CN210738774U

CN210738774U - Vacuum device used in closed box chamber

Info

Publication number: CN210738774U
Application number: CN201921639826.7U
Authority: CN
Inventors: 张志平; 张黎源; 许忠政; 姜正鹤
Original assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Current assignee: Research Institute of Physical and Chemical Engineering of Nuclear Industry
Priority date: 2019-09-29
Filing date: 2019-09-29
Publication date: 2020-06-12
Anticipated expiration: 2029-09-29

Abstract

The utility model discloses a vacuum device used in a closed box chamber, which comprises a vacuum chamber and a vacuum pump, wherein a corrugated pipe, an elbow pipeline and a high vacuum pipeline are sequentially connected between the vacuum chamber and the vacuum pump, and metal sealing structures are arranged between the vacuum chamber and the vacuum pump; the vacuum chamber is arranged on the bracket platform; the front door of the vacuum chamber is arranged on the vacuum chamber through a front door movement mechanism, and the front door movement mechanism is fixedly connected with the truss and further arranged on the support platform; the vacuum chamber is provided with a vacuum chamber bottom door flange, and the vacuum chamber bottom door is arranged on the bottom door lifting mechanism; sealing ring sealing structures are arranged between the front door of the vacuum chamber and between the bottom door of the vacuum chamber and the vacuum chamber. The utility model adopts metal sealing for all sealing connections except the door sealing of the motion mechanism, thereby ensuring reliable connection and vacuum sealing; the door of the movement mechanism is driven by a motor, and the remote inspection and maintenance of the motor are realized by a power manipulator; a power manipulator interface is designed on the flange of the sealing ring retainer, so that the manipulator can be operated remotely conveniently.

Description

Vacuum device used in closed box chamber

Technical Field

The utility model relates to a vacuum apparatus field specifically is a vacuum apparatus for in airtight box room.

Background

In the application fields of medical treatment, nuclear industry and the like with clean requirements and needing strong radiation protection, experimental equipment is often installed in a large-scale box room with certain sealing requirements, personnel cannot enter the box room to directly operate the equipment due to the fact that the box room has strong radiation dosage and ultra-clean requirements, and the performance of a plurality of components under the irradiation condition is different from that in a normal state, so that higher requirements are provided for the performance and the inspection maintainability of the device. The vacuum equipment is different from other equipment, the vacuum performance index is the core parameter of the equipment, the influence factors are more, and the requirement on the sealing performance is very high.

SUMMERY OF THE UTILITY MODEL

The present invention provides a vacuum device for use in a closed chamber to solve the above technical problem.

The utility model discloses a realize according to following technical scheme:

a vacuum device used in a closed box chamber comprises a vacuum chamber arranged in the closed box chamber and a vacuum pump arranged outside the closed box chamber, wherein a corrugated pipe, an elbow pipeline and a high vacuum pipeline are sequentially connected between the vacuum chamber and the vacuum pump; metal sealing structures are arranged among the vacuum chamber, the corrugated pipe, the elbow pipeline and the high vacuum pipeline;

the vacuum chamber is arranged on the bracket platform; the front door of the vacuum chamber is arranged on the vacuum chamber through a front door movement mechanism, and the front door movement mechanism is fixedly connected with the truss and further arranged on the support platform; the vacuum chamber is provided with a vacuum chamber bottom door flange, and the vacuum chamber bottom door is arranged on the bottom door lifting mechanism; and sealing ring sealing structures are arranged between the front door of the vacuum chamber and between the bottom door of the vacuum chamber and the vacuum chamber.

Further, the metal sealing structure comprises a first flange, a second flange, a positioning assembly, a metal sealing ring and a connecting piece; four corners of the sealing side of the first flange are respectively provided with a mounting hole, and threaded holes are formed at the bottoms of the mounting holes; the positioning assembly comprises a bolt, a second spring and a positioning pin; the positioning pin is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt; a second spring is arranged between the positioning pin and the wall of the first flange mounting hole; the metal sealing ring is bent to be square and sleeved on positioning pins in positioning assemblies arranged at four corners of the first flange; the first flange and the second flange are fastened through a connecting piece.

Furthermore, the locating pin is of an internal hollow structure, the bolt is located in the locating pin, the inner diameter of one end of the locating pin is reduced, and the nut of the bolt is clamped at the reduced inner diameter position of the locating pin; the locating pin and the outer diameter of the same end with the inner diameter reducing form reducing, and the second spring is sleeved on the outer diameter reducing part of the locating pin.

Furthermore, the sealing ring sealing structure comprises a vacuum chamber flange, a retainer flange, a door flange, a clamping block, a hanging component and a sealing ring; the upper end of the vacuum chamber flange is provided with an installation positioning groove for installing a hanging piece assembly; the upper part of the retainer flange is provided with more than one mounting hole, and the pendant assemblies corresponding to the number of the mounting holes are fixed in the mounting holes and comprise pins, gaskets and screws; the middle of the top of the retainer flange is provided with a clamping block; and sealing grooves are formed in two sides of the retainer flange, and the sealing rings are arranged in the sealing grooves.

Furthermore, the front door movement mechanism comprises a door frame, a power mechanism and a movable connecting mechanism; the gantry is connected with a front door of the vacuum chamber through a movable connecting mechanism; the movable connecting mechanism comprises a stress application block arranged on the door frame, and the stress application block is connected with the stop block through a stress application shaft and a first spring; the stop block is provided with a third sliding block which slides on a third guide rail, and the third guide rail is arranged on the door frame; the stop block is also connected with the connecting rod; two ends of the connecting rod are respectively connected with the front door of the vacuum chamber through the swing arms, and the connecting form among the connecting rod, the swing arms and the front door of the vacuum chamber is hinge connection to form a four-connecting-rod structure; a threaded hole is formed in the door frame, and a jackscrew is installed in a matched mode with the threaded hole to realize manual pre-tightening of a front door of the vacuum chamber; the bottom of the front door of the vacuum chamber is provided with a support roller which moves on the track; the rail is an L-shaped section rail, and the side surface of the rail is provided with a notch so that the supporting roller can move back and forth through the notch; the side surface of the vacuum chamber flange is provided with a limiting idler wheel of a front door of the vacuum chamber.

Furthermore, the power mechanism comprises a motor, a first screw rod and a first guide rail which are positioned above the front door of the vacuum chamber, and a second screw rod and a second guide rail which are positioned below the front door of the vacuum chamber; the first screw rod and the second screw rod are respectively nested with a first nut and a second nut which are matched with the first screw rod and the second screw rod, and the tail ends of the first screw rod and the second screw rod are respectively arranged on the truss and the support platform through screw rod supporting structures; the first guide rail and the second guide rail are respectively provided with a first sliding block and a second sliding block, the upper end of the portal frame is connected with the first sliding block and the first nut, and the lower end of the portal frame is connected with the second sliding block and the second nut.

Further, the motor is connected with a first commutator through a speed reducer and a coupler, and the first commutator is connected with a first screw rod; the first commutator is connected with the second commutator through a connecting shaft, and the second commutator is connected with the second screw rod.

Furthermore, flexible couplings are arranged between the first commutator and the first screw rod and between the first commutator and the connecting shaft, and the flexible couplings are corrugated pipe couplings.

Furthermore, the gantry moves in a translational manner along the first guide rail and the second guide rail under the constraint of the first sliding block and the second sliding block, the gantry moves in a translational manner in place and touches the limit switch, and the limit switch outputs a signal to stop the motor from running.

Furthermore, the front door movement mechanism and the bottom door lifting mechanism adopt a motor-speed reducer-lead screw driving mode, and the motor is provided with a power manipulator interface.

The utility model has the advantages and beneficial effects that:

1. the utility model adopts metal sealing for all sealing connections except the door sealing of the motion mechanism, thereby ensuring reliable connection and vacuum sealing;

2. the door of the motion mechanism of the utility model is driven by the motor, and the remote inspection and maintenance of the motor can be realized by the power mechanical arm;

3. the flange of the sealing ring retainer of the utility model is provided with a power manipulator interface, which is convenient for the remote operation of the manipulator;

4. the utility model discloses select components and parts according to the radiation design index, guarantee the radiation resistance performance of device.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a front view of the front door movement mechanism of the present invention;

FIG. 3 is a top view of the front door movement mechanism of the present invention;

FIG. 4 is a side view of the front door movement mechanism of the present invention;

FIG. 5 is a partial view of the cushion assembly of the present invention;

fig. 6 is a schematic structural view of a third guide rail and a third slide block in the buffering assembly of the present invention;

fig. 7 is a schematic view of the metal sealing structure after the sealing ring of the present invention is compressed;

FIG. 8 is a schematic view (local) of the sealing ring of the present invention before compressing

Fig. 9 is a schematic view of the installation and sealing of the vacuum seal retainer of the present invention;

FIG. 10 is a front view of a vacuum chamber flange of the present invention;

FIG. 11 is a side view of a flange of the vacuum chamber of the present invention

Fig. 12 is a front view of the utility model vacuum seal retainer;

fig. 13 is a side view of the utility model vacuum seal retainer;

fig. 14 is a schematic view of a partial structure of the vacuum seal retainer of the present invention.

Wherein, 1, a vacuum chamber; 2. a front door motion mechanism; 2-1. a motor; 2-2, a speed reducer; 2-3, coupling; 2-4. a first commutator; 2-5, a first screw rod; 2-6. a first nut; 2-7, a first slide block; 2-8. a first guide rail; 2-9. connecting shaft; 2-10. a second commutator; 2-11. a second screw rod; 2-12. a second nut; 2-13. a second slide block; 2-14. a second guide rail; 2-15, a screw rod supporting structure; 2-16. a gantry; 2-17, a stress application block; 2-18. a force application shaft; 2-19, a stop block; 2-20. a first spring; 2-21. a third guide rail; 2-22. a third slide block; 2-23. connecting rod; 2-24, swing arm; 2-26, supporting rollers; 2-27. track; 2-29, limiting rollers; 2-31, limit switch; 2-32, top thread; 3. a vacuum chamber front door; 5. a bellows; 6. an elbow pipe; 7. a high vacuum line; 8. a vacuum pump; 9. an electrode flange; 10. a truss; 11. a water pipe; 12. a bottom door lifting mechanism; 13. a closed box chamber; 14. a support platform; 15. a water penetration; 16. an electrical feedthrough; 17. a vacuum chamber bottom door; 18. a first flange; 19. a second flange; 20. a positioning assembly; 20-1. bolt; 20-2. a second spring; 20-3, positioning pins; 21. a metal seal ring; 22. a connecting member; 23. a vacuum chamber flange; 24. a retainer flange; 25. a door flange; 26. installing a positioning groove; 27. a gripping block; 28. mounting holes; 29. a suspension component; 30. a gasket; 31. a screw; 32. a pin; 33. a sealing groove; 34. and (5) sealing rings.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings and examples.

As shown in fig. 1-14, a vacuum device for use in a closed box chamber comprises a vacuum chamber 1 installed in a closed box chamber 13 and a vacuum pump 8 installed outside the closed box chamber 13, wherein a bellows 5, an elbow pipe 6 and a high vacuum pipe 7 are sequentially connected between the vacuum chamber 1 and the vacuum pump 8 to perform a vacuum pumping function; the vacuum pump 8 is arranged outside the closed box chamber 13, so that the original evacuation effect can be achieved, the radiation and pollution to the vacuum pump 8 can be reduced, and the vacuum pump 8 can be maintained on site by taking certain auxiliary measures when in failure.

Metal sealing structures are arranged between the vacuum chamber 1 and the corrugated pipe 5, between the corrugated pipe 5 and the elbow pipeline 6, and between the elbow pipeline 6 and the high vacuum pipeline 7; the rubber ring sealing device is not detachable, the reliability of vacuum sealing connection is improved, and unknown risks such as aging of the rubber ring sealing under irradiation conditions are avoided. The bellows 5 installed between the vacuum chamber 1 and the elbow pipe 6 functions to buffer evacuation and compensate for installation errors.

The vacuum chamber 1 is arranged on a support platform 14 and is connected by bolts; a front door 3 of the vacuum chamber is arranged on the vacuum chamber 1 through a front door movement mechanism 2, and the front door movement mechanism 2 is fixedly connected with a truss 10 and further arranged on a support platform 14; the vacuum chamber 1 works in the closed box chamber 13, and necessarily involves the operation of opening and closing the vacuum chamber door, and the conventional vacuum chamber door is mostly of a hinged door structure, but the hinged door occupies a large space during rotation, and is not easy to realize remote operation. The utility model relates to a real empty room qianmen 3 passes through 2 drives of qianmen motion, can realize automatic translation and pretension to realize the long-range switching of real empty room qianmen 3.

The vacuum chamber 1 is provided with a vacuum chamber bottom door flange, a vacuum chamber bottom door 17 is arranged on a bottom door lifting mechanism 12, and the vacuum chamber bottom door can ascend and descend through the bottom door lifting mechanism 12. The bottom door lifting mechanism 12 comprises two sets of lifting mechanisms, the double-screw lifting structures on the two sides serve as main lifting mechanisms, and the connecting rod shear beam lifting mechanism serves as a standby mechanism and is realized in a motor-reducer-commutator type mode. Four supporting columns of the vacuum chamber 1 are fixed at four corners of the supporting platform 14, and the middle of the supporting platform 14 is hollow so that the bottom door lifting mechanism 12 can lift and seal the bottom door. Because the metal seal is disposable, sealing ring seal structures are arranged between the vacuum chamber front door 3 and the vacuum chamber bottom door 17 and the vacuum chamber 1, and the sealing rings are made of Ethylene Propylene Diene Monomer (EPDM) and have certain irradiation resistance.

The metal sealing structure comprises a first flange 18, a second flange 19, a positioning assembly 20, a metal sealing ring 21 and a connecting piece 22; mounting holes are formed in four corners of the sealing side of the first flange 18, and threaded holes are formed in the bottoms of the mounting holes and used for mounting the positioning assemblies 20; the positioning assembly 20 comprises a bolt 20-1, a second spring 20-2 and a positioning pin 20-3; the positioning pin 20-3 is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt 20-1; a second spring 20-2 is arranged between the positioning pin 20-3 and the wall of the first flange mounting hole; the metal sealing ring 21 is bent to be square and sleeved on positioning pins 20-3 in positioning assemblies 20 arranged at four corners of the first flange 18 to realize positioning; the first flange 18 and the second flange 19 are fastened by a connecting piece 22.

The locating pin 20-3 is of an internal hollow structure, the bolt 20-1 is located in the locating pin 20-3, the inner diameter of one end of the locating pin 20-3 is reduced, the nut of the bolt 20-1 is clamped at the reduced inner diameter position of the locating pin 20-3, the nut of the bolt 20-1 limits the locating pin 20-3, and the locating pin 20-3 is prevented from being separated from the first flange 18 under the action of the elastic force of the second spring 20-2; the locating pin 20-3 and the outer diameter of the same end with the reduced inner diameter form a reduced diameter, and the second spring 20-2 is sleeved on the outer diameter reduced part of the locating pin 20-3.

The first flange 18 and the second flange 19 are both flat flanges and have no positioning structures such as bosses, and the square flange is convenient to process.

The positioning pin 20-3 is in clearance fit with the bolt 20-1.

The positioning pin 20-3 is in clearance fit with the first flange mounting hole and can slide smoothly.

The metal sealing ring 21 is made of soft metal materials such as silver and aluminum, is made of soft materials, and is conveniently bent into a square sealing ring. Preferably, the metal sealing ring 21 is an aluminum metal sealing ring, and can be baked and heated to about 350 ℃ to meet the requirement of high vacuum.

The diameter of the section of the metal sealing ring 21 is about 1 mm-4 mm.

The connecting piece 22 is a bolt; the nut is a self-tightening nut and has a locking structure.

When the flange is installed, the metal sealing rings 21 are hooped on the positioning pins 20-3 arranged at four corners of the first flange 18, so that the metal sealing rings 21 are prevented from sliding; when the positioning pin is screwed down, the positioning pin 20-3 is compressed into the first flange mounting hole by the second flange 19, and the second flange 19 and the first flange 18 are in contact with the metal sealing ring 21, so that the metal sealing ring 21 generates plastic deformation, and sealing is realized. The utility model discloses a locating component 20 has flexible function, can provide locate function during the installation, and withdrawal when sealed does not influence vacuum seal.

The sealing ring sealing structure comprises a vacuum chamber flange 23, a retainer flange 24, a door flange 25, a clamping block 27, a hanging component 29 and a sealing ring 34; the upper end of the vacuum chamber flange 23 is provided with a mounting positioning groove 26 for mounting a hanging component 29; the upper part of the retainer flange 24 is provided with more than one mounting hole 28 for mounting the pendant assembly 29, the pendant assembly 29 corresponding to the number of the mounting holes 28 is fixed in the mounting hole 28, and the pendant assembly 29 comprises a pin 32, a gasket 30 and a screw 31; a clamping block 27 is arranged in the center of the top of the retainer flange 24; and sealing grooves 33 are formed in two sides of the retainer flange 24, and sealing rings 34 are arranged in the sealing grooves 33.

The sealing groove 33 on the retainer flange 24 is a dovetail groove.

The retainer flange 24 is provided with 2 mounting holes 28, and each mounting hole 28 is internally provided with a pendant component 29.

The pin 32 of the hanger assembly 29 is inserted into the mounting hole 28, and a washer 30 and a screw 31 are sequentially installed on the other side of the holder flange 24 to prevent the pin 32 from being removed from the mounting hole 28.

The clamping block 27 is of an inverted boss structure, and is convenient to clamp through a manipulator in a long-distance mode.

The surface of the clamping block 27 is knurled to increase the clamping friction.

The mounting detents 26 are located and numbered to correspond with the hanger assemblies 29.

A clamping block 27 is arranged in the center of the top of the retainer flange 24.

The installation positioning groove 26 is a double-U-shaped groove, the upper groove is large, the lower groove is small, and the hanging component 29 is convenient to install in place.

In operation, the seal rings 34 are installed in the seal grooves 33 on both sides of the retainer flange 24. The manipulator lifts the holder flange 24 by clamping the clamping block 27, so that the hanging component 29 is installed in the installation positioning groove 26, the holder flange 24 is installed on the vacuum chamber flange 23, and the door flange 25 presses the holder flange 24 from the other side, thereby realizing double-side sealing.

The front door movement mechanism 2 comprises door frames 2-16, a power mechanism and a movable connecting mechanism; the door frames 2-16 are connected with a front door 3 of the vacuum chamber through a movable connecting mechanism; the movable connecting mechanism comprises force application blocks 2-17 arranged on the door frames 2-16, and the force application blocks 2-17 are connected with the stop blocks 2-19 through force application shafts 2-18 and first springs 2-20; the stop blocks 2-19 are provided with third slide blocks 2-22, the third slide blocks 2-22 slide on third guide rails 2-21, and the third guide rails 2-21 are arranged on the door frames 2-16; the stop blocks 2-19 are also connected with the connecting rods 2-23; therefore, translational motion can be generated between the door frames 2-16 and the connecting rods 2-23, a buffering component is arranged between the door frames 2-16 and the connecting rods 2-23, and when the door frames move to a limiting position, the first springs 2-20 play a buffering role;

two ends of the connecting rods 2-23 are respectively connected with the front door 3 of the vacuum chamber through swing arms 2-24, and the connecting rods 2-23, the swing arms 2-24 and the front door 3 of the vacuum chamber are connected in a hinge mode to form a four-connecting-rod structure;

threaded holes are formed in the door frames 2-16, and the jackscrews 2-32 are installed in a matched mode with the threaded holes to achieve manual pre-tightening of the front door 3 of the vacuum chamber; the jackscrews 2-32 can be used during manual pre-tightening, when the automatic pre-tightening function is failed or the automatic pre-tightening sealing is not tight, the jackscrews 2-32 can be manually screwed, the door frame 2-16 is not moved, and the jackscrews 2-32 are rotated and advanced to press the front door 3 of the vacuum chamber.

The bottom of the front door 3 of the vacuum chamber is provided with support rollers 2-26, and the support rollers 2-26 move on rails 2-27; the rails 2-27 are L-shaped cross-section rails, and the side surfaces of the rails are provided with notches, so that the supporting rollers 2-26 can move back and forth through the notches;

the side surface of the vacuum chamber flange 23 is provided with limiting rollers 2-29 of a front vacuum chamber door 3, the front vacuum chamber door 3 moves to the limiting rollers 2-29, the front vacuum chamber door 3 can stop translating under the action of the limiting rollers 2-29, at the moment, the motor 2-1 drives the door frame 2-16 to continue moving to drive the swing arms 2-24 to rotate, the front vacuum chamber door 3 moves towards the side of the vacuum chamber 1, and at the moment, the limiting rollers 2-29 provide rolling friction force.

The power mechanism comprises a motor 2-1, a first screw rod 2-5 and a first guide rail 2-8 which are positioned above the front door 3 of the vacuum chamber, and a second screw rod 2-11 and a second guide rail 2-14 which are positioned below the front door 3 of the vacuum chamber; the first screw rod 2-5 and the second screw rod 2-11 are respectively nested with a first nut 2-6 and a second nut 2-12 which are matched with the first screw rod and the second screw rod, and the tail ends of the first screw rod 2-5 and the second screw rod 2-11 are respectively arranged on the truss 10 and the support platform 14 through screw rod supporting structures 2-15; the first guide rail 2-8 and the second guide rail 2-14 are respectively provided with a first sliding block 2-7 and a second sliding block 2-13, the upper end of the door frame 2-16 is connected with the first sliding block 2-7 and the first nut 2-6, and the lower end of the door frame 2-16 is connected with the second sliding block 2-13 and the second nut 2-12.

The motor 2-1 is connected with a first commutator 2-4 through a speed reducer 2-2 and a coupler 2-3, and the first commutator 2-4 is connected with a first screw rod 2-5; the first commutator 2-4 is connected with the second commutator 2-10 through a connecting shaft 2-9, and the second commutator 2-10 is connected with the second screw rod 2-11.

And flexible couplings are arranged between the first commutator 2-4 and the first screw rod 2-5 and between the first commutator 2-4 and the connecting shaft 2-9, and are corrugated pipe couplings.

The door frames 2-16 move in a translation mode along the first guide rails 2-8 and the second guide rails 2-14 under the constraint of the first sliding blocks 2-7 and the second sliding blocks 2-13, the door frames 2-16 move in a translation mode to a position where the door frames touch the limit switches 2-31, and the limit switches 2-31 output signals to enable the motor 2-1 to stop operating. The limit switches 2-31 can be designed redundantly, and reliability is guaranteed. The limit switches 2-31 are mechanical limit switches, are arranged at the positions where the door is completely closed, and control the stop of the motor by feeding back a 24V voltage signal to the motor controller; the motor with the encoder can be selected according to requirements, the starting position and the stopping position of the motor can be realized through an internal encoding program, and the limit switches 2-31 can be used as a second means for controlling the motor to stop. The selection and usage of the limit switch 31 and the motor controller are the basic knowledge in the field of motion control, i.e. the common knowledge of those skilled in the art, and are not the core innovation of the present invention, so that the details are not described herein.

The front end of the jackscrew 2-32 is provided with a universal ball.

The supporting rollers 2-26 adopt universal balls according to the load.

The vacuum chamber automatic door is provided with one set or two sets of four-bar structures consisting of connecting bars 2-23, swing arms 2-24 and a vacuum chamber front door 3 according to the load requirement.

The transmission systems respectively consisting of a first screw rod 2-5, a first nut 2-6, a first slide block 2-7, a first guide rail 2-8, a second screw rod 2-11, a second nut 2-12, a second slide block 2-13 and a second guide rail 2-14 are symmetrically arranged; the motor 2-1 drives the first screw rod 2-5 and the second screw rod 2-11 to realize synchronous motion through the speed reducer 2-2, the first commutator 2-4, the connecting shaft 2-9 and the second commutator 2-10.

The motor-reducer-commutator assembly drives the first screw rod, the second screw rod is synchronously driven through the connecting shaft and the commutator, the upper screw rod and the lower screw rod synchronously rotate to respectively drive the sliding blocks, so that the portal frame-door body is driven to do translational motion, and after the stop block is touched, the translational motion is converted into motion perpendicular to the door body under the action of the four-bar structure, so that a pre-tightening function is realized.

The front door movement mechanism 2 and the bottom door lifting mechanism 12 adopt a motor-reducer-lead screw driving mode, and the motor is provided with a power manipulator interface, so that remote replacement, inspection and maintenance can be carried out through the power manipulator.

The components such as the motor, the cable, the travel switch and the like are radiation-resistant components.

According to different design temperatures, the vacuum chamber 1 can be designed to have a water jacket-free structure, the water pipe 11 adopts a metal pipe, and the penetrating of the closed box chamber 13 adopts a water penetrating piece 15.

The penetration of the cable into the enclosure 13 is by means of an electrical penetration 16.

The electrode flange 9 is used for an electrical through-connection with the vacuum chamber 1 for performing certain process functions.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. A vacuum device used in a closed box chamber is characterized by comprising a vacuum chamber (1) arranged in the closed box chamber (13) and a vacuum pump (8) arranged outside the closed box chamber (13), wherein a corrugated pipe (5), an elbow pipeline (6) and a high vacuum pipeline (7) are sequentially connected between the vacuum chamber (1) and the vacuum pump (8); metal sealing structures are arranged between the vacuum chamber (1) and the corrugated pipe (5), between the corrugated pipe (5) and the elbow pipeline (6), and between the elbow pipeline (6) and the high vacuum pipeline (7);

the vacuum chamber (1) is arranged on a support platform (14); a front door (3) of the vacuum chamber is arranged on the vacuum chamber (1) through a front door movement mechanism (2), and the front door movement mechanism (2) is fixedly connected with the truss (10) and further arranged on a support platform (14); the vacuum chamber (1) is provided with a vacuum chamber bottom door flange, and a vacuum chamber bottom door (17) is arranged on the bottom door lifting mechanism (12); and sealing ring sealing structures are arranged between the vacuum chamber front door (3) and the vacuum chamber bottom door (17) and the vacuum chamber (1).

2. A vacuum device for use in a closed chamber according to claim 1, wherein said metal sealing structure comprises a first flange (18), a second flange (19), a positioning assembly (20), a metal sealing ring (21) and a connecting piece (22); four corners of the sealing side of the first flange (18) are respectively provided with a mounting hole, and threaded holes are formed at the bottom of the mounting holes; the positioning assembly (20) comprises a bolt (20-1), a second spring (20-2) and a positioning pin (20-3); the positioning pin (20-3) is arranged in a threaded hole at the bottom of the first flange mounting hole through a bolt (20-1); a second spring (20-2) is arranged between the positioning pin (20-3) and the wall of the first flange mounting hole; the metal sealing ring (21) is bent to be square and sleeved on positioning pins (20-3) in positioning assemblies (20) arranged at four corners of the first flange (18); the first flange (18) and the second flange (19) are fastened by a connecting piece (22).

3. The vacuum device for the closed box chamber is characterized in that the positioning pin (20-3) is of an internal hollow structure, the bolt (20-1) is positioned in the positioning pin (20-3), the inner diameter of one end of the positioning pin (20-3) is reduced, and the nut of the bolt (20-1) is clamped at the reduced inner diameter part of the positioning pin (20-3); the locating pin (20-3) and the outer diameter of the same end with the reduced inner diameter form a reduced diameter, and the second spring (20-2) is sleeved on the outer diameter reduced part of the locating pin (20-3).

4. A vacuum device for use in a closed box chamber according to claim 1, wherein the sealing ring sealing structure comprises a vacuum chamber flange (23), a holder flange (24), a door flange (25), a gripping block (27), a hanger assembly (29), a sealing ring (34); the upper end of the vacuum chamber flange (23) is provided with a mounting positioning groove (26) for mounting a hanging component (29); the upper part of the retainer flange (24) is provided with more than one mounting hole (28), the hanging component (29) corresponding to the number of the mounting holes (28) is fixed in the mounting hole (28), and the hanging component (29) comprises a pin (32), a gasket (30) and a screw (31); a clamping block (27) is arranged in the center of the top of the retainer flange (24); both sides of the retainer flange (24) are provided with sealing grooves (33), and the sealing rings (34) are arranged in the sealing grooves (33).

5. A vacuum device for use in an enclosure according to claim 1, characterized in that the front door movement mechanism (2) comprises a gantry (2-16), a power mechanism and a movable connection mechanism; the door frames (2-16) are connected with a front door (3) of the vacuum chamber through a movable connecting mechanism; the movable connecting mechanism comprises a stress application block (2-17) arranged on a door frame (2-16), and the stress application block (2-17) is connected with a stop block (2-19) through a stress application shaft (2-18) and a first spring (2-20); the stop blocks (2-19) are provided with third sliding blocks (2-22), the third sliding blocks (2-22) slide on third guide rails (2-21), and the third guide rails (2-21) are arranged on the door frames (2-16); the stop blocks (2-19) are also connected with the connecting rods (2-23); two ends of the connecting rods (2-23) are respectively connected with the vacuum chamber front door (3) through swing arms (2-24), and the connecting rods (2-23), the swing arms (2-24) and the vacuum chamber front door (3) are connected in a hinge mode to form a four-connecting-rod structure; threaded holes are formed in the door frames (2-16), and the jackscrews (2-32) are installed in a matched mode with the threaded holes to achieve manual pre-tightening of the front door (3) of the vacuum chamber; the bottom of the front door (3) of the vacuum chamber is provided with supporting rollers (2-26), and the supporting rollers (2-26) move on the rails (2-27); the rails (2-27) are L-shaped cross-section rails, and the side surfaces of the rails are provided with notches, so that the supporting rollers (2-26) can move back and forth through the notches; the side surface of the vacuum chamber flange (23) is provided with a limiting roller (2-29) of the vacuum chamber front door (3).

6. A vacuum device for use in an enclosure according to claim 5, characterised in that the power means comprise an electric motor (2-1), and a first screw (2-5) and a first guide (2-8) above the front door (3) of the vacuum chamber, a second screw (2-11) and a second guide (2-14) below the front door (3) of the vacuum chamber; the first screw rod (2-5) and the second screw rod (2-11) are respectively nested with a first nut (2-6) and a second nut (2-12) which are matched with the first screw rod and the second screw rod, and the tail ends of the first screw rod (2-5) and the second screw rod (2-11) are respectively arranged on the truss (10) and the support platform (14) through screw rod supporting structures (2-15); the first guide rail (2-8) and the second guide rail (2-14) are respectively provided with a first sliding block (2-7) and a second sliding block (2-13), the upper end of the door frame (2-16) is connected with the first sliding block (2-7) and the first nut (2-6), and the lower end of the door frame (2-16) is connected with the second sliding block (2-13) and the second nut (2-12).

7. A vacuum device for use in a closed box chamber according to claim 6, characterized in that the motor (2-1) is connected to the first commutator (2-4) via a speed reducer (2-2) and a coupling (2-3), the first commutator (2-4) being connected to the first screw (2-5); the first commutator (2-4) is connected with the second commutator (2-10) through a connecting shaft (2-9), and the second commutator (2-10) is connected with the second screw rod (2-11).

8. A vacuum device for use in a closed chamber according to claim 7, characterized in that flexible couplings are arranged between the first commutator (2-4) and the first screw (2-5) and between the first commutator (2-4) and the coupling shaft (2-9), said flexible couplings being bellows couplings.

9. A vacuum device for use in an enclosure according to claim 6, wherein the gantries (2-16) are translationally moved along the first (2-8) and second (2-14) guides under the constraint of the first (2-7) and second (2-13) slides, the gantries (2-16) are translationally moved to a position where they touch the limit switches (2-31), and the limit switches (2-31) output signals to stop the motor (2-1).

10. The vacuum device for the inside of the closed box chamber as claimed in claim 1, characterized in that the front door movement mechanism (2) and the bottom door lifting mechanism (12) are driven by a motor-reducer-lead screw, and the motor is designed with a power manipulator interface.