CN210775553U - Piezoelectric ceramic precision rotating platform for ultra-high vacuum and extremely-low temperature - Google Patents
Piezoelectric ceramic precision rotating platform for ultra-high vacuum and extremely-low temperature Download PDFInfo
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- CN210775553U CN210775553U CN201921485111.0U CN201921485111U CN210775553U CN 210775553 U CN210775553 U CN 210775553U CN 201921485111 U CN201921485111 U CN 201921485111U CN 210775553 U CN210775553 U CN 210775553U
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Abstract
The utility model discloses an ultra-high vacuum utmost point low temperature is with accurate revolving stage of piezoceramics, including shell, rotary platform, rotation axis, bearing and last top piece. The rotating shaft is provided with an upper end part and a lower end part which is integrally formed with the upper end part, and the rotating shaft is fixedly connected with the rotating platform. The bearing and the upper top sheet are sequentially sleeved at the upper end part of the rotating shaft, and a first space for placing at least one piezoelectric ceramic component is arranged between the upper top sheet and the lower end part of the rotating shaft. The utility model discloses an ultra-high vacuum is with accurate piezoelectricity displacement platform of big stroke adopts reverse piezoelectricity effect, makes the electric energy turn into rotary motion's kinetic energy indirectly. Compared with the traditional motor, the motor has the characteristics of small volume, low delay, large torque, high rotation precision, stable low-speed operation, high controllability and the like.
Description
Technical Field
The utility model belongs to the technical field of accurate rotation control, concretely relates to super high vacuum is with accurate piezoelectricity displacement platform of large stroke.
Background
The utility model discloses a utility model with publication number CN107941261B and subject name as a sensor equipment low-temperature test bench, which adopts the technical scheme that the utility model comprises a thermostat, a comprehensive tool table and a preloading device; a liquid helium pool is arranged in the thermostat, and the comprehensive tool table is positioned in the liquid helium pool; the preloading device comprises a vacuum tube, a transmission unit and a force loading control unit, wherein the transmission unit is positioned in the vacuum tube, the force loading control unit is connected with the transmission unit, the force loading control unit is connected with the vacuum tube in a sealing manner, and the vacuum tube is connected with the top opening of the thermostat in a sealing manner through a flange; the outermost layer of the comprehensive tool table is a vacuum box, the vacuum box is in sealing connection with a vacuum tube of the preloading device, a testing tool used for installing sensor equipment to be tested is arranged inside the vacuum box, and a transmission unit in the vacuum tube is connected with the testing tool.
However, in the above-mentioned utility model patent, the rotary motion cannot be realized, and further the reverse piezoelectric effect cannot be adopted, so that the electric energy is indirectly converted into the kinetic energy of the rotary motion, and further improvement is needed.
SUMMERY OF THE UTILITY MODEL
The utility model discloses to prior art's situation, overcome above defect, provide an ultra-high vacuum is accurate revolving stage of piezoceramics for utmost point low temperature.
The utility model discloses a following technical scheme, the accurate revolving stage of piezoceramics for ultra-high vacuum extremely low temperature includes shell and rotary platform, still includes:
the rotating shaft is provided with an upper end part and a lower end part which is integrally formed with the upper end part, and the rotating shaft is fixedly connected with the rotating platform;
the bearing and the upper top sheet are sequentially sleeved at the upper end part of the rotating shaft, a first space for placing at least one piezoelectric ceramic component is formed between the upper top sheet and the lower end part of the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the upper top sheet, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with a second friction layer arranged on the upper surface of the lower end part of the rotating shaft;
the bottom plate and the upper top plate are coaxially arranged, a second space for placing at least one piezoelectric ceramic component is formed between the bottom plate and the lower end part of the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the first friction layer arranged on the lower surface of the lower end part of the rotating shaft, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with the bottom plate;
the sapphire substrate comprises a pre-tightening sheet and a plurality of sapphire balls, wherein each sapphire ball is located between the pre-tightening sheet and the bottom sheet, and each sapphire ball is partially embedded in a groove located in the bottom sheet.
According to the above aspect, as a more preferable aspect of the above aspect, the dimension of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature is 30mm × 34 mm.
According to the above technical means, as a further preferable technical means of the above technical means, the bearing is a vacuum bearing.
According to the above technical solution, as a further preferable technical solution of the above technical solution, the ultra-high vacuum very-low temperature piezoelectric ceramic precision rotation table is made of a non-magnetic material.
According to the above aspect, as a more preferable aspect of the above aspect, the rotary platform has a through hole in an axial direction.
The utility model discloses an application still discloses an ultra-high vacuum is accurate revolving stage of piezoceramics for utmost point low temperature, including shell and rotary platform, still include:
the rotating shaft is fixedly connected with the rotating platform;
the bearing and the upper top sheet are sequentially sleeved on the rotating shaft, a first space for accommodating at least one piezoelectric ceramic component is formed between the upper top sheet and the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the upper top sheet, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with a second friction layer arranged on the upper surface of the lower end part of the rotating shaft;
the bottom plate and the upper top plate are coaxially arranged, a second space for placing at least one piezoelectric ceramic component is arranged between the bottom plate and the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the first friction layer arranged on the lower surface of the rotating shaft, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with the bottom plate;
the sapphire substrate comprises a pre-tightening sheet and a plurality of sapphire balls, wherein each sapphire ball is located between the pre-tightening sheet and the bottom sheet, and each sapphire ball is partially embedded in a groove located in the bottom sheet.
According to the above technical solution, as a further preferable technical solution of the above technical solution, the balls of the bearing have a molybdenum disulfide protective layer (mainly playing a self-lubricating role).
According to the above technical solution, as a further preferable technical solution of the above technical solution, the piezoelectric ceramic component includes 4 piezoelectric ceramic sheets sequentially stacked.
According to the above technical solution, as a further preferable technical solution of the above technical solution, the first friction layer employs an aluminum oxide sheet.
According to the technical scheme, as a further preferable technical scheme of the technical scheme, the pre-tightening piece is a beryllium copper piece.
The utility model discloses an ultra-high vacuum is with accurate piezoelectricity displacement platform of large stroke, its beneficial effect lies in, adopts reverse piezoelectricity effect, makes the electric energy turn into rotary motion's kinetic energy indirectly. Compared with the traditional motor, the motor has the characteristics of small volume, low delay, large torque, high rotation precision, stable low-speed operation, high controllability and the like.
Drawings
Fig. 1 is a schematic view of the overall structure of an angle of the present invention.
Fig. 2 is a partial structural schematic view (with the outer shell hidden) of the present invention.
Fig. 3 is a schematic diagram of an angular explosion structure of the present invention.
Fig. 4 is a schematic diagram of an explosion structure at another angle of the present invention.
Fig. 5 is a schematic view of another aspect of the present invention.
Fig. 6 is a schematic cross-sectional structure along the BB direction in fig. 5.
The reference numerals include: 10-a housing; 11-a rotating platform; 12-a pre-tensioning sheet; 13-sapphire balls; 14-a bearing; 15-upper topsheet; 16-a backsheet; 17-a first friction layer; 18-a rotating shaft; 19-a second friction layer; 20-a piezoceramic component.
Detailed Description
The utility model discloses an ultra-high vacuum is accurate revolving stage of piezoceramics for utmost point low temperature combines preferred embodiment below, and is right the utility model discloses a detailed embodiment does further description.
Referring to fig. 1 to 6 of the drawings, fig. 1 shows a three-dimensional structure of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature, fig. 2 shows a three-dimensional structure (with a housing hidden) of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature, fig. 3 shows an explosion structure of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature in a top view, fig. 4 shows an explosion structure of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature in a bottom view, fig. 5 shows a projection structure of the piezoelectric ceramic precision rotation stage for ultra-high vacuum and ultra-low temperature in a main view, and fig. 6 shows a cross-sectional structure of the piezoelectric ceramic precision rotation stage in an AA direction in fig. 5.
Preferred embodiments.
Preferably, the piezoelectric ceramic precision rotation platform for ultra-high vacuum and ultra-low temperature comprises a housing 10 and a rotation platform 11, and further comprises:
a rotating shaft 18 (with a shaft section in a loop shape), the rotating shaft 18 having an upper end (extending in an axial direction of the rotating shaft 18) and a lower end (integrally formed with the upper end (and extending in a radial direction of the rotating shaft 18)), the rotating shaft 18 being fixedly connected to the rotating platform 11 (the rotating platform 11 being partially inscribed in the rotating shaft 18);
the bearing 14 and the upper top sheet 15 are sequentially sleeved on the upper end part of the rotating shaft 18, a first space for accommodating at least one piezoelectric ceramic assembly 20 is formed between the upper top sheet 15 and the lower end part of the rotating shaft 18, the upper end surface of each piezoelectric ceramic assembly 20 (positioned in the first space) is tightly attached to and contacted with the upper top sheet 15, and the lower end surface of each piezoelectric ceramic assembly 20 is tightly attached to and contacted with a second friction layer 19 arranged on the upper surface of the lower end part of the rotating shaft 18;
a bottom plate 16, wherein the bottom plate 16 and the upper top plate 15 are coaxially arranged, a second space for placing at least one piezoelectric ceramic assembly 20 is arranged between the bottom plate 16 and the lower end part of the rotating shaft 18, the upper end surface of each piezoelectric ceramic assembly 20 (positioned in the second space) is tightly attached to and contacted with a first friction layer 17 arranged on the lower surface of the lower end part of the rotating shaft 18, and the lower end surface of each piezoelectric ceramic assembly 20 is tightly attached to and contacted with the bottom plate 16;
a pre-tensioning sheet 12 and a plurality of sapphire balls 13, each sapphire ball 13 being located between the pre-tensioning sheet 12 and the base sheet 16, each sapphire ball 13 being partially embedded in a recess located in (the lower end face of) the base sheet 16.
Further, the size of the piezoelectric ceramic precision rotating platform for the ultra-high vacuum and ultra-low temperature is preferably 30mm by 34 mm.
Further, the bearing 14 is preferably a vacuum bearing, and the balls of the bearing 14 have a molybdenum disulfide protective layer.
Further, the piezoelectric ceramic precision rotating platform for the ultra-high vacuum and extremely-low temperature is preferably made of a non-magnetic material.
Further, the rotary platform 11 has a through hole in the axial direction.
Further, the piezoelectric ceramic assembly 20 preferably includes 4 piezoelectric ceramic plates stacked in sequence.
Further, the first friction layer 17 is preferably made of an aluminum oxide sheet.
Further, the US coupling second friction layer 19 preferably employs aluminum oxide sheets.
Further, the pre-tightening piece 12 is preferably a beryllium copper piece.
Further, the number of the piezoelectric ceramic components 20 located in the first space is preferably 3.
Further, the number of the piezoelectric ceramic components 20 located in the second space is preferably 3.
Further, the number of the sapphire balls 13 is preferably 3.
The first embodiment (the main difference between this embodiment and the preferred embodiment is that the shape of the rotation axis 18 is not directly defined).
Preferably, the piezoelectric ceramic precision rotation platform for ultra-high vacuum and ultra-low temperature comprises a housing 10 and a rotation platform 11, and further comprises:
a rotating shaft 18, wherein the rotating shaft 18 is fixedly connected with the rotating platform 11 (the rotating platform 11 is partially inscribed in the rotating shaft 18);
the bearing 14 and the upper top sheet 15 are sequentially sleeved on the rotating shaft 18, a first space for accommodating at least one piezoelectric ceramic assembly 20 is formed between the upper top sheet 15 and the rotating shaft 18, the upper end face of each piezoelectric ceramic assembly 20 (positioned in the first space) is tightly attached to and contacted with the upper top sheet 15, and the lower end face of each piezoelectric ceramic assembly 20 is tightly attached to and contacted with a second friction layer 19 arranged on the upper surface of the rotating shaft 18;
a bottom plate 16, wherein the bottom plate 16 and the upper top plate 15 are coaxially arranged, a second space for accommodating at least one piezoelectric ceramic component 20 is arranged between the bottom plate 16 and the rotating shaft 18, the upper end surface of each piezoelectric ceramic component 20 (positioned in the second space) is tightly attached to and contacted with a first friction layer 17 arranged on the lower surface of the rotating shaft 18, and the lower end surface of each piezoelectric ceramic component 20 is tightly attached to and contacted with the bottom plate 16;
a pre-tensioning sheet 12 and a plurality of sapphire balls 13, each sapphire ball 13 being located between the pre-tensioning sheet 12 and the base sheet 16, each sapphire ball 13 being partially embedded in a recess located in (the lower end face of) the base sheet 16.
Further, the size of the piezoelectric ceramic precision rotating platform for the ultra-high vacuum and ultra-low temperature is preferably 30mm by 34 mm.
Further, the bearing 14 is preferably a vacuum bearing, and the balls of the bearing 14 have a molybdenum disulfide protective layer.
Further, the piezoelectric ceramic precision rotating platform for the ultra-high vacuum and extremely-low temperature is preferably made of a non-magnetic material.
Further, the rotary platform 11 has a through hole in the axial direction.
Further, the piezoelectric ceramic assembly 20 preferably includes 4 piezoelectric ceramic plates stacked in sequence.
Further, the first friction layer 17 is preferably made of an aluminum oxide sheet.
Further, the second friction layer 19 is preferably made of an aluminum oxide sheet.
Further, the pre-tightening piece 12 is preferably a beryllium copper piece.
Further, the number of the piezoelectric ceramic components 20 located in the first space is preferably 3.
Further, the number of the piezoelectric ceramic components 20 located in the second space is preferably 3.
Further, the number of the sapphire balls 13 is preferably 3.
According to the above-mentioned embodiment, the utility model discloses a super high vacuum is accurate revolving stage of piezoceramics for extremely low temperature, bearing 14 are installed at the top of the inside of shell 10, and top plate 15 is hugged closely to the lower surface of bearing 14, and the upper surface of the bottom of rotation axis 18 is provided with second frictional layer 19, and the bottom of rotation axis 18 is provided with first frictional layer 17 to on the lower terminal surface of top plate 15 and the up end of film 16, glue piezoceramics subassembly 20 respectively. The rotation shaft 18 is sequentially passed through the upper top plate 15 and the bearing 14, and the piezoelectric ceramic assembly 20 located at the upper end surface is brought into close contact with the upper top plate 15. The upper end face of the base sheet 16 is then brought into close contact with the piezoelectric ceramic element 20 located on the lower end face. After the power is switched on, under the action of electric excitation, the piezoelectric ceramic components 20 on the upper end face and the lower end face move, the rotating shaft 18 is rotated through friction, and the rotating shaft 18 and the rotating platform 11 are fixed together, so that the rotating shaft 18 drives the rotating platform 11 to rotate together. The sapphire ball 13 is placed in a concave pit of the bottom plate 16, and finally the pre-tightening piece 12 and the shell 10 are installed together through screws, so that the pre-tightening force can be adjusted through adjusting the tightness of the screws, and the rotation smoothness of the rotating platform can be adjusted.
According to the above embodiment, the utility model discloses an ultra-high vacuum is accurate revolving stage of piezoceramics for extremely low temperature according to innovative degree and vital degree, further analysis as follows.
1. The volume is small, the length, the width and the height are 30mm 34mm, and the size can be smaller according to the requirement.
2. The bearing is introduced to ensure that the displacement table has high durability and better coaxiality.
3. All materials of the rotating platform are compatible with an ultrahigh vacuum environment and a very low temperature environment.
4. The displacement table can be used in combination with other displacement tables to achieve multiple degrees of freedom.
5. The ball of the bearing is plated with a molybdenum disulfide protective layer, and the bearing has a self-lubricating effect.
6. The displacement table is compatible with an ultralow temperature (4k) environment and resistant to high-temperature baking.
7. The displacement table is not limited by the installation mode and can be horizontally installed, vertically installed, obliquely installed and inversely installed.
8. The pretightening force between the piezoelectric ceramic legs of the displacement table and the second friction layer is adjustable.
9. All parts of the displacement table can be made of non-magnetic materials, and the displacement table is not influenced by a magnetic field and does not generate a magnetic field.
10. The piezoelectric ceramics have fast reaction, and a plurality of groups of piezoelectric ceramics can synchronously operate.
11. The rotating platform is hollow in the center and is suitable for an optical environment.
12. The piezoelectric rotating platform can bear a large load, and the number of the piezoelectric ceramics can be increased or decreased according to actual conditions to adjust the load.
13. Can be matched with a carbon film resistor for accurate positioning.
According to the embodiment, the utility model discloses an ultra-high vacuum is accurate revolving stage of piezoceramics for utmost point low temperature is applicable to ultra-high vacuum, utmost point low temperature environment as preferred, compatible optical environment's revolving stage (also compatible conventional environment uses). The volume is small, so that more cold can be obtained at the position of the sample stage, and better conditions are provided for extremely low temperature research. The device has small volume, can be combined with other moving parts for use, and can obtain more degrees of freedom. The piezoelectric ceramic components are uniformly distributed in 3 groups on one surface, the total upper surface and the lower surface are 6 groups of piezoelectric ceramic components, each group consists of 4 piezoelectric ceramic pieces (but each group is not limited to 4 piezoelectric ceramic pieces), and the piezoelectric ceramic components have the characteristics of large load and stable operation. And the use of the pre-tightening piece enables the pre-tightening force to be adjustable and the smoothness of the rotating platform to be adjusted. The amplitude and frequency of the piezoelectric ceramic are adjustable.
It is worth mentioning that the utility model discloses a technical features such as the concrete lectotype of piezoceramics piece that the patent application relates to should be regarded as prior art, and the concrete structure of these technical features, theory of operation and the control mode that probably involves, spatial arrangement mode adopt in the field conventional selection can, should not be regarded as the utility model discloses a little place, the utility model discloses a do not further specifically expand the detailing.
It will be apparent to those skilled in the art that modifications and variations can be made in the above-described embodiments, or some features of the invention may be substituted or omitted, and any modification, substitution, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (10)
1. The utility model provides a super high vacuum utmost point low temperature is with accurate revolving stage of piezoceramics which characterized in that, includes shell and rotary platform, still includes:
the rotating shaft is provided with an upper end part and a lower end part which is integrally formed with the upper end part, and the rotating shaft is fixedly connected with the rotating platform;
the bearing and the upper top sheet are sequentially sleeved at the upper end part of the rotating shaft, a first space for placing at least one piezoelectric ceramic component is formed between the upper top sheet and the lower end part of the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the upper top sheet, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with a second friction layer arranged on the upper surface of the lower end part of the rotating shaft;
the bottom plate and the upper top plate are coaxially arranged, a second space for placing at least one piezoelectric ceramic component is formed between the bottom plate and the lower end part of the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the first friction layer arranged on the lower surface of the lower end part of the rotating shaft, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with the bottom plate;
the sapphire substrate comprises a pre-tightening sheet and a plurality of sapphire balls, wherein each sapphire ball is located between the pre-tightening sheet and the bottom sheet, and each sapphire ball is partially embedded in a groove located in the bottom sheet.
2. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotation stage of claim 1, wherein the dimension of the ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotation stage is 30mm by 34 mm.
3. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 1, wherein the bearing is a vacuum bearing.
4. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 1, wherein the ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table is made of a non-magnetic material.
5. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 1, wherein the rotary table has a through hole in an axial direction.
6. The utility model provides a super high vacuum utmost point low temperature is with accurate revolving stage of piezoceramics which characterized in that, includes shell and rotary platform, still includes:
the rotating shaft is fixedly connected with the rotating platform;
the bearing and the upper top sheet are sequentially sleeved on the rotating shaft, a first space for accommodating at least one piezoelectric ceramic component is formed between the upper top sheet and the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the upper top sheet, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with a second friction layer arranged on the upper surface of the lower end part of the rotating shaft;
the bottom plate and the upper top plate are coaxially arranged, a second space for placing at least one piezoelectric ceramic component is arranged between the bottom plate and the rotating shaft, the upper end face of each piezoelectric ceramic component is tightly attached to and contacted with the first friction layer arranged on the lower surface of the rotating shaft, and the lower end face of each piezoelectric ceramic component is tightly attached to and contacted with the bottom plate;
the sapphire substrate comprises a pre-tightening sheet and a plurality of sapphire balls, wherein each sapphire ball is located between the pre-tightening sheet and the bottom sheet, and each sapphire ball is partially embedded in a groove located in the bottom sheet.
7. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 6, wherein the balls of the bearing have a molybdenum disulfide protective layer.
8. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 6, wherein the piezoelectric ceramic assembly comprises 4 piezoelectric ceramic plates sequentially stacked.
9. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 6, wherein the first friction layer is made of aluminum oxide sheet.
10. The ultra-high vacuum ultra-low temperature piezoelectric ceramic precision rotary table according to claim 6, wherein the pre-tightening piece is a beryllium copper sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921485111.0U CN210775553U (en) | 2019-09-06 | 2019-09-06 | Piezoelectric ceramic precision rotating platform for ultra-high vacuum and extremely-low temperature |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921485111.0U CN210775553U (en) | 2019-09-06 | 2019-09-06 | Piezoelectric ceramic precision rotating platform for ultra-high vacuum and extremely-low temperature |
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| CN210775553U true CN210775553U (en) | 2020-06-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501524A (en) * | 2019-09-06 | 2019-11-26 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum extremely low temperature piezoelectric ceramics precision rotation platform |
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2019
- 2019-09-06 CN CN201921485111.0U patent/CN210775553U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110501524A (en) * | 2019-09-06 | 2019-11-26 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum extremely low temperature piezoelectric ceramics precision rotation platform |
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