CN210534976U - Deionized water resistivity alarm device - Google Patents
Deionized water resistivity alarm device Download PDFInfo
- Publication number
- CN210534976U CN210534976U CN201921160163.0U CN201921160163U CN210534976U CN 210534976 U CN210534976 U CN 210534976U CN 201921160163 U CN201921160163 U CN 201921160163U CN 210534976 U CN210534976 U CN 210534976U
- Authority
- CN
- China
- Prior art keywords
- resistivity
- deionized water
- connecting pipe
- alarm
- alarm device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Abstract
The utility model relates to a deionized water resistivity alarm device, including the connecting pipe, the outside of connecting pipe is provided with the resistivity control appearance, the internally mounted of resistivity control appearance has the PLC controller, the alarm is installed to outer wall one side of resistivity control appearance, alarm and PLC controller electric connection, the connecting pipe is provided with two, the resistivity sensor is installed to the inboard of connecting pipe, resistivity sensor and PLC controller signal connection, the top of second grade reverse osmosis membrane is connected with first three way connection, the connecting pipe is close to the bottom of resistivity control appearance and installs the valve, valve and PLC controller electric connection, the bottom of connecting pipe is connected with the second three way connection, the second three way connection is arranged in compiling the deionized water in the connecting pipe, and carry for increasing the pump. The utility model discloses a set up alarm device on the connecting pipe of deionized water, whether the resistivity of real-time supervision deionized water reaches more than 12M omega cm, improves the quality that the deionized water was electroplated to the semiconductor.
Description
Technical Field
The utility model relates to a technical field is electroplated to the semiconductor, especially relates to a deionized water resistivity alarm device.
Background
The deionized water system is widely applied to deionized water for an electroplating process, pure water for a battery production process, pure water for automobiles, household appliances and building material products, pure water for cleaning, pure water for coated glass and a hardness and salinity removing water system required by a textile printing and dyeing process. The development of ultrapure water manufacturing technology has greatly pushed the technological development of the semiconductor and electronic industries. For example: plated bumps are commonly used in driver IC packaging; electroplating is applied in CMOS/MEMS to manufacture switch contacts, various structures and the like; the coating is applied as an air bridge on the radar; electroplating is also used for protective layers of UBM barrier layers, and bonding surfaces for various wire bonds, and the like.
Deionized water quality can generally be determined from the conductivity of the deionized water: the conductivity is high, the content of other impurity ions in the water is necessarily high, and if the conductivity is lower than 0.056us/cm, other impurity ions are basically not existed, namely the purity which can be theoretically reached is reached. Since the resistivity of water is closely related to temperature and environment, the resistivity of water can be accurately detected only by online monitoring. The resistivity is actually the same as the conductivity and represents the purity of water, while the relationship with the conductivity is the inverse relationship, the lower the conductivity value the purer the water quality, and the opposite the resistivity, the higher the resistivity value the purer the water quality. The resistivity of deionized ultrapure water in the field of semiconductor electroplating process is required to be more than 12M omega cm so as to meet the requirement of electroplating environment.
The existing deionized water resistivity on-line monitoring equipment is only used for displaying relevant data, and when the fact that the resistivity of deionized ultrapure water is too low is detected, no other operation is performed, so that unqualified deionized water continuously flows into a subsequent process flow, and the quality of semiconductor electroplating deionized water is influenced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a deionized water resistivity alarm device, through set up alarm device on the connecting pipe of deionized water, whether the resistivity of real-time supervision deionized water reaches 12M omega more than cm, improves the quality that the deionized water was electroplated to the semiconductor.
In order to achieve the above purpose, the technical scheme of the utility model is as follows:
a deionized water resistivity alarm device comprises a connecting pipe, wherein a resistivity monitor is arranged on the outer side of the connecting pipe, a second-stage reverse osmosis membrane is connected to the top of the connecting pipe, an increasing pump is arranged at the bottom of the connecting pipe, a PLC (programmable logic controller) is installed inside the resistivity monitor, an alarm is installed on one side of the outer wall of the resistivity monitor and electrically connected with the PLC, two connecting pipes are arranged, a drain pipe is arranged on the outer side of the connecting pipe, a resistivity sensor is installed on the inner side of the connecting pipe and is in signal connection with the PLC, a first three-way joint is connected to the top of the second-stage reverse osmosis membrane and used for shunting deionized water to the two connecting pipes, a valve is installed at the bottom of the connecting pipe close to the resistivity monitor and is electrically connected with the PLC, the bottom of the connecting pipe is connected with a second three-way joint which is used for collecting the deionized water in the connecting pipe and conveying the deionized water to the increasing pump.
In the above scheme, the two connecting pipes have the same structure, and the arranged devices are the same.
In the scheme, the ball valve is installed on the body of the water discharge pipe, and the water outlet of the water discharge pipe is provided with the dust cover.
In the above-mentioned scheme, resistivity sensor's model is CS615TC type, the alarm is the LED pilot lamp of MFL series, the valve is the electric stop valve of J941F type, the model of resistivity monitor is the DZG-303B type.
Compared with the prior art, the beneficial effects of the utility model are that: when deionized water respectively enters reverse osmosis equipment in the two connecting pipes through the first three-way joint, is filtered by the second-stage reverse osmosis membrane and passes through a resistance monitoring instrument in the connecting pipes, when the resistivity of the deionized water reaches more than 12M omega cm, the deionized water directly enters the additional pump through the second three-way joint, and the process of Electrodeionization (EDI) is completed. When the resistivity of the deionized water is lower than 12M omega cm, the resistivity sensor uploads the resistivity of the deionized water to the PLC controller in real time to be corrected, the PLC controller closes the valve by inputting a command, the deionized water is prevented from flowing into a qualified deionized water collecting tank, the alarm is controlled to emit rotary flashing display light and give out alarm sound, workers are reminded to check and maintain in time, the deionized water is discharged through the waterproof pipe, collected and then conveyed into the deionized water system until the resistivity of the obtained deionized water reaches more than 12M omega cm. The two connecting pipes are provided with the alarm devices, the two connecting pipes are respectively provided with the pipeline, the pipelines are respectively detected, if one of the pipelines is unqualified, the valve is closed in time for maintenance, the other pipeline can be continuously used, the working efficiency is improved, and the quality of the semiconductor electroplating deionized water is improved due to the arrangement of the alarm devices.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a side view of the overall structure of the present invention;
fig. 3 is a system framework diagram of the present invention.
Reference numbers in the figures: 1-a first three-way joint; 2-a secondary reverse osmosis membrane; 3-connecting pipe; 30-a PLC controller; 31-a water discharge pipe; 32-resistivity sensor; 33-an alarm; 34-a valve; 4-resistivity monitor; 5-a second three-way joint; 6-a booster pump.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to the accompanying drawings and embodiments.
As shown in fig. 1 to 3, a deionized water resistivity alarm device includes a connecting pipe 3, the connecting pipe 3 is a pipeline for conveying deionized water, and in the prior art, a resistivity monitor 4 is only arranged on the outer side of the connecting pipe 3 for detecting real-time data of the resistivity of deionized water. As a preferred scheme, the resistivity monitoring instrument 4 adopts a (double-detection) resistivity monitoring instrument with a model number of DZG-303B, the resistivity monitoring instrument 4 adopts a microprocessor to perform high-purity water nonlinear curve compensation, and the instrument has the functions of automatic zero setting and correction and is suitable for the resistivity value measurement and control of deionized water. The top of connecting pipe 3 is connected second grade reverse osmosis membrane 2, and the bottom of connecting pipe 3 is provided with increases pump 6, reverse osmosis equipment among the basic process flow of reality deionized water production to the technology between the Electrodeionization (EDI).
The resistivity monitor 4 is internally provided with a PLC 30, chips of the PLC 30 are directly purchased in the market, and then required data are input for limiting the resistivity data of the deionized water, for example, the resistivity data is set to be more than or equal to 12M omega cm. An alarm 33 is installed on one side of the outer wall of the resistivity monitor 4, the alarm 33 is an MFL series LED indicator lamp, preferably a Q-LIGHT MFL series long-lighting/flashing, explosion flashing and rotary flashing multifunctional indicator lamp, and the alarm 33 is electrically connected with the PLC 30.
In this embodiment, connecting pipe 3 is provided with two, and two connecting pipe 3's structure is the same, and the device that sets up is all the same, and two connecting pipes 3 all set up alarm device, detect respective pipeline separately, if one of them appears nonconforming, in time close and maintain, another can continue to use, improves work efficiency. A water discharge pipe 31 is welded and fixed on the outer side of the connecting pipe 3, a ball valve is installed on the body of the water discharge pipe 31, and a dust cover is arranged at the water outlet of the water discharge pipe 31 and used for discharging deionized water when the resistivity of the deionized water is lower than 12 MOmega-cm, and the deionized water is collected and then conveyed into the deionized water system. And a resistivity sensor 32 is installed on the inner pipe wall of the connecting pipe 3, the model of the resistivity sensor 32 is CS615TC, and the resistivity sensor 32 is in signal connection with the PLC 30 and is used for uploading the resistivity of the deionized water to the PLC 30 in real time for calibration.
The top of second grade reverse osmosis membrane 2 is connected with first three way connection 1, and first three way connection 1 is used for shunting two connecting pipes 3 with deionized water. A valve 34 is installed at the bottom of the connecting pipe 3 close to the resistivity monitor 4, the valve 34 is a J941F type electric stop valve, the valve 34 is electrically connected with the PLC controller 30, when it is detected that the resistivity of the deionized water does not reach 12M Ω · cm, the PLC controller 30 will input a command to close the valve 34, and the deionized water is prevented from flowing into the qualified deionized water collection tank. The bottom of the connecting pipe 3 is connected with a second three-way joint 5, the second three-way joint 5 is used for collecting the deionized water in the connecting pipe 3 and conveying the deionized water to the additional pump 6, and the process from reverse osmosis equipment to Electrodeionization (EDI) in the basic process flow of deionized water production is realized.
The working principle is as follows: when deionized water respectively enters reverse osmosis equipment in two connecting pipes 3 through a first three-way joint 1, is filtered by a second-stage reverse osmosis membrane 2 and passes through a resistivity monitor 4 in the connecting pipes 3, when the resistivity of the deionized water reaches more than 12M omega cm, the deionized water directly enters an additional pump 6 through a second three-way joint 5 to complete the process of Electrodeionization (EDI), when the resistivity of the deionized water is lower than 12M omega cm, a resistivity sensor 32 uploads the resistivity of the deionized water to a PLC (programmable logic controller) 30 in real time to correct and find problems, the PLC 30 closes a valve 34 by inputting a command to prevent the deionized water from flowing into a qualified deionized water collecting tank, controls an alarm 33 to emit rotary flashing display light and alarm sound to remind workers to check and maintain in time, and discharges the deionized water through a waterproof pipe 31, and (4) collecting and then conveying the mixture to the deionized water system until the resistivity of the obtained deionized water reaches more than 12M omega cm. Two connecting pipes 3 are arranged, the two connecting pipes 3 are respectively provided with an alarm device, the respective pipelines are respectively detected, if one of the two connecting pipes is unqualified, the valve 34 is closed in time for maintenance, the other connecting pipe can be continuously used, the working efficiency is improved, and the quality of the semiconductor electroplating deionized water is improved due to the arrangement of the alarm device.
The above-mentioned embodiments further explain in detail the objects, technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only the embodiments of the present invention, and are not intended to limit the scope of the present invention, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (4)
1. The utility model provides a deionized water resistivity alarm device, includes connecting pipe (3), the outside of connecting pipe (3) is provided with resistivity monitor (4), the top of connecting pipe (3) is connected with second grade reverse osmosis membrane (2), the bottom of connecting pipe (3) is provided with increases pump (6), its characterized in that: the utility model discloses a water purifier, including resistivity monitor (4), alarm (33), connecting pipe (3), second grade reverse osmosis membrane (2), first tee joint (1), second tee joint (1) are used for shunting two connecting pipes (3) with the deionized water, the internally mounted of resistivity monitor (4) has PLC controller (30), alarm (33) is installed to the outer wall one side of resistivity monitor (4), alarm (33) and PLC controller (30) electric connection, connecting pipe (3) are provided with two, the outside of connecting pipe (3) is provided with drain pipe (31), resistivity sensor (32) is installed to the inboard of connecting pipe (3), resistivity sensor (32) and PLC controller (30) signal connection, the top of second grade reverse osmosis membrane (2) is connected with first tee joint (1), first tee joint (1) is used for shunting two connecting pipes (3) with the deionized water, valve (34) are installed to the bottom that connecting pipe (3, the bottom of the connecting pipe (3) is connected with a second three-way joint (5), and the second three-way joint (5) is used for collecting deionized water in the connecting pipe (3) and conveying the deionized water to the adding pump (6).
2. The deionized water resistivity alarm device of claim 1, characterized in that: the two connecting pipes (3) have the same structure, and the arranged devices are the same.
3. The deionized water resistivity alarm device of claim 1, characterized in that: the ball valve is installed on the body of the water discharge pipe (31), and a dust cover is arranged at the water outlet of the water discharge pipe (31).
4. The deionized water resistivity alarm device of claim 1, characterized in that: the model of resistivity sensor (32) is CS615TC type, alarm (33) are the LED pilot lamp of MFL series, valve (34) are the electronic stop valve of J941F type, the model of resistivity monitor (4) is DZG-303B type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921160163.0U CN210534976U (en) | 2019-07-23 | 2019-07-23 | Deionized water resistivity alarm device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921160163.0U CN210534976U (en) | 2019-07-23 | 2019-07-23 | Deionized water resistivity alarm device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210534976U true CN210534976U (en) | 2020-05-15 |
Family
ID=70598764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921160163.0U Active CN210534976U (en) | 2019-07-23 | 2019-07-23 | Deionized water resistivity alarm device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210534976U (en) |
-
2019
- 2019-07-23 CN CN201921160163.0U patent/CN210534976U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104654498B (en) | Integrate water purification humidification and the environment electrical equipment of purification of air | |
| CN107697991A (en) | A kind of accurate dosing system of running water chlorine residue and its control method with closed-loop control | |
| CN104584757B (en) | A kind of directly mixing type multipurpose accurate fertilizer irrigation system automatically | |
| CN106000142A (en) | Device for automatically preparing and storing ammonia water and use method of device | |
| CN210534976U (en) | Deionized water resistivity alarm device | |
| CN111208139A (en) | Vacuum ultrasonic spiral composite defoaming type turbidity on-line detector | |
| CN207749088U (en) | A kind of fluid on-line cleaning purification system | |
| CN106495344A (en) | Underground coal mine water treatment system | |
| CN110082254A (en) | A kind of concentration basin ladder concentration polling type self-operated measuring unit | |
| CN103924419A (en) | Washing solution online detection method and washing device | |
| CN207501460U (en) | A kind of novel online Low Voltage Pure water heating system | |
| CN108911038A (en) | A kind of new intelligent ion-exchanger | |
| CN208985015U (en) | A kind of liquid level intelligent monitoring device | |
| CN210181029U (en) | Water quality monitoring intelligent liquid level system of water purification system water tank | |
| CN110057613B (en) | Water efficiency testing system and method for drinking water purifier | |
| CN108002456A (en) | Water purifier and the based reminding method for replacing filter core | |
| BRPI1000926A2 (en) | automatic water separator system | |
| CN207076361U (en) | A kind of multiplex pulse formula chemicals dosing plant | |
| CN207748903U (en) | A kind of recovery and processing system for handling acidic industrial effluent | |
| CN208916875U (en) | A kind of new intelligent ion-exchanger | |
| CN207600677U (en) | A kind of air-tightness detection device | |
| CN206255907U (en) | Underground coal mine water treatment system | |
| CN211627391U (en) | Vacuum ultrasonic spiral composite defoaming type turbidity on-line detector | |
| CN210243543U (en) | Low temperature resistant pH meter on-line measuring device | |
| CN110734183A (en) | Full intelligent control system for direct drinking water |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 210000 floor 13, tower C, Tengfei building, research and Innovation Park, Nanjing area, China (Jiangsu) pilot Free Trade Zone, Nanjing, Jiangsu Patentee after: Jiangsu Changjing Technology Co.,Ltd. Address before: 210000 room 1087, hatch Eagle building, No. 99, Tuanjie Road, yanchuang Park, Jiangbei new area, Nanjing, Jiangsu Province Patentee before: Jiangsu Changjing Technology Co.,Ltd. |