CN210856324U - Workpiece frame compatible mechanism for vacuum chamber of film plating machine - Google Patents
Workpiece frame compatible mechanism for vacuum chamber of film plating machine Download PDFInfo
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- CN210856324U CN210856324U CN201921039276.5U CN201921039276U CN210856324U CN 210856324 U CN210856324 U CN 210856324U CN 201921039276 U CN201921039276 U CN 201921039276U CN 210856324 U CN210856324 U CN 210856324U
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Abstract
A workpiece holder compatible mechanism for a vacuum chamber of a film coating machine, the utility model discloses a hang the barrel and be movably connected with separable pinion and the meshing of the not moving gear dish at rotation center down, the state that the barrel has self rotation and has revolution around the furnace body center has been formed, make the product that depends on hanging the barrel surface obtain the ion sputtering membrane of target in the rotation, realize the arc product coating film, and the top of pinion runs through there is the stores pylon tray, the stores pylon tray has a plurality of groups around placing the stores pylon in the periphery of hanging the barrel, the equidistance is in the distance of hanging the barrel and target, and the bottom of stores pylon is connected with the rotation gear mechanism, according to the principle of stores pylon, realized the compatibility of the product coating film of the plate shape and arc product coating film, when the flat plate coating film, as long as to take off the barrel, install the; when the arc surface product is plated, the flat plate hanging rack is taken down and the barrel is arranged, so that the multipurpose of one furnace is realized, the initial investment is effectively reduced, the limited equipment is enabled, and the requirements of the changed market on different products are better met.
Description
Technical Field
The utility model relates to a work rest field of coating machine, more specifically say, especially relate to a work rest compatible mechanism for real empty room of coating machine.
Background
At present, with the rapid development of mobile phone, cosmetics, optics and photoelectron industries, a plurality of elements with irregular shapes, such as arc-shaped products, sheet-shaped products and the like, generally, the film coating machine commonly used at present only can carry out film coating on the sheet-shaped products or only can carry out film coating on the arc-shaped products.
When the existing film plating machine is used for magnetron sputtering film plating, the barrel-shaped hanging frame and the sheet-shaped hanging frame are carried out in two furnaces and are not universal, one furnace is bought, the number of the furnaces is hundreds of thousands, the equipment investment cost of an enterprise is large, and the existing film plating machine is not beneficial to being suitable for different product requirements of the market.
SUMMERY OF THE UTILITY MODEL
The utility model discloses improve prior art to above-mentioned shortcoming, provide a compatible mechanism of work rest for the real empty room of coating machine, technical scheme is as follows:
a workpiece holder compatible mechanism for a vacuum chamber of a film coating machine comprises a furnace body, wherein a film coating furnace chamber is arranged in the furnace body, a revolution plate rotating mechanism and a rotation gear mechanism are arranged in the film coating furnace chamber, a target is connected to one side of the inner wall, the revolution plate rotating mechanism is connected to the bottom of the inner side of the furnace body and comprises a chassis fixedly connected with the furnace body, a plurality of groups of first supporting columns are uniformly arranged and connected above the chassis, a plurality of groups of fixed large fluted discs are connected with the first supporting columns, a plurality of groups of small gears are uniformly engaged around the periphery of the fixed large fluted discs to form a planetary gear mechanism, the bottom centers of the small gears extend through the revolution plate, the top centers of the small gears extend through a hanger tray, fixed holes are formed in the top end faces of the small gears, a hanging barrel is arranged through the fixed holes, and can rotate above the small gears, the outer peripheral edge of the hanging rack tray is provided with a hanging rack assembly in a penetrating mode, the bottom end of the hanging rack assembly is connected with a self-rotating gear mechanism, and the distance between the outer side of the hanging rack assembly and the target material is consistent with the distance between the outer periphery of the hanging barrel and the target material.
The rotation gear mechanism is arranged between the bottom of the inner side of the furnace body and the chassis and comprises a rotation cylinder, the rotation cylinder is fixedly embedded in the bottom of the outer side of the furnace body, a rotation shaft of the rotation cylinder penetrates through the furnace body and is arranged inside the film coating furnace chamber, the rotation shaft of the rotation cylinder is connected with a crank rocker mechanism, the other end of the crank rocker mechanism is connected with a guide slider, a guide rail is connected to the lower portion of the guide slider, the guide rail is fixedly connected to the bottom of the inner side of the furnace body, a rack is fixedly connected to the upper portion of the guide slider and meshed with the rotation gear, the bottom of the hanger assembly is arranged in a rotation gear sleeve, and the rotation positioner is fixedly arranged on the upper portion of the rotation gear in a.
Furthermore, the hanger component comprises a hanger, and a rotation lower shaft and a positioning upper shaft which are connected to two ends of the hanger, wherein the rotation upper shaft is movably arranged above the hanger in a penetrating manner, a rotation positioner and a rotation gear meshed with the rack are sequentially arranged below the hanger in a penetrating manner from top to bottom through the rotation lower shaft, so that the hanger performs limiting rotation, and the hanger is arranged corresponding to the target.
Furthermore, the rotation cylinder rotates 180 degrees to drive the crank rocker mechanism to transmit the motion to the sliding block through the rocker, the sliding block is provided with a rack which can enable the rotation gear to rotate 180 degrees enough, the rack is meshed with the rotation gear during revolution to drive the hanger with the product to rotate to realize turnover, the upper end of the gear is provided with a rotation positioner which is an abrasive disc, the abrasive disc is fixedly connected with a rotation lower shaft through a flat key and is pressed on the upper surface of the rotation gear under the action of gravity, when the rotation angle of the shaft is more than 180 degrees, the pin is used for limiting, the abrasive disc slips to achieve the purpose of accurate turnover, after the turnover is finished, the rotation cylinder rotates reversely, the sliding block returns, the hanging frame keeps still, the purpose of re-plating the other surface to turn over is realized, and the purpose of repeatedly plating films can be realized.
The two ends of the hanging barrel are respectively connected with an autorotation lower shaft and a positioning upper shaft, the upper part of the hanging barrel movably penetrates through the revolution upper plate through the positioning upper shaft, and the lower part of the hanging barrel is movably connected with a pinion through the autorotation lower shaft.
The bottom of the revolution plate is fixedly connected with a transmission gear, the lower part of the transmission gear can be rotatably connected with the chassis, the upper part of the transmission gear is connected with the rack tray through second support columns which are uniformly arranged, the top end surface of the rack tray is connected with a revolution upper plate through a revolution support rod, and a plurality of groups of rack assemblies are detachably connected between the revolution upper plate and the rack tray.
The top end of the inner side of the furnace body is provided with an upper supporting seat in an extending way corresponding to the center of the revolution upper disc and is movably connected with the revolution upper disc.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a hang the barrel under the swing joint have separable pinion and the meshing of the not moving gear dish at rotation center, it has the state of revolution again around the furnace body center to have self rotation to have formed the bucket, make the product that depends on hanging the barrel surface obtain the ion sputtering membrane of target in rotatory, realize arc product coating film, and the top of pinion runs through there is the stores pylon tray, the stores pylon tray has a plurality of groups around placing the stores pylon in the periphery of hanging the barrel, the equidistance is in the distance of hanging barrel and target, and the stores pylon tray can realize the revolution when the pinion rotates, the bottom of stores pylon is connected with the rotation gear mechanism, according to the principle of stores pylon, the compatibility of dull and stereotyped product coating film and cambered surface product coating film has been realized, when dull and stereotyped coating film, as long as to take off the bucket; when the arc surface product is plated, the flat plate hanging rack is taken down and the barrel is arranged, so that the multipurpose of one furnace is realized, the initial investment is effectively reduced, the limited equipment is enabled, and the requirements of the changed market on different products are better met.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described as follows:
FIG. 1 is a schematic view of the full-section structure of the present invention;
FIG. 2 is a partially enlarged perspective view of the present invention;
FIG. 3 is a top view of the present invention;
fig. 4 is a front view of the present invention;
fig. 5 is a perspective view of the present invention
The method comprises the following steps: the device comprises a furnace body 1, an upper supporting seat 2, a fixing hole 3, a hanging barrel 4, a revolution upper disc 5, a positioning upper shaft 6, a revolution supporting rod 8, a rotation lower shaft 9, a rotation positioner 10, a rotation gear 11, a rack 12, a guide rail 13, a slide block 14, a rocker 15, a rotary cylinder 16, a crank-rocker mechanism 17, a film coating furnace chamber 18, a hanger component 19, a target 20, a revolution disc rotating mechanism 21, a rotation gear mechanism 22, a chassis 23, a first supporting column 24, a fixed big fluted disc 25, a small gear 26, a revolution disc 27, a hanger tray 28, a transmission gear 29, a second supporting column 30 and a hanger 32.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiment of the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Embodiments of the present invention will be described in further detail below with reference to the following drawings, in which:
a workpiece holder compatible mechanism for a vacuum chamber of a film coating machine comprises a furnace body 1, a film coating furnace chamber 18 is arranged in the furnace body 1, a revolution disc rotating mechanism 21 and a rotation gear mechanism 22 are arranged in the film coating furnace chamber 18, a target material 20 is connected to one side of the inner wall, the revolution disc rotating mechanism 21 is connected to the bottom of the inner side of the furnace body 1 and comprises a chassis 23 fixedly connected with the furnace body 1, a plurality of groups of first supporting columns 24 are uniformly arranged and connected above the chassis 23, a plurality of groups of fixed big fluted discs 25 are connected with the first supporting columns 24, a plurality of groups of small gears 26 are uniformly engaged around the periphery of the fixed big fluted discs 25 to form a planetary gear mechanism, the centers of the bottoms of the small gears 26 are respectively penetrated through a revolution disc 27 in an extending way, the centers of the top ends are respectively penetrated through a hanger tray 28, fixed holes 3 are respectively arranged on the top end surfaces of, the hanging barrel 4 is rotatably arranged above the pinion 26 in a penetrating way, the peripheral edge of the hanging bracket tray 28 is provided with a hanging bracket assembly 19 in a penetrating way, the bottom end of the hanging bracket assembly 19 is connected with a self-rotating gear mechanism 22, and the distance between the outer side of the hanging bracket assembly 19 and the target 20 is consistent with the distance between the periphery of the hanging barrel 4 and the target 20.
The rotation gear mechanism 22 is arranged between the inner bottom of the furnace body 1 and the chassis 23, and comprises a rotation cylinder 16, the rotation cylinder 16 is fixedly embedded in the outer bottom of the furnace body 1, a rotation shaft of the rotation cylinder passes through the furnace body 1 and is arranged inside the film coating furnace chamber 18, the rotation shaft of the rotation cylinder 16 is connected with a crank rocker mechanism 17, the other end of the crank rocker mechanism 17 is connected with a guide slider 14, a guide rail 13 is connected below the guide slider 14, the guide rail 13 is fixedly connected to the inner bottom of the furnace body 1, a rack 12 is fixedly connected above the guide slider 14, the rack 12 is meshed with the rotation gear 11, the rotation gear 11 is sleeved at the bottom end of the hanger assembly 19, and the hanger assembly 19 is fixedly provided with the rotation positioner 10 above the rotation gear 11.
The hanger assembly 19 comprises a hanger 32, and a rotation lower shaft 9 and a positioning upper shaft 6 connected to two ends of the hanger 32, wherein the upper part of the hanger 32 is movably arranged on the revolution upper disc 5 through the positioning upper shaft 6, the lower part of the hanger 32 is sequentially arranged with a rotation positioner 10 and a rotation gear 11 engaged with the rack 12 from top to bottom through the rotation lower shaft 9, so that the hanger 32 performs limited rotation, and the hanger 32 is arranged corresponding to the target 20.
Further, the rotary cylinder 16 rotates 180 degrees to drive the crank rocker mechanism 17 to transmit the motion to the slide block 14 through the rocker 15, the slide block 14 is provided with a rack 12 which can enable the rotation gear 11 to rotate 180 degrees enough, during revolution, the rack 12 is meshed with the rotation gear 11 to drive the hanger with the product to rotate to realize turnover, the upper end of the gear is provided with a rotation positioner 10, the rotation positioner 10 is a friction disc, the friction disc is fixedly connected with the rotation lower shaft 9 through a flat key and is pressed on the upper surface of the rotation gear 11 under the action of gravity, when the rotation angle of the shaft is more than 180 degrees, the friction disc is limited by a pin and slides to achieve the purpose of accurate turnover, after the turnover is finished, the rotary cylinder 16 rotates reversely, the slide block 14 retracts, the hanging frame 32 keeps motionless to realize the purpose of re-plating the other surface, and can realize the purpose of repeatedly turning over and plating the film for many times
Two ends of the hanging barrel 4 are respectively connected with a rotation lower shaft 9 and a positioning upper shaft 6, the upper part of the hanging barrel 4 is movably arranged on the revolution upper plate 5 through the positioning upper shaft 6, and the lower part of the hanging barrel 4 is movably connected with a pinion 26 through the rotation lower shaft 9.
The bottom of the revolution disc 27 is fixedly connected with a transmission gear 29, the lower part of the transmission gear 29 can be rotatably connected with the chassis 23, the upper part is connected with a hanger tray 28 through second support columns 30 which are uniformly arranged, the top end surface of the hanger tray 28 is connected with a revolution upper disc 5 through a revolution support rod 8 in a surrounding manner, and a plurality of groups of hanger assemblies 19 are detachably connected between the revolution upper disc 5 and the hanger tray 28.
The top end of the inner side of the furnace body 1 is provided with an upper supporting seat 2 corresponding to the center of the upper revolution disc 5 in an extending way and is movably connected with the upper revolution disc 5 through the upper supporting seat.
Taking the working principle combined with the structure as an example, the lower part of the hanging barrel 4 of the utility model is movably connected with the separable pinion 26 which is meshed with the fixed gear plate at the rotating center, thereby forming the state that the barrel rotates and revolves around the center of the furnace body 1, so that the product attached on the surface of the hanging barrel 4 can obtain the ion sputtering film of the target material 20 in the rotating process, realizing the film coating of the arc-shaped product, the top end of the pinion 26 is penetrated with a rack tray 28, the rack tray 28 is provided with a plurality of groups of racks 32 around the periphery of the hanging barrel 4, the distance between the hanging barrel 4 and the target 20 is equal, the rack tray 28 can realize revolution when the pinion 26 rotates, the bottom end of the rack 32 is connected with the rotation gear mechanism 22, the compatibility of the plate-shaped product coating and the arc-shaped product coating is realized according to the principle of the rack 32, and when the plate coating is carried out, only a barrel needs to be taken down and the plate rack 32 needs to be installed; when the arc surface product is plated, the flat plate hanging frame 32 is taken down and the barrel is arranged, so that the multipurpose of one furnace is realized, the initial investment is effectively reduced, the limited equipment is enabled, and the requirements of the changed market on different products are better met.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a compatible mechanism of work rest for real empty room of coating machine, is equipped with coating film furnace chamber (18) including furnace body (1) in this furnace body (1), its characterized in that: a revolution plate rotating mechanism (21) and a rotation gear mechanism (22) are arranged inside the film coating furnace chamber (18), a target (20) is connected to one side of the inner wall, the revolution plate rotating mechanism (21) is connected to the bottom of the inner side of the furnace body (1) and comprises a chassis (23) fixedly connected with the furnace body (1), a plurality of groups of first supporting columns (24) are uniformly arranged and connected above the chassis (23) and are connected with a fixed big fluted disc (25) through the first supporting columns (24), a plurality of groups of small gears (26) are uniformly engaged around the periphery of the fixed big fluted disc (25) to form a planetary gear mechanism, the centers of the bottom of the small gears (26) are all penetrated through the revolution plate (27) through extension, the centers of the top ends are all penetrated through a hanger tray (28), fixing holes (3) are all formed in the top end face of the small gears (26), and hanging buckets (4) are penetrated through the fixing holes (3), the hanging barrel (4) is rotatably arranged above the pinion (26) in a penetrating mode, a hanging rack assembly (19) is arranged around the periphery of the hanging rack tray (28) in a penetrating mode, the bottom end of the hanging rack assembly (19) is connected with a rotation gear mechanism (22), and the distance between the outer side of the hanging rack assembly (19) and the target (20) is consistent with the distance between the periphery of the hanging barrel (4) and the target (20).
2. The workpiece holder compatibility mechanism for a vacuum chamber of a coater of claim 1 further comprising: the rotation gear mechanism (22) is arranged between the bottom of the inner side of the furnace body (1) and the chassis (23), which comprises a rotary cylinder (16), the rotary cylinder (16) is fixedly embedded at the bottom of the outer side of a furnace body (1), the rotating shaft of the rotary cylinder (16) penetrates through the furnace body (1) and is arranged in the coating furnace chamber (18), the rotating shaft of the rotary cylinder (16) is connected with a crank rocker mechanism (17), the other end of the crank rocker mechanism (17) is connected with a guide sliding block (14), a guide rail (13) is connected below the guide sliding block (14), the guide rail (13) is fixedly connected with the bottom of the inner side of the furnace body (1), a rack (12) is fixedly connected above the guide sliding block (14), the rack (12) is meshed with a rotation gear (11), the rotation gear (11) is sleeved at the bottom end of the hanger component (19), and the hanging rack assembly (19) is fixedly provided with a rotation positioner (10) above the rotation gear (11) in a penetrating way.
3. A workpiece holder compatibility mechanism for a vacuum chamber of a coater as defined in claim 1 or claim 2 wherein: the hanger assembly (19) comprises a hanger (32), and a rotation lower shaft (9) and a positioning upper shaft (6) which are connected to two ends of the hanger (32), wherein the rotation upper shaft (5) is movably arranged above the hanger (32) in a penetrating manner through the positioning upper shaft (6), a rotation positioner (10) and a rotation gear (11) meshed with a rack (12) are sequentially arranged below the hanger (32) in a penetrating manner from top to bottom through the rotation lower shaft (9), so that the hanger (32) performs limiting rotation, and the hanger (32) is arranged corresponding to a target (20).
4. The workpiece holder compatibility mechanism for a vacuum chamber of a coater of claim 1 further comprising: the two ends of the hanging barrel (4) are respectively connected with a rotation lower shaft (9) and a positioning upper shaft (6), the upper part of the hanging barrel (4) is movably arranged on the revolution upper plate (5) through the positioning upper shaft (6), and the lower part of the hanging barrel (4) is movably connected with a pinion (26) through the rotation lower shaft (9).
5. The workpiece holder compatibility mechanism for a vacuum chamber of a coater of claim 1 further comprising: the bottom of the revolution plate (27) is fixedly connected with a transmission gear (29), the lower part of the transmission gear (29) can be rotatably connected with a chassis (23), the upper part of the transmission gear is connected with a hanger tray (28) through second support columns (30) which are uniformly arranged, the top end surface of the hanger tray (28) is connected with a revolution upper tray (5) through a revolution support rod (8), and a plurality of groups of hanger assemblies (19) are detachably connected between the revolution upper tray (5) and the hanger tray (28).
6. The workpiece holder compatibility mechanism for a vacuum chamber of a coater of claim 1 further comprising: the top end of the inner side of the furnace body (1) is provided with an upper supporting seat (2) corresponding to the center of the revolution upper disc (5) in an extending way, and is movably connected with the revolution upper disc (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921039276.5U CN210856324U (en) | 2019-07-05 | 2019-07-05 | Workpiece frame compatible mechanism for vacuum chamber of film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921039276.5U CN210856324U (en) | 2019-07-05 | 2019-07-05 | Workpiece frame compatible mechanism for vacuum chamber of film plating machine |
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| CN210856324U true CN210856324U (en) | 2020-06-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201921039276.5U Active CN210856324U (en) | 2019-07-05 | 2019-07-05 | Workpiece frame compatible mechanism for vacuum chamber of film plating machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150280A (en) * | 2021-10-26 | 2022-03-08 | 南阳清水科技有限公司 | Automatic turnover device for drum type magnetron sputtering machine |
| CN115558899A (en) * | 2022-10-19 | 2023-01-03 | 中国人民解放军陆军装甲兵学院士官学校 | Special composite rotating rack for ion sputtering coating machine and use method thereof |
| CN117305800A (en) * | 2023-11-29 | 2023-12-29 | 长沙正圆动力科技有限责任公司 | Piston ring coating machine with multidimensional rotating frame |
-
2019
- 2019-07-05 CN CN201921039276.5U patent/CN210856324U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114150280A (en) * | 2021-10-26 | 2022-03-08 | 南阳清水科技有限公司 | Automatic turnover device for drum type magnetron sputtering machine |
| CN114150280B (en) * | 2021-10-26 | 2023-09-29 | 南阳清水科技有限公司 | Automatic overturning device for drum type magnetron sputtering machine |
| CN115558899A (en) * | 2022-10-19 | 2023-01-03 | 中国人民解放军陆军装甲兵学院士官学校 | Special composite rotating rack for ion sputtering coating machine and use method thereof |
| CN117305800A (en) * | 2023-11-29 | 2023-12-29 | 长沙正圆动力科技有限责任公司 | Piston ring coating machine with multidimensional rotating frame |
| CN117305800B (en) * | 2023-11-29 | 2024-02-13 | 长沙正圆动力科技有限责任公司 | Piston ring coating machine with multidimensional rotating frame |
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