CN210573193U

CN210573193U - Developing machine

Info

Publication number: CN210573193U
Application number: CN201921747702.0U
Authority: CN
Inventors: 聂富强
Original assignee: Suzhou Wenhao Microfluidic Technology Co ltd
Current assignee: Suzhou Wenhao Microfluidic Technology Co ltd
Priority date: 2019-10-17
Filing date: 2019-10-17
Publication date: 2020-05-19
Anticipated expiration: 2029-10-17

Abstract

The utility model discloses a developing machine, which comprises a shell, a middle plate, a liquid accumulation container, a silicon wafer supporting plate, a swinging mechanism and a lifting mechanism; the middle plate is provided with a pair of swing holes, the swing mechanism comprises a swing motor, a swing bottom plate and a pair of eccentric wheels, the swing bottom plate is provided with a pair of mounting holes corresponding to the swing holes, arc-shaped enclosing plates matched with the outer surface of the effusion container are formed on two sides of the swing bottom plate, and the effusion container is placed on the swing bottom plate and limited by the arc-shaped enclosing plates; the eccentric wheel is positioned between the middle plate and the swinging bottom plate, the connecting shafts on two sides of the eccentric wheel are respectively provided with a ball bearing, and a pair of ball bearings are respectively embedded in the swinging hole and the mounting hole; the swing motor is arranged below the middle plate, and a main shaft of the swing motor extends into a swing hole and is fixedly connected to a connecting shaft of the eccentric wheel. The utility model discloses a developing machine, the development time and the effect of having overcome manual development are uncontrollable, can also reduce the artificial damage of operating personnel to chip silicon chip.

Description

Developing machine

Technical Field

The utility model relates to a show technical field, concretely relates to developing machine.

Background

The photolithography process is an important process in the manufacture of semiconductor chips, and transfers the pattern on a mask plate to a substrate by means of a photoresist, and generally undergoes the processes of substrate surface cleaning and drying, priming, photoresist coating, soft baking, alignment exposure, post-baking, developing, hard baking, etching, detection and the like. The manual development is needed in the current microfluidic chip manufacturing process, the efficiency of the manual development is low, the development time and effect are not controllable, and operators can easily damage chips/silicon wafers artificially.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a developing machine can replace the manual development link in the micro-fluidic chip manufacture process completely, and the development time and the effect of having overcome manual development are uncontrollable, can also reduce the artificial damage of operating personnel to chip/silicon chip.

In order to solve the technical problem, the utility model provides a developing machine, which comprises a shell, and an intermediate plate, a liquid accumulation container, a silicon wafer supporting plate, a swing mechanism and a lifting mechanism which are arranged in the shell;

the shell comprises a shell and a bottom plate, the top of the shell is provided with an opening, and a cover plate is hinged to the opening; the liquid accumulation container is positioned right below the cover plate and is used for containing developing solution; the silicon wafer supporting plate is provided with a cylinder body extending into the effusion container and an outer brim extending outwards from the cylinder opening, and the bottom surface of the cylinder body is hollowed;

the middle plate is positioned above the bottom plate and is provided with a pair of swinging holes; the swing mechanism comprises a swing motor, a swing bottom plate and a pair of eccentric wheels, a pair of mounting holes corresponding to the swing holes are formed in the swing bottom plate, arc-shaped enclosing plates matched with the outer surface of the effusion container are formed on two sides of the swing bottom plate, and the effusion container is placed on the swing bottom plate and limited by the arc-shaped enclosing plates;

the connecting shafts on two sides of the eccentric wheel are respectively provided with a ball bearing, the eccentric wheel is positioned between the middle plate and the swinging bottom plate, and a pair of ball bearings are respectively embedded in the swinging hole and the mounting hole; the swing motor is arranged below the middle plate, and a main shaft of the swing motor extends into a swing hole and is fixedly connected to a connecting shaft of the eccentric wheel;

the lifting mechanism comprises a lifting motor and a plurality of vertically arranged supporting plate fixing rods, one end of each supporting plate fixing rod is fixed on the outer eave, and the other end of each supporting plate fixing rod is in sliding penetrating connection with a through hole formed in the middle plate; the lifting motor is a linear stepping motor, and a nut seat of the linear stepping motor is fixedly connected to the outer eaves.

The utility model relates to an in the preferred embodiment, the intermediate lamella is fixed in through a plurality of support columns on the bottom plate, swing motor and the equal fixed mounting of elevator motor are on the lower surface of intermediate lamella.

The utility model relates to an in the preferred embodiment, still be equipped with at least one solution bottle in the casing, the solution bottle is placed on the intermediate lamella or on the bottom plate, just the solution bottle pass through the pipeline with hydrops container intercommunication.

The utility model relates to an in the preferred embodiment, still be equipped with pneumatic pump and solenoid valve on the intermediate lamella, the pneumatic pump be used for with in the liquid pressure to the hydrops container of developing in the solution bottle, the solenoid valve is used for controlling the break-make of pneumatic pump.

In a preferred embodiment of the present invention, an opening is provided on the top surface or the side surface of the housing corresponding to the position of the solution bottle, and a side door is installed at the opening.

The utility model relates to an in the preferred embodiment, still be equipped with the sensor that is used for detecting the interior developer solution content of hydrops container on the swing bottom plate.

The utility model relates to an in the preferred embodiment, the surface of hydrops container and silicon chip layer board has all plated anticorrosive coating.

The utility model relates to an in the preferred embodiment, be equipped with power source, radiator fan and louvre on the side of shell, be equipped with on the bottom plate respectively with switching power supply and PCB board that power source, swing motor, elevator motor, pneumatic pump, radiator fan electricity are connected.

The utility model relates to an in the preferred embodiment, the front side of shell forms an inclined plane, install the display screen on the inclined plane.

In a preferred embodiment of the present invention, the bottom plate is made of aluminum alloy, and the housing is made of engineering plastic.

The beneficial effects of the utility model reside in that:

1. the utility model discloses a developing machine can realize clockwise and anticlockwise two-way rotation oscillation, and degree of automation is high, can develop the photoetching silicon chip of different specifications.

2. The utility model discloses a developing machine can replace the manual development link in the micro-fluidic chip manufacture process completely, and the development time and the effect of having overcome manual development are uncontrollable, can also reduce the artificial damage of operating personnel to chip silicon chip.

Drawings

Fig. 1 and 2 are schematic views of the external structure of the developing machine of the present invention;

FIG. 3 is a schematic view of the internal structure of the housing;

FIG. 4 is a side view of the interior of the housing;

3 FIG. 3 5 3 is 3 a 3 cross 3- 3 sectional 3 view 3 taken 3 along 3 A 3- 3 A 3 of 3 FIG. 3 4 3; 3

Wherein: 110. a housing; 111. a cover plate; 112. a side door; 113. a display screen; 114. a power interface; 115. A heat radiation fan; 116. heat dissipation holes; 120. a base plate; 121. a switching power supply; 122. a PCB board; 123. a foot pad;

210. a middle plate; 211. a swing hole; 212. perforating; 213. a linear bearing; 220. an aluminum profile; 230. A pneumatic pump;

310. a liquid accumulation container; 320. a silicon wafer supporting plate; 321. a barrel; 322. an outer brim;

410. a swing floor; 411. mounting holes; 412. an arc coaming; 420. an eccentric wheel; 421. a ball bearing; 422. a connecting shaft; 430. a swing motor; 431. a main shaft; 440. a linear stepper motor; 441. a nut seat; 450. a supporting plate fixing rod;

500. solution bottles.

Detailed Description

The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.

Referring to fig. 1, the present invention provides a developing machine, which is mainly used for the developing process in the photolithography process in the microfluidic chip lab, and the structure of the developing machine mainly includes a housing, and an intermediate plate 210, a liquid loading container 310, a silicon wafer supporting plate 320, a swing mechanism and a lifting mechanism which are arranged in the housing.

Referring to fig. 1-2, the casing is a box shape, and includes a casing 110 and a bottom plate 120, wherein the casing 110 is preferably made of engineering plastic, and has an open top, and a cover plate 111 is hinged to the open top. The bottom plate 120 is preferably made of aluminum alloy, and a foot pad 123 is disposed at the lower periphery of the bottom plate.

Referring to fig. 3, the liquid loading container 310 is a cylindrical container located right below the cover 111 and used for containing the developing solution. The silicon wafer supporting plate 320 is used for placing a silicon wafer, and has a cylinder 321 extending into the effusion container 310 and an outer brim 322 extending outwards from the cylinder opening, and the bottom surface of the cylinder 321 is hollowed. In this embodiment, the surfaces of the liquid loading container 310 and the silicon wafer supporting plate 320 are plated with an anti-corrosion coating, which can resist the corrosion of the developing solution, so that the service life is prolonged, and no influence is caused on the silicon wafer.

The middle plate 210 is positioned above the base plate 120 and is fixed to the base plate 120 by a plurality of support columns. In this embodiment, the middle plate 210 is fixed to the bottom plate 120 by four aluminum profiles 220. The intermediate plate 210 is provided with a pair of swing holes 211.

Referring to fig. 4-5, the swing mechanism includes a swing motor 430, a swing base plate 410 and a pair of eccentric wheels 420, wherein the swing base plate 410 is an elongated plate, a pair of mounting holes 411 corresponding to the swing holes 211 are formed thereon, and arc-shaped enclosing plates 412 matching with the outer surface of the effusion container 310 are formed on both sides of the swing base plate 410. The fluid reservoir 310 is positioned on the swing floor 410 and is retained by arcuate closure 412 on either side.

The eccentric 420 is disposed between the middle plate 210 and the swing base plate 410, a ball bearing 421 is mounted on each of the connecting shafts 422 at both sides thereof, and a pair of ball bearings 421 at both sides of the eccentric 420 are respectively embedded in the corresponding swing hole 211 and the mounting hole 411. The swing motor 430 is disposed under the middle plate 210, and a main shaft 431 thereof extends into one of the swing holes 211 and is fixedly coupled to a coupling shaft 422 on one side of the eccentric 420. When the swing motor 430 rotates, the eccentric wheel 420 connected to the motor spindle 431 drives the swing bottom plate 410 to swing circularly, and the swing bottom plate 410 further drives the liquid loading container 310 located thereon and the developer inside the liquid loading container 310 to oscillate.

The lifting mechanism comprises a lifting motor and a plurality of vertically arranged supporting plate fixing rods 450, wherein one end of each supporting plate fixing rod 450 is fixed on the outer eaves 322, and the other end of each supporting plate fixing rod 450 is slidably penetrated in a through hole 212 formed in the middle plate 210. In this embodiment, the number of the supporting plate fixing rods 450 is 4, and the supporting plate fixing rods 450 and the through holes 212 on the middle plate 210 are respectively located at four corners of the outer edge 322, and the linear bearings 213 are disposed at the supporting plate fixing rods 450 and the through holes 212.

In this embodiment, the lifting motor is a linear stepping motor 440, which is fixedly mounted on the lower surface of the middle plate 210, and a nut seat 441 of the linear stepping motor 440 is fixedly connected to the outer brim 322.

In order to facilitate the replenishment of the developer solution into the solution container 310, in one embodiment, at least one solution bottle 500 is further disposed in the housing, the solution bottle 500 may be placed on the middle plate 210 or on the bottom plate 120, and the solution bottle 500 is communicated with the solution container 310 through a pipeline. An opening is provided on the top surface or the side surface of the housing 110 at a position corresponding to the solution bottle 500, and a side door 112 is installed at the opening to facilitate replacement of the solution bottle 500 or replenishment of the developing solution into the solution bottle 500. In this embodiment, a pair of solution bottles 500 is disposed in the housing, and is placed in the placement hole formed in the middle plate 210, and the effusion container 310 is provided with a liquid inlet connector and a liquid outlet connector, and the solution bottles 500 are connected to the liquid inlet connector through a pipeline. The intermediate plate 210 is also provided with a pneumatic pump 230 and an electromagnetic valve.

In this embodiment, the side surface of the housing 110 is further provided with a power interface 114, a heat dissipation fan 115 and a heat dissipation hole 116, and the bottom plate 120 is provided with a switching power supply 121 and a PCB 122, which are respectively electrically connected to the power interface 114, the swing motor 430, the lift motor, the pneumatic pump 230 and the heat dissipation fan 115.

In this embodiment, the front side of the housing 110 forms a slope on which a display screen 113 is mounted to display the developing parameters. Preferably, the display screen 113 is a touch screen, and parameters such as the rotation speed, the liquid amount, the forward and reverse rotation switching and the like can be customized through the touch screen.

The developing machine of the embodiment can self-define parameters such as rotating speed, liquid amount, forward and reverse rotation switching and the like, has high automation degree, can replace a manual developing link in the manufacturing process of the microfluidic chip, overcomes the defect that the developing time and effect of manual developing are not controllable, and can reduce the artificial damage of operators to the chip/silicon wafer.

The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.

Claims

1. A developing machine is characterized by comprising a shell, and an intermediate plate, a liquid accumulation container, a silicon wafer supporting plate, a swinging mechanism and a lifting mechanism which are arranged in the shell;

2. The developing machine according to claim 1, wherein the intermediate plate is fixed to the base plate by a plurality of support columns, and the swing motor and the elevating motor are fixedly mounted on a lower surface of the intermediate plate.

3. The developing machine according to claim 1, wherein at least one solution bottle is further provided in the housing, the solution bottle is placed on the middle plate or the bottom plate, and the solution bottle is communicated with the effusion cell through a pipeline.

4. The developing machine according to claim 3, wherein the intermediate plate is further provided with a pneumatic pump and an electromagnetic valve, the pneumatic pump is used for pressing the developing liquid in the solution bottle into the liquid accumulation container, and the electromagnetic valve is used for controlling the on-off of the pneumatic pump.

5. The developing machine according to claim 3, wherein an opening is provided on a top surface or a side surface of the casing at a position corresponding to the solution bottle, and a side door is installed at the opening.

6. The developing machine according to claim 1, wherein a sensor for detecting a content of the developer in the liquid accumulation container is further provided on the swing base plate.

7. The developing machine of claim 1 wherein the liquid accumulation container and the surface of the wafer support plate are coated with an anti-corrosion coating.

8. The developing machine according to claim 4, wherein a power interface, a heat dissipating fan and heat dissipating holes are formed on a side surface of the casing, and a switching power supply and a PCB board electrically connected to the power interface, the swing motor, the lift motor, the pneumatic pump and the heat dissipating fan, respectively, are formed on the base plate.

9. The developer apparatus of claim 1, wherein the front side of the housing forms a bezel, the bezel having a display screen mounted thereon.

10. The developer apparatus of claim 1, wherein the base plate is made of an aluminum alloy and the housing is made of an engineering plastic.