CN210778477U - Sample stage of special microscope for processing cross section of ion grinding instrument - Google Patents
Sample stage of special microscope for processing cross section of ion grinding instrument Download PDFInfo
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- CN210778477U CN210778477U CN201921252434.5U CN201921252434U CN210778477U CN 210778477 U CN210778477 U CN 210778477U CN 201921252434 U CN201921252434 U CN 201921252434U CN 210778477 U CN210778477 U CN 210778477U
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Abstract
The utility model relates to a special microscope sample stage for processing the cross section of an ion grinding instrument, which is characterized by comprising a vertical positioning area and a horizontal positioning area, and the special microscope sample stage is characterized in that the vertical positioning area of the microscope comprises a positioning column I and a positioning hole, wherein the positioning column I protrudes out of a table top, and the positioning hole is concave in the table top; microscope horizontal location district includes reference column II and reference column III, and reference column II and reference column III all bulge the mesa. Due to the change of the structure of the vertical positioning area of the microscope, when the sample seat is vertically arranged on the vertical positioning area of the microscope, the sample seat can not do left and right front and back or rotary motion, the position of the sample seat is fixed, and the sample can be conveniently positioned at a more accurate X-direction processing position.
Description
Technical Field
The utility model relates to a microscope supporting parts technical field, specific theory is a special microscope's of ion grinding appearance cross-section processing sample platform.
Background
When an ion grinder is used for machining a sample section, the sample needs to be installed on a special section machining sample seat, and a section machining position is located by means of a special microscope so as to accurately select and estimate a machining center and a machining range of an ion beam on the sample.
The positioning is adjusted in three directions: x, Y and R. The R direction adjustment function is to enable three lines of the sample edge, the MASK edge and the eyepiece horizontal marking line to be parallel, so that the height of the sample edge exceeding the MASK edge can be further adjusted, namely Y direction adjustment is carried out. The action position of the ion beam in the longitudinal direction of the sample can be determined through the adjustment of the R direction and the Y direction, and the action position of the ion beam in the transverse direction of the sample can be adjusted through the adjustment of the X direction.
The special microscope for positioning the ion grinder is divided into a vertical positioning area and a horizontal positioning area. When the R direction and the Y direction are adjusted, the special cross section processing sample seat is horizontally arranged on a special microscope, and the sample seat is positioned in a horizontal positioning area of the special microscope; when the X-direction adjustment is carried out, the special section processing sample seat is vertically placed on the special microscope, and the sample seat is located in the special microscope vertical positioning area. When the sample holder is horizontally placed, 2 convex positioning columns are arranged on the sample holder, 2 concave positioning holes are arranged on a horizontal positioning area of the special positioning microscope, 2 groups of positioning columns are matched with the positioning holes, the sample holder cannot move left and right or back and forth, and meanwhile, the sample holder is limited from being incapable of rotating, so that the sample holder is fixed on the positioning microscope. When the sample seat is vertically placed, an upper concave positioning hole is formed in the sample seat, an upper convex positioning column is arranged on a vertical positioning area of the special microscope, when the sample seat is vertically placed, the positioning column is matched with the positioning hole, the sample seat cannot move left and right or back and forth, however, the sample seat can rotate by taking the positioning column as a center, so that the relative position of the sample seat is fixed to a certain extent, the sample seat cannot be prevented from rotating or slightly shifting front, back, left and right, and accurate positioning of the X-direction machining center cannot be achieved.
Meanwhile, when the sample holder is vertically placed, a positioning column which is convex downwards is arranged beside the positioning hole which is concave upwards. When a sample and the sample seat are installed in a sample chamber of the ion grinding instrument, the sample seat is placed perpendicular to the sample table, the concave positioning hole on the sample seat is matched with the convex positioning column on the sample table, meanwhile, the concave positioning hole is formed in the sample table, and the convex positioning column on the lower side of the sample seat is matched with the concave positioning hole on the sample table, so that the sample seat is prevented from rotating.
The to-be-solved technical problem of the utility model is behind present cross-section processing sample seat and the special microscope cooperation, can't accurately carry out sample X direction processing position location, lead to being difficult to the problem of accurate selection location to the machining center of ion beam on the sample. The purpose is realized by partially changing the structure of a vertical positioning area of a special microscope from the structure of the conventional section processing sample seat.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is behind current cross-section processing sample seat and special microscope's structure cooperation, can't accurately carry out sample X direction processing position location, be difficult to carry out the problem of accurate location to the machining center of ion beam on the sample, in order to realize above-mentioned purpose, the utility model discloses a following technical scheme.
A sample stage of a microscope special for processing a section of an ion grinder comprises a vertical positioning area and a horizontal positioning area, and is characterized in that,
the microscope vertical positioning area comprises a positioning column I and a positioning hole, the positioning column I protrudes out of the table top, and the positioning hole is concave to the table top; the size and the position of the microscope positioning column I are matched with the size and the position of a concave positioning hole on the sample seat, meanwhile, the size and the position of the microscope positioning hole correspond to the size and the position of a convex positioning column under the sample seat, when the sample seat is vertically placed on a microscope, two groups of positioning devices are matched with each other at the same time, and the sample seat is fixed on the microscope;
the microscope horizontal positioning area comprises a positioning column II and a positioning column III, and the positioning column II and the positioning column III both protrude out of the table top; when the sample seat is horizontally placed on a microscope, the sizes and the positions of the microscope positioning column III and the positioning column III are matched with those of the two positioning holes on the sample seat at the same time, and the sample seat is fixed on the microscope.
Compared with the prior art, the utility model has the positive effects that:
due to the change of the structure of the vertical positioning area of the microscope, when the sample seat is vertically arranged on the vertical positioning area of the microscope, the sample seat can not do left and right front and back or rotary motion, the position of the sample seat is fixed, and the sample can be conveniently positioned at a more accurate X-direction processing position.
Drawings
FIG. 1 is a front view of the application;
fig. 2 is a top view of the application.
The labels in the figures are:
1 a positioning column I is arranged on the base,
2, positioning the holes in the base plate,
3 a positioning column II is arranged on the base,
4, positioning the column III at the position,
Detailed Description
The following provides the utility model relates to a special microscope's of ion grinding appearance cross-section processing sample platform's embodiment.
Example 1
A sample stage of a microscope special for processing a section of an ion grinding instrument comprises a vertical positioning area and a horizontal positioning area, wherein the vertical positioning area of the microscope comprises a positioning column and a positioning hole, the positioning column protrudes out of a table top and is an upward-protruding positioning column, the positioning hole is concave to the table top and is a downward-concave positioning hole, the size and the position of the upward-protruding positioning column of the microscope are matched with the size and the position of a concave positioning hole on a sample seat, and the size and the position of the downward-concave positioning hole of the microscope are corresponding to the size and the position of the downward; when the sample seat is vertically arranged on the microscope, the two groups of positioning devices are mutually adapted at the same time, so that the sample seat is fixed on the microscope, the X-direction positioning is accurately carried out, and the action position of the ion beam on the sample in the transverse direction is determined.
The horizontal positioning area of the microscope comprises two positioning columns, the positioning columns protrude out of the table top, when the sample holder is horizontally placed on the microscope, the sizes and the positions of the two positioning columns of the microscope are respectively matched with the sizes and the positions of the two positioning holes in the sample holder, so that the sample holder is fixed on the microscope, the R direction and the Y direction are accurately positioned, and the action position of the ion beam in the longitudinal direction of the sample is determined. Therefore, the problem of accurately selecting and positioning the machining center of the sample is solved.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the concept of the present invention, and these improvements and decorations should also be considered as within the protection scope of the present invention.
Claims (1)
1. A sample stage of a microscope special for processing a section of an ion grinder comprises a vertical positioning area and a horizontal positioning area, and is characterized in that,
the microscope vertical positioning area comprises a positioning column I and a positioning hole, the positioning column I protrudes out of the table top, and the positioning hole is concave to the table top;
the microscope horizontal positioning area comprises a positioning column II and a positioning column III, and the positioning column II and the positioning column III both protrude out of the table top;
the size and the position of the microscope positioning column I are matched with the size and the position of a concave positioning hole on the sample seat, meanwhile, the size and the position of the microscope positioning hole correspond to the size and the position of a convex positioning column under the sample seat, when the sample seat is vertically placed on a microscope, two groups of positioning devices are matched with each other at the same time, and the sample seat is fixed on the microscope;
when the sample seat is horizontally placed on a microscope, the sizes and the positions of the microscope positioning column III and the positioning column III are matched with those of the two positioning holes on the sample seat at the same time, and the sample seat is fixed on the microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921252434.5U CN210778477U (en) | 2019-08-05 | 2019-08-05 | Sample stage of special microscope for processing cross section of ion grinding instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921252434.5U CN210778477U (en) | 2019-08-05 | 2019-08-05 | Sample stage of special microscope for processing cross section of ion grinding instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210778477U true CN210778477U (en) | 2020-06-16 |
Family
ID=71042969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921252434.5U Active CN210778477U (en) | 2019-08-05 | 2019-08-05 | Sample stage of special microscope for processing cross section of ion grinding instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210778477U (en) |
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2019
- 2019-08-05 CN CN201921252434.5U patent/CN210778477U/en active Active
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