CN210890069U

CN210890069U - Sealing structure of reaction chamber flange

Info

Publication number: CN210890069U
Application number: CN201921455246.2U
Authority: CN
Inventors: 杨宝立; 张勇; 余仲
Original assignee: SC New Energy Technology Corp
Current assignee: SC New Energy Technology Corp
Priority date: 2019-09-03
Filing date: 2019-09-03
Publication date: 2020-06-30
Anticipated expiration: 2029-09-03

Abstract

The utility model discloses a seal structure of reacting chamber flange, be equipped with the quartz capsule of business turn over material mouth including the outer end, overlap side by side two flanges on the quartz capsule outer end, the quartz capsule is equipped with and is located annular flange between two flanges, two flanges with equal centre gripping has the sealing washer between the terminal surface of annular flange, the sealing washer with there is the round clearance between the quartz capsule. The utility model provides a seal structure of reaction chamber flange has set up the flange on the quartz capsule outer wall, the sealing washer only with the terminal surface contact of flange, and not direct and the contact of quartz capsule outer wall, the temperature of sealing washer department is lower, sealing washer non-deformable is ageing, life is higher.

Description

Sealing structure of reaction chamber flange

Technical Field

The utility model relates to a photovoltaic equipment technical field, more specifically say, relate to a seal structure of flange on reaction chamber business turn over material mouth.

Background

In the photovoltaic industry, a reaction chamber is a cavity for process reaction, the vacuum degree of the reaction chamber directly influences the quality of a product, and the vacuum degree is directly influenced by the service life of an O-shaped sealing ring. As shown in fig. 1, a reaction chamber in the prior art mainly includes a quartz tube 4, a material inlet and outlet 21 is arranged at one end of the quartz tube, two flanges (2, 3) are sleeved side by side on the quartz tube, the two flanges are fixedly connected, the fixed plate 1 is fixedly connected with the flange 3, a sealing ring 5 is positioned between the two flanges and is hermetically connected with the outer wall of the quartz tube, because the reaction chamber is to perform radiant heating on the outer wall of the quartz tube through a heating furnace body during operation, the outer wall of the quartz tube has a certain temperature, the sealing ring is in direct contact with the outer wall of the quartz tube, the temperature of the sealing ring is high, the sealing ring is usually made of rubber, and is easy to deform and age after long-term use, and has a.

SUMMERY OF THE UTILITY MODEL

The utility model provides a seal structure of reaction chamber flange to solve among the prior art sealing washer and use the back for a long time easy deformation ageing, the lower problem of life.

In order to achieve the above purpose, the technical scheme of the utility model is that:

the utility model provides a seal structure of reaction chamber flange, includes that the outer end is equipped with the quartz capsule of business turn over material mouth, overlaps side by side two flanges in the quartz capsule outer end, the quartz capsule is equipped with and is located annular flange between two flanges, two flanges with equal centre gripping has the sealing washer between annular flange's the terminal surface, the sealing washer with there is the round clearance between the quartz capsule.

The flange is provided with an annular groove on the end face adjacent to the annular flange, and the sealing ring is arranged in the groove

The annular groove is internally connected with the end face of the annular flange in a sealing way.

The radial section of the annular groove is trapezoidal, the lower bottom of the trapezoid is positioned at the bottom of the annular groove, and the upper bottom of the trapezoid is positioned at the opening of the annular groove.

The opening edge of the annular groove is arc-shaped.

The sealing ring is of an O-shaped structure.

The two flanges are respectively a first flange sleeved at the feed inlet and the discharge outlet and a second flange positioned at the inner side of the first flange.

The end face of the first flange is provided with a plurality of through mounting holes along the axial direction, the end face of the second flange adjacent to the first flange is provided with a threaded hole matched with the mounting hole, the first flange and the second flange penetrate through the screw rod, the mounting hole is in threaded connection with the second flange, and the sealing ring is compressed tightly, so that the end faces of the first flange and the second flange are respectively in sealed connection with the end faces of the flanges through the sealing ring.

The quartz tube is further sleeved with a fixing plate located on the inner side of the second flange, a plurality of fixing holes are formed in the fixing plate, through holes matched with the fixing holes are axially formed in the second flange, and the second flange penetrates through the through holes and the fixing holes and is fixedly connected with the fixing plate.

The first flange is provided with a first water inlet joint and a first water outlet joint, and a first cooling water channel is arranged inside the first flange, wherein two ends of the first cooling water channel are connected with the first water inlet joint and the first water outlet joint respectively.

And a second water inlet joint and a second water outlet joint are arranged on the second flange, and a second cooling water channel with two ends respectively connected with the second water inlet joint and the second water outlet joint is arranged in the second flange.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model provides a seal structure of reaction chamber flange has set up the flange on the quartz capsule outer wall, the sealing washer only with the terminal surface contact of flange, and not direct and the contact of quartz capsule outer wall, the temperature of sealing washer department is lower, sealing washer non-deformable is ageing, life is higher.

Drawings

Fig. 1 is a schematic diagram of a prior art structure.

Fig. 2 is a front view of the present invention.

Fig. 3 is a sectional view B-B of fig. 2.

Fig. 4 is a partially enlarged schematic view of a in fig. 3.

Detailed Description

In order to make the technical problems, technical solutions adopted, and technical effects obtained by the present invention easy to understand, the present invention will be described in detail with reference to the accompanying drawings and embodiments. It should be understood that the following specific examples are only for illustrating the present invention and are not to be construed as limiting the present invention.

It should be noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the embodiment shown in fig. 2 and 3, a sealing structure for the inlet and outlet of the reaction chamber is provided, which comprises a quartz tube 41 with an outer end provided with an inlet and outlet 61, and two flanges (21, 31) sleeved on the outer end of the quartz tube 41 side by side, wherein the quartz tube 41 is provided with an annular flange 411 positioned between the two flanges, a sealing ring 51 is clamped between the two flanges and the end surface of the annular flange 411, and a gap is formed between the sealing ring 51 and the quartz tube 41.

The two flanges (21, 31) are respectively a first flange 21 sleeved at the material inlet/outlet 61 and a second flange 31 positioned at the inner side of the first flange 21.

In one embodiment, the first flange 21 and the second flange 31 are each provided with an annular groove 9 on the end surface adjacent to the annular flange 411, and the sealing ring 51 is disposed in the annular groove 9 and is connected with the end surface of the annular flange 411 in a sealing manner.

As shown in fig. 4, in an embodiment, the radial cross section of the annular groove 9 is trapezoidal, the lower base of the trapezoid is located at the bottom of the annular groove 9, and the upper base of the trapezoid is located at the opening of the annular groove 9.

Further, the opening edge of the annular groove 9 is arc-shaped. The arc-shaped structure can facilitate taking out the sealing ring 51 in the annular groove 9, and meanwhile, the sealing ring 51 is not easy to scratch.

In one embodiment, the seal ring 51 is an O-ring configuration. The seal ring 51 is preferably made of a rubber material.

As shown in fig. 3, a plurality of through mounting holes 7 are axially formed in an end face of the first flange 21, a threaded hole 8 matched with the mounting hole is formed in an end face, adjacent to the first flange 21, of the second flange 31, the first flange 21 and the second flange 31 penetrate through the mounting hole 7 through a screw to be in threaded connection with the threaded hole 8 of the second flange 31, and a sealing ring 51 is pressed tightly, so that the end faces of the first flange 21 and the second flange 31 are respectively in sealing connection with the end face of the annular flange 411 through the sealing ring 51.

As shown in fig. 2 and 3, the quartz tube 41 is further sleeved with a fixing plate 11 located inside the second flange 31, the fixing plate 11 is provided with a plurality of fixing holes, the second flange 31 is axially provided with through holes matched with the fixing holes, and the second flange 31 passes through the through holes and the fixing holes through bolts to be fixedly connected with the fixing plate 11. The fixing plate 11 has a through hole which is fitted over the quartz tube 41, and the fixing plate 11 is connected and fixed to an external holder.

As shown in fig. 2, a first water inlet joint 10 and a first water outlet joint 12 are arranged on the first flange 21, a first cooling water channel is arranged inside the first flange 21, one end of the first cooling water channel is communicated with the first water inlet joint 10, and the other end of the first cooling water channel is communicated with the first water outlet joint 12.

The second flange 31 is provided with a second water inlet joint 13 and a second water outlet joint 14, the second flange 31 is provided with a second cooling water channel inside, one end of the second cooling water channel is communicated with the second water inlet joint 13, and the other end of the second cooling water channel is communicated with the second water outlet joint 14.

Can carry out cooling treatment to first flange 21 and quartz capsule 41 through first cooling water course, can carry out cooling treatment to second flange 31 and quartz capsule 41 through second cooling water course to prevent the overheat phenomenon, improve the life of product. When the cooling water channel is used specifically, the two cooling water channels can be used independently or connected in series.

In practice, a movable door is also provided at the inlet/outlet port 61, which is sealed against the end face of the first flange 21 when the movable door is closed.

The above embodiments and drawings are only for illustrating the technical solutions of the present invention and do not constitute limitations of the present invention. It should be noted that, a person skilled in the art may modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for part or all of the technical features, and such modifications or substitutions are included in the scope of the present invention as claimed in the claims.

Claims

1. The utility model provides a seal structure of reaction chamber flange, includes that the outer end is equipped with the quartz capsule of business turn over material mouth, overlaps side by side two flanges in the quartz capsule outer end, its characterized in that: the quartz tube is provided with an annular flange positioned between the two flanges, sealing rings are clamped between the two flanges and the end face of the annular flange, and a circle of gap exists between the sealing rings and the quartz tube.

2. A sealing structure of a reaction chamber flange according to claim 1, wherein: and the end face of the flange adjacent to the annular flange is provided with an annular groove, and the sealing ring is arranged in the annular groove and is in sealing connection with the end face of the annular flange.

3. A sealing structure of a reaction chamber flange according to claim 2, wherein: the radial section of the annular groove is trapezoidal, the lower bottom of the trapezoid is positioned at the bottom of the annular groove, and the upper bottom of the trapezoid is positioned at the opening of the annular groove.

4. A sealing structure of a reaction chamber flange according to claim 3, wherein: the opening edge of the annular groove is arc-shaped.

5. A sealing structure of a reaction chamber flange according to claim 1, wherein: the sealing ring is of an O-shaped structure.

6. A sealing structure of a reaction chamber flange according to claim 1, wherein: the two flanges are respectively a first flange sleeved at the feed inlet and the discharge outlet and a second flange positioned at the inner side of the first flange.

7. A sealing structure of a reaction chamber flange according to claim 6, characterized in that: the end face of the first flange is provided with a plurality of through mounting holes along the axial direction, the end face of the second flange adjacent to the first flange is provided with a threaded hole matched with the mounting hole, the first flange and the second flange penetrate through the screw rod, the mounting hole is in threaded connection with the second flange, and the sealing ring is compressed tightly, so that the end faces of the first flange and the second flange are respectively in sealed connection with the end faces of the flanges through the sealing ring.

8. A sealing structure of a reaction chamber flange according to claim 6, characterized in that: the quartz tube is further sleeved with a fixing plate located on the inner side of the second flange, a plurality of fixing holes are formed in the fixing plate, through holes matched with the fixing holes are axially formed in the second flange, and the second flange penetrates through the through holes and the fixing holes and is fixedly connected with the fixing plate.

9. A sealing structure of a reaction chamber flange according to claim 6, characterized in that: the first flange is provided with a first water inlet joint and a first water outlet joint, and a first cooling water channel is arranged inside the first flange, wherein two ends of the first cooling water channel are connected with the first water inlet joint and the first water outlet joint respectively.

10. A sealing structure of a reaction chamber flange according to claim 6, characterized in that: and a second water inlet joint and a second water outlet joint are arranged on the second flange, and a second cooling water channel with two ends respectively connected with the second water inlet joint and the second water outlet joint is arranged in the second flange.