CN210892365U - Polished section air-dries system - Google Patents
Polished section air-dries system Download PDFInfo
- Publication number
- CN210892365U CN210892365U CN201921409887.4U CN201921409887U CN210892365U CN 210892365 U CN210892365 U CN 210892365U CN 201921409887 U CN201921409887 U CN 201921409887U CN 210892365 U CN210892365 U CN 210892365U
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- Prior art keywords
- slide glass
- base
- hole
- housing
- polished wafer
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Abstract
The utility model relates to the technical field of optoelectronic material processing, in particular to a polished section air drying system, which comprises a base, wherein a housing is buckled and connected with the base to form a closed operating space; an operation table is arranged above the base, a first through hole extending in the up-down direction is formed in the operation table, a slide glass table top is arranged on the upper surface of the operation table, the slide glass table top is of a zigzag structure, and a second through hole extending in the up-down direction is formed in the slide glass table top; the device is characterized in that a plurality of heat lamp sources and a plurality of exhaust fans are arranged above the slide glass table board, an air inlet hole is formed in a top plate of the housing, a filtering device is installed on the top surface of the housing, and an air outlet end of the filtering device is communicated with the air inlet hole through a pipeline. The utility model discloses the product is rational in infrastructure ingenious, through set up exhaust fan and heat lamp source in the housing, the corresponding structure that sets up on cooperation slide glass mesa, operation panel and the base can realize high-efficient, thorough drying to polishing piece.
Description
Technical Field
The utility model relates to a photoelectron material processing technology field, concretely relates to polishing piece air-dries system.
Background
Optoelectronic material processing typically includes stock-slicing-chamfering-grinding-polishing. And after polishing, forming a polishing sheet, cleaning, drying and surface inspection, putting the polishing sheet into a slide glass box, and sealing and packaging the polishing sheet to be processed into the required functional material. In order to obtain a high-performance functional material, the requirement on the surface quality of the polishing sheet is very high, and the drying process of the polishing sheet after cleaning and before packaging plays an important role. The prior art adopts drier or stoving case to the drying of polishing piece, has the not thorough problem of drying. If the polishing sheet is not completely dried and is directly sealed and packaged, the cleaning solution remained on the surface of the polishing sheet or the water vapor and mist formed by the failure of timely volatilization can corrode or deliquesce the surface of the polishing sheet, and further the subsequent processing quality of the polishing sheet is directly influenced.
Disclosure of Invention
The utility model provides a to above-mentioned problem, a polished section air-dries system is provided, and this air-dries system can realize high-efficient, the thorough drying of polished section.
According to the technical scheme of the utility model: the utility model provides a polished section air-dries system which characterized in that: the device comprises a base, wherein a housing is buckled and connected with the base to form a closed operation space; an operation table is arranged above the base, a first through hole extending in the up-down direction is formed in the operation table, a slide glass table top is arranged on the upper surface of the operation table, the slide glass table top is of a zigzag structure, and a second through hole extending in the up-down direction is formed in the slide glass table top; a plurality of heat lamp sources and a plurality of exhaust fans are arranged above the slide glass table top, an air inlet hole is formed in the top plate of the housing, a filtering device is installed on the top surface of the housing, and the air outlet end of the filtering device is communicated with the air inlet hole through a pipeline; the base is provided with a plurality of exhaust holes, the bottom surface of the operating platform is connected with a rotating shaft, and the rotating shaft extends to the end part outside the base and is connected with a transmission device.
As the utility model discloses a further improvement, the vertical stand that sets up of base upper surface, the stand top surface sets up the support frame, and exhaust fan, heat lamp source hang and locate the support frame bottom surface.
As a further improvement of the utility model, the heat lamp source adopts a heat lamp or an LED lamp.
As a further improvement of the utility model, the slide glass table-board and the operation table are both made of stainless steel plate materials.
As a further improvement of the utility model, the zigzag part of the slide glass table board and the surface of the operation table form an angle of 35-45 degrees.
As a further improvement of the utility model, the exhaust fan and the heat lamp source are arranged at intervals.
As a further improvement, the first through hole is arranged along the surface of the operating table, the second through hole is arranged on the surface of the slide glass table, and the exhaust hole is arranged on the base.
As a further improvement of the utility model, the filtering device is an air filter.
As a further improvement, the transmission device comprises a motor and a speed reducer, the output shaft of the motor is connected with the input end of the speed reducer, and the output end of the speed reducer is connected with the rotating shaft.
As a further improvement of the utility model, the support frame passes through threaded connection with the stand, and the support frame can be for the upper and lower elevating movement of stand.
The technical effects of the utility model reside in that: the product of the utility model has reasonable and ingenious structure, and can realize the efficient and thorough drying of the polished wafer by arranging the exhaust fan and the heat lamp source in the housing and matching with the corresponding structures arranged on the slide glass table-board, the operation table and the base; the heat lamp source heats the polishing sheet to evaporate and atomize the cleaning liquid, and then the cleaning liquid passes through the air inlet and the air outlet and is driven by the exhaust fan to circulate, so that mist and water vapor evaporated on the surface of the polishing sheet are taken away in time, and the surface of the polishing sheet can be completely dried; the table top of the slide glass is set to a certain inclination angle, the slide glass rack with the polishing sheet is obliquely placed on the table top of the slide glass, cleaning liquid on the surface of the polishing sheet can be drained timely in the drying process of the polishing sheet, and the air drying speed of the polishing sheet is accelerated; set up over-and-under type heat lamp source, exhaust fan and rotary operation platform, can adjust polished section heat source irradiation district, exhaust district or through rotatory even stoving that realizes polished section in a flexible way as required, improve the work efficiency and the quality of air-drying system.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The following description will further describe embodiments of the present invention with reference to the accompanying drawings.
In fig. 1, the device comprises a base 1, a housing 2, an operation table 3, a slide table top 4, a support frame 5, a column 6, a filter 7, an air inlet 8, an exhaust fan 9, a heat lamp source 10, a rotating shaft 11, a transmission device 12, a first through hole 13, a second through hole 14, an exhaust hole 15 and the like.
As shown in fig. 1, the utility model relates to a polished section air-drying system, which comprises a base 1, a housing 2 is buckled and connected with the base 1 to form a closed operation space; an operating platform 3 is arranged above the base 1, a first through hole 13 extending in the vertical direction is formed in the operating platform 3, a slide glass table top 4 is arranged on the upper surface of the operating platform 3, the slide glass table top 4 is of a zigzag structure, and a second through hole 14 extending in the vertical direction is formed in the slide glass table top 4; a plurality of heat lamp sources 10 and a plurality of exhaust fans 9 are arranged above the slide glass table top 4, an air inlet hole 8 is arranged on the top plate of the housing 2, a filter device 7 is arranged on the top surface of the housing 2, and the air outlet end of the filter device 7 is communicated with the air inlet hole 8 through a pipeline; a plurality of exhaust holes 15 are formed in the base 1, the bottom surface of the operating platform 3 is connected with a rotating shaft 11, and the end part, extending to the outer side of the base 1, of the rotating shaft 11 is connected with a transmission device 12.
The vertical stand 6 that sets up of base 1 upper surface, 6 top surfaces of stand set up support frame 5, and exhaust fan 9, heat lamp source 10 hang and locate the bottom surface of support frame 5.
The hot light source 10 adopts a hot light lamp or an LED lamp to realize heating of air flow entering the housing and ensure high-efficiency and quick drying of the polished wafer.
The slide table top 4 and the operation table 3 are both made of stainless steel plate materials, and the strength is reliable and stable.
The angle between the sawtooth-shaped part of the slide table top 4 and the surface of the operation table 3 is 35-45 degrees, and the angle range can effectively drain liquid on the surface of the polishing sheet.
The exhaust fan 9 and the heat lamp source 10 are arranged at intervals to ensure that the temperature of the air flow in the housing 2 is uniform.
The first through holes 13 are uniformly distributed along the surface of the operating platform 3, the second through holes 14 are uniformly distributed on the slide glass table-board 4, and the exhaust holes 15 are uniformly distributed on the base 1.
The filter device 7 is an air filter by which the air entering the housing 2 is filtered to increase the purity of the air flow entering the housing 2.
The transmission device 12 comprises a motor and a speed reducer, an output shaft of the motor is connected with an input end of the speed reducer, an output end of the speed reducer is connected with the rotating shaft 11, and when the electric power tool works, the transmission device 12 drives the operating platform 3 to rotate through the rotating shaft 11.
Support frame 5 and stand 6 pass through threaded connection, and support frame 5 can be for stand 6 upper and lower elevating movement, and when specifically using, support frame 5 can also have other setting modes with stand 6's connected mode, for example sets up the threaded rod on stand 6, and support frame 5 is connected with threaded rod screw-thread fit.
The utility model discloses the working process of product is as follows: placing the slide glass rack with the polishing sheet on the slide glass table top 4, enabling the slide glass rack to incline for a certain angle to drain the cleaning liquid on the surface of the polishing sheet, and discharging the drained cleaning liquid through the second through hole 14, the first through hole 13 and the exhaust hole 15 respectively; adjust heat lamp source 10 through support frame 5 and stand 6, exhaust fan 9 and polished section's height, make polished section possess suitable heat source irradiation district and the district of airing exhaust, turn on heat lamp source 10, exhaust fan 9, the filter equipment 7 of inlet port 8 department, heat lamp source 10 heats polished section, make the washing liquid evaporation atomizing, filtered air gets into from the filter equipment 7 of inlet port 8 department, drive the circulation of air by exhaust fan 9, through second through-hole 14, first through-hole 13, with the fog of polished section surface evaporation, steam is in time followed exhaust hole 15 and is discharged. Meanwhile, the transmission device 12 can be started as required, and the operation table 3 is driven to rotate through the rotating shaft 11, so that the polishing sheet is uniformly dried.
Claims (10)
1. The utility model provides a polished section air-dries system which characterized in that: the device comprises a base (1), wherein a housing (2) is buckled and connected with the base (1) to form a closed operation space; an operating table (3) is arranged above the base (1), a first through hole (13) extending in the vertical direction is formed in the operating table (3), a slide glass table top (4) is arranged on the upper surface of the operating table (3), the slide glass table top (4) is of a zigzag structure, and a second through hole (14) extending in the vertical direction is formed in the slide glass table top (4); a plurality of heat lamp sources (10) and a plurality of exhaust fans (9) are arranged above the slide glass table top (4), an air inlet hole (8) is formed in the top plate of the housing (2), a filtering device (7) is installed on the top surface of the housing (2), and the air outlet end of the filtering device (7) is communicated with the air inlet hole (8) through a pipeline; the base (1) is provided with a plurality of exhaust holes (15), the bottom surface of the operating platform (3) is connected with a rotating shaft (11), and the rotating shaft (11) extends to the end part of the outer side of the base (1) and is connected with a transmission device (12).
2. The polished wafer air drying system of claim 1, wherein: the vertical stand (6) that sets up of base (1) upper surface, stand (6) top surface sets up support frame (5), and exhaust fan (9), heat lamp source (10) hang and locate support frame (5) bottom surface.
3. The polished wafer seasoning system of claim 2 wherein: the heat lamp source (10) adopts a heat lamp or an LED lamp.
4. The polished wafer air drying system of claim 1, wherein: the slide glass table top (4) and the operating table (3) are both made of stainless steel plate materials.
5. The polished wafer air drying system of claim 1, wherein: the zigzag part of the slide glass table top (4) forms an angle of 35-45 degrees with the surface of the operating table (3).
6. The polished wafer air drying system of claim 1, wherein: the exhaust fan (9) and the heat lamp source (10) are arranged at intervals.
7. The polished wafer air drying system of claim 1, wherein: first through-hole (13) set up along operation panel (3) surface equipartition, and second through-hole (14) equipartition sets up in slide glass mesa (4), and exhaust hole (15) equipartition sets up on base (1).
8. The polished wafer air drying system of claim 1, wherein: the filtering device (7) is an air filter.
9. The polished wafer air drying system of claim 1, wherein: the transmission device (12) comprises a motor and a speed reducer, an output shaft of the motor is connected with an input end of the speed reducer, and an output end of the speed reducer is connected with the rotating shaft (11).
10. The polished wafer seasoning system of claim 2 wherein: the support frame (5) is connected with the upright post (6) through threads, and the support frame (5) can move up and down relative to the upright post (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201921409887.4U CN210892365U (en) | 2019-08-27 | 2019-08-27 | Polished section air-dries system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201921409887.4U CN210892365U (en) | 2019-08-27 | 2019-08-27 | Polished section air-dries system |
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CN210892365U true CN210892365U (en) | 2020-06-30 |
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CN201921409887.4U Expired - Fee Related CN210892365U (en) | 2019-08-27 | 2019-08-27 | Polished section air-dries system |
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CN (1) | CN210892365U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110425821A (en) * | 2019-08-27 | 2019-11-08 | 山东欧晶莱光学科技有限公司 | Polished silicon wafer air drying system |
-
2019
- 2019-08-27 CN CN201921409887.4U patent/CN210892365U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110425821A (en) * | 2019-08-27 | 2019-11-08 | 山东欧晶莱光学科技有限公司 | Polished silicon wafer air drying system |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200630 Termination date: 20210827 |
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CF01 | Termination of patent right due to non-payment of annual fee |