CN210650147U - Vacuum adsorption device - Google Patents
Vacuum adsorption device Download PDFInfo
- Publication number
- CN210650147U CN210650147U CN201921634520.2U CN201921634520U CN210650147U CN 210650147 U CN210650147 U CN 210650147U CN 201921634520 U CN201921634520 U CN 201921634520U CN 210650147 U CN210650147 U CN 210650147U
- Authority
- CN
- China
- Prior art keywords
- vacuum adsorption
- gas
- inlet
- outlet
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model relates to a vacuum adsorption device, include: the vacuum adsorption disc is provided with a first air suction port in the center; the gas-liquid separation structure comprises an inlet and an outlet, and the inlet is communicated with the first air suction port through a first pipeline; the venturi tube comprises a first air inlet and a first air outlet which are positioned at two opposite ends, and a second air inlet which is positioned on the side face, wherein the second air inlet is communicated with the outlet of the gas-liquid separation structure.
Description
Technical Field
The utility model relates to a vacuum adsorption technology field especially relates to a vacuum adsorption device.
Background
In silicon wafer edge polishing, the vacuum generating device that silicon wafer adsorbs the adoption is water ring vacuum pump, because water ring vacuum pump needs the supply that has tap water (running water), and because the problem of structure, the running water can be inhaled and sneaked into along with the liquid that gas was inhaled, this liquid is that the water seal water requirement that does not conform to water ring vacuum pump, it has the pollution probably, lead to directly draining the water in the water ring vacuum pump of needs, then supply water again, water ring vacuum pump water seal water consumption is very big, frequently supply water, the drainage, use cost rises, and the energy consumption is high, and water ring vacuum pump's area is great.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a vacuum adsorption device solves the problem that the energy consumption that adopts the water ring vacuum pump to carry out vacuum adsorption and cause is high, with high costs etc.
In order to achieve the above purpose, the utility model discloses a technical scheme is: a vacuum adsorption apparatus comprising:
the vacuum adsorption disc is provided with a first air suction port in the center;
the gas-liquid separation structure comprises an inlet and an outlet, and the inlet is communicated with the first air suction port through a first pipeline;
the venturi tube comprises a first air inlet and a first air outlet which are positioned at two opposite ends, and a second air inlet which is positioned on the side face, wherein the second air inlet is communicated with the outlet of the gas-liquid separation structure.
Optionally, in a direction from the first air inlet to the first air outlet, the venturi tube sequentially includes a contraction tube, a throat tube, and a diffusion tube, and the second air inlet is located in the throat tube.
Optionally, the venturi further comprises a compressed air supply structure communicating with the first air inlet through a pipe to supply compressed air to the venturi.
Optionally, the compressed air supply structure includes an air drying part, an air cleaning part and an air compressing part which are communicated with each other through a duct.
Optionally, the vacuum adsorption device comprises at least two venturi tubes, each venturi tube is connected to the second air inlet, the outlet of the gas-liquid separation structure is connected to a main pipe, and each branch pipe is communicated with the main pipe.
Optionally, a first valve is arranged on the main pipeline, and/or a second valve is arranged on each branch pipeline.
Optionally, the gas-liquid separation structure includes a body having an accommodating cavity, and the sidewall of the upper half of the body is provided with the inlet and the outlet communicated with the accommodating cavity.
Optionally, still include the liquid reserve tank, the bottom of body is provided with the liquid outlet, the liquid outlet pass through the second pipeline with the liquid reserve tank intercommunication.
Optionally, a third valve is arranged on the first pipeline, and a fourth valve is arranged on the third pipeline.
Optionally, the third valve and/or the fourth valve is a solenoid valve.
The utility model has the advantages that: adopt venturi to replace water ring vacuum pump to provide vacuum environment, carry out vacuum adsorption to adopt the gas-liquid separation structure when carrying out vacuum adsorption, sneak into the liquid separation in the gas and come out, avoided sneaking into the liquid among the gas and got into venturi, thoroughly solve when adopting water ring vacuum pump to carry out vacuum adsorption, inspiratory gas sneak into liquid, and the cost that causes rises, the energy consumption is heavy scheduling problem.
Drawings
Fig. 1 shows a schematic structural view of a vacuum adsorption device in an embodiment of the present invention;
FIG. 2 is a schematic diagram of a venturi according to an embodiment of the present invention;
fig. 3 shows a schematic view of a part of the structure of the transmission part in the embodiment of the present invention.
Detailed Description
In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined below to clearly and completely describe the technical solution of the embodiments of the present invention. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived from the description of the embodiments of the present invention by a person skilled in the art, are within the scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Generally, silicon wafer polishing, it is fixed to adsorb through vacuum adsorption to silicon wafer, and it is water ring vacuum pump to provide the vacuum, however, water ring vacuum pump needs water to carry out the operation, during vacuum adsorption, have liquid along with inspiratory gas go on in the water ring vacuum pump, these liquid are by polluting, need direct discharge, will cause frequent drainage like this, supply water, cause the waste of water resource, the promotion of cost, and water ring vacuum pump's area is also great, extravagant space.
To above-mentioned technical problem, this embodiment provides a vacuum adsorption device, adopt venturi to replace water ring vacuum pump to provide vacuum environment, carry out vacuum adsorption, and what venturi adopted is gas rather than liquid, and when gas-liquid separation structure will carry out vacuum adsorption, the liquid separation who sneakes into in the gas comes out, liquid entering venturi in the sneaked into gas has been avoided, venturi and gas-liquid separation structure cooperate, thoroughly solve when adopting water ring vacuum pump to carry out vacuum adsorption, inspiratory gas sneakes into liquid, and the cost that causes rises, the energy consumption is heavy scheduling problem.
Specifically, as shown in fig. 1, the present embodiment provides a vacuum adsorption apparatus, including:
the vacuum adsorption disc comprises a vacuum adsorption disc 1, wherein a first air suction port is arranged in the center of the vacuum adsorption disc 1;
a gas-liquid separation structure 2 including an inlet and an outlet, the inlet communicating with the first suction port through a first duct 5;
the venturi tube 3 includes a first gas inlet 34 and a first gas outlet 35 at opposite ends, and a second gas inlet 36 at a side, the second gas inlet 36 being communicated with the outlet of the gas-liquid separation structure 2.
The venturi effect, also known as the venturi effect. This phenomenon is named after its finder, the Italian physicist Venturi (Giovanni Battista Venturi). This effect is manifested in the phenomenon that the flow velocity of the confined fluid increases as it passes through a reduced flow cross-section, which is inversely proportional to the flow cross-section. While it is known from bernoulli's law that an increase in flow velocity is accompanied by a decrease in fluid pressure, a common venturi phenomenon. In general terms, when a fluid flows inside a venturi, at the narrowest point of the duct, the dynamic pressure (head of velocity) reaches a maximum, the static pressure (resting pressure) reaches a minimum, and the velocity of the fluid rises as the cross-sectional area of the flow decreases. The entire surge undergoes a pipe reduction process at the same time, and the pressure is reduced at the same time, thereby creating a pressure differential that is used to measure or provide an external suction to the fluid, thereby creating an adsorption effect.
This embodiment has utilized venturi's venturi effect, it is fixed to realize treating the absorption of mounting, though flow in venturi and adopt gas in order to produce the fluid of adsorption, but, mix the interior contaminated liquid of gas and can cause the unstability of vacuum equally, and contaminated liquid also can reduce venturi's life, so this embodiment has set up the gas-liquid separation structure, avoid liquid to get into venturi, that is to say, this embodiment, cooperate through venturi and gas-liquid separation structure and substitute water ring vacuum pump, realize vacuum adsorption, thoroughly solved because adopt water ring vacuum pump to provide vacuum adsorption, the problem that the water consumption is big, and solved because inspiratory gas sneaks into liquid, lead to water ring vacuum pump water seal water to need directly discharge, and the frequent water supply that leads to the fact, the drainage, and the cost is reduced, and the water resource is saved.
In this embodiment, as shown in fig. 2, the venturi tube sequentially comprises a contraction tube 31, a throat tube 32 and a diffusion tube 33 from the first gas inlet 34 to the first gas outlet 35, and the second gas inlet 36 is located in the throat tube 32.
Gas enters the venturi interior from the first gas inlet 34, the gas flow rate increases at the throat 32, the pressure decreases, and adsorption occurs, i.e., adsorption is provided through the second gas inlet 36.
In this embodiment, an adjusting structure for adjusting the size of the throat 32 is disposed at the throat 32, and the adjusting structure adjusts the size of the throat 32 to adjust the magnitude of the adsorption force.
The specific structural form of the adjusting structure can be various, and in this embodiment, the adjusting structure includes a pressure monitor for monitoring the pressure at the throat 32, at least one valve plate disposed at the throat 32, a transmission portion for controlling the movement of the at least one valve plate, and a driving portion for driving the transmission portion.
In a specific embodiment, the adjusting structure may include two valve plates disposed oppositely so that the gas always flows through the center of the throat.
The specific structural form of the transmission part can be various, in this embodiment, as shown in fig. 3, the transmission part includes a transmission gear assembly, a first belt pulley 30 and a second belt pulley, a rotating shaft and a conveyor belt; the transmission gear assembly comprises a driving gear 10 and a driven gear 20, a first belt wheel 30 is arranged on the driven gear 20, a second belt wheel is arranged on one side of the driven gear 20 and is positioned on the same level with the driven gear 20, the conveying belt is tensioned on the first belt wheel 30 and the second belt wheel, one valve plate is connected with the first belt wheel 30 through a rotating shaft, the other valve plate is connected with the second belt wheel through a rotating shaft, and the two valve plates are driven to overturn relatively through the rotation of the transmission gear assembly and the second belt wheel.
In this embodiment, the two valve plates are disposed inside the throat 32, and the transmission portion is fixed to the outer side surface of the throat 32 through a connecting member.
In this embodiment, the outer cover of the conveyor belt is provided with a protective cover 40 to play a role of dust prevention.
In this embodiment, the driving structure includes a motor, but not limited thereto.
In this embodiment, a compressed air supply structure 4 is further included, which communicates with the first air inlet via a conduit 8 to supply compressed air to the venturi 3.
In the present embodiment, the compressed air supply structure 4 includes an air drying portion, an air cleaning portion, and an air compressing portion that are communicated with each other through a duct.
In this embodiment, the vacuum adsorption apparatus includes at least one venturi tube 3, when the vacuum adsorption apparatus includes at least two venturi tubes 3, each of the venturi tubes 3 is connected to the second gas inlet by a branch pipe 9, the outlet of the gas-liquid separation structure 2 is connected to a main pipe 6, and each of the branch pipes 9 is communicated with the main pipe 6.
In practical use, the number of the venturi tubes 3 can be increased to increase the adsorption force.
Optionally, a first valve 61 is disposed on the main pipe 6, and/or a second valve is disposed on each branch pipe 9.
When the number of the venturi tubes 3 is at least two, the venturi tubes 3 can be controlled individually by the second valve on each branch pipe, or the venturi tubes 3 can be controlled collectively by the first valve 61 on the main pipe 6, so as to facilitate the operation.
In this embodiment, the gas-liquid separation structure 2 includes a body having an accommodating cavity, and the sidewall of the upper half portion of the body is provided with the inlet and the outlet communicated with the accommodating cavity.
The gas inlet and the gas outlet are both positioned on the side wall of the upper half part of the body, so that during vacuum adsorption, the gas in the suction pipeline is mixed with the liquid, and when the gas mixed with the liquid flows through the gas-liquid separation structure, the liquid descends and gathers at the bottom of the accommodating cavity through the self gravity, and the structure is simple.
In this embodiment, the vacuum adsorption device still includes liquid reserve tank 5, the bottom of body is provided with the liquid outlet, the liquid outlet pass through second pipeline 7 with liquid reserve tank 5 intercommunication.
Collect the liquid that separates through liquid reserve tank 5, avoid the polluted environment, just the liquid outlet sets up the bottom of body does benefit to gather in the discharge of the liquid that holds the cavity bottom.
The material of the liquid storage tank 5 may be stainless steel, so as to increase the service life of the liquid storage tank 5, but not limited thereto.
In this embodiment, the second pipe 7 is provided with a fourth valve 71.
When the first valve 61 on the main pipeline 6 is opened, vacuum adsorption is carried out, liquid sucked by gas reaches the gas-liquid separation structure 2, descends due to self gravity and is gathered at the bottom of the accommodating cavity, after the vacuum adsorption is finished, the first valve 61 on the main pipeline 6 is closed, at the moment, the fourth valve 71 on the second pipeline 7 is opened, the liquid in the body can be discharged, and when the first valve 61 on the main pipeline 6 is opened again, the fourth valve 71 on the second pipeline 7 is closed, and the liquid is continuously collected.
The fourth valve 71 on the second pipeline 7 is convenient for cleaning the liquid in the liquid storage tank 5, so as to prevent the liquid in the liquid storage tank 5 from overflowing.
In a specific implementation manner of this embodiment, the valves are all solenoid valves.
The first valve 61 on the main pipeline 6 and/or the second valve on the branch pipeline 9, and the fourth valve on the second pipeline 7 all adopt solenoid valves, realize respectively that main pipeline 6, branch pipeline 9 and the automatic operation of switching on/off of second pipeline 7, raise the efficiency.
In a specific implementation manner of this embodiment, the third valve on the first pipeline may not be disposed on the main pipeline 6, and likewise, the third valve may not be disposed on the first pipeline, and the first valve is disposed on the main pipeline to simplify the structure.
In this embodiment, the exit of body is provided with the filtration that is used for filtering impurity.
The setting of filtration can prevent that particulate matter impurity from entering into water ring vacuum pump, it is right water ring vacuum pump plays the guard action, extension water ring vacuum pump's life.
The specific structural form of the filtering structure may be various, and in this embodiment, the filtering structure includes a filtering net, but is not limited thereto.
The above is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should be considered as the protection scope of the present invention.
Claims (10)
1. A vacuum adsorption apparatus, comprising:
the vacuum adsorption disc is provided with a first air suction port in the center;
the gas-liquid separation structure comprises an inlet and an outlet, and the inlet is communicated with the first air suction port through a first pipeline;
the venturi tube comprises a first air inlet and a first air outlet which are positioned at two opposite ends, and a second air inlet which is positioned on the side face, wherein the second air inlet is communicated with the outlet of the gas-liquid separation structure.
2. A vacuum adsorption device as claimed in claim 1, wherein the venturi comprises, in order from the first gas inlet to the first gas outlet, a converging tube, a throat and a diverging tube, the second gas inlet being located at the throat.
3. A vacuum adsorption device as claimed in claim 1, further comprising a compressed air supply structure in communication with the first air inlet via a conduit to supply compressed air to the venturi.
4. The vacuum adsorption device of claim 3, wherein the compressed air supply structure comprises an air drying part, an air cleaning part and an air compressing part which are communicated with each other through a pipe.
5. A vacuum adsorption apparatus as claimed in claim 1, comprising at least one venturi, wherein when said vacuum adsorption apparatus comprises at least two venturis, said second gas inlet of each venturi is connected to a branch conduit, said outlet of said gas-liquid separation structure is connected to a main conduit, and each branch conduit is communicated with said main conduit.
6. A vacuum adsorption unit according to claim 5 wherein a first valve is provided on the main conduit and/or a second valve is provided on each of the branch conduits.
7. The vacuum adsorption device according to claim 1, wherein the gas-liquid separation structure comprises a body having a receiving cavity, and the inlet and the outlet communicating with the receiving cavity are provided on a sidewall of an upper half of the body.
8. The vacuum adsorption device of claim 7, further comprising a liquid storage tank, wherein a liquid outlet is arranged at the bottom of the body, and the liquid outlet is communicated with the liquid storage tank through a second pipeline.
9. The vacuum adsorption device of claim 8, wherein the first conduit is provided with a third valve and the second conduit is provided with a fourth valve.
10. The vacuum adsorption device of claim 9, wherein the third valve and/or the fourth valve is a solenoid valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921634520.2U CN210650147U (en) | 2019-09-27 | 2019-09-27 | Vacuum adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921634520.2U CN210650147U (en) | 2019-09-27 | 2019-09-27 | Vacuum adsorption device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210650147U true CN210650147U (en) | 2020-06-02 |
Family
ID=70835826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921634520.2U Active CN210650147U (en) | 2019-09-27 | 2019-09-27 | Vacuum adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210650147U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113926357A (en) * | 2021-09-16 | 2022-01-14 | 蔡丽佳 | Cosmetic processing device and preparation process of cosmetics |
-
2019
- 2019-09-27 CN CN201921634520.2U patent/CN210650147U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113926357A (en) * | 2021-09-16 | 2022-01-14 | 蔡丽佳 | Cosmetic processing device and preparation process of cosmetics |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212187989U (en) | Sewage draining device | |
| CN210650147U (en) | Vacuum adsorption device | |
| CN201610878U (en) | Precision filter of compressed air | |
| CN215962843U (en) | Activated carbon adsorption box of waste gas treatment equipment | |
| CN204141699U (en) | A kind of air purifier | |
| CN109173600A (en) | A kind of aqueous medium indoor air purifier | |
| CN104096407B (en) | A kind of drainage system comprising vacuum filter | |
| CN110666680A (en) | Vacuum adsorption device | |
| CN217077201U (en) | Sewage treatment case that sewage treatment used | |
| CN216236890U (en) | Filtering separator for natural gas convenient to collect impurity | |
| CN110550754B (en) | Membrane method sewage treatment system | |
| CN211999085U (en) | Filter device for electroplating production line | |
| CN210845756U (en) | House building engineering dust keeper | |
| CN210951621U (en) | Indoor air pollutant filters air supply arrangement | |
| CN209646904U (en) | A kind of lithium battery diaphragm coating slurry feed back material feeding jar | |
| CN202876458U (en) | Capsule compressing side flow fiber bundle filtering system | |
| CN206867862U (en) | Applied to the water separator on sludge drying system | |
| CN210964399U (en) | Dust collector for factory building is transported to grain | |
| CN211111361U (en) | Membrane method filtering equipment for sewage treatment | |
| CN209129141U (en) | A kind of integrated prefabricated pumping plant with water surface dross automatic collection function | |
| CN213885479U (en) | Water filtration air purification device | |
| CN211274246U (en) | Non-metal cross-flow membrane tube intercepting device | |
| CN214715305U (en) | Spray tower for industrial waste gas treatment | |
| CN221244597U (en) | High-efficiency energy-saving desulfurization solution circulating pump | |
| CN216381473U (en) | Ventilation and dust removal equipment for coal mine operation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |