CN210864010U - Wide-band induction type magnetic field sensor - Google Patents
Wide-band induction type magnetic field sensor Download PDFInfo
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- CN210864010U CN210864010U CN201921225261.8U CN201921225261U CN210864010U CN 210864010 U CN210864010 U CN 210864010U CN 201921225261 U CN201921225261 U CN 201921225261U CN 210864010 U CN210864010 U CN 210864010U
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Abstract
The utility model provides a broadband induction type magnetic field sensor, which comprises an exciting coil, an induction coil, a fluxgate magnetic core and a TMR sensor; the magnetic core of the fluxgate is a hollow cylinder, the exciting coil and the induction coil are wound on the magnetic core of the fluxgate, and the TMR sensor is arranged at the center of the inside of the magnetic core of the fluxgate; under the action of the exciting coil, the induction coil outputs an induction electric signal related to a low-frequency magnetic field, and the TMR sensor outputs an induction electric signal related to a high-frequency magnetic field, so that the broadband measurement of the vector magnetic field is realized. Under the action of an external excitation signal, the induction coil outputs an induction electric signal related to a low-frequency magnetic field, and the TMR sensor outputs an induction electric signal related to a high-frequency magnetic field, so that broadband measurement of the vector magnetic field is realized.
Description
Technical Field
The utility model relates to a sensor technical field, concretely relates to broadband induction type magnetic field sensor.
Background
Current magnetometers can be broadly divided into three categories based on measurement principles: mechanical, inductive, and quantum. The mechanical type has poor performance in measuring precision, stability and the like, and is gradually eliminated. The quantum type adopts the latest quantum effect, can realize extremely high measurement precision and accuracy, but has the problems of complicated instrument structure or incapability of measuring magnetic field vectors and the like. Therefore, the most widely used magnetometers at present are fluxgates, magnetoresistances, and the like, which utilize the induction principle.
Due to different structures of the inductive sensors, sensitive frequency intervals have differences, and a single sensor cannot realize broadband high-precision measurement. The magnetic core of the fluxgate senses the axial magnetic flux change response magnetic field information, the sensitivity of the sensor determines the magnetic measurement vector resolution and the measurement precision, the influence of problems such as skin effect and the like is caused, and the high-frequency magnetic field is difficult to accurately measure. The tunnel junction of the TMR magnetoresistive sensor senses the information of the axial magnetic flux change response magnetic field, and the change speed of the axial magnetic flux change response magnetic field is only determined by the external magnetic field, so the response speed is extremely high. However, the Barkhausen equivalent exists in the sensor, so that the low-frequency band 1/f noise of the sensor is large, and the low-frequency measurement accuracy of the sensor is influenced.
Disclosure of Invention
The to-be-solved technical problem of the utility model lies in, to the above-mentioned technical problem that wide band high accuracy measurement can't be realized to present single sensor, provide wide band induction type magnetic field sensor and solve above-mentioned technical defect.
The broadband induction type magnetic field sensor comprises an exciting coil, an induction coil, a fluxgate magnetic core and a TMR sensor; the fluxgate magnetic core is a hollow cylinder, the exciting coil and the induction coil are wound on the surface of the fluxgate magnetic core, and the exciting coil and the induction coil are wound in an orthogonal manner; the exciting coil penetrates through the upper circumferential surface and the lower circumferential surface of the cylinder of the magnetic core of the fluxgate, is tightly arranged and wound on the side wall of the cylinder of the magnetic core of the fluxgate, and fully arranges the side wall of the whole cylinder; the induction coils are parallel to the upper and lower circumferential surfaces of the cylinder of the magnetic core of the fluxgate and are tightly arranged and wound at any position on the surface of the side wall of the cylinder; the exciting coil and the induction coil are required to be arranged closely to avoid signal mutual interference; at the intersection of the exciting coil and the induction coil, the induction coil is closer to the magnetic core of the fluxgate, and the exciting coil is arranged on the outer side; the TMR sensor is fixed at the center of the inner wall of the magnetic core of the fluxgate by using a non-magnetic substrate, and a sensitive shaft of the TMR sensor is arranged in parallel with the axis of the magnetic core of the fluxgate;
under the action of an external excitation signal, the induction coil outputs an induction electric signal related to a low-frequency magnetic field, and the TMR sensor outputs an induction electric signal related to a high-frequency magnetic field, so that broadband measurement of the vector magnetic field is realized.
Further, the low-frequency magnetic field measurement is completed by a fluxgate sensor assembly, and the fluxgate sensor assembly comprises an excitation coil, an induction coil and a fluxgate magnetic core; and an audio-frequency sinusoidal or square wave excitation signal is introduced into the excitation coil, the magnetic induction intensity of the magnetic core of the fluxgate is modulated by the excitation signal, the modulated magnetization intensity is collected by the induction coil, and the induction coil outputs an electric signal which is synchronously changed with the magnetization intensity on the magnetic core of the fluxgate.
Further, the high-frequency magnetic field measurement is completed by a TMR sensor assembly which comprises an excitation coil, a fluxgate magnetic core and a TMR sensor; the TMR sensor is internally provided with a Venturi bridge formed by 4 groups of magneto-resistive devices, the resistance of the magneto-resistive devices changes along with the change of the induction intensity of a magnetic field in the axial direction of the magneto-resistive devices, and the output of the TMR sensor is voltage which linearly changes along with the magnetic field; under the excitation of the exciting coil, the flux gate magnetic core pair generates magnetic flux gathering effect around the TMR sensor and modulates the magnetic field.
Compared with the prior art, the utility model has the advantages that:
1. the TMR and the fluxgate are integrally designed into a novel broadband vector magnetic field sensor, and broadband high-precision vector magnetic field measurement is realized.
2. The TMR sensor is used for changing the low-frequency magnetic field measurement into the high-frequency magnetic field measurement by using a magnetic field modulation method, so that the TMR low-frequency magnetic field measurement precision is improved.
3. And the sensitivity of the TMR sensor is improved by using a magnetic flux gathering effect, so that the measurement precision of a high-frequency magnetic field is ensured.
Drawings
The invention will be further explained with reference to the drawings and examples, wherein:
fig. 1 is a cross-sectional view of a wide-band inductive magnetic field sensor according to the present invention.
Detailed Description
In order to clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The wide-band induction type magnetic field sensor comprises an exciting coil 1, an induction coil 2, a fluxgate magnetic core 3 and a TMR sensor 4(Tunneling magneto resistance sensor). As shown in fig. 1, the fluxgate magnetic core 3 is a hollow cylinder, the excitation coil 1 and the induction coil 2 are wound on the surface of the fluxgate magnetic core 3, and the excitation coil 1 and the induction coil 2 are wound orthogonally (at 90 °); the exciting coil 1 penetrates through the upper circumferential surface and the lower circumferential surface of the cylinder of the magnetic flux gate core 3, and is tightly wound on the side wall of the cylinder of the magnetic flux gate core 3 (one by one), so that the side wall of the whole cylinder is fully arranged; the induction coil 2 is parallel to the upper and lower circumferential surfaces of the cylinder of the magnetic core 3 of the fluxgate, and is tightly arranged and wound at any position on the surface of the side wall of the cylinder, and the number of turns is determined according to actual requirements; the exciting coil 1 and the induction coil 2 are required to be arranged closely to avoid signal mutual interference; at the intersection of the exciting coil 1 and the induction coil 2, the induction coil 2 is closer to the magnetic core 3 of the fluxgate, and the exciting coil 1 is arranged on the outer side; the TMR sensor 4 is fixed at the center (one-half height) of the inner wall of the fluxgate magnetic core 3 by using a non-magnetic substrate, and a sensitive shaft of the TMR sensor 4 is arranged in parallel with the axis of the fluxgate magnetic core 3;
under the action of an external excitation signal, the excitation coil 1 outputs an induced electrical signal related to a low-frequency magnetic field through the induction coil 2, and the TMR sensor outputs an induced electrical signal related to a high-frequency magnetic field, so that broadband measurement of a vector magnetic field is realized.
The low frequency magnetic field measurement is accomplished by a fluxgate sensor assembly comprising an excitation coil 1, an induction coil 2 and a fluxgate magnetic core 3. An audio-frequency-segment sine or square-wave excitation signal is introduced into the excitation coil 1, the magnetic induction intensity of the magnetic core 3 of the fluxgate is modulated by the excitation signal, the modulated magnetization intensity is collected by the induction coil 2, and the induction coil 2 outputs an electric signal which is synchronously changed with the magnetization intensity on the magnetic core 3. The excitation signals of the excitation coil 1 are:
V＝Vacsin(2πft)，
wherein V is an excitation signal, VacIs the peak-to-peak amplitude of the excitation signal, f is the excitation signal frequency, and t is the duration.
The high frequency magnetic field measurement is accomplished by a TMR sensor assembly comprising an excitation coil 1, a fluxgate magnetic core 3 and a TMR sensor 4. The TMR sensor 4 is internally provided with a Venturi bridge formed by 4 groups of magneto-resistive devices, the resistance of the magneto-resistive devices changes along with the change of the induction intensity of a magnetic field in the axial direction of the magneto-resistive devices, and the output of the TMR sensor 4 is voltage which linearly changes along with the magnetic field. Under the excitation of the excitation coil 1, the fluxgate magnetic core 3 generates a magnetic flux effect around the TMR sensor 4 and modulates the magnetic field, under which the output voltage of the TMR sensor 4 is:
VTMR＝MRiac＝2πfMRCVacsin(2πft)，
wherein, VTMRFor outputting a voltage signal for the TMR sensor 4, MR is the magnetoresistive size of the magnetoresistive device of the TMR sensor 4, iacC is a proportionality constant for the magnetoresistive junction current of the TMR sensor 4.
At this moment, the TMR sensor 4 is modulated to a frequency f section for measuring the low-frequency magnetic field, so that the interference of low-frequency 1/f noise is avoided, and the sensitivity of low-frequency measurement is improved. The sensor flux penetration increases by a factor of G due to the effect of the flux concentration:
wherein the variables are: b isgapFor inducing a magnetic field through the TMR in the flux concentrator, BextPassing through the TMR flux under an external magnetic field. As the magnetic flux increases, the sensitivity of the TMR magnetoresistive sensor is enhanced.
The utility model discloses broadband induction type magnetic field sensor integrates fluxgate and TMR magnetoresistive sensor, uses fluxgate to measure low frequency magnetic field, and TMR measures high frequency magnetic field, realizes vector magnetic field broadband measurement; under the action of an excitation magnetic field, the TMR sensor is modulated to a frequency f section for measuring the low-frequency magnetic field, so that the interference of low-frequency 1/f noise is avoided; the fluxgate magnetic core forms a magnetic flux gathering effect near the TMR, and the sensitivity of the TMR sensor is improved.
While the embodiments of the present invention have been described with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many modifications may be made by one skilled in the art without departing from the spirit and scope of the present invention as defined in the appended claims.
Claims (3)
1. The broadband induction type magnetic field sensor is characterized by comprising an exciting coil, an induction coil, a fluxgate magnetic core and a TMR sensor; the fluxgate magnetic core is a hollow cylinder, the exciting coil and the induction coil are wound on the surface of the fluxgate magnetic core, and the exciting coil and the induction coil are wound in an orthogonal manner; the exciting coil penetrates through the upper circumferential surface and the lower circumferential surface of the cylinder of the magnetic core of the fluxgate, is tightly arranged and wound on the side wall of the cylinder of the magnetic core of the fluxgate, and fully arranges the side wall of the whole cylinder; the induction coils are parallel to the upper and lower circumferential surfaces of the cylinder of the magnetic core of the fluxgate and are tightly arranged and wound at any position on the surface of the side wall of the cylinder; the exciting coil and the induction coil are required to be arranged closely to avoid signal mutual interference; at the intersection of the exciting coil and the induction coil, the induction coil is closer to the magnetic core of the fluxgate, and the exciting coil is arranged on the outer side; the TMR sensor is fixed at the center of the inner wall of the magnetic core of the fluxgate by using a non-magnetic substrate, and a sensitive shaft of the TMR sensor is arranged in parallel with the axis of the magnetic core of the fluxgate;
under the action of an external excitation signal, the induction coil outputs an induction electric signal related to a low-frequency magnetic field, and the TMR sensor outputs an induction electric signal related to a high-frequency magnetic field, so that broadband measurement of the vector magnetic field is realized.
2. The wide band inductive magnetic field sensor of claim 1, wherein the low frequency magnetic field measurement is performed by a fluxgate sensor assembly comprising an excitation coil, an induction coil, and a fluxgate magnetic core; and an audio-frequency sinusoidal or square wave excitation signal is introduced into the excitation coil, the magnetic induction intensity of the magnetic core of the fluxgate is modulated by the excitation signal, the modulated magnetization intensity is collected by the induction coil, and the induction coil outputs an electric signal which is synchronously changed with the magnetization intensity on the magnetic core of the fluxgate.
3. The wide band inductive magnetic field sensor of claim 1 wherein the high frequency magnetic field measurement is performed by a TMR sensor assembly, the TMR sensor assembly comprising an excitation coil, a fluxgate magnetic core, and a TMR sensor; the TMR sensor is internally provided with a Venturi bridge formed by 4 groups of magneto-resistive devices, the resistance of the magneto-resistive devices changes along with the change of the induction intensity of a magnetic field in the axial direction of the magneto-resistive devices, and the output of the TMR sensor is voltage which linearly changes along with the magnetic field; under the excitation of the exciting coil, the flux gate magnetic core pair generates magnetic flux gathering effect around the TMR sensor and modulates the magnetic field.
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| CN110441718A (en) * | 2019-07-31 | 2019-11-12 | 中国地质大学（武汉） | Broadband induction type magnetic field sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110441718A (en) * | 2019-07-31 | 2019-11-12 | 中国地质大学（武汉） | Broadband induction type magnetic field sensor |
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