CN210560697U

CN210560697U - Sedimentation mechanism of vacuum coating machine

Info

Publication number: CN210560697U
Application number: CN201921563632.3U
Authority: CN
Inventors: 童晓宏
Original assignee: Lanxi Hongyi Vacuum Coating Factory
Current assignee: Lanxi Hongyi Vacuum Coating Factory
Priority date: 2019-09-19
Filing date: 2019-09-19
Publication date: 2020-05-19
Anticipated expiration: 2029-09-19

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a sedimentation mechanism of a vacuum coating machine, which comprises a coating machine body, a support column is arranged at the bottom of the coating machine body, a settling pipeline is arranged at a steam outlet at the bottom of the coating machine body, a sedimentation tank body is arranged at the bottom end of the sedimentation pipeline, a sedimentation water tank is arranged at the bottom of the film coating machine body, the communicating pipe arranged at the water outlet of the settling water tank penetrates through the pipe wall of the settling pipe and extends to the inner side of the settling pipe, the utility model solves the problem that the vapor remained without evaporation after the existing vacuum coating can not be cleaned when meeting the cold condition to form dust, which can affect the normal operation of the subsequent equipment, when the settling mechanism is used, steam can be effectively settled, the possibility of dust formation of the steam is greatly reduced, the service life of the negative pressure pump is prolonged, and normal operation of the negative pressure pump is guaranteed.

Description

Sedimentation mechanism of vacuum coating machine

Technical Field

The utility model relates to a vacuum coating technical field especially relates to a vacuum coating machine subsides mechanism.

Background

The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. At present, when a vacuum coating machine carries out coating, vapor is evaporated in a coating chamber, the residual part in the coating chamber is not evaporated on a film, the vapor forms dust when meeting cold, the dust is pumped away by a vacuum pump under the action of negative pressure, the dust not only influences the normal operation of the vacuum pump, but also even damages the vacuum pump when serious, and is not easy to clean, so that the settling mechanism of the vacuum coating machine is provided.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the vapor remained without evaporation after vacuum coating in the prior art cannot form dust when being cooled, which affects the normal operation of subsequent equipment, and providing a settling mechanism of a vacuum coating machine.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a sedimentation mechanism of a vacuum coating machine comprises a coating machine body, wherein a support column is arranged at the bottom of the coating machine body, a sedimentation pipeline is installed at a steam outlet at the bottom of the coating machine body, a sedimentation box body is arranged at the bottom end of the sedimentation pipeline, a leading-out pipeline is arranged outwards at the bottom of the sedimentation pipeline, a negative pressure pump is arranged at the end part, away from the sedimentation pipeline, of the leading-out pipeline, a sedimentation water tank is arranged at the bottom of the coating machine body, and a communicating pipe arranged at a water outlet of the sedimentation water tank penetrates through the pipe wall of the sedimentation pipeline and extends to the;

the inner wall of the settling pipeline is sequentially provided with a one-way valve, a flow guide channel and a settling chamber from top to bottom, the communicating pipe extends to the inner side of the settling chamber, and the communicating pipe is positioned in the pipeline inside the settling chamber and is sequentially provided with uniformly distributed nozzles from top to bottom.

Preferably, the structure of the flow guide channel is in an open horn type design, and the inner diameter of an upper port of the flow guide channel is larger than that of a lower port of the flow guide channel.

Preferably, the inside of settling chamber is provided with the pivot that sets gradually from top to bottom, the outside of pivot has cup jointed the settlement plate, the pivot sets up with the shower nozzle one-to-one that is located pivot one side.

Preferably, the first opening is opened at the top of settling chamber, the third opening is opened at the bottom of settling chamber, and the second opening is opened on the outer wall of settling chamber.

Preferably, the first port is communicated with the lower port of the diversion channel, the third port is communicated with the inlet of the sedimentation box body, and the second port is communicated with the pipe orifice of the leading-out pipeline.

Preferably, the negative pressure pump is placed on the base.

The utility model has the advantages that: the settlement mechanism provided by the scheme solves the problem that residual vapor which is not subjected to evaporation plating after the existing vacuum coating cannot be cleaned due to dust formation caused by cooling, and the normal operation of subsequent equipment is influenced.

Drawings

FIG. 1 is a schematic view of a deposition mechanism of a vacuum coater according to the present invention;

FIG. 2 is a schematic view of the internal structure of a settling pipe of a settling mechanism of a vacuum coater provided by the present invention;

fig. 3 is a schematic view of the internal structure of a settling chamber of a settling mechanism of a vacuum coating machine of the present invention.

In the figure: 1 coating film organism, 2 support columns, 3 settling ducts, 4 check valves, 5 water conservancy diversion passageways, 6 settling chambers, 7 settling water tanks, 8 communicating pipes, 9 settling tanks, 10 leading-out pipelines, 11 negative pressure pumps, 12 bases, 13 nozzles, 14 rotating shafts, 15 settling plates, 16 first ports, 17 second ports, 18 third ports.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the embodiment, referring to fig. 1-3, a sedimentation mechanism of a vacuum coater comprises a coater body 1, a support column 2 is arranged at the bottom of the coater body 1, a sedimentation pipe 3 is arranged at a steam outlet at the bottom of the coater body 1, a sedimentation tank 9 is arranged at the bottom end of the sedimentation pipe 3, a leading-out pipe 10 is arranged at the bottom of the sedimentation pipe 3 towards the outside, a negative pressure pump 11 is arranged at the end part of the leading-out pipe 10 far away from the sedimentation pipe 3, the negative pressure pump 11 is placed on a base 12, a sedimentation water tank 7 is arranged at the bottom of the coater body 1, a communication pipe 8 arranged at a water outlet of the sedimentation water tank 7 penetrates through the pipe wall of the sedimentation pipe 3 and extends to the inside of the sedimentation pipe 3, a one-way valve 4, a flow guide channel 5 and a sedimentation chamber 6 are sequentially arranged on the inner wall of the sedimentation pipe 3 from top to bottom, the flow guide channel, the design facilitates the steam drainage, and ensures that the steam continuously and efficiently enters the settling chamber 6 from the flow guide channel 5 under the guide of negative pressure.

The pipeline of the communicating pipe 8 is provided with a stop valve, the communicating pipe 8 extends to the inner side of the settling chamber 6, the communicating pipe 8 is positioned in the pipeline inside the settling chamber 6 and is sequentially provided with spray heads 13 which are uniformly distributed from top to bottom, the inside of the settling chamber 6 is provided with a rotating shaft 14 which is sequentially arranged from top to bottom, the outer side of the rotating shaft 14 is sleeved with a settling plate 15, and the rotating shaft 14 and the spray heads 13 positioned on one side of the rotating shaft 14 are arranged in a one-to-one correspondence manner.

First opening 16 has been seted up at the top of drip chamber 6, and third opening 18 has been seted up to the bottom of drip chamber 6, has seted up second opening 17 on the outer wall of drip chamber 6, and first opening 16 is linked together with the lower port of water conservancy diversion passageway 5, and third opening 18 is linked together with the entry of settling tank 9, and second opening 17 is linked together with the mouth of pipe of drawing pipeline 10.

The mechanism is also provided with a controller, the controller is preferably a single chip microcomputer controller, the controller is electrically connected with a power supply, the controller is respectively and electrically connected with the one-way valve 4, a stop valve for controlling the circulation of the communicating pipe 8, a driving motor for controlling the rotation of the rotating shaft 14 and the negative pressure pump 11, and the controller carries out control programming according to the requirements of the embodiment.

The specific working principle is as follows: when carrying out vapour settlement, open negative pressure pump and stop valve in proper order for form the negative pressure in the whole settling tube 3, with the vapour suction in the coating film organism 1 settling tube 3, then open the stop valve, drive pivot 14 rotates, the vapour that flows into settling chamber 6 from first opening 16 beats on settlement plate 15 under the effect of the shower nozzle 13 water spray, and along with settlement plate 15 finally downwards the landing from third opening 18 landing to settling box 9, here, the quantity of shower nozzle 13 is preferred two sets or more than two sets of, multi-level settling action, greatly reduced the possibility that vapour formed the dust, finally, the residual gas is drawn forth to the outside through drawing forth pipeline 10.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. A sedimentation mechanism of a vacuum coating machine comprises a coating machine body (1), wherein a support column (2) is arranged at the bottom of the coating machine body (1), and is characterized in that a sedimentation pipeline (3) is installed at a steam outlet at the bottom of the coating machine body (1), a sedimentation box body (9) is arranged at the bottom end of the sedimentation pipeline (3), a leading-out pipeline (10) is arranged at the outer side of the bottom of the sedimentation pipeline (3), a negative pressure pump (11) is arranged at the end part, far away from the sedimentation pipeline (3), of the leading-out pipeline (10), a sedimentation water tank (7) is arranged at the bottom of the coating machine body (1), and a communicating pipe (8) arranged at a water outlet of the sedimentation water tank (7) penetrates through the pipe wall of the sedimentation pipeline (3) and extends to;

the inner wall of settling tube (3) has set gradually check valve (4), water conservancy diversion passageway (5) and settling chamber (6) from top to bottom, communicating pipe (8) extend to the inboard of settling chamber (6) to the pipeline that communicating pipe (8) are located settling chamber (6) inside has set gradually evenly distributed's shower nozzle (13) from top to bottom.

2. The sedimentation mechanism of a vacuum coater according to claim 1, wherein the structure of the diversion channel (5) is an open-ended trumpet design, and the inner diameter of the upper port of the diversion channel (5) is larger than the inner diameter of the lower port of the diversion channel (5).

3. The sedimentation mechanism of the vacuum coater as claimed in claim 1, wherein the sedimentation chamber (6) is internally provided with a rotating shaft (14) which is sequentially arranged from top to bottom, the outer side of the rotating shaft (14) is sleeved with a sedimentation plate (15), and the rotating shaft (14) is arranged corresponding to the nozzles (13) on one side of the rotating shaft (14).

4. The vacuum coating machine's mechanism of subsiding of claim 3, characterized in that, the first opening (16) has been seted up at the top of subsidence room (6), and the third opening (18) has been seted up to the bottom of subsidence room (6), has seted up second opening (17) on the outer wall of subsidence room (6).

5. The deposition mechanism of vacuum coater according to claim 4, wherein the first port (16) is connected to the lower port of the flow guide channel (5), the third port (18) is connected to the inlet of the deposition chamber (9), and the second port (17) is connected to the mouth of the outlet pipe (10).

6. The vacuum coater's setting mechanism as claimed in claim 1, wherein said negative pressure pump (11) is placed on the base (12).