CN210665172U - High-purity anhydrous hydrofluoric acid sampling equipment - Google Patents
High-purity anhydrous hydrofluoric acid sampling equipment Download PDFInfo
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- CN210665172U CN210665172U CN201921556650.9U CN201921556650U CN210665172U CN 210665172 U CN210665172 U CN 210665172U CN 201921556650 U CN201921556650 U CN 201921556650U CN 210665172 U CN210665172 U CN 210665172U
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Abstract
The utility model relates to a high-purity anhydrous hydrofluoric acid sampling equipment, which comprises a housin, the casing passes through the fixed bolster support, the air intake department at casing top is provided with high efficiency filter, the bottom is equipped with laminar flow board in the casing, laminar flow board is even porous structure, lateral wall department is provided with the box of induced drafting in the casing, the air outlet of laminar flow board links to each other with the box air intake of induced drafting, the air outlet of box of induced drafting is connected with the exhaust column, the wind that high efficiency filter got into forms the air circulation return circuit through box of induced drafting and exhaust column after laminar flow board vortex, the ice water box is put into to the casing, the sampling bottle is arranged in the ice water box, the sample connection of sampling bottle connects gradually the sample valve through the feed liquor pipeline, the feed liquor connects, the sample valve sets up outside the casing, high-purity anhydrous; the utility model discloses the cleanliness factor of sample environment has been increased substantially, can prevent to pollute the sample in the sample operation, and the at utmost has reduced the injury of waste gas to personnel simultaneously.
Description
[ technical field ]
The utility model belongs to the technical field of the chemical industry equipment technique and specifically relates to a high-purity anhydrous hydrofluoric acid sampling equipment.
[ background art ]
The manufacturing process of the industries such as chips, liquid crystal panels and the like increasingly requires refinement and high performance. High-purity hydrofluoric acid is needed in the production of the industries, and the conventional preparation process of the high-purity hydrofluoric acid comprises the steps of chemically pretreating anhydrous hydrofluoric acid, feeding the anhydrous hydrofluoric acid into a rectifying tower for rectifying operation, cooling the obtained anhydrous hydrofluoric acid, absorbing the anhydrous hydrofluoric acid in an absorption tower by using ultrapure water, further purifying the high-purity hydrofluoric acid by adopting methods of controlling spray density, gas-liquid ratio and the like, performing ultrafiltration under the condition of less than 0.2 mu m, and finally filling under the condition of a closed clean environment (CLASS 100) to obtain a final product, namely the high-purity hydrofluoric acid. In the process, the anhydrous hydrofluoric acid is sampled for a plurality of times so as to adjust the process parameters better. Anhydrous hydrofluoric acid sampling equipment needs to satisfy the sample environment and keeps at high clean level, and sample waste gas needs to be handled, and is safer and easy to operate.
However, most of the existing high-purity anhydrous hydrofluoric acid equipment is transplanted with an industrial hydrofluoric acid sampling mode, open sampling is adopted mostly, no consideration is made on the cleanness of a space, and the environment of a sampling space is not controlled because pollutants have no strict requirement on the industrial hydrofluoric acid for high-purity hydrofluoric acid. In addition, the existing sampling is not enough in consideration of safety, waste gas is not treated, because anhydrous hydrofluoric acid is easy to volatilize when the temperature is higher than 5 ℃, and the existing equipment is not used for treating volatilized acid gas, so that safety risk is easily caused. Meanwhile, the sampling bottle adopts an open design during sampling, so that pollutants easily pollute the sample, and the sampling operation is not standard, thereby easily causing danger.
[ contents of utility model ]
The utility model aims at solving foretell not enough and providing a high-purity anhydrous hydrofluoric acid sampling equipment, increased substantially the cleanliness factor of sample environment, can prevent to pollute the sample in the sample operation, the at utmost has reduced the injury of waste gas to personnel simultaneously.
The high-purity anhydrous hydrofluoric acid sampling device comprises a high-efficiency filter 1, a shell 2, a fixed support 4, an exhaust pipe 5, a liquid inlet joint 6, a sampling valve 7, a liquid inlet pipeline 8, a laminar flow plate 9, an exhaust box 10, an ice water box 12 and a sampling bottle 17, wherein the shell 2 is a hollow sealed shell, the fixed support 4 is arranged below the shell 2 and is supported by the fixed support 4, an air inlet is formed in the top of the shell 2, the high-efficiency filter 1 is arranged at the air inlet, a laminar flow plate 9 is arranged at the bottom in the shell 2, the laminar flow plate 9 is of a uniform porous structure, the exhaust box 10 is arranged at the inner side wall of the shell 2, an air outlet of the laminar flow plate 9 is connected with the air inlet of the exhaust box 10, the air outlet of the exhaust box 10 is connected with the exhaust pipe 5, and air entering the high-efficiency filter 1 forms an air circulation loop through the exhaust box 10 and the exhaust pipe 5, the casing 2 embeds there is ice water box 12 in, sample bottle 17 is arranged in ice water box 12, sample bottle 17's sample connection connects gradually sampling valve 7, inlet fitting 6 through inlet pipeline 8, sampling valve 7 sets up in 2 outsides of casing, inlet fitting 6 sets up at 2 tops of casing, high-purity anhydrous hydrofluoric acid passes through inlet fitting 6, sampling valve 7, in the inlet pipeline 8 gets into sample bottle 17.
Further, a laminar flow channel is arranged in the laminar flow plate 9, the laminar flow plate 9 is provided with two layers, each laminar flow plate 9 is made of a polypropylene plate with the thickness of 6 mm, the upper and lower interval distance of the laminar flow plate 9 is 15 mm, and vent holes with the interval of 20 mm and the diameter of 5 mm are uniformly distributed on each laminar flow plate 9.
Further, the sampling door 3 has been installed on the casing 2 openly, sampling door 3 adopts transparent polyvinyl chloride to make, sampling door 3 is used for observing the interior liquid level of sampling bottle 17.
Further, a sampling bottle joint 16 is installed at the bottle mouth of the sampling bottle 17, a first quick joint 18 and a second quick joint 19 are arranged on the sampling bottle joint 16, the first quick joint 18 is connected with the liquid inlet pipeline 8, the second quick joint 19 is connected with the sampling exhaust pipe 11, and the other end of the sampling exhaust pipe 11 is connected into the air exhaust box 10.
Further, sample bottle 17 is installed in casing 2 through sample installing support 15, sample bottle connects 16 middle parts and is equipped with round recess 20, set up on sample installing support 15 and connect 16 recess 20 matched with U type groove 21 with sample bottle, sample bottle 17 connects 16 card to go into sample installing support 15 through sample bottle.
Further, the ice water box 12 is placed on an ice box slide rail 13, the ice box slide rail 13 is higher than the lower door frame of the sampling door 3, and the ice water box 12 is pushed into the housing 2 along the ice box slide rail 13.
Further, a liquid outlet is formed in the bottom of the shell 2, and a liquid outlet valve 14 is installed at the liquid outlet.
Further, ice cubes are arranged in the ice water box 12, and the height of the ice cubes is higher than 2/3 of the height of the sampling bottle 17.
Compared with the prior art, the utility model, have following advantage:
(1) the utility model greatly improves the internal clean environment through reasonable air circulation design and setting, so that the sampling environment is operated in a controllable environment, most of pollution is isolated in the operation of the sampling bottle when the sampling is opened, and the sample is prevented from being polluted;
(2) the sealed sampling bottle joint setting and sampling mounting bracket design of the utility model can isolate pollutants during sampling, and exhaust gas during sampling can be smoothly discharged, thus avoiding product pollution or exhaust gas pollution to the environment;
(3) the reasonable ice water box of the utility model is convenient to take and easy to observe during sampling, and the temperature of the sampling bottle can be ensured;
(4) the utility model discloses the casing is airtight, and the sample bottle is airtight, and dual control can the furthest reduce the injury of waste gas to personnel, is worth popularizing and applying.
[ description of the drawings ]
Fig. 1 is a schematic view of the external structure of the present invention;
fig. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic view of the sampling bottle of the present invention;
in the figure: 1. high efficiency filter 2, casing 3, sample door 4, fixed bolster 5, exhaust column 6, liquid inlet joint 7, sample valve 8, liquid inlet pipe 9, laminar flow board 10, convulsions box 11, sample blast pipe 12, frozen water box 13, ice cube box slide rail 14, flowing back valve 15, sample installing support 16, sample bottle joint 17, sample bottle 18, quick-operation joint 19, quick-operation joint two 20, recess 21, U type groove.
[ detailed description of the invention ]
The invention is further described below with reference to the accompanying drawings:
as shown in the attached drawings, the utility model provides a high-purity anhydrous hydrofluoric acid sampling device, which comprises a high-efficiency filter 1, a shell 2, a fixed support 4, an exhaust pipe 5, a liquid inlet joint 6, a sampling valve 7, a liquid inlet pipeline 8, a laminar flow plate 9, an exhaust box 10, an ice water box 12 and a sampling bottle 17, wherein the shell 2 is a hollow sealed shell, the fixed support 4 is arranged below the shell 2 and is supported by the fixed support 4, the top of the shell 2 is provided with an air inlet, the high-efficiency filter 1 is arranged at the air inlet, the laminar flow plate 9 is arranged at the bottom in the shell 2, the laminar flow plate 9 is of a uniform porous structure, the exhaust box 10 is arranged at the inner side wall of the shell 2, the air outlet of the laminar flow plate 9 is connected with the air inlet of the exhaust box 10, the air outlet of the exhaust box 10 is connected with the exhaust pipe 5, the air entering the high, the shell 2 is internally provided with an ice water box 12, a sampling bottle 17 is arranged in the ice water box 12, a sampling port of the sampling bottle 17 is sequentially connected with a sampling valve 7 and a liquid inlet connector 6 through a liquid inlet pipeline 8, the sampling valve 7 is arranged outside the shell 2, the liquid inlet connector 6 is arranged at the top of the shell 2, and high-purity anhydrous hydrofluoric acid enters the sampling bottle 17 through the liquid inlet connector 6, the sampling valve 7 and the liquid inlet pipeline 8; the sampling door 3 has been installed on casing 2 openly, and sampling door 3 adopts transparent polyvinyl chloride to make, and sampling door 3 is used for observing the interior liquid level of sampling bottle 17, and the leakage fluid dram has been seted up to casing 2 bottom, and leakage fluid dram department installs leakage fluid valve 14.
Wherein, a laminar flow channel is arranged in the laminar flow plate 9, the laminar flow plate 9 is provided with two layers, each laminar flow plate 9 is made of a polypropylene plate with the thickness of 6 mm, the upper and lower spacing distance of the laminar flow plate 9 is 15 mm, and vent holes with the spacing of 20 mm and the diameter of 5 mm are uniformly distributed on each laminar flow plate 9; the sampling bottle 17 is provided with a sampling bottle joint 16 at the mouth, the sampling bottle joint 16 is provided with a first quick joint 18 and a second quick joint 19, the first quick joint 18 is connected with the liquid inlet pipeline 8, the second quick joint 19 is connected with the sampling exhaust pipe 11, and the other end of the sampling exhaust pipe 11 is connected with the air exhaust box 10. The sampling bottle 17 is installed in casing 2 through sampling installing support 15, and the sampling bottle connects 16 middle parts to be equipped with round recess 20, offers on the sampling installing support 15 with the sampling bottle connect 16 recess 20 matched with U type groove 21, sampling bottle 17 connects 16 card income sampling installing support 15 through the sampling bottle. The ice water box 12 is arranged on an ice box sliding rail 13, the ice box sliding rail 13 is higher than a door frame at the lower part of the sampling door 3, and the ice water box 12 is pushed into the shell 2 along the ice box sliding rail 13; ice blocks are arranged in the ice water box 12, and the height of the ice blocks is higher than 2/3 of that of the sampling bottle 17.
The utility model discloses utilize air laminar flow principle to keep cleanliness factor in the equipment, send into clean new trend through high efficiency filter, clean new trend flows the board through the layer and carries out the air cycle that makes the interior air of casing form upper portion air inlet lower part convulsions through the box of induced drafting and exhaust column after the vortex, wherein, the layer flows the board and is even porous structure for the air is difficult to form the vortex, thereby cleanliness factor can obtain guaranteeing in the equipment. The equipment shell is supported by the fixing support, the sampling valve is arranged outside the equipment, and the sampling bottle is arranged inside the equipment, so that the safe operation is facilitated. The sampling door adopts transparent polyvinyl chloride preparation, does benefit to after closing and observes liquid level in the sampling bottle, and inside and outside completely during the sample, harmful gas is difficult for volatilizing to the outside unexpected injury that causes of equipment, and outside polluted air can not get into inside pollution sample space environment yet. During high-purity anhydrous hydrofluoric acid passed through inlet joint, sampling valve, inlet line got into the sampling bottle, all materials and joint all adopted clean polytetrafluoroethylene material to make, guaranteed that the quality of pure anhydrous hydrofluoric acid does not receive the pollution, produced waste gas and insert exhaust box discharge apparatus through the sample blast pipe during the sample, handled. The sampling bottle connector and the sampling mounting bracket are provided with matching grooves to facilitate the fixing and taking operation of the sampling bottle. The sampling bottle connects upper portion to have quick-operation joint, and one end links up with the inlet conduit, and another end links up with the blast pipe of taking a sample, realizes the airtight of sampling bottle. The ice water box is placed on the ice box slide rail, and the ice box slide rail is higher than the door frame of sampling door lower part, and the ice water box can be easily operated through the mode of pushing.
The utility model discloses in, high-purity anhydrous hydrofluoric acid sampling method as follows:
(1) the high efficiency filter and the extraction duct are opened to allow air circulation within the apparatus for a period of time such that the airborne contaminant particles in the apparatus fall to within 0.3 dust particles per cubic foot and cannot exceed 100 (class100 rating).
(2) Opening a sampling valve after closing the liquid discharge valve, and then discharging liquid for a certain time; the liquid discharge time is determined by the length of a liquid inlet joint pipeline and the flow rate of the pipeline, the formula is that T is L/V + T1 (wherein T is the liquid discharge time, L is the length V of the pipeline and the flow rate of the pipeline, and T1 is the reserved time), T1 is obtained after actual process test is needed, and is generally not less than 10 seconds; the purpose of this step is to clear away the residual anhydrous hydrofluoric acid inside the pipeline, so that the sampling result is more accurate.
(3) And closing the sampling valve, putting the ice block into the ice water box, placing the sampling bottle for cooling for about one minute, and pushing the ice block into the equipment through the ice block box slide rail, wherein the ice block in the ice water box needs to submerge the sampling bottle by 2/3 of the height.
(4) And connecting the cooled sampling bottle to a sampling bottle joint, and clamping the sampling bottle joint groove into a sampling mounting support to seal the sampling bottle.
(5) And opening the sampling valve to sample, observing the liquid level of the sampling bottle, and closing the sampling valve after reaching 2/3.
(6) Standing for 30 seconds to stabilize the total fluid in the pipe and exhaust gas in the bottle.
(7) And covering the sampling bottle, taking out the sampling bottle together with the ice water box, and sending the sampling bottle and the ice water box to a laboratory for detection.
The basic principle of the utility model is that: keeping cleanliness in equipment by utilizing an air laminar flow principle; discharging waste gas in sampling by negative pressure air draft for post-treatment; cooling with ice water to control the temperature of the sampling bottle below 5 ℃; and a closed sampling mode is adopted, so that the entering of pollutants in the sampling chamber and the volatilization of harmful gases are strictly controlled.
The present invention is not limited by the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be equivalent replacement modes, and are all included in the protection scope of the present invention.
Claims (8)
1. The utility model provides a high-purity anhydrous hydrofluoric acid sampling equipment which characterized in that: comprises a high-efficiency filter (1), a shell (2), a fixed support (4), an exhaust pipe (5), a liquid inlet joint (6), a sampling valve (7), a liquid inlet pipeline (8), a laminar flow plate (9), an exhaust box (10), an ice water box (12) and a sampling bottle (17), wherein the shell (2) is a hollow sealed shell, the fixed support (4) is arranged below the shell (2) and is supported by the fixed support (4), an air inlet is formed in the top of the shell (2), the high-efficiency filter (1) is arranged at the air inlet, a laminar flow plate (9) is arranged at the bottom in the shell (2), the laminar flow plate (9) is of a uniform porous structure, the exhaust box (10) is arranged at the inner side wall of the shell (2), an air outlet of the laminar flow plate (9) is connected with the air inlet of the exhaust box (10), and an air outlet of the exhaust box (10) is connected, the wind that high efficiency filter (1) got into forms the air cycle return circuit through box (10) of induced drafting and exhaust column (5) behind laminar flow board (9) vortex, casing (2) embeds there is ice water box (12), sample bottle (17) are arranged in ice water box (12), the sample connection of sample bottle (17) passes through inlet channel (8) and connects gradually sampling valve (7), liquid inlet joint (6), sampling valve (7) set up in casing (2) outside, liquid inlet joint (6) set up at casing (2) top, high-purity anhydrous hydrofluoric acid passes through liquid inlet joint (6), sampling valve (7), inlet channel (8) and gets into in sample bottle (17).
2. The high purity anhydrous hydrofluoric acid sampling apparatus of claim 1, wherein: the laminar flow plate is characterized in that a laminar flow channel is arranged in the laminar flow plate (9), the laminar flow plate (9) is provided with two layers, each laminar flow plate (9) is made of a polypropylene plate with the thickness of 6 millimeters, the upper and lower interval distance of the laminar flow plate (9) is 15 millimeters, and ventilation holes with the intervals of 20 millimeters and the diameters of 5 millimeters are uniformly distributed in each laminar flow plate (9).
3. The high purity anhydrous hydrofluoric acid sampling apparatus of claim 2, wherein: the sampling door (3) has been installed on casing (2) front, sampling door (3) adopt transparent polyvinyl chloride to make, liquid level in sampling bottle (17) is used for observing in sampling door (3).
4. The apparatus for sampling anhydrous hydrofluoric acid of high purity according to claim 1, 2 or 3, wherein: the sampling device is characterized in that a sampling bottle joint (16) is installed at the bottle mouth of the sampling bottle (17), a first quick joint (18) and a second quick joint (19) are arranged on the sampling bottle joint (16), the first quick joint (18) is connected with the liquid inlet pipeline (8), the second quick joint (19) is connected with the sampling exhaust pipe (11), and the other end of the sampling exhaust pipe (11) is connected into the air exhaust box (10).
5. The high purity anhydrous hydrofluoric acid sampling apparatus of claim 4, wherein: sample bottle (17) are installed in casing (2) through sample installing support (15), sample bottle connects (16) middle part and is equipped with round recess (20), set up on sample installing support (15) and connect (16) recess (20) matched with U type groove (21) with the sample bottle, sample bottle (17) connect (16) card to go into sample installing support (15) through the sample bottle.
6. The high purity anhydrous hydrofluoric acid sampling apparatus of claim 5, wherein: the ice water box (12) is arranged on an ice box sliding rail (13), the ice box sliding rail (13) is higher than a door frame at the lower part of the sampling door (3), and the ice water box (12) is pushed into the shell (2) along the ice box sliding rail (13).
7. The high purity anhydrous hydrofluoric acid sampling apparatus of claim 6, wherein: a liquid outlet is formed in the bottom of the shell (2), and a liquid outlet valve (14) is installed at the liquid outlet.
8. The apparatus for sampling anhydrous hydrofluoric acid of high purity according to claim 7, wherein: ice blocks are arranged in the ice water box (12), and the height of the ice blocks is higher than 2/3 of that of the sampling bottle (17).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921556650.9U CN210665172U (en) | 2019-09-18 | 2019-09-18 | High-purity anhydrous hydrofluoric acid sampling equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921556650.9U CN210665172U (en) | 2019-09-18 | 2019-09-18 | High-purity anhydrous hydrofluoric acid sampling equipment |
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| CN210665172U true CN210665172U (en) | 2020-06-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426246A (en) * | 2019-09-18 | 2019-11-08 | 冠礼控制科技（上海）有限公司 | A kind of high-pure anhydrous hydrofluoric acid sampling equipment and its sampling method |
-
2019
- 2019-09-18 CN CN201921556650.9U patent/CN210665172U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426246A (en) * | 2019-09-18 | 2019-11-08 | 冠礼控制科技（上海）有限公司 | A kind of high-pure anhydrous hydrofluoric acid sampling equipment and its sampling method |
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