CN210649670U - Uniform-temperature freezing clamping device - Google Patents

Uniform-temperature freezing clamping device Download PDF

Info

Publication number
CN210649670U
CN210649670U CN201921469091.8U CN201921469091U CN210649670U CN 210649670 U CN210649670 U CN 210649670U CN 201921469091 U CN201921469091 U CN 201921469091U CN 210649670 U CN210649670 U CN 210649670U
Authority
CN
China
Prior art keywords
cold water
transition
cold
water inlet
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201921469091.8U
Other languages
Chinese (zh)
Inventor
陈启文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DONGGUAN DELISHI MACHINERY TECHNOLOGY CO LTD
Original Assignee
DONGGUAN DELISHI MACHINERY TECHNOLOGY CO LTD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DONGGUAN DELISHI MACHINERY TECHNOLOGY CO LTD filed Critical DONGGUAN DELISHI MACHINERY TECHNOLOGY CO LTD
Priority to CN201921469091.8U priority Critical patent/CN210649670U/en
Application granted granted Critical
Publication of CN210649670U publication Critical patent/CN210649670U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

The utility model discloses a uniform temperature freezing clamping device, which comprises a shell and a top cover plate, wherein cold and hot chips are uniformly arranged and distributed on the lower side of the top cover plate, and each cold and hot chip is correspondingly provided with a cold water transition block; the water inlet cold water circulation block is provided with a water inlet cold water circulation flow channel which is connected with a cold water inlet, the water inlet cold water circulation flow channel is provided with a water inlet interface corresponding to a cold water transition water inlet of each cold water transition block, the water outlet cold water circulation block is provided with a water outlet cold water circulation flow channel which is connected with a cold water outlet, and the water outlet cold water circulation flow channel is provided with a water outlet interface corresponding to a cold water transition water outlet of each cold water transition block; the water inlet and outlet valve is arranged in the water inlet and outlet transition block, and is matched with a water inlet connector of the water inlet and outlet transition block to regulate the flow of cold water entering the water inlet and outlet transition block. The heat dissipation effect is improved, and the uniformity of the freezing temperature is ensured.

Description

Uniform-temperature freezing clamping device
Technical Field
The utility model relates to a freezing clamping device, in particular to freezing clamping device of samming.
Background
The freezing clamping device (also known as a freezing clamp, a freezing sucker and the like) utilizes an electrothermal type refrigeration principle (also known as a Peltier effect) to rapidly refrigerate and freeze a panel and a freezing medium on the panel through the refrigeration surface of a cold and hot chip (also known as an electrothermal cooling element, a semiconductor combined chip and the like) so as to clamp workpieces in a freezing way, can well clamp small and precise workpieces, thin workpieces, irregular workpieces and the like which are difficult to clamp by a traditional clamp, and is widely applied. The true utility of new patent semiconductor freezing sucker, application number: 201821743134.2, publication No.: 208880564U, the semiconductor freezing sucker, it uses the Peltier effect to refrigerate and freeze the cold guide plate and the medium on it by the refrigerating surface of the semiconductor combination plate, to realize the clamping of the workpiece; because the semiconductor combined piece has a refrigerating surface, the semiconductor combined piece must have a heating surface, and therefore, in the working process of the semiconductor combined piece, the heat of the heating surface of the semiconductor combined piece needs to be taken away in a heat dissipation mode, and the refrigerating effect of the refrigerating surface of the semiconductor combined piece can be ensured; and the heat dissipation flow channel is added with circulating cooling liquid in a common and preferred heat dissipation mode. However, the heat dissipation method of the semiconductor freezing sucker by adding the circulating cooling liquid into the heat dissipation flow channel has the following disadvantages: when more than two cold and hot chips are arranged and distributed below the panel, the hot surface of each chip generates heat and needs to dissipate heat, and when circulating cold liquid sequentially passes through the heat dissipation flow channel and dissipates heat to the first and second … … Nth cold and hot chips to take away heat, the temperature of the cooling liquid is higher and higher, the heat dissipation effect is reduced gradually, the heat of the chips taken away is less and less, so that the heat dissipation effect of the front chip is more, the cooling effect is good, the temperature of the corresponding panel position is lower, the heat dissipation effect of the rear chip is less, the cooling effect is poorer, the temperature of the corresponding panel position is higher, therefore, the panel and the freezing medium on the panel are inconsistent in heat dissipation effect at different positions, the temperature difference exists, the cooling is uneven, and the clamping effect is influenced. No matter what kind of material, the condition that can inevitably have expend with heat and contract with cold, cold and hot deformation, when freezing centre gripping, if freezing temperature is inhomogeneous, very easily influences the precision of processing. In addition, the uneven heat dissipation causes uneven freezing, and meanwhile, the accuracy of the freezing clamping temperature control is also influenced, and the error is large. The prior freezing clamping device has the following defects: firstly, the whole radiating effect is poor, and temperature uniformity is poor, and secondly, the temperature control error is big, can't realize high accuracy temperature control and regulation. Therefore, the conventional isothermal freezing clamping device has many unreasonable places and needs to be improved.
SUMMERY OF THE UTILITY MODEL
To the above, an object of the utility model is to provide a freezing clamping device of samming improves whole radiating effect, realizes that the hot side heat dissipation of a plurality of cold and hot chips is unanimous, guarantees that the freezing temperature of panel and the different positions of refrigerant on it is even to and improve the precision of freezing centre gripping temperature control.
The utility model adopts the technical proposal that: a temperature-equalizing freezing clamping device comprises a shell and a top cover plate (generally, the shell can also comprise a bottom plate as a substrate part), wherein the shell forms an accommodating installation cavity, more than two cold chips and more than two cold chips are uniformly distributed and arranged on the lower side of the top cover plate, a cold water transition block is correspondingly arranged on the lower hot surface of each cold chip and each cold chip, and each cold water transition block comprises a cold water transition cavity, a cold water transition water inlet and a cold water transition water outlet;
the water inlet cold water circulation block is provided with a water inlet cold water circulation flow channel which is connected with a cold water inlet, a water inlet interface is arranged at a cold water transition water inlet of each cold water transition block in the same row corresponding to the water inlet cold water circulation flow channel, a water outlet cold water circulation flow channel is arranged at the water outlet cold water circulation flow channel which is connected with a cold water outlet, and a water outlet interface is arranged at a cold water transition water outlet of each cold water transition block in the same row corresponding to the water outlet cold water circulation flow channel;
still include the choke valve more than two, the choke valve sets up at the cold water circulation piece of intaking to cooperate with every interface of intaking of the cold water circulation piece of intaking, adjust the interface of intaking of the cold water circulation piece and the cold water transition water inlet's of cold water transition piece the space that switches on, and then adjust the cold water flow that gets into in the cold water transition piece.
The control method of the uniform temperature freezing clamping device comprises the following steps:
1) pre-adjusting a throttle valve: the power supply is connected, the uniform temperature freezing clamping device is started, a preset voltage value is input, each throttling valve is adjusted, the cold water inlet amount in each cold water transition block is further adjusted, meanwhile, the temperature of the position, corresponding to each cold and hot chip, of the top cover plate is detected through the temperature detector, the temperature of each position is consistent, a preset temperature value is reached, and the uniformity of the freezing temperature of different positions of the uniform temperature freezing clamping device is guaranteed;
2) the temperature sensor is installed at the local position of the top cover plate, and in the work application process of the uniform temperature freezing clamping device, the refrigeration effect of the cold and hot chip is adjusted by adjusting the voltage value of the power supply, and the temperature constant temperature adjustment and control of the uniform temperature freezing clamping device are realized by matching with the feedback temperature of the temperature sensor.
The utility model has the advantages of it is following: the cooling and heating chips are correspondingly provided with the cold water transition blocks to independently dissipate heat, so that the heat dissipation unit is good in heat dissipation effect and easy to adjust, and the problem that the heat dissipation of the chips at different positions is inconsistent due to the traditional integrated heat dissipation is avoided. And secondly, the water inlet cold water circulating block and the water outlet cold water circulating block are connected with each cold water transition block, so that cold water entering each cold water transition block is ensured to be the most original cold water (or other cold liquid) with relatively consistent temperature as far as possible, the heat dissipation effect is ensured, and meanwhile, the problem that the heat dissipation effect of a front chip is good and the effect of a rear chip is poor due to the fact that a traditional single cold water flow channel sequentially passes through each cold and hot chip is avoided, and therefore, the heat dissipation effect can be further improved, and meanwhile, the uniformity of heat dissipation is improved. Thirdly, a throttle valve is arranged on the water inlet cold water circulation block corresponding to each cold water transition block, and the flow of cold water entering each cold water transition block is adjusted, so that the heat dissipation effect of each cold water transition block is adjusted to be consistent by adjusting the throttle valve, the temperature of cold surfaces of a plurality of cold and hot chips is consistent, the uniform freezing temperature of different positions of a panel and a freezing medium on the panel is ensured, and the accuracy of freezing clamping temperature control is improved; the temperature uniformity can be maintained at +/-0.01 ℃, and the temperature control accuracy (based on the temperature of the temperature sensor) can reach +/-0.1 ℃. Fourthly, the temperature equalizing freezing clamping device can be modularized in a unit, and the temperature equalizing freezing clamping device with larger area can be obtained by splicing a plurality of freezing clamping devices.
The present invention will be further described with reference to the following description and embodiments in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic view of the overall structure of a uniform temperature freezing clamping device;
FIG. 2 is a schematic structural view of the hidden top cover plate of FIG. 1;
FIG. 3 is a schematic structural view of the hidden housing of FIG. 2;
FIG. 4 is a schematic view of the backside structure of FIG. 3 with the hidden bottom plate and the hidden cold water transition block
FIG. 5 is a schematic structural view of the uniform temperature freezing clamping device after the bottom plate is hidden;
FIG. 6 is a schematic cross-sectional view of the isothermal freezing clamping device;
FIG. 7 is a schematic structural diagram of a cold water transition block;
FIG. 8 is a schematic structural view of an intake cold water circulation block;
FIG. 9 is a schematic structural diagram of an outlet cold water circulation flow passage;
FIG. 10 is a schematic view of the fitting structure of the water inlet joint mounting block and the water outlet joint mounting block;
in the figure: a base plate 1; a housing 2; a top cover plate 3; a cold-hot chip 4; electrically connecting the transition joint 41; a cold water transition block 5; a cold water transition chamber 51; a cold water transition inlet 52; a cold water transition outlet 53; a cold water transition plate 54; a cold water bottom plate 55; an inlet cold water circulation block 6; an inlet cold water circulation flow passage 61; a water inlet port 62; an effluent cold water circulation block 7; an effluent cold water circulation flow passage 71; a water outlet port 72; a throttle valve 8; a valve body 81; a valve core 82; a water inlet joint mounting block 9; an inlet cold water diversion passage 91; a cold water inlet transition joint 92; a water outlet joint mounting block 10; a cold water outlet confluence passage 101; and a cold water transition joint 102.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indicators (such as … …, upper, lower, left, right, front, back, top, bottom, inner, outer, vertical, horizontal, longitudinal, counterclockwise, clockwise, circumferential, radial, axial) are involved in the embodiments of the present invention, the directional indicators are only used to explain the relative position, motion, etc. of the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicators are changed accordingly.
In addition, if there is a description relating to "first" or "second", etc. in the embodiments of the present invention, the description of "first" or "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Example one
Referring to fig. 1 to 10, the present embodiment is a basic embodiment, and the provided uniform temperature freezing clamping device includes a bottom plate 1, a housing 2 and a top cover plate 3, where the housing 2 forms an accommodating installation cavity, the lower side of the top cover plate 3 is uniformly distributed with more than two cold and hot chips 4, a cold water transition block 5 is correspondingly arranged on the lower hot surface of each cold and hot chip, and the cold water transition block 5 includes a cold water transition cavity 51, a cold water transition water inlet 52 and a cold water transition water outlet 53;
the water cooling system is characterized by further comprising a water inlet cold water circulating block 6 and a water outlet cold water circulating block 7, wherein the water inlet cold water circulating block 6 is provided with a water inlet cold water circulating flow passage 61, the water inlet cold water circulating flow passage 61 is connected with a cold water inlet, the water inlet cold water circulating flow passage 61 is provided with a water inlet interface 62 corresponding to a cold water transition water inlet 52 of each cold water transition block 5 in the same row, the water outlet cold water circulating block 7 is provided with a water outlet cold water circulating flow passage 71, the water outlet cold water circulating flow passage 71 is connected with a cold water outlet, and the water outlet cold water circulating flow passage 71 is provided with a water outlet interface 72 corresponding to a cold water transition water outlet 53 of each cold water transition block 5 in the same row;
the water inlet circulation device further comprises more than two throttle valves 8, wherein the throttle valves 8 are arranged on the water inlet cold water circulation block 6 and are matched with each water inlet interface 62 of the water inlet cold water circulation block 6, and the communication space between the water inlet interfaces 62 of the water inlet cold water circulation block 6 and the cold water transition water inlets 52 of the cold water transition blocks 5 is adjusted, so that the flow of cold water entering the cold water transition blocks 5 is adjusted.
In addition, an electrical connection transition joint 41 connected with the cold-hot chip 4 is arranged at the side part of the shell 2 of the uniform temperature freezing clamping device, so that the cold-hot chip 2 can be connected with a power supply.
Specifically, the throttle valve 8 includes a valve body 81 and a valve core 82, the valve body 81 and the valve core 82 are matched with each other through a sealed threaded screw hole structure, so that the valve core 82 can be adjusted by screwing in and out, one end of the valve core 82 is a butt end, and the butt end is in a cone structure and is matched with the water inlet port 62 of the water inlet cold water circulation block 6. It should be noted that a hole is reserved in the bottom of the housing 2 corresponding to the throttle 8 to facilitate screwing the throttle 8, and the bottom plate 1 can cover the bottom of the housing 2. It should be noted that the specific structure of the throttle valve 8 is a preferable structure for the intake cold water circulation block 6 and the cold water transition block 5 in the present embodiment, and is not excluded, and other throttle valve structures are also applicable, and instead of an equivalent throttle valve structure, it is only necessary to satisfy the requirement that the amount of cold water entering each cold water transition block is adjusted to realize the adjustment of the heat dissipation amount.
Specifically, the cold water transition block 5 is formed by matching a cold water transition plate 54 and a cold water bottom plate 55, the cold water transition plate 54 is provided with a cold water transition water inlet 52 and a cold water transition water outlet 53, and the cold water bottom plate 55 is covered on the cold water transition plate 54 to form a cold water transition cavity 51. More specifically, a plurality of heat dissipation fins are arranged inside the cold water bottom plate 55. Cold water enters from the cold water transition water inlet 52, passes through the cold water transition cavity 51, takes away as much heat as possible, and then goes out from the cold water transition water outlet 53, so that the heat dissipation effect is improved.
It should be noted that the surface of the top cover plate 3 is provided with evenly distributed liquid storage tanks for accommodating the connecting medium.
The control method of the uniform temperature freezing clamping device comprises the following steps:
1) pre-adjusting a throttle valve: the power supply is connected, the uniform temperature freezing clamping device is started, the preset voltage value is input, each throttle valve 8 is adjusted, the cold water inlet amount in each cold water transition block 5 is further adjusted, meanwhile, the temperature of the position, corresponding to each cold and hot chip 4, of the top cover plate 3 is detected through the temperature detector, the temperature of each position is enabled to be consistent, the preset temperature value is reached, and the uniformity of the freezing temperature of different positions of the uniform temperature freezing clamping device is guaranteed;
2) the temperature sensor is arranged at the local position of the top cover plate 3, and in the working application process of the uniform-temperature freezing clamping device, the refrigeration effect of the cold and hot chip 4 is adjusted by adjusting the voltage value of the connected power supply, and the temperature constant temperature adjustment and control of the uniform-temperature freezing clamping device are realized by matching with the feedback temperature of the temperature sensor.
The basic principle of the control method of the uniform temperature freezing clamping device is as follows: on the basis of the uniform temperature freezing clamping device, the heat dissipation of each cold and hot chip is adjusted to ensure the consistency and uniformity of the refrigeration effect of each cold and hot chip; then the refrigeration temperature of each cold and hot chip is controlled by controlling the power supply.
Example two
Referring to fig. 1 to 10, the present embodiment is one of extended embodiments, and is different from the first embodiment in that:
the cold and hot chips 4 on the lower side of the top cover plate 3 comprise more than two rows, and the cold water transition blocks 5 comprise more than two corresponding rows; the inlet cold water circulating block 6 and the outlet cold water circulating block 7 respectively comprise more than two blocks, one inlet cold water circulating block 6 is matched with one outlet cold water circulating block 7 and corresponds to one row of cold water transition blocks 5, and therefore cold water inlet and outlet circulation of each cold water transition block 5 is achieved.
Specifically, the water inlet connector installation block 9 is provided with a cold water inlet diversion channel 91, one side of the cold water inlet diversion channel 91 corresponds to a cold water inlet and is provided with a cold water inlet transition joint 92, and the other side of the cold water inlet diversion channel 91 is respectively communicated with the cold water inlet circulation channel 61 of each cold water inlet circulation block 6 to input cold water; the water outlet joint mounting block 10 is provided with a cold water outlet converging channel 101, one side of the cold water outlet converging channel 101 corresponds to a cold water outlet, a cold water outlet transition joint 102 is arranged, and the other side of the cold water outlet converging channel 101 is respectively communicated with the cold water outlet circulating flow channel 71 of each cold water outlet circulating block 7 to discharge cold water.
It should be noted that, when the number of the cold and hot chips is two or more, in order to achieve the effect that one cold water inlet enters cold water and one cold water outlet exits cold water, it is necessary to provide a water inlet joint mounting block to connect to the water inlet cold water circulation blocks of each row, to shunt the cold water entering from the cold water inlet to the water inlet cold water circulation blocks of each row, and also to provide a water outlet joint mounting block to connect to the water outlet cold water circulation blocks of each row, to collect the cold water after heat dissipation of the water outlet cold water circulation blocks of each row to the cold water outlet for discharge. The arrangement can enable the water-cooling structure layout of the uniform-temperature freezing clamping device to be more concise and scientific, efficient and practical.
The utility model discloses be not limited to above-mentioned embodiment, adopt with the same or similar technical characteristics of the above-mentioned embodiment of the utility model, and the freezing clamping device of other samming that obtains is all within the protection scope of the utility model.

Claims (6)

1. The utility model provides a freezing clamping device of samming, includes shell and lamina tecti, the shell forms the holding installation cavity, the cold and hot chip of two above, its characterized in that are installed to lamina tecti downside align to grid distribution:
a cold water transition block is correspondingly arranged on the lower hot surface of each cold and hot chip and comprises a cold water transition cavity, a cold water transition water inlet and a cold water transition water outlet;
the water inlet cold water circulation block is provided with a water inlet cold water circulation flow channel which is connected with a cold water inlet, a water inlet interface is arranged at a cold water transition water inlet of each cold water transition block in the same row corresponding to the water inlet cold water circulation flow channel, a water outlet cold water circulation flow channel is arranged at the water outlet cold water circulation flow channel which is connected with a cold water outlet, and a water outlet interface is arranged at a cold water transition water outlet of each cold water transition block in the same row corresponding to the water outlet cold water circulation flow channel;
still include the choke valve more than two, the choke valve sets up at the cold water circulation piece of intaking to cooperate with every interface of intaking of the cold water circulation piece of intaking, adjust the interface of intaking of the cold water circulation piece and the cold water transition water inlet's of cold water transition piece the space that switches on, and then adjust the cold water flow that gets into in the cold water transition piece.
2. The clamping device for uniform temperature freezing according to claim 1, wherein the throttle valve comprises a valve body and a valve core, the valve body and the valve core are matched through a sealed threaded screw hole structure, so that the valve core can be adjusted by screwing in and out, one end of the valve core is a butt end, and the butt end is in a cone structure and is matched with a water inlet interface of the water inlet cold water circulating block.
3. The clamping device for uniform temperature freezing according to claim 1, wherein the cold water transition block is formed by matching a cold water transition plate and a cold water bottom plate, the cold water transition plate is provided with a cold water transition water inlet and a cold water transition water outlet, and the cold water bottom plate is covered on the cold water transition plate to form a cold water transition cavity.
4. The temperature equalizing and freezing clamping device as claimed in claim 3, wherein a plurality of heat dissipating fins are arranged on the inner side of the cold water bottom plate.
5. The temperature equalizing and freezing clamping device as claimed in claim 1, wherein the number of the hot and cold chips on the lower side of the top cover plate is more than two rows, and the number of the cold water transition blocks is more than two corresponding rows; the water inlet cold water circulating block and the water outlet cold water circulating block respectively comprise more than two blocks, and one water inlet cold water circulating block is matched with one water outlet cold water circulating block and corresponds to one row of cold water transition blocks, so that cold water inlet and outlet circulation of each cold water transition block is realized.
6. The clamping device for uniform temperature freezing of claim 5, further comprising a water inlet joint mounting block and a water outlet joint mounting block, wherein the water inlet joint mounting block is provided with a cold water inlet diversion channel, one side of the cold water inlet diversion channel corresponds to the cold water inlet and is provided with a cold water inlet transition joint, and the other side of the cold water inlet diversion channel is respectively communicated with the cold water inlet circulation flow channel of each cold water inlet circulation block for inputting cold water; the water outlet joint installation block is provided with a cold water outlet confluence channel, one side of the cold water outlet confluence channel corresponds to the cold water outlet and is provided with a cold water outlet transition joint, and the other side of the cold water outlet confluence channel is respectively communicated with the cold water outlet circulation flow channel of each cold water outlet circulation block for discharging cold water.
CN201921469091.8U 2019-09-05 2019-09-05 Uniform-temperature freezing clamping device Active CN210649670U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921469091.8U CN210649670U (en) 2019-09-05 2019-09-05 Uniform-temperature freezing clamping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921469091.8U CN210649670U (en) 2019-09-05 2019-09-05 Uniform-temperature freezing clamping device

Publications (1)

Publication Number Publication Date
CN210649670U true CN210649670U (en) 2020-06-02

Family

ID=70837375

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921469091.8U Active CN210649670U (en) 2019-09-05 2019-09-05 Uniform-temperature freezing clamping device

Country Status (1)

Country Link
CN (1) CN210649670U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110480384A (en) * 2019-09-05 2019-11-22 东莞市得力仕机械科技有限公司 A kind of samming freezing clamping device and its control method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110480384A (en) * 2019-09-05 2019-11-22 东莞市得力仕机械科技有限公司 A kind of samming freezing clamping device and its control method

Similar Documents

Publication Publication Date Title
US9113581B2 (en) Valve controlled, node-level vapor condensation for two-phase heat sink(s)
US10770372B2 (en) Fluid routing devices and methods for cooling integrated circuit packages
US8583290B2 (en) Cooling system and method minimizing power consumption in cooling liquid-cooled electronics racks
CN102057476B (en) Fast substrate support temperature control
US20060237181A1 (en) Multi-channel temperature control system for semiconductor processing facilities
CN210649670U (en) Uniform-temperature freezing clamping device
CN204202237U (en) Attemperating unit
CN103928414A (en) Liquid cooling radiating system of electronic component
US7225864B2 (en) Multi-channel temperature control system for semiconductor processing facilities
CN210220286U (en) Heat exchanger structure
KR101618450B1 (en) Apparatus for controlling temperature of semiconductor equipment
KR20180027283A (en) Small heatsink
CN113594344A (en) Refrigeration chip heat dissipation device and use method
CN116520134B (en) Temperature control testing system
KR101575505B1 (en) Apparatus for controlling process temperature
KR101551874B1 (en) Power thyristor unit cooling system
CN102620592A (en) Preparation method for liquid refrigerator applied to semiconductor laser and refrigerating device for semiconductor laser
CN202602082U (en) Liquid cooling device for semiconductor laser
JP2001082828A (en) Heat exchanger and heat carrier supply system
CN110480384A (en) A kind of samming freezing clamping device and its control method
CN109496115B (en) Microchannel heat exchanger with local self-adjustment function
EP3108748B1 (en) Aquarium thermostat using plurality of peltier elements and method for adjusting breeding water temperature
CN111151771A (en) Electric spindle cooled by clamping
CN212339681U (en) Refrigeration piece with heat dissipation plate
KR101577024B1 (en) Device and method for controlling water temperature

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant