CN210645871U - Waste gas treatment system - Google Patents

Waste gas treatment system Download PDF

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Publication number
CN210645871U
CN210645871U CN201920806874.4U CN201920806874U CN210645871U CN 210645871 U CN210645871 U CN 210645871U CN 201920806874 U CN201920806874 U CN 201920806874U CN 210645871 U CN210645871 U CN 210645871U
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gas
treatment system
absorption tower
oxidation reactor
membrane separation
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毛智明
魏巍
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Bay Environmental Technology Beijing Corp
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Bay Environmental Technology Beijing Corp
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Abstract

The embodiment of the utility model discloses exhaust-gas treatment system. The waste gas treatment system comprises an absorption tower, a gas separation tower and a gas separation tower, wherein the absorption tower is used for absorbing organic components in gas to be absorbed to form a recovery liquid and outputting the residual gas to be absorbed as intermediate gas; a membrane separation module connected to the absorber to receive the intermediate gas and separate the intermediate gas into a permeate gas and a retentate gas, the concentration of organic components in the permeate gas being greater than the concentration of organic components in the retentate gas; and the oxidation reactor is connected with the membrane separation assembly to receive the trapped gas, and the trapped gas is subjected to oxidation reaction in the oxidation reactor to generate dischargeable clean gas, wherein the gas to be absorbed comprises waste gas and/or permeation gas. The utility model discloses processing system has extensive application scope, can realize the improvement to multiple waste gas, when retrieving the organic component in the waste gas, carries out oxidation treatment to the organic waste in the waste gas, has better recovery effect and treatment effect.

Description

Waste gas treatment system
Technical Field
The utility model relates to a waste gas treatment technical field, in particular to waste gas treatment system.
Background
Volatile Organic Compounds (VOCs) such as crude oil, product oil, and liquid organic chemicals (benzene, toluene, xylene, alcohols, styrene, etc.) generate volatile gases during loading, storage, etc. If the gases are directly discharged into the atmosphere, the gases not only cause waste, but also pollute the surrounding environment and the atmosphere, certain chemical products have biological toxicity, and if the gases are volatilized and diffused, the gases can cause harm to organisms such as people. Therefore, these exhaust gases need to be treated.
In the prior art, the treatment of organic waste gas is generally recovery treatment through physical processes such as adsorption, condensation, absorption, membrane separation and the like. After the treatment of the waste gas by the treatment means or the combination of the treatment means, the obtained gas still contains organic matters with higher concentration, and the treatment effect is poor. The treatment of the organic waste gas can also adopt oxidation treatment, such as direct-fired furnace incineration, regenerative oxidation and the like, and the technologies oxidize and decompose organic matters in the waste gas into water and carbon dioxide through oxidation. However, the existing oxidation technologies have respective application ranges and are harsh in application conditions.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention is directed to an exhaust gas treatment system having a wider application range and a stronger fluctuation adaptability, which can effectively treat organic waste while efficiently recovering organic components.
According to an aspect of the utility model, a provide an exhaust-gas treatment system, include: the absorption tower is used for absorbing at least part of organic components in the gas to be absorbed to form a recovery liquid and outputting the residual gas to be absorbed as intermediate gas; a membrane separation assembly coupled to the absorber column to receive the intermediate gas and separate the intermediate gas into a permeate gas and a retentate gas, the permeate gas having a greater concentration of organic components than the retentate gas; and the oxidation reactor is connected with the membrane separation assembly to receive the trapped gas, the trapped gas is subjected to oxidation reaction in the oxidation reactor to generate dischargeable clean gas, and the gas to be absorbed comprises the waste gas and/or the permeate gas.
Preferably, the absorption tower comprises: a first input for receiving the gas to be absorbed; a second input for receiving an absorbent; a gas output end connected with the membrane separation assembly to output the intermediate gas; and the spray head is communicated with the second input end, and the absorbent is sprayed in the absorption tower by the spray head, wherein the position of the spray head is higher than that of the first input end.
Preferably, the exhaust gas treatment system further comprises: the first compressor is positioned on a conveying pipeline for conveying the gas to be absorbed to the absorption tower and is used for pressurizing the gas to be absorbed; one end of the reflux pipeline is connected with the tower top of the absorption tower, and the other end of the reflux pipeline is connected with the inlet end of the first compressor and used for conveying the gas at the tower top to the inlet end of the first compressor; and the first regulating valve is positioned on the return pipeline and used for regulating the airflow in the return pipeline.
Preferably, the exhaust gas treatment system further comprises: an absorbent recovery pump connected to the bottom of the absorption tower for recovering the absorbent enriched with the organic component; when the liquid level of the absorbent at the bottom of the absorption tower reaches a certain height, the absorbent recovery pump is started to recover the absorbent.
Preferably, the membrane separation module comprises: an input end connected to the absorber column for receiving the intermediate gas; a separation membrane for separation of the intermediate gas, separating the intermediate gas into the permeate gas and the retentate gas; a first output end connected to the absorption tower for outputting the permeate gas to the absorption tower; a second output end connected to the oxidation reactor for outputting the trapped gas to the oxidation reactor; the separation membrane has selective permeability, and has a permeation effect on organic matters and an interception effect on inorganic gases.
Preferably, the exhaust gas treatment system further comprises: and the back pressure valve is connected with the output end of the membrane separation component, is set with a constant value and is used for maintaining the pressure value in front of the back pressure valve to be the constant value.
Preferably, the exhaust gas treatment system further comprises: a heat exchanger comprising a cold fluid inlet end and a hot fluid inlet end; the cold fluid inlet end is connected with the output end of the membrane separation assembly and is used for receiving the trapped gas serving as cold fluid; the hot fluid inlet end is used for receiving hot fluid; wherein the cold fluid exchanges heat with the hot fluid in the heat exchanger.
Preferably, the oxidation reactor is connected with the heat exchanger; carrying out oxidation treatment in the oxidation reactor, and conveying the obtained high-temperature tail gas serving as the hot fluid to the heat exchanger; the trapped gas after heat exchange is conveyed to the oxidation reactor for oxidation treatment;
the exhaust treatment system further includes: and the heater is connected with the oxidation reactor and used for heating the trapped gas after heat exchange when the temperature of the trapped gas after heat exchange is lower than an expected value.
Preferably, the exhaust gas treatment system further comprises: the diluting air pipeline is connected with the output end of the membrane separation assembly, and when the concentration of the trapped gas is higher than a set value, the diluting air pipeline is opened to dilute the trapped gas; and the fan is connected with the cold fluid inlet end and used for pressurizing the intercepted gas input into the heat exchanger.
Preferably, the exhaust treatment system is fixed on the base to form skid-mounted equipment.
According to the utility model discloses waste gas treatment system, including membrane separation part and oxidation treatment part, can retrieve repeatedly the organic component in the waste gas, carry out oxidation treatment to organic waste simultaneously, it is effectual to the recovery of organic component, and recovery efficiency and rate of recovery are high, and the processing to organic waste is thorough; the reaction heat released by the oxidation reaction is utilized, the energy is saved, and the method has wider application range and can be used for treating various waste gases.
According to the utility model discloses exhaust-gas treatment system, the design has membrane separation subassembly, return line etc. and adaptation gas fluctuation ability is strong, no matter how undulant in design range of gaseous tolerance, concentration, constitution, and this system can be rapidly effectual realization peak clipping flat valley, and the stability of system is strong, and the security is high.
According to the waste gas treatment system provided by the embodiment of the utility model, the oxidation treatment part is provided with the heat exchanger, so that the energy is efficiently utilized; and a dilution air pipeline and the like are designed, so that the concentration of an oxidation reactant can be controlled, and the stable operation and the safety of the system are ensured.
Drawings
The above and other objects, features and advantages of the present invention will become more apparent from the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:
FIG. 1 illustrates an apparatus schematic of an exhaust treatment system according to an embodiment of the present disclosure;
fig. 2 shows a device schematic of an exhaust gas treatment system according to another embodiment of the present invention.
Description of reference numerals:
1 compressor, 2 absorption towers, 3 first absorbent pump, 4 second absorbent pump, 5 membrane separation components, 6 vacuum pumps, 7 backpressure valves, 8 air inlet pipelines, 9 fans, 10 heat exchangers, 11 oxidation reactors, 12 exhaust cylinders, 13 heaters, 14 dilution air pipelines, 15 cold bypasses, 16 emergency evacuation pipelines and 17 emergency exhaust cylinders
Detailed Description
Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by the same or similar reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale. Moreover, certain well-known elements may not be shown in the figures.
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. Numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of components, are set forth in the following description in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.
Fig. 1 shows a device schematic of an exhaust gas treatment system according to an embodiment of the present invention. As shown in fig. 1, the off-gas treatment system includes an absorption tower 2, a membrane separation module 5, and an oxidation reactor 11.
The absorber 2 includes a first input, a second input, and an output. The membrane separation module 5 comprises an input, a first output and a second output. Oxidation reactor 11 includes an input and an output. The exhaust gas is fed into the absorption tower 2 from a first input end of the absorption tower 2 through a pipe. In the absorption tower 2, the gas phase organic matter is dissolved in the liquid phase absorbent, so that the recovery of the organic component is realized. The output end of the absorption tower 2 is connected with the input end of the membrane separation assembly 5, and organic components and inert gases which cannot be absorbed in the absorption tower 2 reach the membrane separation assembly 5 through a pipeline.
The membrane separation technology is that a selective permeable membrane is used as a separation medium, and oil gas containing hydrocarbon components selectively permeates the membrane under the driving of pressure difference formed on two sides of the membrane by utilizing the difference of the capacities of organic steam and air to permeate the membrane; the gas that permeates the membrane is permeate gas, and the gas that does not permeate the membrane is trapped gas. After separation, the concentration of organic components in the permeate gas is greater than the concentration of organic components in the retentate gas. The membrane separation module 5 has the above selective permeability, and organic substances (such as hydrocarbons) in the mixed gas permeate through the membrane separation module, are enriched on the permeation side and enter the absorption tower 2 through the second output end of the membrane separation module 5 through the second input end of the absorption tower 2; gas (mainly air, including a small amount of hydrocarbons) that fails to pass through the membrane separation module 5 is input into the oxidation reactor 11 through a first output end of the membrane separation module 5 via an input end of the oxidation reactor 11. In the oxidation reactor 11, the gas undergoes an oxidation reaction, and the reacted gas is discharged through the output end of the oxidation reactor 11.
Fig. 2 shows a device schematic of an exhaust gas treatment system according to another embodiment of the present invention. As shown in fig. 2, the exhaust gas treatment system includes a compressor 1, an absorption tower 2, a first absorbent pump 3, a second absorbent pump 4, a membrane separation assembly 5, a vacuum pump 6, a back pressure valve 7, an oxidation intake line 8, a fan 9, a heat exchanger 10, an oxidation reactor 11, an exhaust funnel 12, a heater 13, a dilution air line 14, a cold bypass 15, an emergency evacuation line 16, and an emergency exhaust funnel 17.
The exhaust gases are conveyed via a pipeline to the compressor 1. The compressor 1 pressurizes the exhaust gas to a desired pressure, and then delivers the pressurized exhaust gas to the absorption tower 2. The first absorbent pump 3 pumps the absorbent into the absorption tower 2, and the absorbent absorbs the organic components in the waste gas, so that the phase transfer from the gas phase to the liquid phase is realized. The absorbent enters the absorption tower 2 through a pipeline, a spray head is arranged at the tail end of the pipeline, and the absorbent enters the absorption tower 2 in a spraying mode to realize the spraying absorption of the waste gas. And collecting the absorbent highly enriched with organic matters after the absorption in the liquid phase layer of the absorption tower 2 for temporary storage. When the liquid level of the temporary storage absorbent reaches a certain height, the second absorbent pump 4 is started to convey the absorbent rich in organic matters to the storage tank. The hydrocarbon and inert gas which are not absorbed and dissolved in the absorption tower 2 enter the membrane separation assembly 5 under the pushing of high pressure.
In an alternative embodiment of the invention, the absorbent has a temperature of less than 35 ℃ and a vapor pressure of less than 75kPa, while containing no or little C2C3 component. The absorbent can be at least one of gasoline, diesel oil, middle diesel oil, heavy naphtha, mixed benzene, crude benzene, mixed toluene, C9, raffinate oil and aviation kerosene.
Different gases have different permeation rates in the membrane separation module 5, and the components in the exhaust gas are separated due to the difference in permeation rates. Wherein the hydrocarbons preferentially permeate through the membrane separation module 5 to be enriched on the permeate side and are transported to the inlet of the compressor 1 by the suction of the vacuum pump 6. The separated and enriched hydrocarbon enters the absorption tower 2 again for absorption. The trapped gas that fails to pass through the membrane separation module 5 is primarily air, containing small amounts of hydrocarbons. The entrapped gas enters the fan 9 through the inlet line 8. Preferably, the fan 9 may be a dilution fan. In order to ensure a sufficient driving force of the membrane separation unit 5, a back pressure valve 7 is provided to make the pre-valve pressure constant. When the pressure exceeds the set value of the back pressure valve 7, the valve body of the back pressure valve 7 is opened, and the gas enters the emergency evacuation pipeline 16 and is exhausted through the emergency exhaust funnel 17.
The heat exchanger 10 includes a first input, a second input, a first output, and a second output. The first input end of the heat exchanger 10 is connected with the fan 9 through a pipeline, and the trapped gas enters the heat exchanger 10 from the first input end after being pressurized to carry out heat exchange. A second input of the heat exchanger 10 is connected to an output of the oxidation reactor 11. High-temperature tail gas generated by oxidation reaction in the oxidation reactor 11 enters the heat exchanger 10 through the second input end for heat exchange with trapped gas in the heat exchanger 10. A first output of the heat exchanger 10 is connected to a heater 13 for outputting the organic waste gas. A second output end of the heat exchanger 10 is connected with an exhaust funnel 12 for discharging the treated tail gas. The input end of the oxidation reactor 11 is connected with the output end of the heater 13 and receives the organic waste gas conveyed by the heater 13. The organic waste gas is oxidized in the oxidation reactor 11 to generate carbon dioxide and water, and heat is generated. The heat generated by the oxidation reaction is used to raise the temperature of the incoming trapped gas.
The oxidation reaction in the oxidation reactor 11 is, for example, catalytic oxidation, a noble metal catalyst is placed in the oxidation reactor 11, and the substrate can be a ceramic substrate or a metal substrate, so that the reaction temperature of the oxidation reaction is reduced to 300-. When the temperature of the organic exhaust gas output from the first output end of the heat exchanger 10 is lower than the catalyst light-off temperature, the heater 13 is turned on to increase the temperature of the organic exhaust gas fed to the oxidation reactor 11. The heater 13 is, for example, an electric heater, preferably a thyristor-regulated continuously variable electric heater. The oxidation reactor 11 is also provided with a temperature monitoring device, when the monitored temperature is higher than an alarm value, the air input of the dilution air pipeline 14 is increased, and the cold bypass 15 is opened to ensure that newly-entering trapped gas directly enters the oxidation reactor 11 without heat exchange and temperature rise of the heat exchanger 10 so as to achieve the purpose of temperature reduction; when the temperature is detected to be higher than the dangerous value, the emergency evacuation line 16 is opened, the air inlet line 8 is closed, and the trapped gas is directly exhausted through the emergency exhaust funnel 17. Optionally, the heights of the exhaust funnel 12 and the emergency exhaust funnel 17 are not less than 15 meters.
In the above embodiments, the off-gas is separated using a membrane separation module. Due to the unique selective permeation function (preferentially permeating organic matters and having the interception function on inorganic gases such as nitrogen, oxygen and the like) of the membrane separation component, when the concentration of the organic matters in the waste gas is increased, the separation membrane component can permeate more organic components; when the concentration of organic matter in the exhaust gas decreases, the amount of organic matter permeating the separation membrane becomes smaller. Therefore, no matter how the concentration fluctuates, the concentration of the organic matters at the interception side of the membrane module can be maintained in a small range, and the purposes of peak clipping and valley leveling are achieved. According to the utility model discloses processing system, adaptation exhaust gas fluctuation ability is strong, and then has controlled the exhaust gas concentration level in the oxidation reactor, is favorable to entire system's even running.
In an alternative embodiment of the present invention, the handling system is fixed to the base to form a skid-mounted device.
The invention will be described in more detail below with reference to two embodiments and figure 2.
Example 1:
the treatment object is the flow of 100 and 1000Nm3And/h, the volume concentration of volatile organic compounds fluctuates within the range of 0-40 vol%. The off-gas is collected and fed to the treatment system by suction from compressor 1 and compressed to 3.1barA and fed to absorber 2. Wherein, the compressor 1 is a liquid ring compressor. Preferably, a liquidThe ring liquid used by the ring compressor and the absorbent used for absorbing the organic components are the same liquid; the liquid ring compressor is connected to the first absorbent pump 3. The waste gas entering the absorption tower 2 is in countercurrent contact absorption with the middle diesel oil absorbent conveyed by the first absorbent pump 3. The middle diesel oil as the absorbent absorbs the organic components (crude oil) in the exhaust gas and then is conveyed to a storage tank. Separating the middle diesel oil and the crude oil in the storage tank, and recovering the separated crude oil.
After the spraying absorption of the absorption tower 2, the equilibrium gas at the top of the tower enters a membrane separation component 5 for further separation and enrichment of organic matters and air. The permeate gas of organic hydrocarbons passes through the membrane separation module 5 and is concentrated on the permeate side of the membrane. The permeate gas enriched on the permeate side of the membrane is returned to the inlet of the compressor 1 by the suction effect of the vacuum pump 6 (pressure of 20kPaA) and the compression-absorption process is resumed to recover the enriched organic components. The vacuum pump 6 is, for example, a liquid ring vacuum pump or a spark-proof rotary vane vacuum pump for oil and gas recovery. The retentate side of the membrane separation module 5 is an organic-lean gas stream having a predominant air component. After the lean organic matter gas flow maintains a constant valve-front pressure value (3.0barA) through a backpressure valve 7, the lean organic matter gas flow enters a subsequent catalytic oxidation unit for further advanced treatment of VOCs. The concentration of organic matters in the waste gas after the primary treatment is 5000mg/m3Left and right.
The primarily treated waste gas is firstly conveyed by a fan 9, mixed with a proper amount of diluted air and then enters a heat exchanger 10, and exchanges heat with the high-temperature flue gas discharged from the oxidation reactor 11, the temperature of the waste gas is increased from about 35-40 ℃ to about 280-170 ℃, and meanwhile, the temperature of the high-temperature flue gas discharged from the oxidation reactor 11 is reduced from about 420-450 ℃ to about 150-170 ℃. The heat exchanger 10 may be of a shell-and-tube type, a plate type, or the like.
The waste gas after heat exchange treatment enters an oxidation reactor 11, organic components VOCs undergo flameless oxidation reaction in the presence of a noble metal catalyst and oxygen, are completely oxidized and decomposed to generate carbon dioxide and water, and simultaneously emit reaction heat to obtain treated tail gas. The tail gas is discharged through the exhaust funnel 12 after being subjected to heat exchange by the heat exchanger 10. When the concentration of organic matter in the exhaust gas after the preliminary treatmentWhen the temperature of the waste gas is reduced or the temperature of the waste gas which is simply subjected to heat exchange by the heat exchanger 11 is not high enough to meet the ignition temperature of the catalytic oxidation reaction, the heater 13 with certain power is started to heat the waste gas so as to ensure that the waste gas enters the oxidation reactor 11 after reaching the oxidation reaction temperature. In this embodiment, after the above treatment, the concentration of non-methane hydrocarbons in the final exhaust gas discharged from the exhaust stack 12 is maintained at 9-12mg/m3Left and right, the treatment effect is obvious.
In an optional embodiment of the present invention, the top of the absorption tower 2 is provided with a reflux pipeline and an automatic regulating valve. The return line and self-regulating valve deliver the off-gas at the top of the column to the inlet of the compressor 1 to maintain the pressure at the compressor 1.
In the above embodiment, the arrangement of the return line and the self-regulating valve can be adapted to the change of the gas flow rate, and the pressure at the compressor 1 is maintained to fluctuate within a certain range.
Example 2:
the treatment object is respiratory gas (waste gas) containing a benzene storage tank. The flow rate is 0-500Nm3And/h, a large amount of breathing gas can be generated from the breathing valve when the temperature and the pressure in the storage tank change, and the volume concentration of volatilized organic matters fluctuates within the range of 0-20 vol%. The waste gases are collected and collected, and then are pressurized to 3.1barA by a compressor 1 and enter an absorption tower 2. The absorption tower 2 is designed by adopting a packed tower, and efficient packing such as pall rings, eight-four inner arc rings and the like is adopted as the packing. In the absorption tower 2, the waste gas and the absorbent (mixed benzene) conveyed by the first absorbent pump 3 are subjected to countercurrent contact absorption; after being sprayed and absorbed, the equilibrium gas enters the membrane separation component 5. The membrane separation module 5 may adopt a spiral wound membrane module, a disc type membrane module, or the like. Under the suction action of the compressor 1 and the vacuum pump 6, pressure difference is formed on two sides of the membrane separation assembly 5, and the pressure difference pushes the permeation separation of organic matters and air. The permeation side is permeation gas highly enriched with organic hydrocarbon, and the permeation gas is returned to the inlet of the compressor 1 through the suction effect (the pressure is 20kPaA) of the vacuum pump 6 and is compressed again to enter the absorption tower 2 to recover the enriched organic components. The trapped side is the organic matter-poor airflow (trapped gas) with air as the main component, after maintaining the constant valve front pressure value (3.0barA) through the backpressure valve 7, enters the subsequent catalysisThe benzene-containing VOCs are further processed in an advanced way by the chemical oxidation unit. The concentration of the benzene-containing waste gas after the primary treatment is 2000mg/m3Left and right.
The primarily treated waste gas is conveyed to the heat exchanger 10 through the fan 9, when the concentration of the waste gas is monitored to be higher than a set value, the dilution air pipeline 14 is opened to obtain air from the outside, the air and the waste gas are mixed and then enter the heat exchanger 10, the air and the high-temperature flue gas discharged from the oxidation reactor 11 are subjected to heat exchange, the temperature of the waste gas is increased from about 35-40 ℃ to about 280-170 ℃, meanwhile, the temperature of the high-temperature flue gas discharged from the oxidation reactor 11 is reduced from 420-450 ℃ to about 150-170 ℃, and the cooled flue gas is discharged through the exhaust barrel 12. The organic waste gas after heat exchange undergoes flameless oxidation reaction in the presence of a noble metal catalyst and oxygen in the oxidation reactor 11, so that organic matters in the waste gas are thoroughly oxidized and decomposed to generate carbon dioxide and water, and reaction heat is released at the same time. When the concentration of organic matters in the primarily treated waste gas is lower than a set value, or the temperature of the waste gas subjected to heat exchange by the heat exchanger 10 is not high enough to meet the ignition temperature of the catalytic oxidation reaction, the heater 13 with a certain power is started to heat the waste gas so as to ensure that the waste gas enters the oxidation reactor 11 after reaching the temperature required by the oxidation reaction. After the primary treatment and the oxidation treatment, the benzene emission concentration in the tail gas discharged by the exhaust funnel 12 is kept between 0.5 and 1mg/m3Left and right, the treatment effect is obvious.
In the above embodiments, the treatment system comprises a heat exchanger. The heat exchanger is used for realizing heat exchange between the trapped gas and high-temperature tail gas obtained after oxidation reaction, so that the trapped gas reaches the ignition temperature, and the utilization rate of energy is improved.
In an optional embodiment of the present invention, the compressor 1 adopts a liquid ring compressor, which ensures the safety of the gas compression process (the waste gas is explosive gas); the vacuum pump 6 adopts a spark-proof rotary vane vacuum pump special for oil gas recovery; the heater 13 is an electric heater. The embodiment of the utility model provides an among the processing system, there is not the naked light, the security is high.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
In accordance with the embodiments of the present invention as set forth above, these embodiments are not exhaustive and do not limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application, to thereby enable others skilled in the art to best utilize the invention and its various embodiments with various modifications as are suited to the particular use contemplated. The present invention is limited only by the claims and their full scope and equivalents.

Claims (10)

1. An exhaust treatment system, comprising:
the absorption tower is used for absorbing at least part of organic components in the gas to be absorbed to form a recovery liquid and outputting the residual gas to be absorbed as intermediate gas;
a membrane separation assembly coupled to the absorber column to receive the intermediate gas and separate the intermediate gas into a permeate gas and a retentate gas, the permeate gas having a greater concentration of organic components than the retentate gas; and
an oxidation reactor coupled to the membrane separation assembly to receive the trapped gas, the trapped gas undergoing an oxidation reaction within the oxidation reactor to produce a dischargeable clean gas,
wherein the gas to be absorbed comprises the exhaust gas and/or the permeate gas.
2. The exhaust gas treatment system of claim 1, wherein the absorber tower comprises:
a first input for receiving the gas to be absorbed;
a second input for receiving an absorbent;
a gas output end connected with the membrane separation assembly to output the intermediate gas;
a spray head communicated with the second input end, wherein the absorbent is sprayed in the absorption tower by the spray head,
wherein the position of the spray head is higher than that of the first input end.
3. The exhaust treatment system of claim 1, further comprising:
the first compressor is positioned on a conveying pipeline for conveying the gas to be absorbed to the absorption tower and is used for pressurizing the gas to be absorbed;
one end of the reflux pipeline is connected with the tower top of the absorption tower, and the other end of the reflux pipeline is connected with the inlet end of the first compressor and used for conveying the gas at the tower top to the inlet end of the first compressor;
and the first regulating valve is positioned on the return pipeline and used for regulating the airflow in the return pipeline.
4. The exhaust treatment system of claim 1, further comprising:
an absorbent recovery pump connected to the bottom of the absorption tower for recovering the absorbent enriched with the organic component;
when the liquid level of the absorbent at the bottom of the absorption tower reaches a certain height, the absorbent recovery pump is started to recover the absorbent.
5. The exhaust treatment system of claim 1, wherein the membrane separation assembly comprises:
an input end connected to the absorber column for receiving the intermediate gas;
a separation membrane for separation of the intermediate gas, separating the intermediate gas into the permeate gas and the retentate gas;
a first output end connected to the absorption tower for outputting the permeate gas to the absorption tower;
a second output end connected to the oxidation reactor for outputting the trapped gas to the oxidation reactor;
the separation membrane has selective permeability, and has a permeation effect on organic matters and an interception effect on inorganic gases.
6. The exhaust treatment system of claim 1, further comprising:
and the back pressure valve is connected with the output end of the membrane separation component, is set with a constant value and is used for maintaining the pressure value in front of the back pressure valve to be the constant value.
7. The exhaust treatment system of claim 1, further comprising:
a heat exchanger comprising a cold fluid inlet end and a hot fluid inlet end;
the cold fluid inlet end is connected with the output end of the membrane separation assembly and is used for receiving the trapped gas serving as cold fluid;
the hot fluid inlet end is used for receiving hot fluid;
wherein the cold fluid exchanges heat with the hot fluid in the heat exchanger.
8. The exhaust gas treatment system of claim 7, wherein the oxidation reactor is coupled to the heat exchanger;
the oxidation reaction is carried out in the oxidation reactor, and the obtained high-temperature tail gas is taken as the hot fluid and is conveyed to the heat exchanger;
the trapped gas after heat exchange is conveyed to the oxidation reactor for the oxidation reaction;
the exhaust treatment system further includes:
and the heater is connected with the oxidation reactor and used for heating the trapped gas after heat exchange when the temperature of the trapped gas after heat exchange is lower than an expected value.
9. The exhaust treatment system of claim 7, further comprising:
the diluting air pipeline is connected with the output end of the membrane separation assembly, and when the concentration of the trapped gas is higher than a set value, the diluting air pipeline is opened to dilute the trapped gas;
and the fan is connected with the cold fluid inlet end and used for pressurizing the intercepted gas input into the heat exchanger.
10. An exhaust treatment system according to any of claims 1 to 9, wherein the exhaust treatment system is secured to a base to form a skid.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110141962A (en) * 2019-05-30 2019-08-20 海湾环境科技(北京)股份有限公司 A kind of exhaust treatment system and method
TWI773366B (en) * 2020-09-08 2022-08-01 日商鎧俠股份有限公司 Gas recovery device, semiconductor manufacturing system, and gas recovery method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110141962A (en) * 2019-05-30 2019-08-20 海湾环境科技(北京)股份有限公司 A kind of exhaust treatment system and method
TWI773366B (en) * 2020-09-08 2022-08-01 日商鎧俠股份有限公司 Gas recovery device, semiconductor manufacturing system, and gas recovery method

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