CN210892394U - Novel centrifugal silicon chip drier - Google Patents
Novel centrifugal silicon chip drier Download PDFInfo
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- CN210892394U CN210892394U CN201921783403.2U CN201921783403U CN210892394U CN 210892394 U CN210892394 U CN 210892394U CN 201921783403 U CN201921783403 U CN 201921783403U CN 210892394 U CN210892394 U CN 210892394U
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- spin dryer
- dryer tube
- silicon chip
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Abstract
The utility model provides a novel centrifugal silicon chip drier, includes spin dryer tube, bung, motor, belt pulley and pivot, and the bung shroud is on the spin dryer tube, the output shaft and the belt pulley connection of motor, and the belt pulley is connected with pivot one end, and the pivot other end bears the device rigid coupling with the silicon chip that sets up inside the spin dryer tube after passing the spin dryer tube bottom, the air inlet who link up is seted up at the center of bung, installs airstrainer in air inlet, air water conservancy diversion mouth has been seted up to the lateral wall of spin dryer tube, this air water conservancy diversion mouth and air flow guide pipe intercommunication. The utility model discloses set up air inlet on the bung to set up airstrainer at air inlet department, bear and form top-down high-speed air current under the centrifugal force effect of the high-speed rotation of device at the inside silicon chip of spin dryer tube and silicon chip, thereby with the steam on the silicon chip by air water conservancy diversion mouth discharge spin dryer tube, can be under the condition of stopping air pollution and reduction energy consumption, realize the dehydration that spin-dries of silicon chip, and low cost, the dehydration that spin-dries is effectual.
Description
Technical Field
The utility model belongs to the technical field of solar energy and semiconductor spin-dry, in particular to novel centrifugal silicon chip drier.
Background
After the solar and semiconductor silicon wafers pass through the cleaning machine, the silicon wafers need to be dried and dehydrated by a drying machine, and in the drying process, in order to ensure that the silicon wafers can be completely dried and dehydrated, air flow from top to bottom needs to be formed in a drying barrel to take away water vapor on the surfaces of the silicon wafers. In the existing equipment, as shown in fig. 1, nitrogen is introduced into the spin dryer tube 101 through a nitrogen source, but due to the cost problem, a large amount of nitrogen cannot be introduced, only a small amount of nitrogen can be introduced, and the silicon wafer can be spin-dried only by heating the small amount of nitrogen to form a high-temperature nitrogen flow of more than 100 ℃. The nitrogen gas needs to be heated to above 100 degrees by the oil bath 102 before it is passed into the spin dryer tub. The silicon wafer bearing device 108 for bearing and placing the silicon wafers is arranged in the spin dryer tube, the silicon wafer bearing device drives a belt pulley 110 through an output shaft of a motor 109 arranged outside the spin dryer tube, the belt pulley drives a rotating shaft 111 to rotate at a high speed, heat conduction oil 103, a coil 104 and an electric heating tube 105 are arranged inside the oil bath furnace 102, the heat conduction oil 103 is heated to 150 ℃ through the electric heating tube 105, nitrogen flowing through the coil is heated to more than 100 ℃ through heat exchange of the coil 104, then the nitrogen enters the spin dryer tube through a nitrogen tube 106 communicated with the spin dryer tube and a nozzle 112 uniformly distributed on the nitrogen tube to dry the silicon wafers 107, and the spin dryer tube is covered with a tube cover 113 to realize sealing. However, the heat conduction oil can volatilize at high temperature and generate odor, so that the environment can be polluted, electric energy can be consumed during heating, the total power of the spin dryer tube is 5KW, and about half of power is consumed when the heat conduction oil is heated by light, so that the silicon wafer can be dried without using an oil bath furnace, the cost can be reduced, and the method is of great significance.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model aims at providing a novel drier, its ventilation mechanism that is equipped with solar energy and semiconductor silicon chip and washs back drier can reach the purpose of spin-drying, also can replace the part of oil bath furnace heating conduction oil, and is energy-concerving and environment-protective.
The purpose of the utility model and the technical problem thereof are realized by adopting the following technical scheme. The foundation the utility model provides a novel centrifugal silicon chip drier, including spin dryer tube, bung, motor, belt pulley and pivot, the bung shroud is on the spin dryer tube, the output shaft and the belt pulley connection of motor, and the belt pulley is connected with pivot one end, and the pivot other end bears the device rigid coupling with setting up at the inside silicon chip of spin dryer tube behind the spin dryer tube bottom portion, the air inlet who link up is seted up at the center of bung, installs airstrainer in air inlet, air water conservancy diversion mouth has been seted up to the lateral wall of spin dryer tube, this air water conservancy diversion mouth and air honeycomb duct intercommunication.
The utility model discloses still adopt following technical scheme further to realize.
In the novel centrifugal silicon wafer drying machine, the air filter screen is provided with a plurality of layers.
In the novel centrifugal silicon wafer drying machine, the silicon wafer bearing device is a basket bearing frame.
In the novel centrifugal silicon wafer drying machine, a water outlet is further formed in the drying barrel.
Borrow by above-mentioned technical scheme, the utility model discloses set up air inlet on the bung to set up airstrainer at air inlet department, bear the centrifugal force effect of the high-speed rotation of device at the inside silicon chip of spin dryer tube and silicon chip, can inhale the bucket with the dry air of bung top in, and discharge the steam on the silicon chip by air water conservancy diversion mouth, consequently the utility model discloses can be under the condition of stopping air pollution and reduction energy consumption, realize the dehydration that spin-dries of silicon chip to low cost, the dehydration that spin-dries is effectual.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented according to the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more obvious and understandable, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic view of a prior art spin dryer for silicon wafers.
Fig. 2 is a schematic structural diagram of the present invention.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
Please refer to fig. 2, the utility model discloses a novel centrifugal silicon chip drier, including spin dryer tube 201 and be used for the bung 202 of shroud on the spin dryer tube, be equipped with the silicon chip that is used for placing the silicon chip in the spin dryer tube 201 and bear device 203, this silicon chip bears device bottom and pivot 204 rigid coupling, pivot 204 and belt pulley 205 rigid coupling, and the output shaft of motor 206 passes through drive belt pulley 205 and rotates the realization and bear the rotary drive of device 203 to the silicon chip, and above-mentioned structure is prior art, the utility model discloses an improve the point and lie in: a through air inlet 207 is formed in the center of the tub cover 202, an air filter 208 is installed in the air inlet 207, and an air guide opening 209 is formed in the side wall of the spin dryer tub 201 and is communicated with an air guide pipe 210. Preferably, the air filter screen is provided with a plurality of layers for fully filtering and purifying air; the silicon wafer bearing device can be a flower basket bearing frame.
Because the utility model cancels the heating of the oil bath furnace, the flow of nitrogen is required to be increased to realize the drying of the silicon chip, but the increase of the flow of nitrogen is unacceptable from the perspective of production cost; under actual working conditions, air can be used for replacing nitrogen, but the air cleanliness can not meet the requirements of the production process, so that the air filter screen 208 is additionally arranged for filtering and purifying the dry air entering the outer part of the spin dryer tube. An air guide opening is formed in the side wall of the spin dryer tube, purified air forms high-speed airflow from top to bottom under the action of centrifugal force of high-speed rotation of the silicon wafer bearing device 203 and the silicon wafer 211 in the spin dryer tube, dry air above the barrel cover 202 is sucked into the spin dryer tube, and finally water vapor on the silicon wafer is taken out of the spin dryer tube through the air guide opening 209 and the air guide tube 210, so that spin-drying and dehydration of the silicon wafer are realized; and the excessive water thrown on the inner wall of the spin dryer tube can be discharged from a water outlet 211 arranged at the bottom of the spin dryer tube. Therefore the utility model discloses can realize the dehydration that spin-dries of silicon chip under the condition of stopping air pollution and reducing the energy consumption to low cost, the dehydration that spin-dries is effectual, and the energy consumption that spin-dries reduces by a wide margin, has cancelled the nitrogen gas consumption and has also made manufacturing cost further reduce.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art can easily modify, change or modify the above embodiments according to the technical spirit of the present invention without departing from the scope of the present invention.
Claims (4)
1. The utility model provides a novel centrifugal silicon chip drier, includes spin dryer tube, bung, motor, belt pulley and pivot, and the bung shroud is on the spin dryer tube, the output shaft and the belt pulley connection of motor, and the belt pulley is connected with pivot one end, and the pivot other end bears device rigid coupling, its characterized in that with the silicon chip that sets up inside the spin dryer tube after passing the spin dryer tube bottom: the center of the barrel cover is provided with a through air inlet, an air filter screen is arranged in the air inlet, and the side wall of the spin dryer tube is provided with an air guide opening which is communicated with an air guide tube.
2. The novel centrifugal silicon wafer spin dryer of claim 1, wherein: the air filter screen is provided with a plurality of layers.
3. The novel centrifugal silicon wafer spin dryer of claim 1, wherein: the silicon wafer bearing device is a flower basket bearing frame.
4. The novel centrifugal silicon wafer spin dryer of claim 1, wherein: a water outlet is formed in the spin dryer tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921783403.2U CN210892394U (en) | 2019-10-21 | 2019-10-21 | Novel centrifugal silicon chip drier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921783403.2U CN210892394U (en) | 2019-10-21 | 2019-10-21 | Novel centrifugal silicon chip drier |
Publications (1)
| Publication Number | Publication Date |
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| CN210892394U true CN210892394U (en) | 2020-06-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201921783403.2U Active CN210892394U (en) | 2019-10-21 | 2019-10-21 | Novel centrifugal silicon chip drier |
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| CN (1) | CN210892394U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050619A (en) * | 2020-09-15 | 2020-12-08 | 赣州市业润自动化设备有限公司 | Draining protective cover in drying equipment |
-
2019
- 2019-10-21 CN CN201921783403.2U patent/CN210892394U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112050619A (en) * | 2020-09-15 | 2020-12-08 | 赣州市业润自动化设备有限公司 | Draining protective cover in drying equipment |
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