CN210805727U

CN210805727U - Conveying device

Info

Publication number: CN210805727U
Application number: CN201922407148.8U
Authority: CN
Inventors: 徐常恺
Original assignee: Shanghai Micro Electronics Equipment Co Ltd
Current assignee: Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2019-12-27
Filing date: 2019-12-27
Publication date: 2020-06-19
Anticipated expiration: 2029-12-27

Abstract

The utility model discloses a carrying device. The carrying device comprises a conveying mechanism and an expansion frame erected on the conveying mechanism; at least two material carrying discs are arranged on the expansion frame; the at least two material carrying disks are distributed along the vertical direction, the two material carrying disks are overlapped in the vertical direction, when the at least two material carrying disks only comprise the two material carrying disks, the two material carrying disks are partially overlapped in the vertical direction, the width of the at least two material carrying disks in the direction perpendicular to the forward moving direction of the carrying device can be reduced, and then when the extension frame is arranged, the width of the extension frame in the horizontal plane perpendicular to the forward moving direction of the carrying device can be reduced, so that the width of the carrying device in the horizontal plane perpendicular to the forward moving direction of the carrying device is reduced, namely the size of the carrying device is reduced, the carrying device can be better adapted to a narrow carrying channel, and the use range of the carrying device is expanded.

Description

Conveying device

Technical Field

The embodiment of the utility model provides a relate to mechanical transport technical field, especially relate to a handling device.

Background

In a semiconductor processing plant, space is at a premium and it is desirable to arrange as many processing tools as possible in a limited space. At this time, the carrying passage for carrying the materials becomes very narrow, and thus, the length and width of the carrying device are highly required. Fig. 1 is a schematic structural diagram of a conventional carrying device. As shown in fig. 1, the handling device comprises two material trays, on each of which one material 1 to be handled is placed. And two material carrying trays in the carrying device are horizontally arranged side by side, so that the width of the carrying device is large, and the carrying device is difficult to operate in a narrow carrying channel. Illustratively, when the material trays of the handling device are used for carrying cassettes and each handling device comprises two material trays placed side by side, the width of the handling device will reach around 900 mm. And the narrowest width of the conveying channel is generally less than 1.2m, so that the conveying device is difficult to operate in the conveying channel with the width of 1.2m and further cannot turn around, turn around and the like in the conveying channel.

SUMMERY OF THE UTILITY MODEL

The utility model provides a carrying device to reduce carrying device's width dimension, extension carrying device's application range.

In a first aspect, an embodiment of the present invention provides a carrying device, including a transportation mechanism and an extension frame erected on the transportation mechanism; at least two material carrying discs are arranged on the expansion frame; the at least two material carrying discs are distributed along a vertical direction, two material carrying discs are overlapped in the vertical direction in the at least two material carrying discs, and when the at least two material carrying discs only comprise two material carrying discs, the two material carrying discs are partially overlapped in the vertical direction.

Optionally, any said material tray overlaps with at least one said material tray in said vertical direction.

Optionally, in any two adjacent material carrying trays in the vertical direction, the upper material carrying tray is staggered in the same preset direction relative to the lower material carrying tray.

Optionally, the extension frame comprises a support frame, four casters and an electrical cabinet; the supporting frame comprises four supporting columns and a supporting plate fixed to the tops of the supporting columns, the four casters are respectively connected to the bottoms of the four supporting columns of the supporting frame, the transportation mechanism is fixed to the bottom of the supporting plate, and the electrical cabinet is vertically fixed to one side, close to the forward moving direction of the carrying device, of the top of the supporting plate;

the material carrying disc is arranged on the side face, far away from the positive moving direction, of the electrical cabinet.

Optionally, the width of the handling device in a horizontal plane perpendicular to the direction of forward movement is less than 0.7 meters.

Optionally, in a horizontal plane, a width of the electrical cabinet in a direction perpendicular to the forward moving direction is smaller than or equal to a width of the support plate in the direction perpendicular to the forward moving direction.

Optionally, in the vertical direction, a vertical distance between two adjacent material carrying trays is greater than a vertical height of the material to be carried.

Optionally, the handling device further comprises a robot arm fixed to the top of the electrical cabinet.

Optionally, the shortest vertical distance from the top of the electrical cabinet to the material carrying tray is greater than or equal to the vertical height of the material to be carried.

Optionally, the transport mechanism comprises an automated guided vehicle.

According to the technical scheme of the embodiment of the utility model, at least two material carrying discs are arranged on the expansion frame; the at least two material carrying disks are distributed along the vertical direction, the two material carrying disks are overlapped in the vertical direction, when the at least two material carrying disks only comprise the two material carrying disks, the two material carrying disks are partially overlapped in the vertical direction, the width of the at least two material carrying disks in the direction perpendicular to the forward moving direction of the carrying device can be reduced, and then when the extension frame is arranged, the width of the extension frame in the horizontal plane perpendicular to the forward moving direction of the carrying device can be reduced, so that the width of the carrying device in the horizontal plane perpendicular to the forward moving direction of the carrying device is reduced, namely the size of the carrying device is reduced, the carrying device can be better adapted to a narrow carrying channel, and the use range of the carrying device is expanded.

Drawings

FIG. 1 is a schematic structural diagram of a conventional carrying device;

fig. 2 is a schematic front structural view of a carrying device according to an embodiment of the present invention;

fig. 3 is a schematic side view of a carrying device according to an embodiment of the present invention;

fig. 4 is a front view of a carrying position of a carrying device according to an embodiment of the present invention;

fig. 5 is a top view of a conveying position of a conveying device according to an embodiment of the present invention.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

Fig. 2 is a schematic front structure diagram of a carrying device provided in an embodiment of the present invention, and fig. 3 is a schematic side structure diagram of a carrying device provided in an embodiment of the present invention. As shown in fig. 2 and 3, the carrying device includes a transport mechanism 110, an extension frame 120 mounted on the transport mechanism 110; at least two material carrying discs 121 are arranged on the expansion frame 120; the at least two material trays 121 are distributed along the vertical direction Z, two material trays 121 of the at least two material trays 121 are overlapped in the vertical direction Z, and when the at least two material trays 121 include only two material trays 121, the two material trays 121 are partially overlapped in the vertical direction Z.

In particular, the transport mechanism 110 may effect movement of the handling device. The transport mechanism 110 may be a trolley, for example, and movement of the handling device may be achieved by movement of the trolley. The extension frame 120 is used for extending the handling apparatus, so that the positions of the material tray 121 and the robot 130 in the handling apparatus satisfy the requirements of the handling apparatus when handling materials. One end of the material carrying plate 121 is fixed on the extension frame 120 for carrying the material. As shown in fig. 2 and 3, the width of the extension frame 120 in the horizontal plane perpendicular to the direction X in which the carrying device moves in the forward direction is greater than or equal to the width of the material tray 121 in the direction X in which the carrying device moves in the forward direction, so that one end of the material tray 121 is completely fixed to the extension frame 120, and the stability of the material tray 121 is ensured.

At least two material carrying trays 121 are arranged on the extension frame 120, so that a plurality of materials can be carried simultaneously, and the carrying efficiency is improved. In addition, at least two material carrying trays 121 are distributed along the vertical direction Z, and two material carrying trays 121 in the at least two material carrying trays 121 are overlapped in the vertical direction Z, so that the width of the at least two material carrying trays 121 in the direction X perpendicular to the forward movement direction of the carrying device can be reduced, and further, when the extension frame 120 is arranged, the width of the extension frame 120 in the horizontal plane perpendicular to the direction X perpendicular to the forward movement direction of the carrying device can be reduced, so that the width of the carrying device in the horizontal plane perpendicular to the direction X perpendicular to the forward movement direction of the carrying device is reduced, that is, the size of the carrying device is reduced, the carrying device is better adapted to a narrow carrying channel, and the use range of the carrying device is expanded.

Illustratively, when the material trays 121 of the carrying device are used for carrying cassettes, and there are two material trays 121, the two material trays 121 overlap in the vertical direction Z, and the width of the extension frame 120 perpendicular to the direction X in which the carrying device moves in the forward direction in the horizontal plane may be less than or equal to 0.7m when the material trays 121 are completely fixed on the extension frame 120, and the width of the extension frame 120 perpendicular to the direction X in which the carrying device moves in the forward direction in the horizontal plane may be reduced relative to the width of the two material trays in the horizontal plane up to 0.9m in the prior art.

It is noted that fig. 2 and 3 show, by way of example, that the handling device comprises two material trays 121, the two material trays 121 partially overlapping in the vertical direction Z. In other embodiments, the handling device may further comprise a plurality of material trays 121, at least two of which partially overlap in the vertical direction Z.

With continued reference to fig. 2 and 3, any of the item trays 121 overlaps with at least one of the item trays 121 in the vertical direction Z.

Specifically, overlapping of any material tray 121 and at least one material tray 121 in the vertical direction Z can reduce the width of the extension frame 120 in the horizontal plane perpendicular to the direction X in which the carrying device moves forward, so that the width of the carrying device in the horizontal plane perpendicular to the direction X in which the carrying device moves forward can be reduced, that is, the size of the carrying device is reduced, so that the carrying device can better adapt to a narrower carrying channel, and the use range of the carrying device is extended. For example, when the handling device comprises a plurality of material trays 121, one of the material trays 121 may be arranged to overlap with its adjacent material tray 121 in the vertical direction Z, and one of the material trays 121 may be arranged to overlap with its adjacent upper and lower material trays 121 in the vertical direction Z. In addition, a part of the material carrying tray 121 and the material carrying tray 121 adjacent to the part of the material carrying tray 121 can be overlapped in the vertical direction Z, and a part of the material carrying tray 121 and the physical carrying tray 121 adjacent to the part of the material carrying tray 121 are not overlapped in the vertical direction Z. Furthermore, the overlap of a partial material tray 121 with at least one material tray 121 in the vertical direction Z may be a partial overlap or a complete overlap. It is also possible to achieve a reduction in the width of the conveying device in the horizontal plane perpendicular to the direction X in which the conveying device is moved in the forward direction.

With continued reference to fig. 2 and 3, in any two material trays 121 adjacent to each other in the vertical direction Z, the upper material tray 121 is staggered in the same preset direction with respect to the lower material tray 121.

In particular, when the handling device comprises two material trays 121, fig. 2 and 3 exemplarily show that the upper material tray 121 is staggered in relation to the lower material tray 121 in a reverse direction perpendicular to the direction X in which the handling device is moved in the forward direction in the horizontal plane. When the carrying device comprises a plurality of material carrying trays 121, the material carrying trays 121 on the upper part can be staggered relative to the material carrying trays 121 on the lower part in a direction perpendicular to the direction X of the forward movement of the carrying device in the horizontal plane, so that the material carrying trays 121 are sequentially arranged in the direction perpendicular to the direction X of the forward movement of the carrying device in the horizontal plane, and the material carrying trays 121 can be conveniently taken and placed by the manipulator 130 of the carrying device.

With continued reference to fig. 2 and 3, the extension frame 120 includes a support frame 122, four casters 123, and an electrical cabinet 124; the supporting frame 122 comprises four supporting columns 1221 and a supporting plate 1222 fixed on the top of the supporting columns 1221, the four casters 123 are respectively connected to the bottoms of the four supporting columns 1221 of the supporting frame 122, the transportation mechanism 110 is fixed on the bottom of the supporting plate 1222, and the electrical cabinet 124 is vertically fixed on one side of the top of the supporting plate 1222 close to the forward moving direction of the carrying device; the material tray 121 is disposed on a side of the electrical cabinet 124 away from the forward moving direction.

Specifically, the transportation mechanism 110 is fixed at the bottom of the supporting plate 1222, and when the transportation mechanism 110 moves, the transportation mechanism can drive the supporting frame 122 to move, and thus the expanding frame 120 to move. The material carrying tray 121 is disposed on the extension frame 120, and the extension frame 120 moves to drive the material carrying tray 121 to move, so that the material carrying process of the carrying device is realized. The electrical cabinet 124 is designed in a vertical manner, and the cabinet door moves forward to the carrying device, so that electrical maintenance is facilitated. The electrical cabinet 124 may include electrical equipment for controlling the movement of the robot 130.

In addition, the electrical cabinets 124 may also control movement of the transport mechanism 110 when the transport mechanism 110 includes an automated guided cart. The automatic guided vehicle is electrically connected to the electrical equipment in the electrical cabinet 124, the electrical equipment includes an operation map of the automatic guided vehicle, and the electrical equipment controls the operation of the automatic guided vehicle according to the operation map.

With continued reference to fig. 3, in the horizontal plane, the width of the electrical cabinet 124 in the direction perpendicular to the forward moving direction X is smaller than or equal to the width of the support plate 1222 in the direction perpendicular to the forward moving direction X.

Specifically, the electrical cabinet 124 is vertically fixed to a side of the top of the support plate 1222, which is close to the forward moving direction of the handling device, and by being disposed in a horizontal plane, the width of the electrical cabinet 124 along the direction perpendicular to the forward moving direction X is smaller than or equal to the width of the support plate 1222 along the direction perpendicular to the forward moving direction X, so that the side of the electrical cabinet 124 close to the support plate 1222 is located on the support plate 1222, and the stability of the electrical cabinet 124 can be ensured.

With continued reference to fig. 3, the width of the handling device in the horizontal plane perpendicular to the forward movement direction X is less than 0.7 meters.

Specifically, by arranging at least two material carrying trays 121, two material carrying trays 121 are overlapped in the vertical direction Z, the width of the extension frame 120 perpendicular to the forward moving direction X of the carrying device in the horizontal plane can be made smaller than 0.7 meter, and further the width of the carrying device perpendicular to the forward moving direction X in the horizontal plane can be made smaller than 0.7 meter, so that the carrying device can easily turn around, turn around and the like in a narrow carrying channel.

With continued reference to fig. 3, in the vertical direction Z, the vertical distance between two adjacent material trays 121 is greater than the vertical height of the material to be handled.

In particular, two adjacent material trays 121 overlap in the vertical direction Z, such that material on a lower material tray 121 will overlap with an upper material tray 121 in the vertical direction Z. Through along vertical direction Z, the vertical distance between two adjacent material year dishes 121 is greater than the vertical height who treats the transport material to can avoid the material on the lower part material year dish 121 to contradict with the material year dish 121 of top.

With continued reference to fig. 3, the handling apparatus further includes a robotic arm 130, the robotic arm 130 being secured to the top of the electrical cabinet 124.

Specifically, the robotic arm 130 may be a 6 degree-of-freedom robotic arm that forks the material through the robotic arm 130. Illustratively, the robotic arm 130 may include a base, a swivel mounted on the base, a large arm mounted on the swivel, an elbow joint mounted on the large arm, a small arm mounted at one end on the elbow joint, and a mechanical fork connected to the wrist joint, the mechanical fork side-mounted on the wrist joint. The big arm comprises a first shaft, the elbow joint comprises a second shaft, the small arm comprises a third shaft, and the wrist joint comprises a fourth shaft, a fifth shaft and a sixth shaft. The 6-degree-of-freedom mechanical arm can meet 6 degrees of freedom of a three-dimensional space, so that the movement of the mechanical arm in the three-dimensional space is realized.

With continued reference to fig. 3, the shortest vertical distance of the top of the electrical cabinet 124 from the material tray 121 is greater than or equal to the vertical height of the material to be handled.

Specifically, the robotic arm 130 is fixed to the top of the electrical cabinet 124, and when the shortest vertical distance from the top of the electrical cabinet 124 to the material tray 121 is greater than or equal to the vertical height of the material to be handled, the robotic arm 130 is installed at a position higher than the height of the top of the material to be handled with respect to the ground. When the mechanical arm forks to take materials, the rotary seat of the mechanical arm is vertical to the base. Because the installation mode of the mechanical fork is a side installation mode, when the mechanical fork of the mechanical arm picks up materials, the rotary seat is installed on one side face, the large arm on the rotary seat is parallel to the horizontal plane, and the small arm is vertical to the horizontal plane and faces downwards, so that the small arm hangs downwards, and the mechanical fork connected with the small arm can work on the materials at deeper or lower stations.

Fig. 4 is a front view of a carrying position of a carrying device according to an embodiment of the present invention, and fig. 5 is a top view of a carrying position of a carrying device according to an embodiment of the present invention. As shown in fig. 4 and 5, when the handling device transfers the material 500 to the material storage area 600, the electrical cabinet 124 in the extension frame of the handling device faces the material storage area 600, so that the robot 130 is close to the automatic material storage area 600, the material 500 in the material storage area 600 is located at one side of the robot 130, and the material loading tray 121 is located at the other side of the robot 130. When the material 500 is forked from the carrying device to the material storage area 600, the mechanical arm 130 can place the material 500 on the material carrying tray 121 only by rotating in one direction, and for the reason that the material carrying tray 121 is placed in the front and rear positions of the mechanical arm 130 and the mechanical arm 130 rotates in the front and rear directions to place the material 500 on the material carrying tray 121, the rotation direction of one mechanical arm 130 can be reduced, the position of the mechanical arm 130 where a wrist singular point occurs can be conveniently found out, and the rotation track of the mechanical arm 130 can be reduced.

Further, install sonar sensor on the machinery fork for whether detect material 500 deposits district 600 at the material. The sonar sensor detects whether have material 500 on the material storage area 600 through the sonar, if there is material 500 to fork material 500 again, if do not have material 500 then move to next station.

Further, still install the camera on the mechanical fork, the camera is used for acquireing preset position and shoots. When the carrying device reaches the preset position to fork the material 500, the camera can photograph the position reached by the carrying device to judge whether the preset position is reached.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. The carrying device is characterized by comprising a conveying mechanism and an expansion frame erected on the conveying mechanism; at least two material carrying discs are arranged on the expansion frame; the at least two material carrying discs are distributed along a vertical direction, two material carrying discs are overlapped in the vertical direction in the at least two material carrying discs, and when the at least two material carrying discs only comprise two material carrying discs, the two material carrying discs are partially overlapped in the vertical direction.

2. A handling device according to claim 1, characterised in that any one of said material trays overlaps with at least one of said material trays in said vertical direction.

3. The handling device according to claim 2, wherein any two of said material trays adjacent in said vertical direction are offset in a same predetermined direction with respect to the material tray below.

4. The handling device of claim 1, wherein the extension frame comprises a support frame, four casters, and an electrical cabinet; the supporting frame comprises four supporting columns and a supporting plate fixed to the tops of the supporting columns, the four casters are respectively connected to the bottoms of the four supporting columns of the supporting frame, the transportation mechanism is fixed to the bottom of the supporting plate, and the electrical cabinet is vertically fixed to one side, close to the forward moving direction of the carrying device, of the top of the supporting plate;

5. A handling device according to claim 4, characterised in that the width of the handling device in a horizontal plane perpendicular to the direction of forward movement is less than 0.7 m.

6. The handling device of claim 5, wherein in a horizontal plane, a width of the electrical cabinet in a direction perpendicular to the forward movement direction is less than or equal to a width of the support plate in a direction perpendicular to the forward movement direction.

7. A handling device according to claim 4, characterised in that the vertical distance between two adjacent material trays in the vertical direction is larger than the vertical height of the material to be handled.

8. The handling device of claim 4, further comprising a robotic arm secured to a top of the electrical cabinet.

9. The handling apparatus of claim 8, wherein a shortest vertical distance of a top of the electrical cabinet from the material tray is greater than or equal to a vertical height of the material to be handled.

10. The transfer device of claim 1, wherein the transport mechanism comprises an automated guided cart.