CN210691124U - Temperature control system for acid tank of degumming machine - Google Patents
Temperature control system for acid tank of degumming machine Download PDFInfo
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- CN210691124U CN210691124U CN201921646099.7U CN201921646099U CN210691124U CN 210691124 U CN210691124 U CN 210691124U CN 201921646099 U CN201921646099 U CN 201921646099U CN 210691124 U CN210691124 U CN 210691124U
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Abstract
The utility model provides a temperature control system for an acid tank of a degumming machine, which relates to the photovoltaic technical field and is used for controlling the temperature of liquid in the acid tank of the degumming machine, and comprises a temperature sensor, a temperature controller, a first relay and a heating body; the temperature sensor is arranged in the acid tank and connected with the first end of the temperature controller; the second end of the temperature controller is connected with the first end of the first relay and used for collecting the resistance value of the temperature sensor and sending a disconnection signal to the first relay when the temperature sensor is determined to be in fault according to the resistance value; the first relay is connected with the heating body and used for disconnecting the switch of the first relay according to the first disconnection signal so as to stop the heating body. When the temperature controller determines that the temperature sensor has a fault according to the resistance value, a disconnection signal is sent to the first relay, so that the heating body stops working, and the problems that when the temperature sensor has a fault, the heating body heats liquid in the acid tank, the temperature of the liquid in the acid tank is too high, and the quality of a silicon wafer is reduced can be solved.
Description
Technical Field
The utility model relates to a photovoltaic technology field especially relates to a temperature control system for acid vat of degumming machine.
Background
In the manufacturing process of the photovoltaic module, the silicon rod needs to be cut into silicon wafers, and then a plurality of silicon wafers are assembled into the photovoltaic module. In the silicon rod cutting process, the procedures of sticking the rod, slicing, degumming, cleaning, sorting and the like are required. In the stick sticking procedure, a silicon rod is attached to a bearing tool by glue, a silicon wafer is obtained after the slicing procedure, and the silicon wafer enters the degumming procedure. Since silicon wafers are sensitive to acid concentration and temperature, the temperature of the liquid in the acid tank of the degumming machine needs to be strictly controlled.
At present, the temperature in an acid tank of a degumming machine is mainly controlled by a temperature controller, and the temperature controller controls a heating device according to the temperature of liquid in the acid tank of the degumming machine acquired by a temperature sensor, so that the aim of controlling the temperature of the liquid in the acid tank of the degumming machine is fulfilled. Because temperature sensor is very fragile in high temperature and acid environment, consequently can lead to the temperature anomaly that temperature sensor gathered, for example, temperature sensor opens circuit or the short circuit is all gathered wrong temperature, thereby make the temperature controller acquire wrong temperature value from temperature sensor, make the temperature controller continuously control heating device to the liquid heating in the acid tank of degumming machine, lead to the high temperature in the acid tank, when the temperature is too high, glue between silicon chip and the carrier can melt the adhesion on the silicon chip surface, be difficult to get rid of, when the high temperature was crossed simultaneously, the silicon chip surface produced the flower spot easily, lead to silicon chip quality to descend.
SUMMERY OF THE UTILITY MODEL
The utility model provides a temperature control system for acid tank of degumming machine aims at solving the silicon chip process of coming unstuck, and during the temperature sensor trouble, the heating member lasts the heating, leads to the too high problem of liquid temperature in the acid tank of degumming machine.
The embodiment of the utility model provides a temperature control system for acid tank of degumming machine for in the process of coming unstuck to the silicon chip, the temperature of liquid is controlled in the acid tank of degumming machine, temperature control system includes: the temperature sensor, the temperature controller, the first relay and the heating body;
the temperature sensor is arranged in the acid tank and connected with the first end of the temperature controller;
the second end of the temperature controller is connected with the first end of the first relay, and the temperature controller is used for acquiring the resistance value of the temperature sensor and sending a first off signal to the first relay when the temperature sensor is determined to be in a fault state according to the resistance value;
the second end of the first relay is connected with the heating body, and the first relay is used for disconnecting the switch of the first relay according to the first disconnection signal;
the heating body is arranged in the acid tank and used for stopping working under the condition that a switch of the first relay is disconnected.
Optionally, the temperature control system further includes: the liquid level sensor, the controller and the second relay;
the liquid level sensor is arranged in the acid tank and connected with the first end of the controller, and the liquid level sensor is used for outputting a liquid level signal to the controller according to the collected liquid level in the acid tank;
the second end of the controller is connected with the second relay, and the controller is used for sending a second disconnection signal to the second relay under the condition that the liquid level is lower than or equal to a preset liquid level;
and the second end of the temperature controller is connected with the first end of the first relay through the switch of the second relay, and the second relay is used for disconnecting the switch of the second relay according to the second disconnection signal.
Optionally, the temperature control system further includes: the first alarm device is connected with the third end of the temperature controller and used for outputting a first alarm signal according to a first control signal output by the temperature controller.
Optionally, the temperature control system further includes: and the second alarm device is connected with the third end of the controller and is used for outputting a second alarm signal according to a second control signal output by the controller.
Optionally, the first alarm device and the second alarm device are sound and light alarm devices.
Optionally, the temperature sensor includes an inner cavity and an anticorrosive outer layer, the inner cavity is used for accommodating the thermal resistor, and the anticorrosive outer layer is sleeved on the outer surface of the inner cavity.
Optionally, the inner cavity is a stainless steel sleeve.
Optionally, the anticorrosive outer layer is a polytetrafluoroethylene sleeve.
Optionally, the temperature sensor further comprises an anti-corrosion joint for fixing the temperature sensor.
Optionally, the temperature sensor is a two-wire sensor.
The embodiment of the utility model provides an in, the temperature control system for the acid tank of degumming machine is arranged in the process of coming unstuck to the silicon chip, and the temperature of liquid is controlled in the acid tank of degumming machine, include: the temperature sensor, the temperature controller, the first relay and the heating body; the temperature sensor is arranged in the acid tank and connected with the first end of the temperature controller; the second end of the temperature controller is connected with the first end of the first relay, and the temperature controller is used for acquiring the resistance value of the temperature sensor and sending a first off signal to the first relay when the temperature sensor is determined to be in a fault state according to the resistance value; the second end of the first relay is connected with the heating body, and the first relay is used for disconnecting the switch of the first relay according to the first disconnection signal; the heating body is arranged in the acid tank and used for stopping working under the condition that the switch of the first relay is switched off. In this embodiment, the temperature controller confirms that temperature sensor is the fault state according to temperature sensor's resistance value, send first turn-off signal to first relay, make the heating member stop work, when can avoiding temperature sensor to damage the trouble, the temperature controller controls the heating member according to wrong temperature value and carries out continuous heating to the liquid in the acid tank, make liquid high temperature in the acid tank, glue melts the adhesion and is difficult to get rid of on silicon chip surface, and under higher temperature, silicon chip surface produces the flower spot easily, lead to the problem of silicon chip quality decline.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 shows a schematic structural diagram of a temperature control system for an acid tank of a degumming machine according to a first embodiment of the present invention;
fig. 2 shows a schematic circuit diagram of a temperature control system for an acid tank of a degumming machine according to a second embodiment of the present invention;
fig. 3 shows a schematic structural diagram of a temperature sensor in the second embodiment of the present invention.
Description of reference numerals:
201-a temperature sensor, 2011-an inner cavity, 2012-an anticorrosive outer layer, 2013-an anticorrosive joint, 202-a temperature controller, 203-a first relay, 204-a heating body, 205-a liquid level sensor, 206-a controller, 207-a second relay, 208-a first alarm device, 209-a second alarm device, 210-a switching power supply and 211-an acid tank.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Example one
Referring to fig. 1, fig. 1 shows a schematic structural diagram of a temperature control system for an acid tank of a degumming machine in a first embodiment of the present invention, and the temperature control system can be used for controlling the temperature of liquid in the acid tank of the degumming machine in the silicon wafer degumming process. The temperature control system may include: temperature sensor, temperature controller, first relay and heating member.
In this embodiment, as shown in fig. 1, the temperature sensor may be disposed in an acid tank of the degumming machine, and the temperature sensor is connected to the first end of the temperature controller. The second end of the temperature controller is connected with the first end of the first relay, the temperature controller is used for collecting the resistance value of the temperature sensor, determining the state of the temperature sensor according to the resistance value of the temperature sensor, and sending a first disconnection signal to the first relay when the temperature sensor is determined to be in a fault state. The second end of the first relay is connected with the heating body, and the first relay is used for disconnecting the switch of the first relay according to a first disconnection signal sent by the temperature controller. And the heating body is arranged in the acid tank and used for stopping working under the condition that the switch of the first relay is switched off. In practical use, the connection modes between the temperature controller and the temperature sensor, between the temperature controller and the first relay, and between the first relay and the heating body may refer to the prior art, and this embodiment will not be described in detail.
In this embodiment, the temperature sensor may be fixedly installed in the acid tank to contact the liquid in the acid tank, and the dotted line in the acid tank in fig. 1 is used to illustrate the liquid in the acid tank. The temperature sensor can be an analog quantity sensor, and when the temperature sensor is in contact with the liquid in the acid tank, the resistance value of the temperature sensor can change along with the change of the temperature of the liquid in the acid tank. The principle of the specific temperature sensor can be referred to the prior art, and the embodiment will not be described in detail. In practical operation, the structure of the acid tank of the degumming machine can refer to the prior art, and the installation manner of the temperature sensor in the acid tank can refer to the prior art, which is not limited in this embodiment.
In this embodiment, when the first end of temperature controller is connected with temperature sensor, the temperature controller can gather temperature sensor's resistance value in real time to according to temperature sensor's resistance value, confirm temperature sensor's state. The fault state is a short circuit state or an open circuit state of the temperature sensor. When the temperature sensor is short-circuited, the resistance value of the temperature sensor is zero; when the temperature sensor is in an open circuit, the resistance value of the temperature sensor is infinite. For example, when the temperature sensor is in a short circuit, the resistance value of the temperature sensor acquired by the temperature controller is zero, and the temperature controller judges that the temperature sensor has a short-circuit fault and determines that the temperature sensor is in a fault state. Similarly, when temperature sensor opens circuit, temperature sensor's resistance value reaches the infinity, and when temperature sensor's resistance value that the temperature controller was gathered reached the infinity resistance value, the temperature sensor was judged and the trouble that opens circuit took place, confirms that temperature sensor is in the fault state. In this embodiment, when the thermostat determines that the temperature sensor is in the fault state, the thermostat sends a first off signal to the first relay through the second terminal connected to the first relay.
In this embodiment, the first relay is used to control the opening and closing of the heating body. Specifically, the first end of the first relay is used for receiving a first off signal sent by the temperature controller. The switch of first relay is used for connecting heating member and power, and the second end of first relay is the one end of the switch of first relay, and the heating member is connected to the one end of first relay switch, and the power is connected to the other end. When the first relay receives a first disconnection signal sent by the temperature controller, the switch of the first relay is disconnected, the heating body is disconnected with the power supply at the moment, and the heating body stops working. Specifically, the connection mode of the first relay and the heating body can refer to the prior art, and this embodiment is not particularly limited.
In practical use, in the process of coming unstuck, when the liquid in the heating member pair acid groove lasts the heating, liquid temperature can be too high in the acid groove, can make the glue that is stained with the attached silicon chip melt, the adhesion is difficult to get rid of on the silicon chip surface, simultaneously under higher temperature, liquid reacts with the silicon chip easily in the acid groove, make the protective layer on silicon chip surface destroyed, lead to silicon chip surface to produce the mottle, and under higher temperature, liquid volatilizees very fast in the acid groove, the concentration descends, impurity in the liquid can be attached to the silicon chip surface, produce the mottle, silicon chip surface adheres to glue, produce the mottle and all can lead to the decline of silicon chip quality.
The embodiment of the utility model provides an in, the heating member setting is in the acid tank of degumming machine, and the heating member is connected with the second end of first relay, when the switch disconnection of first relay, has disconnected the second end of heating member and first relay promptly and has been connected to make the heating member stop work. In practical use, the heating body may be any heating device with a heating function, such as a heating tube, and the heating body is not particularly limited in this embodiment.
The embodiment of the utility model provides an in, the temperature control system for the acid tank of degumming machine is arranged in the process of coming unstuck to the silicon chip, and the temperature of liquid is controlled in the acid tank of degumming machine, include: the temperature sensor, the temperature controller, the first relay and the heating body; the temperature sensor is arranged in the acid tank and connected with the first end of the temperature controller; the second end of the temperature controller is connected with the first end of the first relay, and the temperature controller is used for acquiring the resistance value of the temperature sensor and sending a first disconnection signal to the first relay when determining that the temperature sensor is in a fault state according to the resistance value; the second end of the first relay is connected with the heating body, and the first relay is used for disconnecting the switch of the first relay according to the first disconnection signal; and the heating body is arranged in the acid tank and used for stopping working under the condition that the switch of the first relay is switched off. In this embodiment, the temperature controller confirms that temperature sensor is the fault state according to temperature sensor's resistance value, send first turn-off signal to first relay, make the heating member stop work, when can avoiding temperature sensor to damage the trouble, the temperature controller controls the heating member according to wrong temperature value and carries out continuous heating to the liquid in the acid tank, make liquid high temperature in the acid tank, glue melts the adhesion and is difficult to get rid of on silicon chip surface, and under higher temperature, silicon chip surface produces the flower spot easily, lead to the problem of silicon chip quality decline.
Example two
Referring to fig. 2, fig. 2 shows a schematic circuit diagram of a temperature control system for an acid tank of a degumming machine in the second embodiment of the present invention, and the temperature control system can be used for controlling the temperature of liquid in the acid tank of the degumming machine in the silicon wafer degumming process.
The embodiment of the utility model provides an in, temperature control system can include: the temperature control device comprises a temperature sensor 201, a temperature controller 202, a first relay 203, a heating body 204, a liquid level sensor 205, a controller 206, a second relay 207, a first alarm device 208 and a second alarm device 209.
In the embodiment of the present invention, as shown in fig. 2, the temperature sensor 201 is installed in the acid tank 211, and the resistance value of the temperature sensor 201 changes with the temperature of the liquid in the acid tank 211. The temperature controller 202 is used for acquiring the resistance value of the temperature sensor 201, and controlling the first relay 203 and the first alarm device 208 to act according to the resistance value of the temperature sensor 201.
In this embodiment, the first relay 203 may be a solid-state relay, as shown in fig. 2, a first end of the thermostat 202 is connected to the temperature sensor 201, and is configured to collect a resistance value of the temperature sensor 201, and send a first off signal to the first relay 203 when it is determined that the temperature sensor 201 is in a fault state according to the resistance value of the temperature sensor 201. The switch of the first relay 203 is used for connecting the heating body 204 and a power supply (the power supply can be a three-phase 380V power supply), the second end of the first relay 203 is one end of the switch of the first relay 203, one end of the switch of the first relay 203 is connected with the heating body 204, and the other end is connected with the power supply. As shown in fig. 2, when the thermostat 202 determines that the temperature sensor 201 is in a failure state, it sends a first off signal to the first relay 203, and when the first relay 203 receives the first off signal, the switch of the first relay 203 is turned off, and the heating body 204 is disconnected from the power supply, and stops operating. The process of the thermostat 202 determining that the temperature sensor 201 is in the fault state is the same as the first embodiment, and is not described herein. During the in-service use, the concrete model and the kind of temperature controller, temperature sensor, first relay and heating member can be selected according to the demand, and the connected mode between temperature controller, temperature sensor, first relay and the heating member can set up this embodiment according to the demand and does not do the restriction to this.
The embodiment of the utility model provides an in, temperature controller 202 still is used for when confirming temperature sensor 201 is normal state according to temperature sensor 201's resistance value, converts temperature sensor 201's resistance value into the temperature value, sends first break signal or first closed signal to first relay 203 according to the temperature value. For example, when the thermostat 202 determines that the temperature sensor 201 is in a normal state according to the resistance value of the temperature sensor 201, the thermostat 202 may convert the collected resistance value of the temperature sensor 201 into a temperature value, determine whether the temperature value is higher than a preset temperature value, when the temperature value is higher than the preset temperature value, the thermostat 202 sends a first open signal to the first relay 203, and when the temperature value is lower than or equal to the preset temperature value, the thermostat 202 sends a first close signal to the first relay 203. When the first relay 203 receives the first closing signal, the switch of the first relay 203 is closed, the heating body 204 is connected with the power supply, the heating body 204 starts to work to heat the liquid in the acid tank 211, when the first relay 203 receives the first opening signal, the switch of the first relay 203 is opened, the heating body 204 is disconnected from the power supply, the heating body 204 stops working, and the liquid in the acid tank 211 is stopped to be heated. During the actual use, the method that the temperature controller sends first closed signal or first break signal to first relay according to the temperature value can refer to prior art, and preset temperature also can set up according to the demand, and this embodiment does not do the restriction to this.
In this embodiment, when the temperature controller determines that the temperature sensor is in a normal state according to the resistance value of the temperature sensor, the temperature controller converts the resistance value of the temperature sensor into a temperature value, sends a first open signal or a first close signal to the first relay according to the temperature value, and controls the heating body to heat the liquid in the acid tank according to the temperature of the liquid in the acid tank.
The embodiment of the utility model provides an in, this temperature control system can also include: a level sensor 205, a controller 206 and a second relay 207. The level sensor 205 may be disposed in an acid tank 211 of the degumming machine, the level sensor 205 being connected to a first end of the controller 206. The level sensor 205 is used for collecting the liquid level in the acid tank 211 and sending a liquid level signal to the controller 206 according to the liquid level in the acid tank 211. The second end of the controller 206 is connected to the second relay 207, and the controller 206 is configured to send a second off signal to the second relay 207 when determining that the liquid level of the liquid in the acid tank 211 is lower than or equal to the preset liquid level according to the liquid level signal. As shown in fig. 2, the second terminal of the thermostat 202 is connected to the first terminal of the first relay 203 via a switch of a second relay 207, and the second relay 207 is configured to turn off the switch of the second relay 207 according to a second turn-off signal.
In this embodiment, the liquid level signal may be a specific level value, and the liquid level sensor 205 may be fixedly installed in the acid tank 211 of the degumming machine, and is configured to collect a level value of liquid in the acid tank 211 and send the level value to the controller 206.
In this embodiment, the Controller 206 may specifically be a PLC (Programmable Logic Controller), after receiving the level value sent by the level sensor 205, the Controller 206 determines whether the liquid level of the liquid in the acid tank 211 is lower than or equal to a preset liquid level according to the level value, and when the liquid level of the liquid in the acid tank 211 is lower than or equal to the preset liquid level, the Controller 206 sends a second off signal to the second relay 207. For example, referring to fig. 2, after receiving the level value sent by the level sensor 205, if the level value is determined to be lower than or equal to the preset level value, the controller 206 sends a second open signal to the second relay 207. The preset liquid level value can be set according to requirements, the controller can be any controller with a control function in the prior art, and the controller is not limited in the embodiment.
In this embodiment, the second relay 207 may specifically be an intermediate relay, the second end of the thermostat 202 may be connected to the first end of the first relay 203 through a switch of the second relay 207, and when the second relay 207 receives a second off signal sent by the controller 206, the switch of the second relay 207 is turned off, so that the connection between the first end of the first relay 203 and the second end of the thermostat 202 is turned off, the switch of the first relay 203 is turned off, and the heating body 204 is disconnected from the power supply, so that the heating body 204 stops operating.
During the in-service use, the concrete model and the kind of controller, level sensor and second relay can be selected according to the demand, and the connected mode between controller, level sensor and the second relay can set up this embodiment according to the demand and does not do the restriction to this.
In this embodiment, the controller can judge whether the liquid level in the acid tank is less than or equal to and predetermine the liquid level according to the liquid level value that level sensor gathered, when the liquid level in the acid tank is less than or equal to and predetermines the liquid level, send second turn-off signal to the second relay, the disconnection of control second relay switch, during the switch disconnection of second relay, the first end of first relay and the second end disconnection of temperature controller, thereby make the switch disconnection of first relay, heating member and power disconnection, the heating member stops to heat. When the liquid level in the acid tank is too low, the heating body can be prevented from heating the liquid in the acid tank, and the silicon wafer or the acid tank is damaged due to dry burning.
Referring to fig. 2, in this embodiment, the temperature control system may further include a first alarm device 208, as shown in fig. 2, a first end of the first alarm device 208 is connected to a first end of a switching power supply 210, a second end of the first alarm device 208 is connected to a third end of the thermostat 202, a second end of the switching power supply 210 is connected to a fourth end of the thermostat 202, the switching power supply 210 is configured to provide power to the first alarm device 208, and the first alarm device 208 is configured to output a first alarm signal according to a first control signal output by the thermostat 202. Specifically, the first control signal may be an on signal, and the temperature controller 202 may send the on signal to the first alarm device 208 when it is determined that the temperature sensor 201 is in the fault state, and start the first alarm device 208, so that the first alarm device 208 outputs the first alarm signal, where the first alarm signal may be used to indicate that the temperature sensor is in the fault state. In practical use, the specific models and kinds of the first alarm device and the switching power supply can be selected according to requirements, and the connection mode among the controller, the first alarm device and the switching power supply can be set according to requirements without limitation.
Referring to fig. 2, in this embodiment, the temperature control system may further include a second alarm device 209, as shown in fig. 2, the second alarm device 209 is connected to a third end of the controller 107, and the second alarm device 209 is configured to output a second alarm signal according to a second control signal output by the controller 107. Specifically, the second control signal may be an opening signal, after the controller 206 receives the level value sent by the level sensor 205, when the level value is lower than or equal to a preset level value, the controller sends an opening signal to the second alarm device 209, and starts the second alarm device 209, so that the second alarm device 209 outputs the second alarm signal, and the second alarm signal may be used to indicate that the liquid level in the acid tank is too low. In practical use, the specific type and kind of the second alarm device can be selected according to requirements, and the connection mode between the controller and the second alarm device can be set according to requirements without limitation.
Optionally, the first alarm device and the second alarm device may be sound and light alarm devices. In this embodiment, the first alarm device and the second alarm device adopt sound and light alarm devices, and can output a light alarm signal and a sound alarm signal at the same time, so that the workers can find out the fault conveniently.
Optionally, as shown in fig. 3, fig. 3 shows a schematic structural diagram of a temperature sensor in the second embodiment of the present invention, the temperature sensor 201 may include an inner cavity 2011 and an outer anticorrosion layer 2012, the inner cavity 2011 is used for accommodating a thermal resistor, and the outer anticorrosion layer 2012 is sleeved on an outer surface of the inner cavity 2011.
In this embodiment, the inner cavity 2011 of the temperature sensor 201 can be a stainless steel sleeve, which has high hardness and corrosion resistance, and can play a good role in protecting the resistance wires in the inner cavity 2011. The anticorrosive outer layer 2012 of temperature sensor 201 can be the polytetrafluoroethylene sleeve pipe, and the polytetrafluoroethylene sleeve pipe is established to temperature sensor's outer cover, can prevent the liquid in acid tank to temperature sensor's corruption, extension temperature sensor's life.
Optionally, the temperature sensor 201 may also include a corrosion resistant joint 2013. The anticorrosive joint 2013 is provided at one end of the temperature sensor 2011 and is used for fixing the temperature sensor 201. As shown in fig. 3, the corrosion resistant fitting 2013 may be a nut cast from teflon. The anti-corrosion joint is used for installing and fixing the temperature sensor, plays an anti-corrosion role and prolongs the service life of the temperature sensor.
Alternatively, the temperature sensor may be a two-wire sensor. In the embodiment, the temperature sensor adopts a two-wire sensor, and compared with a three-wire sensor, the number of wires is reduced, so that the probability of short circuit and open circuit is reduced, and the fault probability of the temperature sensor is reduced.
The embodiment of the utility model provides an in, the temperature control system for the acid tank of degumming machine is arranged in the process of coming unstuck to the silicon chip, and the temperature of liquid is controlled in the acid tank of degumming machine, include: the temperature control device comprises a temperature sensor, a temperature controller, a first relay, a heating body liquid level sensor, a controller, a second relay, a first alarm device and a second alarm device. When the temperature controller determines that the temperature sensor is in a fault state according to the resistance value of the temperature sensor, a first off signal is sent to the first relay, the heating body stops working, when the temperature sensor is prevented from being damaged and faults, the temperature controller controls the heating body to continuously heat liquid in the acid tank according to wrong temperature values, the temperature of the liquid in the acid tank is too high, glue melts and adheres to the surface of a silicon wafer and is difficult to remove, and under high temperature, the surface of the silicon wafer easily generates speckles, and the quality of the silicon wafer is reduced. Meanwhile, the controller can determine that the liquid level in the acid tank is low according to the liquid level in the acid tank, and then the second relay is disconnected, so that the first relay is disconnected, the heating body is further stopped, and when the liquid level in the acid tank is too low, the heating body heats the liquid in the acid tank, and the silicon wafer or the acid tank is damaged due to dry burning.
While the embodiments of the present invention have been described with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many modifications may be made by one skilled in the art without departing from the spirit and scope of the present invention as defined in the appended claims.
Claims (10)
1. The utility model provides a temperature control system for acid vat of degumming machine which characterized in that, temperature control system includes: the temperature sensor, the temperature controller, the first relay and the heating body;
the temperature sensor is arranged in the acid tank and connected with the first end of the temperature controller;
the second end of the temperature controller is connected with the first end of the first relay, and the temperature controller is used for acquiring the resistance value of the temperature sensor and sending a first off signal to the first relay when the temperature sensor is determined to be in a fault state according to the resistance value;
the second end of the first relay is connected with the heating body, and the first relay is used for disconnecting the switch of the first relay according to the first disconnection signal;
the heating body is arranged in the acid tank and used for stopping working under the condition that a switch of the first relay is disconnected.
2. The temperature control system of claim 1, further comprising: the liquid level sensor, the controller and the second relay;
the liquid level sensor is arranged in the acid tank and connected with the first end of the controller, and the liquid level sensor is used for outputting a liquid level signal to the controller according to the collected liquid level in the acid tank;
the second end of the controller is connected with the second relay, and the controller is used for sending a second disconnection signal to the second relay under the condition that the liquid level is lower than or equal to a preset liquid level;
and the second end of the temperature controller is connected with the first end of the first relay through the switch of the second relay, and the second relay is used for disconnecting the switch of the second relay according to the second disconnection signal.
3. The temperature control system of claim 2, further comprising:
the first alarm device is connected with the third end of the temperature controller and used for outputting a first alarm signal according to a first control signal output by the temperature controller.
4. The temperature control system of claim 3, further comprising:
and the second alarm device is connected with the third end of the controller and is used for outputting a second alarm signal according to a second control signal output by the controller.
5. The temperature control system of claim 4, wherein the first and second alarm devices are audible and visual alarm devices.
6. The temperature control system according to claim 1, wherein the temperature sensor comprises an inner cavity for accommodating the thermal resistor and an anti-corrosion outer layer sleeved on an outer surface of the inner cavity.
7. The temperature control system of claim 6, wherein the internal cavity is a stainless steel sleeve.
8. The temperature control system of claim 6, wherein the corrosion resistant outer layer is a polytetrafluoroethylene sleeve.
9. The temperature control system of claim 6, wherein the temperature sensor further comprises a corrosion resistant fitting for securing the temperature sensor.
10. The temperature control system of claim 1, wherein the temperature sensor is a two-wire sensor.
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| CN201921646099.7U CN210691124U (en) | 2019-09-29 | 2019-09-29 | Temperature control system for acid tank of degumming machine |
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| CN201921646099.7U CN210691124U (en) | 2019-09-29 | 2019-09-29 | Temperature control system for acid tank of degumming machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112484869A (en) * | 2020-11-26 | 2021-03-12 | 福建福强精密印制线路板有限公司 | Plating bath overtemperature alarm device |
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2019
- 2019-09-29 CN CN201921646099.7U patent/CN210691124U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112484869A (en) * | 2020-11-26 | 2021-03-12 | 福建福强精密印制线路板有限公司 | Plating bath overtemperature alarm device |
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Effective date of registration: 20211013 Address after: 655000 floor 3, No. 83, Cuifeng Road, liaokuo street, Qilin District, Qujing City, Yunnan Province Patentee after: Qujing Longji silicon material Co.,Ltd. Address before: No. 102, Ximei Road, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee before: WUXI LONGI SILICON MATERIALS Corp. |
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