the same time, the air inlet 1231 of the pitot tube 123 is opposite to and spaced from the knife edge 21 of the air knife structure 2 by a distance, the air inlet (1231) is used for receiving the air blown out from the knife edge 21 and measuring the wind speed thereof to transmit to the anemometer 122 for displaying, the supporting member 124 is disposed at the lower end of the fixing frame 121 and supports the side of the air knife structure 2, wherein the abutting member 124 is adjusted to abut against the air knife structure 2 by an adjuster 1211 disposed on the fixing frame 121; that is, please refer to fig. 6 together, which is a schematic view illustrating the arrangement of the abutting member and the adjuster of the measuring device according to a preferred embodiment of the present invention, wherein the adjuster 1211 is formed by combining an adjusting plate 12111, an elastic body 12112, and a slider 12113, the slider 12113 is connected to the abutting member 124, the adjusting plate 12111 is used to compress the elastic body 12112, so that the abutting member 124 abuts against the air knife structure 2, if the air knife structure 2 deforms, the abutting member 124 can move along the shape of the air knife structure 2, so that the air inlet 1231 of the pitot tube 123 can keep the same distance with the knife edge 21 of the air knife structure 2, without affecting the measurement of the air speed measuring unit 12; wherein the elastomer 12112 may be any one of a spring, an elastic rubber, an oil pressure element, and the like; the abutting member 124 may be any one of a roller and a slider. Thus, the hardness of the elastic body 12112 can be adjusted by the adjuster 1211 through a screw (not shown) behind the adjusting plate 12111, so that the elastic body can be elastically pressed by the abutting member and the elastic body, and the elastic body can move according to the lateral shape of the air knife structure 2; the wind speed measurement unit 12 further includes a fore-and-aft adjuster 1213 and a height adjuster 1214, and by adjusting the position height or fore-and-aft distance of the whole wind speed measurement unit, the wind speed measurement unit can effectively improve the accuracy of the wind speed value by shortening the distance.

In addition, please refer to fig. 7 and 8, which are schematic diagrams of the wind speed measuring unit of the measuring device of the present invention in two preferred embodiments, and a schematic diagram of the wind speed measuring unit of the measuring device of the present invention in three preferred embodiments, wherein in order to adapt to the situation that the air knife structure 2 is a vertical knife edge 21 that blows 30 degrees or 40 degrees obliquely, the present invention has two different implementation situations, one of which is the angle shown in fig. 7 that changes the air inlet 1231 of the pitot tube 123, that is, the fixing frame 121 is provided with an angle fixer 1212, so as to adjust the angle that the air inlet 1231 of the pitot tube 123 aligns with the knife edge 21 of the air knife structure 2 to be 30 degrees or 40 degrees, so as to completely receive and measure the wind speed of the gas blown out by the knife edge 21, and transmit the wind speed to the anemometer 122 for displaying; another is the angle of the knife edge 21 of the air knife structure 2 shown in fig. 8, that is, an angle fixing block 116 having an inclined plane 1151 for fixing the air knife structure 2 is disposed on the milling plane 114, when the air knife structure 2 is disposed on the inclined plane 1151, the knife edge 21 forms an included angle of 30 degrees or 40 degrees with the air inlet 1231 of the pitot tube 123, so as to completely receive and measure the wind speed of the gas blown out by the knife edge 21, and transmit the wind speed to the anemometer 122 for display.

Please refer to fig. 9, which is a schematic diagram of a deformation measuring unit of a preferred embodiment of the measuring device of the present invention, wherein the deformation measuring unit 13 is disposed on the linear transfer device 112 and located at an end of the wind speed measuring unit 12, the deformation measuring unit 13 includes a measuring probe 131 and a gauge 132 connected to the measuring probe 131, the measuring probe 131 is close to a side of the wind blade structure 2 and measures a deformation thereof, the deformation is transmitted to the gauge 132 for display, the measuring device 1 further includes a man-machine interface, the measuring probe 131 transmits a signal, and calculates a deformation of the wind blade structure 2 by receiving a reflection of the signal and transmits the signal to the man-machine interface, wherein the signal is one of microwave or light, that is, the measuring probe 131 mainly transmits a signal toward the side of the wind blade structure 2, for example: a laser beam, after the measuring probe 131 receives the laser beam and reflects the laser beam to the side of the air knife structure 2, the distance between the side of the air knife structure 2 and the measuring probe 131 can be determined according to the round-trip time of the laser beam, generally speaking, if the side of the air knife structure 2 is not deformed, the round-trip time of the laser beam at each position of the side of the air knife structure 2 is fixed or within an error range, and when the round-trip time of the laser beam received by the measuring probe 131 is greater than or less than the error range, it means that the side of the air knife structure 2 has been deformed, such as deformation like a concave hole or a convex hole.

In addition, the measuring device 1 is provided with an alarm device electrically connected to the anemometer 122 of the wind speed measuring unit 12 and the gauge 132 of the deformation measuring unit 13, respectively, and the alarm device sends an alarm signal when the values displayed by the anemometer 122 and the gauge 132 exceed a preset value.

Please refer to fig. 10 again, which is a schematic view of a driving device of a preferred embodiment of the measuring device of the present invention, wherein the driving device 14 is disposed at a side portion of the base 111 to drive the linear transfer device 112 to slide on the supporting member 1111, so as to drive the wind speed measuring unit 12 and the deformation measuring unit 13 to measure the wind speed and the deformation of the wind knife structure 2; that is, the driving device 14 includes a servo motor 141, at least two rotating wheels 142 connected to the servo motor 141, and a transmission belt 143 sleeved on the rotating wheels 142 and disposed at the lower end of the linear transfer device 112, wherein the servo motor 141 automatically drives the rotating wheels 142 to rotate so as to drive the transmission belt 143 to rotate and drive the linear transfer device 112 to slide back and forth on the supporting member 1111, so that the wind speed measuring unit 12 and the deformation measuring unit 13 can measure the wind speed and the deformation of the air knife structure 2 having a length of 4000mm from beginning to end.

In addition, please refer to fig. 11, which is a flowchart illustrating steps of a measuring method according to the present invention, wherein the measuring method is mainly used for measuring the wind speed and the deformation of a wind knife structure 2, and comprises the following steps: step one S1: arranging a measuring platform 11, wherein the measuring platform 11 comprises a base 111, two supporting members 1111 arranged on the base 111, and a linear transfer device 112 arranged on one of the supporting members 1111; in a preferred embodiment of the present invention, the measuring platform 11 is composed of a base 111, two supporting members 1111 and a linear transfer device 112), wherein the base 111 is used to support the whole measuring device 1; in addition, the lower end of the base 111 can be further provided with a plurality of moving wheels 1112, the moving wheels 1112 can be mainly used by a user to conveniently move the measuring device 1; furthermore, the bottom end of the base 111 can be further provided with a plurality of supports 1113, the supports 1113 mainly stabilize the measuring device 1, so as to avoid the influence of the shaking of the base 111 on the measuring accuracy of the wind speed measuring unit 12 and the deformation measuring unit 13; in addition, the supporting members 1111 are disposed on the upper surface 1114 of the base 111, and since the wind speed or the deformation of the wind knife structure 2 is very important for the horizontal measurement, each of the supporting members 1111 has a long milled plane 114 disposed on the upper surface 1114 thereof to provide a horizontal reference plane 1141 or a vertical reference plane 1142 for the linear transfer device 112 and the wind knife structure 2 to be disposed, as shown in fig. 2 and 3, the linear transfer device 112 is disposed on the long milled plane 114 of the supporting member 1111 on the left side, the linear transfer device 115 slides on the long milled plane 114 through at least two sliding rails 1121, the wind knife structure 2 is disposed on the long milled plane 114 of the supporting member 1111 on the right side, and the wind knife structure 2 and the linear transfer device 112 are both completely horizontal or completely vertical by the long milled plane 114.

Step two S2: a driving device 14 is disposed to connect to the linear transferring device 112 for driving the linear transferring device 112 to move back and forth on the supporting member 1111; in a preferred embodiment of the present invention, the driving device 14 is disposed at a side portion of the base 111 to drive the linear transfer device 115 to slide on the supporting member 1111, so as to drive the wind speed measuring unit 12 and the deformation measuring unit 13 to measure the wind speed and the deformation of the air knife structure 2; that is, the driving device 14 includes a servo motor 141, at least two rotating wheels 142 connected to the servo motor 141, and a transmission belt 143 sleeved on the rotating wheels 142 and disposed at the lower end of the linear transfer device 112, wherein the servo motor 141 automatically drives the rotating wheels 142 to rotate so as to drive the transmission belt 143 to rotate and drive the linear transfer device 112 to slide back and forth on the supporting member 1111, so that the wind speed measuring unit 12 and the deformation measuring unit 13 can measure the wind speed and the deformation of the air knife structure 2 having a length of 4000mm from beginning to end.

Step three S3: an air knife structure 2 is disposed on the other supporting member 1111, wherein the air knife structure 2 includes a knife edge 21.

Step four S4: a wind speed measuring unit 12 is disposed on the linear transferring device 112, wherein the air inlet 1231 of the pitot tube 123 of the wind speed measuring unit 12 is spaced apart from the knife edge 21, and the abutting member 124 of the wind speed measuring unit (12) abuts against the wind knife structure 2.

Step five S5: using the air inlet 1231 to receive the air output of the knife edge 21 and measure the air speed thereof, so as to transmit the air speed to an anemometer 122 for display; in a preferred embodiment of the present invention, the wind speed measuring unit 12 is composed of a fixing frame 121, an anemometer 122, a pitot tube 123 and a supporting member 124, wherein the fixing frame 121 is disposed on the linear transfer device 112, the anemometer 122 and the pitot tube 123 are disposed on the fixing frame 121 at the same time, an air inlet 1231 of the pitot tube 123 is opposite to and spaced from the knife edge 21 of the air knife structure 2 by a distance, the air inlet 1231 is used for receiving the air blown from the knife edge 21 and measuring the wind speed thereof to be transmitted to the anemometer 122 for display, the supporting member 124 is disposed at the lower end of the fixing frame 121 and supports against the side portion of the air knife structure 2, wherein the supporting member 124 adjusts the state of supporting the air knife structure 2 by an adjuster 1211 disposed on the fixing frame 121; that is, the adjuster (1211) is composed of an adjusting plate 12111, an elastic body 12112, and a slider 12113, the slider 12113 is connected to the abutting member 124, the adjusting plate 12111 is used to compress the elastic body 12112, so that the abutting member 124 abuts against the air knife structure 2, if the air knife structure 2 deforms, the abutting member 124 can move along the shape of the air knife structure 2, so that the air inlet 1231 of the pitot tube 123 can keep the same distance with the knife edge 21 of the air knife structure 2, without affecting the measurement of the wind speed measuring unit 12.

Step six S6: arranging a deformation measuring unit 13 on the linear transfer device (112), wherein a measuring probe 131 of the deformation measuring unit 13 is close to the side of the air knife structure 2 and measures the deformation thereof, and the deformation is transmitted to the measuring meter (132) for display; in a preferred embodiment of the present invention, the deformation measuring unit 13 is disposed on the linear transferring device 112 and located at an end of the wind speed measuring unit 12, the deformation measuring unit 13 includes a measuring part 130, wherein the measuring part 130 further includes a measuring probe 131 and a gauge 132 connected to the measuring probe 131, the measuring probe 131 is close to the side of the wind blade structure 2 and measures the deformation thereof, the deformation is transmitted to the gauge 132 for displaying, wherein the measuring probe 131 transmits a signal, and calculates the deformation of the wind blade structure 2 by receiving the reflection of the signal and transmitting the signal to the man-machine interface, wherein the signal is one of microwave or light, that is, the measuring probe 131 mainly transmits a signal toward the side of the wind blade structure 2, for example: a laser beam, after the measuring probe 131 receives the laser beam and reflects the laser beam to the side of the air knife structure 2, the distance between the side of the air knife structure 2 and the measuring probe 131 can be determined according to the round-trip time of the laser beam, generally speaking, if the side of the air knife structure 2 is not deformed, the round-trip time of the laser beam at each position of the side of the air knife structure 2 is fixed or within an error range, and when the round-trip time of the laser beam received by the measuring probe 131 is greater than or less than the error range, it means that the side of the air knife structure 2 has been deformed, such as deformation like a concave hole or a convex hole.

In addition, referring to fig. 12, the measuring method further includes a step S7: an alarm device is arranged to electrically connect the anemometer 122 and the scale 132, and when the values displayed by the anemometer 122 and the scale 132 exceed a preset value, the alarm device sends an alarm signal.

Furthermore, in an embodiment of the present invention, the deformation measuring unit is a semi-automatic or automatic transmission measuring value. When the deformation measuring unit is a semi-automatic embodiment, the measuring device directly displays information on a display table of a measuring piece after the deformation measuring piece of the deformation measuring unit measures the deformation, and arranges manpower for real-time checking beside the deformation measuring unit, thereby achieving a quick and accurate semi-automatic measuring method.

Furthermore, in another embodiment of the present invention, wherein when the deformation measuring unit is an automatic embodiment, the measuring device directly displays information on a display table of the measuring device after measuring the deformation amount by the measuring device of the deformation measuring unit, wherein when the measuring device is a measuring meter, the measuring probe emits a signal, and calculates the deformation amount of the air knife structure by receiving the reflection of the signal, and then transmits the deformation information to the man-machine interface, and checks the deformation information in real time through the man-machine interface, thereby achieving a fast and accurate automatic measuring method.

As can be seen from the above description, the measuring device of the present invention has the following advantages compared with the prior art.

The utility model discloses a measuring device mainly by automatic drive arrangement's hardware design, effective drive carries the wind speed to measure the linear slide of unit and deformation measurement unit and carries out the air-out wind speed that length reaches 4000 mm's air knife structure and the action of measurationing of hard deformation, reaches really to utilize the automatic mode of measurationing to accomplish main advantages such as the wind speed of air knife structure and the measurationing of deformation homogeneity.

Claims

1. A measuring device for measuring wind speed and deformation of a wind knife structure (2), wherein the measuring device (1) comprises:

a measuring platform (11) comprising a base (111), a linear transfer device (112) arranged above the base (111) and a platform (113) arranged on the linear transfer device (112);

a wind speed measuring unit (12) including a fixing frame (121) of the platform (113) disposed on the linear transfer device (112), an anemometer (122) disposed at an upper end of the fixing frame (121), a set of pitot tubes (123) disposed at an upper end of the fixing frame (121) and connected to the anemometer (122), and a support member (124) disposed at a lower end of the fixing frame (121) and supported against the air knife structure (2), wherein a wind inlet port (1231) of the pitot tube (123) is disposed opposite to and spaced apart from a knife edge (21) of the air knife structure (2) to measure a wind speed value of wind outlet from the knife edge (21), and the wind speed value is transmitted to the anemometer (122) for display, and the support member (124) is adjusted by an adjuster (1211) disposed on the fixing frame (121) to support against the air knife structure (2);

a deformation measuring unit (13) disposed on the linear transfer device (112) and located at an end of the wind speed measuring unit (12), wherein the deformation measuring unit (13) includes a measuring member (130), and the measuring member (130) is close to a side of the wind blade structure (2) and measures a deformation thereof; and

a driving device (14) for driving the linear transfer device (112) to slide on the base (111) to drive the wind speed measuring unit (12) and the deformation measuring unit (13) to measure the wind speed and the deformation of the wind knife structure (2).

2. The apparatus according to claim 1, wherein two supporting members (1111) are sequentially disposed on the base (111), and one of the supporting members (1111) is disposed with the linear transfer device (112), and the other supporting member (1111) is disposed with the air knife structure (2).

3. A measuring device according to claim 2, characterized in that an upper surface (1114) of the support (1111) is provided with a milled plane (114) providing a horizontal reference plane (1141) or a vertical reference plane (1142).

4. The measurement apparatus according to claim 3, wherein the linear transfer device (112) slides on the milling plane (114) via at least two sliding rails (1121).

5. A measuring device according to claim 3, wherein the milling plane (114) is provided with an angle fixing block (115) having an inclined plane (1151) for fixing the air knife structure (2).

6. The measurement apparatus according to claim 1, wherein the holder (121) is provided with an angle holder (1212) for adjusting an angle of the air inlet port (1231) of the pitot tube (123) to be aligned with the blade edge (21) of the air knife structure (2).

7. A measuring device according to claim 1, wherein the measuring member (130) is one of a volume meter, an optical displacement meter, a laser displacement meter, etc.

8. A measuring device according to claim 1, wherein the measuring member (130) is a measuring meter, the measuring meter comprises a measuring probe (131) and a measuring meter (132) connected to the measuring probe (131), the measuring probe (131) is close to the side of the air knife structure (2) and measures the deformation thereof.

9. A measuring device as claimed in claim 1, wherein the measuring device (1) is provided with an alarm device electrically connected to the anemometer (122) of the wind speed measuring unit (12) and the measuring member (130) of the strain measuring unit (13), respectively, the alarm device emitting an alarm signal when the values displayed by the anemometer (122) and the measuring member (130) exceed a predetermined value.

10. A measuring device according to claim 1, wherein the driving device (14) is any one of a servo motor (141), a slide rail, a belt or a ball screw.

11. The measuring apparatus according to claim 1, wherein the driving device (14) comprises a servo motor (141), at least two rotating wheels (142) connected to the servo motor (141), and a driving belt (143) sleeved on the rotating wheels (142) and disposed at a lower end of the linear transfer device (112), the servo motor (141) drives the rotating wheels (142) to rotate, so as to drive the driving belt (143) to rotate and drive the linear transfer device (112) to slide back and forth on the supporting member (1111).

12. A measuring device according to claim 1, characterized in that the measuring device (1) comprises a man-machine interface.

13. A measuring device according to claim 12, wherein the measuring member (130) is a measuring meter, the measuring meter comprises a measuring probe (131) and a measuring meter (132) connected to the measuring probe (131), the measuring probe (131) is close to the side of the air knife structure (2) and measures the deformation thereof.

14. A measuring device according to claim 13, wherein the measuring probe (131) emits a signal and calculates the deformation of the air knife structure (2) by receiving the reflection of the signal and transmits it to the human machine interface.

15. The measurement device of claim 14, wherein the signal is one of microwave or light.

16. A measuring apparatus according to claim 12, wherein the driving device (14) comprises a servo motor (141), at least two rotating wheels (142) connected to the servo motor (141), and a driving belt (143) sleeved on the rotating wheels (142) and disposed at a lower end of the linear transfer device (112), the servo motor (141) drives the rotating wheels (142) to rotate, so as to drive the driving belt (143) to rotate and drive the linear transfer device (112) to slide back and forth on the supporting member (1111).

17. A measuring device according to claim 1, characterized in that the measuring device (1) comprises a gas supply filter device (3).

18. The measurement apparatus according to claim 1, wherein the linear transfer device (112) is a linear carriage or a ball screw.

19. A measuring device according to claim 1, wherein the abutting member (124) is a roller or a slider.