CN210801213U - Hydrogen combustion device - Google Patents
Hydrogen combustion device Download PDFInfo
- Publication number
- CN210801213U CN210801213U CN201921867152.6U CN201921867152U CN210801213U CN 210801213 U CN210801213 U CN 210801213U CN 201921867152 U CN201921867152 U CN 201921867152U CN 210801213 U CN210801213 U CN 210801213U
- Authority
- CN
- China
- Prior art keywords
- hydrogen
- ceramic shell
- heater strip
- baffle
- electrode column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000001257 hydrogen Substances 0.000 title claims abstract description 37
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 37
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 238000002485 combustion reaction Methods 0.000 title claims abstract description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000001301 oxygen Substances 0.000 claims abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims description 31
- 150000002431 hydrogen Chemical class 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 7
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
Images
Abstract
The utility model discloses a hydrogen combustion device, including electrode post, heater strip and high temperature wire, baffle in the casing forms the combustion chamber that is used for burning hydrogen with upper portion in the casing, is equipped with the heater strip more than two in the combustion chamber, and the both ends of every heater strip are connected with an electrode post respectively, and the outer parcel of heater strip and electrode post connecting wire has the pottery piece, and the outer parcel of electrode post on the baffle has the pottery shell, and high temperature wire is connected to the lower extreme of electrode post, is equipped with hydrogen air inlet and oxygen air inlet on the baffle, the utility model has the characteristics of thoroughly burning hydrogen, reliability height, long service life, easily maintenance.
Description
Technical Field
The utility model belongs to the technical field of semiconductor chip processing equipment, especially, relate to a hydrogen burner.
Background
Hydrogen has wide application in the manufacturing process of semiconductor chips, and the treatment of hydrogen in tail gas is of great importance to production safety. The existing hydrogen combustion device uses a group of electric heating wires, is arranged at a tail gas outlet, and is heated to a certain temperature through the electric heating wires to ignite hydrogen in the tail gas. However, when the flow of the tail gas is too large, the conventional hydrogen combustion device has the problem of insufficient combustion and potential safety hazard.
Disclosure of Invention
The utility model aims to improve the defects of the prior art and provide a hydrogen combustion device which can thoroughly combust hydrogen, has high reliability, long service life and is easy to maintain.
The utility model aims at realizing like this, a hydrogen combustion device, including the electrode post, heater strip and high temperature wire, its characteristics are that baffle in the casing forms the combustion chamber that is used for burning hydrogen with upper portion in the casing, be equipped with the heater strip more than two in the combustion chamber, the both ends of every heater strip are connected with an electrode post respectively, the outer parcel of heater strip and electrode post connecting wire has ceramic block, the outer parcel of the electrode post on the baffle has ceramic shell, high temperature wire is connected to the lower extreme of electrode post, be equipped with hydrogen air inlet and oxygen air inlet on the baffle.
In order to further achieve the object of the present invention, the ceramic shell may be composed of an upper ceramic shell and a lower ceramic shell.
In order to further realize the purpose of the utility model, the upper ceramic shell and the lower ceramic shell adopt the concave-convex structure for splicing connection.
Compared with the prior art, the utility model has the following characteristics of showing and positive effect: the utility model adopts the clapboard to form the combustion chamber on the upper part of the shell, and introduces hydrogen into the combustion chamber, which is beneficial to the sufficient combustion of hydrogen; the outer part of the electrode column is wrapped by a ceramic shell and isolated from the shell, so that potential safety hazards caused by the electrification of the shell are avoided; the ceramic part wrapping the electrode column is divided into two parts, and a concave-convex male-female type design is adopted, so that the fitting degree is ensured, and the safety is further improved; the connecting line of the electrode column and the heating wire is wrapped with the ceramic block, so that the safety is further improved; more than two groups of heating wires are adopted, so that hydrogen can be fully combusted when the gas flow is large, and even if one group of heating wires is fused, the heating wires can also meet the requirement of hydrogen treatment; the bottom is provided with an oxygen inlet to ensure that the hydrogen can be fully combusted.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a top view of fig. 1.
Fig. 3 is another schematic structural diagram of the present invention.
In the figure: 1. the ceramic electrode comprises a heating wire, 2, a shell, 3, a high-temperature wire, 4, a hydrogen inlet, 5, an electrode column, 6, an oxygen inlet, 7, a ceramic shell, 8, a lower ceramic shell, 9, an upper ceramic shell, 10, a ceramic block, 11 and a partition plate.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
A hydrogen combustion device, refer to fig. 1 and 2, a clapboard 11 is fixed in a shell 2, a combustion chamber for combusting hydrogen is formed at the upper part of the clapboard 11 in the shell 2, more than two heating wires 1 are arranged in the combustion chamber, two ends of each heating wire 1 are respectively connected with an electrode column 5, a ceramic block 10 is wrapped outside a connecting line of the heating wires 1 and the electrode columns 5, a ceramic shell 7 is wrapped outside the electrode column 5 arranged on the clapboard 11, the electrode column 5 is in threaded connection with the ceramic shell 7, the clapboard 11 is isolated from the electrode column 5 by the ceramic shell 7, the lower end of the electrode column 5 is connected with a high-temperature lead 3, a hydrogen inlet 4 and an oxygen inlet 6 are arranged on the clapboard 11, the hydrogen inlet 4 is positioned at the central part of each heating wire 1, the oxygen inlet 6 is arranged, the present embodiment can adopt 1 hydrogen inlet 4 and 4 oxygen inlets 6 according to the required configuration.
Referring to fig. 3, the ceramic shell 7 is composed of an upper ceramic shell 9 and a lower ceramic shell 8, the upper ceramic shell 9 and the lower ceramic shell 8 are connected in an inserting manner by adopting a central concave-convex structure, the middle part of the electrode column 5 is completely wrapped, and only the upper end and the lower end are reserved for being respectively connected with a heating wire and a high-temperature wire.
The utility model discloses the theory of operation: the electrode column 5 is externally connected with a power supply through a high-temperature wire 3 and is electrified to heat the heating wire 1, after the hydrogen combustion temperature is reached, hydrogen tail gas is respectively introduced into the combustion chamber from the hydrogen inlet 4 and oxygen from the oxygen inlet 6 to be mixed, and the hydrogen tail gas is ignited and combusted by the heating wire 1.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (3)
1. The utility model provides a hydrogen combustion apparatus, includes electrode column, heater strip and high temperature wire, the baffle in the characterized by casing upper portion forms the combustion chamber that is used for burning hydrogen with the casing, is equipped with two above heater strips in the combustion chamber, and the both ends of every heater strip are connected with an electrode column respectively, and the outer parcel of heater strip and electrode column connecting wire has the ceramic piece, and the outer parcel of the electrode column of installing on the baffle has the ceramic shell, and the high temperature wire is connected to the lower extreme of electrode column, is equipped with hydrogen air inlet and oxygen air inlet on the baffle.
2. A hydrogen combustion apparatus as claimed in claim 1, wherein said ceramic shell comprises an upper ceramic shell and a lower ceramic shell.
3. The hydrogen burner as claimed in claim 2, wherein the upper ceramic shell and the lower ceramic shell are connected by means of a male-female structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921867152.6U CN210801213U (en) | 2019-11-01 | 2019-11-01 | Hydrogen combustion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921867152.6U CN210801213U (en) | 2019-11-01 | 2019-11-01 | Hydrogen combustion device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210801213U true CN210801213U (en) | 2020-06-19 |
Family
ID=71228215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921867152.6U Expired - Fee Related CN210801213U (en) | 2019-11-01 | 2019-11-01 | Hydrogen combustion device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210801213U (en) |
-
2019
- 2019-11-01 CN CN201921867152.6U patent/CN210801213U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200619 |