CN210716485U

CN210716485U - Sealing element

Info

Publication number: CN210716485U
Application number: CN201920923260.4U
Authority: CN
Inventors: 杨娜; 曹京星; 朱建华
Original assignee: Beijing Juntai Innovation Technology Co Ltd
Current assignee: Deyun Chuangxin (Beijing) Technology Co.,Ltd.
Priority date: 2019-06-18
Filing date: 2019-06-18
Publication date: 2020-06-09
Anticipated expiration: 2029-06-18

Abstract

The utility model provides a sealing member for seal the through-hole of chamber locular wall, include: a sealing joint and a locking component, the sealing joint comprising: the fixing part is fixedly connected with the body, the sealing joint is inserted into the chamber wall, the fixing part is arranged on one side of the chamber wall, the body is arranged on the other side of the chamber wall, the locking component is used for locking the sealing joint on the chamber wall, the cross section of the fixing part is not circular, a limiting groove matched with the fixing part is formed in one side, close to the fixing part, of the chamber wall, the fixing part is arranged in the limiting groove, when the locking component is rotated, the fixing part is limited in the limiting groove and cannot rotate along with the locking component, and the sealing joint is tightly installed on the chamber wall, so that the vacuum tightness of the vacuum chamber is guaranteed.

Description

Sealing element

Technical Field

The utility model relates to a technical field of photovoltaic module processing, concretely relates to sealing member.

Background

At present, a cooling structure is arranged inside a chamber of vacuum equipment (such as PECVD equipment and PVD equipment) to cool the chamber, and the cooling structure generally adopts a mode that a water-cooling pipe is wound in the chamber and is connected with the outside of the chamber through a sealing joint, so that cooling water is introduced into the vacuum chamber while vacuum sealing of the chamber is ensured;

in the prior art, the sealing joint is tightly connected with the chamber by adopting a thread matching mode between the sealing joint and the locking component, but when the locking component is used for locking the sealing joint, because the cross section of the fixing part of the sealing joint is of a circular structure and has no limiting structure, the fixing part can rotate along with the locking component, so that the loosening condition occurs, the vacuum tightness of the vacuum chamber is influenced, and the air leakage of the vacuum chamber is caused.

SUMMERY OF THE UTILITY MODEL

In view of this, the present invention provides a sealing member, so as to alleviate the technical problem caused by the easy loosening of the existing sealing joint when the sealing joint is installed in the chamber.

Technical scheme (I)

The utility model provides a sealing member for seal the through-hole of chamber locular wall, include: a sealing joint and a locking component, the sealing joint comprising: the fixing part is fixedly connected with the body, the sealing joint is inserted into the chamber wall, the fixing part is arranged on one side of the chamber wall, the body is arranged on the other side of the chamber wall, the locking part is arranged on one side of the chamber wall opposite to the fixing part, the locking part is used for locking the sealing joint on the chamber wall, the cross section of the fixing part is not circular, a limiting groove matched with the fixing part is formed in one side, close to the fixing part, of the chamber wall, and the fixing part is arranged in the limiting groove.

Optionally, the fixing part is square or oval.

Optionally, the shape of the limiting groove is matched with the shape of the fixing part.

Optionally, the sealing member connection structure further includes: at least one securing assembly, the securing assembly comprising: the connecting piece with set up in locating hole on the fixed part and set up in the constant head tank of spacing inslot, locating hole and constant head tank respectively with the connecting piece is threaded connection.

Optionally, the axis of the positioning through hole is aligned with the axis of the positioning groove.

Optionally, the number of the fixing assemblies is four.

Optionally, four the positioning through holes are arranged on the fixing part at equal intervals along the circumferential direction.

Optionally, four the constant head tank sets up along circumference equidistance in the spacing inslot.

Optionally, the surface of the fixing part close to the chamber wall of the chamber is provided with an anti-slip bulge.

Optionally, the anti-slip protrusions are arranged in a zigzag shape.

(III) the beneficial effects are as follows:

compared with the prior art, the utility model, following beneficial effect has:

the utility model provides a sealing member for seal the through-hole of chamber locular wall, include: a sealing joint and a locking component, the sealing joint comprising: a fixing part and a body, wherein the fixing part is fixedly connected with the body, the sealing joint is inserted in the chamber wall of the chamber, the fixing part is arranged on one side of the chamber wall, the body is arranged on the other side of the chamber wall, the locking part is arranged on one side of the chamber wall opposite to the fixing part, and the locking component is used for locking the sealing joint on the chamber wall, the cross section of the fixing part is not circular, a limiting groove matched with the fixing part is arranged on one side of the chamber wall close to the fixing part, the fixing part is arranged in the limiting groove, when the locking component is rotated, the fixing part is limited in the limiting groove, the fixing part cannot rotate along with the locking component, and the sealing joint is tightly arranged on the wall of the chamber, so that the vacuum tightness of the vacuum chamber is ensured.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained without inventive exercise, wherein:

fig. 1 is a schematic structural diagram of a first embodiment of the present invention;

fig. 2 is a schematic structural view of a fixing portion according to a first embodiment of the present invention;

fig. 3 is a schematic structural diagram of a second embodiment of the present invention;

fig. 4 is a schematic structural view of the fixing portion and the fixing component according to the second embodiment of the present invention;

FIG. 5 is a schematic view of a positioning groove according to a second embodiment of the present invention;

FIG. 6 is a schematic structural view of an anti-slip bump in the third embodiment of the present invention;

fig. 7 is a use state diagram of the present invention.

In the figure: 1. sealing the joint; 2. a locking member; 3. a chamber wall; 4. a fixed part; 5. a body; 6. a limiting groove; 7. a connecting member; 8. positioning a groove; 9. and (4) anti-skid bulges.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The invention will be described in further detail with reference to the following drawings and embodiments:

example one

As shown in fig. 1, 2 and 7, the present application discloses a seal for sealing a through hole of a chamber wall 3, comprising: sealing joint 1 and locking part 2, sealing joint 1 includes: fixed part 4 and body 5, fixed part 4 and body 5 are fixed connection, sealing joint 1 penetrates the back from the through-hole one side of chamber wall 3 and stretches out the opposite side of chamber wall 3, fixed part 4 sets up the one side at chamber wall 3, body 5 penetrates the back from through-hole one side of chamber wall 3 and stretches out the opposite side of chamber wall 3, locking part 2 sets up the one side at chamber wall 3 relative with fixed part 4, and locking part 2 is used for locking sealing joint 1 on chamber wall 3, preferably, locking part 2 sets up to the nut, the nut is connected with 5 screw-thread fit of body, the realization is locked sealing joint 1 on chamber wall 3, another embodiment mode: locking part 2 is connected for the block with body 5, locking part 2's internal face is equipped with at least one arch promptly, be equipped with on body 5 with protruding matched with recess, realize utilizing locking part 2 to lock sealing joint 1 on chamber wall 3 through the cooperation of arch and recess, as shown in fig. 2, the cross section shape of fixed part 4 is not circular, preferably, fixed part 4 sets up to square or oval, this shape is not done concrete injecing, chamber wall 3 is close to one side of fixed part 4 and has seted up with fixed part complex spacing groove 6, fixed part 4 sets up in spacing groove 6, when rotating locking part 2, fixed part 4 is then injectd in spacing groove 6, can not be along with locking part 2 is rotatory together, with sealing joint 1 close mounting on chamber wall 3, thereby guarantee the vacuum seal nature of vacuum chamber.

Optionally, the shape of the limiting groove 6 is matched with the shape of the fixing part 4, so that when the locking part 2 is rotated, the fixing part 4 cannot rotate along with the locking part 2 due to limitation of the limiting groove 6, and therefore working efficiency is improved.

Optionally, a sealing ring is arranged between the limiting groove 6 and the fixing portion 4, and the sealing performance between the sealing joint 1 and the chamber wall 3 of the chamber is enhanced by the sealing ring.

Optionally, a through hole is formed in the body 5 of the sealing joint 1 along the axis, one end of the through hole is connected with an external water conveying pipe outside, and the other end of the through hole is connected with a water cooling pipe in the chamber wall 3, so that external cold water is conveyed to the water cooling pipe in the chamber wall 3 through the sealing joint 1, and cooling in the chamber is achieved.

Example two

A difference from the example is that, in the present embodiment, as shown in fig. 3, 4 and 5,

the seal member connection structure further includes: the fixing component is used for stably fixing the sealing joint 1 on the chamber wall 3, so that when the locking component 2 is rotated, the fixing component 4 is fixed on the chamber wall 3 by the fixing component, and cannot rotate along with the locking component 2, theoretically, the more the number of the fixing components is set, the more the sealing component is fixed on the chamber wall 3, but the more the area of the fixing component 4 is limited, the more the specific number can be adjusted according to production requirements; the fixing assembly includes: connecting piece 7 and set up the positioning hole on fixed part 4 and set up the constant head tank 8 in spacing groove 6, preferably, connecting piece 7 is threaded connection with positioning hole and constant head tank 8 respectively, during the use, is connected with constant head tank 8 in spacing groove 6 after passing the positioning hole on fixed part 4 with connecting piece 7, then when clockwise or anticlockwise rotation connecting piece 7 to fix fixed part 4 on chamber wall 3.

Optionally, the axis of positioning hole and the axis of constant head tank 8 are on a straight line, and this design guarantees that connecting piece 7 can accurately insert in constant head tank 8 after passing positioning hole, and connecting piece 7 can not be because positioning hole and constant head tank 8 are not on a straight line to the condition of slope appears, finally guarantees to utilize the cooperation of fixed subassembly and locking part 2, thereby fixes sealing joint 1 on cavity locular wall 3 steadily, thereby guarantees the vacuum seal nature of vacuum chamber.

Alternatively, as shown in fig. 4, the number of the fixing members is set to four.

Alternatively, four positioning through holes are provided on the fixing portion 4 at equal intervals in the circumferential direction.

Optionally, four constant head tanks 8 set up in spacing groove 6 along circumference equidistance, and the atress of fixed part 4 is guaranteed evenly in this design, effectively improves fixed effect.

EXAMPLE III

The difference from the second example is that, in this embodiment, as shown in fig. 6,

optionally, the surface of the fixing portion 4 close to the chamber wall 3 is provided with an anti-slip bump 9, the anti-slip bump 9 is used for enhancing the friction force between the fixing portion 4 and the chamber wall 3, so that the probability that the fixing portion 4 rotates along with the locking component 2 is reduced, and the sealing performance of the sealing joint 1 is ensured.

Optionally, the anti-skid protrusions 9 are arranged in a zigzag manner, and may also be arranged in a spherical manner, and the specific structure and number of the anti-skid protrusions 9 are not limited, as long as the structure capable of enhancing the friction force is included in the protection scope of the present application.

The following explains the assembly process of the present invention:

firstly, processing a sealing joint 1 into a square shape, welding a sawtooth-shaped anti-skid bump 9 on the surface of the sealing joint 1 close to a chamber wall 3, and then forming at least one positioning through hole on a fixing part 4;

meanwhile, a limiting groove 6 matched with the fixing part 4 in shape is formed in the chamber wall 3 of the chamber to be sealed, and a positioning groove 8 corresponding to the positioning through hole is formed in the limiting groove 6;

during the assembly, insert sealing joint 1 and locate in chamber locular wall 3, fixed part 4 sets up in spacing groove 6, body 5 stretches out the opposite side of chamber locular wall 3 after penetrating from the through-hole one side of chamber locular wall 3, afterwards, insert connecting piece 7 in proper order and set up the positioning hole on fixed part 4 and set up in constant head tank 8 in spacing groove 6, then clockwise or anticlockwise rotation connecting piece 7, thereby fix fixed part 4 on chamber locular wall 3, and finally, 2 threaded connection of locking part is on body 5, thereby realize fixing sealing joint 1 on chamber locular wall 3 steadily, the not hard up condition can not take place, effectively guarantee sealing chamber's sealing performance.

The embodiments in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the words "bottom" and "top", "inner" and "outer" refer to directions toward and away from, respectively, a particular component geometry.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the communication may be direct, indirect via an intermediate medium, or internal to both elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.

The above description is only for the preferred embodiment of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A seal for sealing a through hole of a chamber wall (3), comprising: a sealing joint (1) and a locking member (2), the sealing joint (1) comprising: a fixed part (4) and a body (5), wherein the fixed part (4) is fixedly connected with the body (5), the sealing joint (1) is inserted into the chamber wall (3), the fixing part (4) is arranged on one side of the chamber wall (3), the body (5) is arranged on the other side of the chamber wall (3), the locking part (2) is arranged on one side of the chamber wall (3) opposite to the fixing part (4), and the locking means (2) are used to lock the sealing joint (1) to the chamber wall (3), the cross section of the fixing part (4) is not circular, a limiting groove (6) matched with the fixing part (4) is formed in one side, close to the fixing part (4), of the chamber wall (3), and the fixing part (4) is arranged in the limiting groove (6).

2. A seal according to claim 1, characterized in that the fixing portion (4) is provided in a square or oval shape.

3. A seal according to claim 1, characterized in that the shape of the retaining groove (6) is adapted to the shape of the fixing portion (4).

4. A seal according to claim 1, wherein said seal attachment structure further comprises: at least one securing assembly, the securing assembly comprising: connecting piece (7) with set up in positioning hole on fixed part (4) with set up in constant head tank (8) in spacing groove (6), positioning hole and constant head tank (8) respectively with connecting piece (7) are threaded connection.

5. A seal according to claim 4, characterized in that the axis of the positioning through hole is in line with the axis of the positioning slot (8).

6. A seal according to claim 4, wherein the number of securing assemblies is provided as four.

7. A seal according to claim 6, characterized in that four of said positioning through holes are provided circumferentially equidistant on said fixed part (4).

8. A seal according to claim 6, characterized in that four positioning slots (8) are arranged circumferentially equidistant in the retaining slot (6).

9. Seal according to any of claims 1-8, characterized in that the surface of the fixing part (4) near the chamber wall (3) is provided with anti-slip protrusions (9).

10. A seal according to claim 9, characterized in that the anti-slip protrusions (9) are arranged as serrations.