CN210830755U

CN210830755U - Throttling refitting device for silicon wafer cleaning pipeline

Info

Publication number: CN210830755U
Application number: CN201921642971.0U
Authority: CN
Inventors: 李伟; 戴磊; 王波波; 吴斌华; 夏康; 蓝希旺
Original assignee: Zhonggan New Energy Co ltd
Current assignee: Zhonggan New Energy Co ltd
Priority date: 2019-09-29
Filing date: 2019-09-29
Publication date: 2020-06-23
Anticipated expiration: 2029-09-29

Abstract

The utility model relates to a silicon chip production auxiliary device technical field just discloses silicon chip washs throttle repacking device of pipeline, including the locating lever, the upper portion fixedly connected with punch holder of locating lever one side, the lower part fixedly connected with lower plate of punch holder, the positive lower part fixedly connected with nut of lower plate, the positive upper portion fixedly connected with nut of punch holder is one, the middle part fixedly connected with spliced pole one of lower plate lower part, the lower part fixedly connected with connecting device one of spliced pole. This throttle repacking device of silicon chip washing pipeline is fixed it through nut four between outlet pipe one and outlet pipe two for its stability between the in-process of leading to water is guaranteed to it, prevents the phenomenon of leaking, installs simultaneously between rivers passageway one and rivers passageway two, and the throttle piece device makes its in-process that uses change the flow of its rivers, reduces its velocity of flow, makes it play the effect of damming, makes its resources are saved.

Description

Throttling refitting device for silicon wafer cleaning pipeline

Technical Field

The utility model relates to a silicon chip production auxiliary device technical field specifically is throttling modification device of silicon chip washing pipeline.

Background

The water resource is an indispensable part in our life, is also an indispensable part in the course of its industrial production, and for this reason we need the using water wisely, and in the production process of silicon chip, it needs to wash its silicon chip of producing through rivers, but its water pressure of common washing pipeline is great, and the waste of water resource is more when making it wash for this reason designs a novel throttle repacking device of silicon chip washing pipeline.

In the existing throttling refitting device for cleaning the pipeline by the silicon wafer, when the throttling refitting device is used, the water pressure of water flow is high, so that water resources are wasted when the throttling refitting device is used, in the process of installing and fixing the cleaning pipeline, a fixing clamp of the throttling refitting device is damaged under the action of a water pipe and the water pressure, and the whole throttling refitting device is frequently required to be replaced, so that the resources are wasted and the operation is inconvenient.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough to prior art, the utility model provides a throttle repacking device of silicon chip washing pipeline possesses the convenient advantage of change, has solved when it uses, and the water pressure of its rivers is great, makes its extravagant water resource when using, and is wasing the fixed in-process of piping erection to it, and its fixation clamp can make it damage because under water service pipe and hydraulic effect, often sees to need to change whole device changing, makes its extravagant resource and the inconvenient problem of operation.

The utility model provides a following technical scheme: the throttling modification device for the silicon wafer cleaning pipeline comprises a positioning rod, wherein an upper clamping plate is fixedly connected to the upper portion of one side of the positioning rod, a lower clamping plate is fixedly connected to the lower portion of the upper clamping plate, a nut is fixedly connected to the lower portion of the front side of the lower clamping plate, a first connecting column is fixedly connected to the middle portion of the lower clamping plate, a first connecting device is fixedly connected to the lower portion of the first connecting column, a second connecting column is fixedly connected to the lower portion of the first connecting device, a clamping plate is fixedly connected to the lower portion of the second connecting column, a first water outlet pipe is fixedly connected to the inner portion of the clamping plate, a first water flow channel is formed in the first water outlet pipe, a second connecting device is fixedly connected to the other side of the first water outlet pipe, a second water outlet pipe is, the lower part of the second water outlet pipe is fixedly connected with a cleaning pipe, a cleaning pipe water outlet is formed in the lower side of the cleaning pipe, one side of the inside of the cleaning pipe is fixedly connected with a waterproof gasket, and the other side of the waterproof gasket is connected with a water flow channel II.

Preferably, the first connecting device comprises a third connecting column, the first waterproof gasket is fixedly connected with a first threaded baffle plate outside, the lower portion of the third connecting column is fixedly connected with the upper portion of the second connecting column, and a second threaded baffle plate is fixedly connected with a second nut outside.

Preferably, the second connecting column comprises a lower connecting column, the lower portion of the lower connecting column is fixedly connected to the upper portion of the clamping plate, a second threaded baffle is fixedly connected to the outer portion of the lower connecting column, and the second threaded baffle is connected with the second nut in a matched mode.

Preferably, the connecting device II comprises a third threaded baffle, a first lower part of the third threaded baffle is fixedly connected with a first water outlet pipe, a fourth opposite side of the third threaded baffle is fixedly connected with a fourth threaded baffle, a fourth external fixedly connected with nut of the fourth threaded baffle is provided with a thread, a throttling piece is placed on one side of the lower part of the second water outlet pipe, and a throttling piece fixing frame is fixedly connected with the other side of the inner part of the first water outlet pipe.

Preferably, a bulge is arranged on one side inside the cleaning pipe, and the hollow inside of the cleaning pipe is communicated with the water flow channel II.

Preferably, the waterproof gasket is fixed between the second water flow channel and a crack between the cleaning pipes.

Compared with the prior art, the utility model discloses possess following beneficial effect:

1. this throttle repacking device of silicon chip washing pipeline is fixed it through nut four between outlet pipe one and outlet pipe two for its stability between the in-process of leading to water is guaranteed to it, prevents the phenomenon of leaking, installs simultaneously between rivers passageway one and rivers passageway two, and the throttle piece device makes its in-process that uses change the flow of its rivers, reduces its velocity of flow, makes it play the effect of damming, makes its resources are saved.

2. The throttling refitting device for the silicon wafer cleaning pipeline fixes the threaded baffle plate I by mounting the nut II outside the threaded baffle plate I, in the later use process, under the action of the gravity of the first water outlet pipe and the impact force of water flow, the upper clamping plate and the screw cap, so that the upper splint and the lower splint bear larger force, the lower splint is easy to damage, in the common device, when the lower clamping plate is damaged, the upper clamping plate, the lower clamping plate, the screw cap, the first nut, the first connecting column, the first connecting device and the clamping plate need to be integrally replaced, so that the resources are wasted, the operation is inconvenient, through the external mounting nut two at screw thread baffle one, and make it fixed with device screw thread baffle two, make it when later stage punch holder or lower plate damage, need change device punch holder and lower plate can, easy operation and resources are saved.

Drawings

FIG. 1 is a schematic view of the structure of the present invention;

FIG. 2 is an enlarged schematic view of a structural connection device of the present invention;

fig. 3 is an enlarged schematic view of the second structural connection device of the present invention.

In the figure: 1. positioning a rod; 2. an upper splint; 3. a lower splint; 4. a nut; 5. a first nut; 6. connecting a column I; 7. a first connecting device; 71. connecting a column III; 72. a first threaded baffle; 73. a second nut; 8. Connecting a second column; 81. a lower connecting column; 82. a second threaded baffle; 9. a splint; 10. a first water outlet pipe; 11. A first water flow channel; 12. a second connecting device; 121. a thread baffle plate III; 122. a thread baffle plate IV; 123. A fourth nut; 124. a throttle plate; 125. a throttle plate holder; 13. a water outlet pipe II; 14. a water flow channel II; 15. cleaning the tube; 16. a water outlet of the cleaning pipe; 17. waterproof gasket.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the throttling modification device for the silicon wafer cleaning pipeline comprises a positioning rod 1, an upper clamping plate 2 is fixedly connected to the upper portion of one side of the positioning rod 1, a lower clamping plate 3 is fixedly connected to the lower portion of the upper clamping plate 2, a nut 4 is fixedly connected to the lower portion of the front side of the lower clamping plate 3, a nut one 5 is fixedly connected to the upper portion of the front side of the upper clamping plate 2, a first connecting column 6 is fixedly connected to the middle portion of the lower clamping plate 3, a first connecting device 7 is fixedly connected to the lower portion of the first connecting column 6, a second connecting column 8 is fixedly connected to the lower portion of the first connecting device 7, a clamping plate 9 is fixedly connected to the lower portion of the second connecting column 8, a first water outlet pipe 10 is fixedly connected to the inner portion of the clamping plate 9, a water flow channel II 14 is formed in the middle of the other side of the connecting device II 12, a cleaning pipe 15 is fixedly connected to the lower portion of the water outlet pipe II 13, a cleaning pipe water outlet 16 is formed in the lower side of the cleaning pipe 15, a waterproof gasket 17 is fixedly connected to one side of the inner portion of the cleaning pipe 15, and the other side of the waterproof gasket 17 is connected with the water flow channel II 14.

Wherein, the connecting device I7 comprises a connecting column III 71, a thread baffle plate I72 is fixedly connected to the outer part of the waterproof gasket 17, the lower part of the connecting column III 71 is fixedly connected with the upper part of a connecting column II 8, a nut II 73 is fixedly connected to the outer part of the thread baffle plate I72, the thread baffle plate I72 is fixed by the thread baffle plate I72 through the nut II 73 arranged on the outer part of the thread baffle plate I72, the upper clamping plate 2 and the nut 4 bear larger force under the action of gravity of the water outlet pipe I10 and impact force of water flow in the later use process, so that the upper clamping plate 2 and the lower clamping plate 3 are easy to damage, in a common device, the upper clamping plate 2, the lower clamping plate 3, the nut 4, the nut I5, the connecting column I6, the connecting device I7 and the clamping plate 9 need to be integrally replaced when the lower clamping plate 3 is damaged, so that resources are wasted and the, the second nut 73 is arranged outside the first threaded baffle 72, and the second threaded baffle 82 is fixed, so that the upper clamping plate 2 and the lower clamping plate 3 need to be replaced when the upper clamping plate 2 or the lower clamping plate 3 is damaged in the later period, and the operation is simple and resources are saved.

Wherein, spliced pole two 8 is including lower spliced pole 81, and the lower part fixed connection of lower spliced pole 81 is on the upper portion of splint 9, the outside fixedly connected with screw thread baffle two 82 of lower spliced pole 81, and screw thread baffle two 82 is connected with the cooperation of nut two 73, just be connected with the cooperation of screw thread baffle two 82 through nut two 73, make its device spliced pole one 6 and spliced pole two 8 fixed, make its device outlet pipe one 10 fix on locating lever 1, make its device keep fixed, prevent that device outlet pipe one 10 is in the use, the impact force through rivers is with its skew, it influences abluent efficiency to change the washing angle.

Wherein, the second connecting device 12 comprises a third threaded baffle 121, the lower part of the third threaded baffle 121 is fixedly connected with a first water outlet pipe 10, the other side of the third threaded baffle 121 is fixedly connected with a fourth threaded baffle 122, the outer part of the fourth threaded baffle 122 is fixedly connected with a fourth nut 123, and the screw thread is arranged inside the nut IV 123, one side of the lower part of the water outlet pipe II 13 is provided with a throttling sheet 124, the other side inside the water outlet pipe I10 is fixedly connected with a throttling sheet fixing frame 125, the water outlet pipe I10 and the water outlet pipe II 13 are fixed by the nut IV 123, so that the stability of the water outlet pipe I and the water outlet pipe II is ensured in the water passing process, the water leakage phenomenon is prevented, and a throttle plate 124 device is arranged between the first water flow channel 11 and the second water flow channel 14, the flow of the water flow is changed in the using process, the flow speed is reduced, the flow-stopping effect is achieved, and resources are saved.

Wherein, there is the arch one side inside the scavenge pipe 15, and the scavenge pipe 15 is inside hollow to link up with rivers passageway two 14, keeps hollow through the inside of scavenge pipe 15, and runs through with rivers passageway two 14, makes its rivers advance the scavenge pipe 15 through rivers passageway two 14 and go out the outflow from scavenge pipe delivery port 16, makes it wash the silicon chip.

The waterproof gasket 17 is fixed between a crack between the second water flow channel 14 and the cleaning pipe 15, and the waterproof gasket 17 device is installed through the crack between the second water flow channel 14 and the cleaning pipe 15 and has certain waterproof performance, so that the airtightness inside the device is ensured, and water leakage is prevented.

The working principle is as follows: when the silicon wafer cleaning device is used, the first water outlet pipe 10 and the second water outlet pipe 13 enter the fourth nut 123 to be fixed, the fourth nut 123 is installed inside the water outlet pipe 10, the first water outlet pipe 10 is fixed inside the clamping plate 9 and is fixed below the first connecting device 7 through the second connecting column 8, the upper clamping plate 2 and the lower clamping plate 3 are fixed outside the positioning rod 1 through the nut 4, the first water outlet pipe 10 and the second water outlet pipe 13 are kept fixed in position, water is introduced to one side of the first water flow channel 11, the water flows through the fourth nut 123 to block the water flow, the water flow is saved, the water flows into the second water flow channel 14 after passing through the fourth nut 123, the water flow inside the second water flow channel 14 flows out from the water outlet 16 of the cleaning pipe through the cleaning pipe 15 to clean a silicon wafer, when the upper clamping plate 2 and the lower clamping plate 3 are damaged, the inside of the second connecting column 8 only needs to be loosened, the upper splint 2 and the lower splint 3 can be replaced.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Also in the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and for simplicity of description, and do not indicate or imply that the equipment or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In addition, in the drawings of the present invention, the filling pattern is only for distinguishing the pattern layer, and is not limited to any other pattern.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Throttling modification device of silicon chip washing pipeline, including locating lever (1), its characterized in that: the upper portion of one side of the positioning rod (1) is fixedly connected with an upper clamping plate (2), the lower portion of the upper clamping plate (2) is fixedly connected with a lower clamping plate (3), the lower portion of the lower clamping plate (3) is fixedly connected with a nut (4), the upper portion of the upper clamping plate (2) is fixedly connected with a nut I (5), the middle portion of the lower clamping plate (3) is fixedly connected with a connecting column I (6), the lower portion of the connecting column I (6) is fixedly connected with a connecting device I (7), the lower portion of the connecting device I (7) is fixedly connected with a connecting column II (8), the lower portion of the connecting column II (8) is fixedly connected with a clamping plate (9), the inner portion of the clamping plate (9) is fixedly connected with a water outlet pipe I (10), a water flow channel I (11) is arranged inside the water outlet pipe I (10, the opposite side fixedly connected with outlet pipe two (13) of connecting device two (12), rivers passageway two (14) have been seted up at the middle part of connecting device two (12) opposite side, outlet pipe two (13) lower part fixedly connected with scavenge pipe (15), scavenge pipe delivery port (16) have been seted up to the downside of scavenge pipe (15), inside one side fixedly connected with waterproof gasket (17) of scavenge pipe (15), the opposite side of cutting waterproof gasket (17) is connected with rivers passageway two (14).

2. The throttle retrofit device for silicon wafer cleaning pipelines of claim 1, wherein: connecting device (7) is including spliced pole three (71), the outside fixedly connected with screw thread baffle of waterproof gasket (17) is one (72), and the lower part of spliced pole three (71) and the upper portion fixed connection of spliced pole two (8), the outside fixedly connected with nut two (73) of screw thread baffle one (72).

3. The throttle retrofit device for silicon wafer cleaning pipelines of claim 1, wherein: the second connecting column (8) comprises a lower connecting column (81), the lower portion of the lower connecting column (81) is fixedly connected to the upper portion of the clamping plate (9), a second threaded baffle (82) is fixedly connected to the outer portion of the lower connecting column (81), and the second threaded baffle (82) is connected with a second nut (73) in a matched mode.

4. The throttle retrofit device for silicon wafer cleaning pipelines of claim 1, wherein: connecting device two (12) is including threaded baffle three (121), the lower part fixedly connected with outlet pipe one (10) of threaded baffle three (121), the opposite side fixedly connected with threaded baffle four (122) of threaded baffle three (121), the outside fixedly connected with nut four (123) of threaded baffle four (122), just the screw is seted up to the inside of nut four (123), throttle plate (124) have been placed to one side of outlet pipe two (13) lower part, the inside opposite side fixedly connected with throttle plate mount (125) of outlet pipe one (10).

5. The throttle retrofit device for silicon wafer cleaning pipelines of claim 1, wherein: and a bulge is arranged on one side inside the cleaning pipe (15), and the hollow inside of the cleaning pipe (15) is communicated with the second water flow channel (14).

6. The throttle retrofit device for silicon wafer cleaning pipelines of claim 1, wherein: and the waterproof gasket (17) is fixed between a crack between the second water flow channel (14) and the cleaning pipe (15).