CN210689844U - Air inlet temperature measuring device - Google Patents
Air inlet temperature measuring device Download PDFInfo
- Publication number
- CN210689844U CN210689844U CN201921813343.4U CN201921813343U CN210689844U CN 210689844 U CN210689844 U CN 210689844U CN 201921813343 U CN201921813343 U CN 201921813343U CN 210689844 U CN210689844 U CN 210689844U
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- purification
- jar body
- temperature
- temperature measuring
- purification jar
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Abstract
The utility model discloses a temperature measuring device admits air belongs to semiconductor technical field. The purification tank comprises a purification tank body, wherein the bottom of the purification tank body is communicated with an air inlet pipe, and a temperature measuring pipe is arranged on the side wall of the purification tank body. The utility model discloses inside source gas gets into purification jar body through the intake pipe, after purification jar body purification, discharge from the gas outlet, when source gas index is on the high side, at first bring the central temperature of intercommunication department of purification jar body and intake pipe and rise, stretch into the central point of intercommunication department that purification jar body and intake pipe are linked together with the temperature tube this moment, insert the thermocouple body again in the measurement pipe, and time thermocouple body measuring end is located the center of intercommunication department of purification jar body and intake pipe, recycle the thermocouple body and carry out the measurement of temperature to the center of intercommunication department of purification jar body and intake pipe, when the temperature of intercommunication department of purification jar body and intake pipe rises, but the short-term test temperature variation, take some safeguard procedures again, avoid causing whole clarifier to become invalid.
Description
Technical Field
The utility model relates to an intake temperature measuring device belongs to semiconductor technical field.
Background
When the purifier is normally used, when the index of the source gas impurities is higher, the internal reaction of the purifier is released, the temperature is raised, and the problem of failure of the purifier due to no effective detection means is caused.
Disclosure of Invention
The utility model discloses the technical problem that will solve lies in: the air inlet temperature measuring device solves the problems that when the index of source gas impurities is higher, the internal reaction of the purifier is exothermic, the temperature is increased, and the purifier fails due to no effective detection means.
The utility model discloses the technical problem that will solve takes following technical scheme to realize:
temperature measuring device admits air, including purification jar body, the bottom intercommunication of purification jar body has the intake pipe, be equipped with the temperature tube on the purification jar body lateral wall, the one end of temperature tube runs through and stretches into the inside of purification jar body, and is located the inside temperature tube tip of purification jar body and is close to the intercommunication department between purification jar body and the intake pipe, just slope setting between temperature tube and the purification jar body, the detachable fixed cover in inside of temperature tube has connect the thermocouple body, the one end of thermocouple body is also close to intercommunication department between intake pipe and the purification jar body, the top intercommunication of purification jar body has the gas outlet.
As a preferred example, the thermocouple body is sleeved with a temperature measuring plug, and the temperature measuring plug is fixedly connected with the temperature measuring pipe through a nut.
As a preferable example, the connection part of the outer wall of the temperature measuring pipe and the purification tank body is in sealing connection.
As a preferable example, the temperature measuring tube and the purification tank body form a 30-60-degree angle.
The utility model has the advantages that: the utility model discloses inside source gas gets into purification jar body through the intake pipe, after purification jar body purification, discharge from the gas outlet, when source gas index is on the high side, at first bring the central temperature of intercommunication department of purification jar body and intake pipe and rise, stretch into the central point of intercommunication department that purification jar body and intake pipe are linked together with the temperature tube this moment, insert the thermocouple body again in the measurement pipe, and time thermocouple body measuring end is located the center of intercommunication department of purification jar body and intake pipe, recycle the thermocouple body and carry out the measurement of temperature to the center of intercommunication department of purification jar body and intake pipe, when the temperature of intercommunication department of purification jar body and intake pipe rises, but the short-term test temperature variation, take some safeguard procedures again, avoid causing whole clarifier to become invalid.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a portion a in fig. 1.
In the figure: purification jar body 1, intake pipe 2, temperature tube 3, thermocouple body 4, temperature measurement end cap 5, gas outlet 6.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand and understand, the present invention is further explained by combining the following specific drawings.
As shown in fig. 1-2, the air inlet temperature measuring device comprises a purification tank body 1, an air inlet pipe 2 is communicated with the bottom of the purification tank body 1, a temperature measuring pipe 3 is arranged on the side wall of the purification tank body 1, one end of the temperature measuring pipe 3 penetrates through and extends into the purification tank body 1, the end part of the temperature measuring pipe 3 located inside the purification tank body 1 is close to the communication position between the purification tank body 1 and the air inlet pipe 2, the temperature measuring pipe 3 and the purification tank body 1 are obliquely arranged, a thermocouple body 4 is fixedly sleeved in the temperature measuring pipe 3 in a detachable mode, one end of the thermocouple body 4 is also close to the communication position between the air inlet pipe 2 and the purification tank body 1, and the top of the purification tank body 1 is communicated with an.
The thermocouple body 4 is sleeved with a temperature measuring plug 5, and the temperature measuring plug 5 is fixedly connected with the temperature measuring pipe 3 through a nut.
Furthermore, an internal thread joint is fixed at the end part of the temperature measuring pipe 3, threads are arranged outside the temperature measuring plug 5, a nut is further in threaded connection with the temperature measuring plug 5, when the thermocouple body 4 is inserted into the temperature measuring pipe 3, the temperature measuring plug 5 on the thermocouple body 4 is in threaded connection with the internal thread joint at the end part of the temperature measuring pipe 3, one end of the nut with the threads on the temperature measuring plug 5 is screwed, and finally the nut enters the internal thread joint.
The outer wall of the temperature measuring tube 3 is hermetically connected with the communicating part of the purification tank body 1.
The temperature measuring tube 3 and the purification tank body 1 are at 30-60 degrees.
The working principle is as follows: when the purification tank is used, source gas enters the interior of the purification tank body 1 through the gas inlet pipe 2, and is discharged from the gas outlet 6 after being purified by the purification tank body 1, when the index of the source gas is higher, the central temperature of the communication position of the purification tank body 1 and the gas inlet pipe 2 is increased firstly, at the moment, the temperature measuring pipe 3 is extended into the central position of the communication position of the interior of the purification tank body 1 and the gas inlet pipe 2, the thermocouple body 4 is inserted into the measuring pipe 3, the measuring end of the thermocouple body 4 is positioned at the center of the communication position of the purification tank body 1 and the gas inlet pipe 2, the temperature of the center of the communication position of the purification tank body 1 and the gas inlet pipe 2 is measured by using the thermocouple body 4, when the temperature of the communication position of the purification tank body 1 and the gas inlet pipe 2 is increased, the temperature change can be detected quickly, and some.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that various changes and modifications may be made without departing from the spirit and scope of the invention, and such changes and modifications fall within the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (4)
1. Temperature measuring device admits air, including purification jar body, its characterized in that: the bottom intercommunication of purification jar body has the intake pipe, be equipped with the temperature tube on the purification jar body lateral wall, the one end of temperature tube runs through and stretches into the inside of purification jar body, and is located the inside temperature tube tip of purification jar body and is close to the intercommunication department between purification jar body and the intake pipe, just slope setting between temperature tube and the purification jar body, the detachable fixed cover in inside of temperature tube has connect the thermocouple body, the one end of thermocouple body is also close to the intercommunication department between intake pipe and the purification jar body, the top intercommunication of purification jar body has the gas outlet.
2. The intake air temperature measuring device according to claim 1, wherein: the thermocouple body is sleeved with a temperature measuring plug, and the temperature measuring plug is fixedly connected with the temperature measuring pipe through a nut.
3. The intake air temperature measuring device according to claim 1, wherein: the outer wall of the temperature measuring pipe is hermetically connected with the communicated part of the purification tank body.
4. The intake air temperature measuring device according to claim 1, wherein: the temperature measuring tube and the purification tank body are at 30-60 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921813343.4U CN210689844U (en) | 2019-10-25 | 2019-10-25 | Air inlet temperature measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921813343.4U CN210689844U (en) | 2019-10-25 | 2019-10-25 | Air inlet temperature measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210689844U true CN210689844U (en) | 2020-06-05 |
Family
ID=70887380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921813343.4U Active CN210689844U (en) | 2019-10-25 | 2019-10-25 | Air inlet temperature measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210689844U (en) |
-
2019
- 2019-10-25 CN CN201921813343.4U patent/CN210689844U/en active Active
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