CN210796286U - Purification device of octafluoropropane - Google Patents
Purification device of octafluoropropane Download PDFInfo
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- CN210796286U CN210796286U CN201921602621.1U CN201921602621U CN210796286U CN 210796286 U CN210796286 U CN 210796286U CN 201921602621 U CN201921602621 U CN 201921602621U CN 210796286 U CN210796286 U CN 210796286U
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Abstract
The utility model discloses an octafluoropropane's purification device, including crude octafluoropropane storage tank, vapour and liquid separator, the liquid phase adsorption tower, first rectifying column, the second rectifying column, the gas phase adsorption tower, third rectifying column and product storage tank, the exit linkage of crude octafluoropropane storage tank to vapour and liquid separator's entry, vapour and liquid separator's liquid phase exit linkage to liquid phase adsorption tower's material entry, liquid phase adsorption tower's material exit linkage to first rectifying column's material entry, first rectifying column's heavy component exit linkage to second rectifying column's material entry, second rectifying column's light component exit linkage to gas phase adsorption tower's material entry, gas phase adsorption tower's material exit linkage to third rectifying column's material entry, third rectifying column's light component exit linkage to product storage tank. The utility model has the advantages of the security is high, and equipment drops into fewly, and the power consumption is few, and economic nature is good, and technology easy operation, product purity height obtain the product that purity is greater than 99.999.5% more.
Description
Technical Field
The utility model relates to a gaseous purification field, concretely relates to octafluoropropane's purification device.
Background
High-purity octafluoropropane is mainly used as a cleaning gas and an etchant in a semiconductor manufacturing process, and the purity requirement of the octafluoropropane is higher and higher along with the development of the semiconductor industry. However, in the main production method at present, the crude octafluoropropane produced by either the direct fluorination or the oxyfluorination method contains not only impurities such as air, water, carbon dioxide and carbon tetrafluoride but also large amounts of chlorofluorocarbon impurities such as chlorodifluoromethane, chloropentafluoroethane, dichlorodifluoromethane and hexafluoropropylene, which are generated by chemical bond cleavage and rearrangement during the production process, and therefore, it is necessary to further purify the crude octafluoropropane to obtain a high-purity octafluoropropane product.
Currently, the common purification methods of octafluoropropane mainly comprise rectification and adsorption. There are many kinds of impurities in octafluoropropane, and impurities having a boiling point close to or azeotropic with octafluoropropane often exist, and it is difficult to remove the impurities by a rectification method. While the adsorption method is usually used with molecular sieve, active carbon, carbon molecular sieve and other adsorbents, some impurities in octafluoropropane have small adsorption capacity for the adsorbents, and are difficult to remove to reach the purification requirement. The impurities such as the chlorofluorocarbon impurities, CO2, H2O and the like in the crude octafluoropropane are difficult to purify to reach the standard by adopting single rectification and single adsorption, and the product with the purity of more than 99.999.5 percent is obtained.
Disclosure of Invention
The utility model aims at providing an octafluoropropane's purification device has the security height, and equipment drops into fewly, and the power consumption is few, and economic nature is good, and technology easy operation, product purity advantage such as high obtains the product that purity is greater than 99.999.5% above.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a device for purifying octafluoropropane, which comprises a crude octafluoropropane storage tank, a gas-liquid separator, a liquid phase adsorption tower, a first rectifying tower, a second rectifying tower, a gas phase adsorption tower, a third rectifying tower and a product storage tank, an outlet of the crude octafluoropropane storage tank is connected to an inlet of the gas-liquid separator, a liquid phase outlet of the gas-liquid separator is connected to a material inlet of the liquid phase adsorption tower, a material outlet of the liquid phase adsorption tower is connected to a material inlet of the first rectifying tower, a heavy component outlet of the first rectifying tower is connected to a material inlet of the second rectifying tower, the light component outlet of the second rectifying tower is connected to the material inlet of the gas-phase adsorption tower, the material outlet of the gas-phase adsorption tower is connected to the material inlet of the third rectifying tower, and the light component outlet of the third rectifying tower is connected to the product storage tank.
Furthermore, the adsorbent of the liquid phase adsorption tower is one or more of silica gel, alumina, alkaline earth metal oxide and calcium fluoride.
Furthermore, the adsorbent of the gas phase adsorption tower is one or more of a high-selectivity carbon dioxide adsorbent, activated carbon, a molecular sieve and a carbon-containing molecular sieve.
Further, a gas-phase outlet of the gas-liquid separator is connected to an inlet of a gas sensor, and an outlet of the gas sensor is connected to a gas return port or a light component recovery tank of the gas-liquid separator.
Further, the light component outlet of the first rectifying tower is connected to a light component recovery tank.
Further, a heavy component outlet of the second rectifying tower is connected to a heavy component recovery tank.
Further, a heavy component outlet of the third rectifying tower is connected to a heavy component recovery tank.
Because of the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
1) the utility model discloses an octafluoropropane's purification device, adopt gas-liquid separation, detach most light components, through the liquid phase adsorption tower, detach most acid gas, fluorine-containing organic impurity, carbon dioxide and water, the cold volume and the heat of rectification at the back have been reduced, it is low to consume energy, good economy, carry out elementary rectification through two rectifying towers, get rid of end boiling point and high boiling point impurity component and obtain elementary product, the product of elementary rectification carries out the degree of depth through the gas phase adsorption tower and gets rid of fluorine-containing organic compound, impurity such as carbon dioxide and water, the leading-in third rectifying tower of crude through gas phase adsorption carries out further purification, the product rate of recovery and purity have been improved, the product that purity is greater than 99.999.5% has been obtained.
2) The utility model discloses an octafluoropropane's purification device has high selectivity adsorbent and rectification parameter through selecting suitable, reduces the cold volume and the heat that consume in the purification process, and equipment drops into fewly, easy operation, and throughput is big, and the yield is high.
Drawings
FIG. 1 is a schematic diagram of the octafluoropropane purifying device disclosed in the utility model.
Wherein, 1, a crude octafluoropropane storage tank; 2. a gas-liquid separator; 3. a liquid phase adsorption column; 4. a first rectification column; 5. a second rectification column; 6. a gas phase adsorption tower; 7. a third rectifying column; 8. a product storage tank; 9. An octafluoropropane sensor; 10. a light component recovery tank; 11. and a heavy component recovery tank.
Detailed Description
The invention will be further described with reference to the accompanying drawings and examples:
referring to fig. 1, as shown in the figure, an octafluoropropane purifying device comprises a crude octafluoropropane storage tank 1, a gas-liquid separator 2, a liquid phase adsorption tower 3 and a first rectifying tower 4, second rectifying column 5, gas phase adsorption tower 6, third rectifying column 7 and product storage tank 8, the exit linkage of 1 jar is stored up to crude octaflurane to gas-liquid separator 2's entry, gas-liquid separator 2's liquid phase exit linkage to liquid phase adsorption tower 3's material entry, liquid phase adsorption tower 3's material exit linkage to first rectifying column 4's material entry, the heavy component exit linkage of first rectifying column 4 to the material entry of second rectifying column 5, the light component exit linkage of second rectifying column 5 to gas phase adsorption tower 6's material entry, gas phase adsorption tower 6's material exit linkage to third rectifying column 7's material entry, the light component exit linkage of third rectifying column 7 to product storage tank 8.
In a preferred embodiment of the present embodiment, the adsorbent of the liquid phase adsorption tower 3 is one or more of silica gel, alumina, an alkaline earth metal oxide, and calcium fluoride.
In a preferred embodiment of this embodiment, the adsorbent in the gas phase adsorption tower 6 is one or more of a high-selectivity carbon dioxide adsorbent, activated carbon, a molecular sieve and a carbon-containing molecular sieve.
In the preferred embodiment of the present embodiment, the gas phase outlet of the gas-liquid separator 2 is connected to the inlet of the gas sensor 9, and the outlet of the gas sensor 9 is connected to the gas return port of the gas-liquid separator 2 or the light component recovery tank 10.
In the preferred embodiment of this example, the light component outlet of the first rectifying column 4 is connected to the light component recovery tank 10.
In the preferred embodiment of this embodiment, the heavies outlet of the second rectifier 5 is connected to a heavies recovery tank 11.
In the preferred embodiment of this example, the heavies outlet of the third rectifier 7 is connected to a heavies recovery tank 11.
The detailed process is as follows:
1) introducing raw material crude octafluoropropane gas into a gas-liquid separator, performing gas-liquid separation at the temperature of-100 to-40 ℃ and the pressure of 0.05 to 1.2MPa, taking the upper noncondensable gas as a diluent gas to circularly enter the gas-liquid separator, and directly discharging the upper noncondensable gas into a light component recovery tank when the content of octafluoropropane detected by a gas sensor is below a detection standard;
2) introducing the crude octafluoropropane liquefied gas into a liquid phase adsorption tower (the adsorbent is one or more of silica gel, alumina, alkaline earth metal oxide and calcium fluoride), wherein the temperature is-100 to-40 ℃, and the pressure is 0.05 to 1.2 MPa;
3) directly discharging the liquid phase adsorbed substances into a rectifying tower T01 for lightness removing treatment, wherein the temperature at the bottom of the tower is-100 ℃ to-45 ℃, the pressure is 0.01 to 0.6MPa, the temperature at the top of the tower is 1 to 30 ℃ lower than that at the bottom of the tower, and the pressure is 0.01 to 0.6MPa, and low-boiling-point substances extracted from the top of the tower directly enter a light component recovery tank;
4) the tower bottom material enters T02 for de-weighting treatment; the temperature of the bottom of the T02 tower is-30-80 ℃, the pressure is 0.01-0.6 MPa, the temperature of the top is 1-30 ℃ lower than that of the bottom, and high boiling point substances discharged from the bottom of the tower directly enter a heavy component recovery tank;
5) introducing the octafluoropropane crude product subjected to preliminary rectification at the tower top into a gas phase adsorption tower (the adsorbent is one or more of a high-selectivity carbon dioxide adsorbent and active carbon, a molecular sieve or a carbon-containing molecular sieve and is mixed), wherein the temperature is-100 to-30 ℃, and the pressure is 0.5 to 1.2 MPa;
6) and introducing the gas adsorbed by the gas phase adsorption tower into T03 for further purification, wherein the temperature at the bottom of the tower is-32-60 ℃, the pressure is 0.01-1.0 MPa, high boiling point substances extracted from the bottom of the tower directly enter a heavy component recovery tank, and the purified octafluoropropane is obtained at the top of the tower.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A device for purifying octafluoropropane is characterized by comprising a crude octafluoropropane storage tank, a gas-liquid separator, a liquid phase adsorption tower, a first rectifying tower, a second rectifying tower, a gas phase adsorption tower, a third rectifying tower and a product storage tank, an outlet of the crude octafluoropropane storage tank is connected to an inlet of the gas-liquid separator, a liquid phase outlet of the gas-liquid separator is connected to a material inlet of the liquid phase adsorption tower, a material outlet of the liquid phase adsorption tower is connected to a material inlet of the first rectifying tower, a heavy component outlet of the first rectifying tower is connected to a material inlet of the second rectifying tower, the light component outlet of the second rectifying tower is connected to the material inlet of the gas-phase adsorption tower, the material outlet of the gas-phase adsorption tower is connected to the material inlet of the third rectifying tower, and the light component outlet of the third rectifying tower is connected to the product storage tank.
2. The purification apparatus of octafluoropropane as claimed in claim 1, wherein said adsorbent of said liquid phase adsorption column is one or more of silica gel, alumina, alkaline earth metal oxide and calcium fluoride.
3. The apparatus for purifying octafluoropropane as claimed in claim 1, wherein said adsorbent of said gas phase adsorption column is one or more of a highly selective carbon dioxide adsorbent, activated carbon and molecular sieve, carbon-containing molecular sieve.
4. The purification apparatus of octafluoropropane as claimed in claim 1, wherein a gas phase outlet of said gas-liquid separator is connected to an inlet of a gas sensor, and an outlet of said gas sensor is connected to a gas return port of said gas-liquid separator or a light component recovery tank.
5. The apparatus for purifying octafluoropropane as claimed in claim 1, wherein said light component outlet of said first rectifying column is connected to a light component recovering tank.
6. The octafluoropropane purification apparatus according to claim 1, wherein a heavies outlet of said second rectifying column is connected to a heavies recovery tank.
7. The octafluoropropane purification apparatus according to claim 1, wherein a heavies outlet of said third distillation column is connected to a heavies recovery tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921602621.1U CN210796286U (en) | 2019-09-25 | 2019-09-25 | Purification device of octafluoropropane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921602621.1U CN210796286U (en) | 2019-09-25 | 2019-09-25 | Purification device of octafluoropropane |
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| CN210796286U true CN210796286U (en) | 2020-06-19 |
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| CN201921602621.1U Active CN210796286U (en) | 2019-09-25 | 2019-09-25 | Purification device of octafluoropropane |
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Address after: 215152 Anmin Road, Panyang Industrial Park, Huangdai Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee after: Jinhong Gas Co.,Ltd. Address before: 215152 No. 6 Anmin Road, Panyang Industrial Park, Huangdi Town, Xiangcheng District, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINHONG GAS Co.,Ltd. |
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