CN210528640U

CN210528640U - High-efficient recovery plant of CMP waste water for semiconductor factory

Info

Publication number: CN210528640U
Application number: CN201921108032.8U
Authority: CN
Inventors: 海洋
Original assignee: Nanjing Daheng Linrui Precision Machinery Co Ltd
Current assignee: Nanjing Daheng Linrui Precision Machinery Co Ltd
Priority date: 2019-07-16
Filing date: 2019-07-16
Publication date: 2020-05-15
Anticipated expiration: 2029-07-16

Abstract

The utility model discloses a high-efficient recovery plant of CMP waste water for semiconductor factory, concretely relates to sewage treatment field, including the sewage treatment case, the front surface of sewage treatment case is provided with control switch, and the inside of sewage treatment case is provided with the precipitation tank, the top that the top of sewage treatment case is located the precipitation tank is provided with the feed liquor mouth of pipe, and the outer wall of sewage treatment case is located the orificial outside of feed liquor and installs the grid box with a net, the top of precipitation tank is inserted and is equipped with first suction tube, the feed liquor end at first water pump is connected on the top of first suction tube, one side that the inside of sewage treatment case is located the precipitation tank is provided with the filter-tank, the inside cross connection of filter-tank has the filter plate. The utility model discloses be convenient for carry out multiple filtration to waste water and handle, and be convenient for wash filter plate surface adhesion's impurity, reduced the trouble of artificial clearance of getting out to can the inside partial peculiar smell of sewage treatment incasement absorb purification treatment.

Description

High-efficient recovery plant of CMP waste water for semiconductor factory

Technical Field

The utility model relates to a sewage treatment field, more specifically say, the utility model relates to a semiconductor factory uses high-efficient recovery plant of CMP waste water.

Background

The semiconductor industry is an industry which depends on water resources and is also an industry with high water consumption, and especially under the condition of limited water resources, the operation of semiconductor production enterprises is greatly stressed by water limitation and water shortage, so the research and practice of saving water of the semiconductor production enterprises is favorable for improving the water utilization benefit and reducing the water utilization cost.

The existing recovery equipment for CMP wastewater is poor in filtering effect on wastewater in the using process, and is inconvenient to clean a filter screen after filtering, and is inconvenient to absorb and purify the peculiar smell in a sewage treatment tank.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above-mentioned defect of prior art, the embodiment of the utility model provides a semiconductor factory is with high-efficient recovery plant of CMP waste water is convenient for carry out multiple filtration processing to waste water, and is convenient for wash filter plate surface adhesion's impurity, has reduced the trouble of artificial taking out the clearance, has saved the time to can the inside partial peculiar smell of sewage treatment incasement portion absorb purification treatment.

In order to achieve the above object, the utility model provides a following technical scheme: a CMP wastewater high-efficiency recovery device for a semiconductor factory comprises a sewage treatment box, wherein a control switch is arranged on the front surface of the sewage treatment box, a precipitation tank is arranged in the sewage treatment box, a liquid inlet pipe orifice is formed in the position, above the precipitation tank, of the top of the sewage treatment box, a grid net cage is installed on the outer side, located at the liquid inlet pipe orifice, of the outer wall of the sewage treatment box, the outer wall of the grid net cage is connected with a liquid inlet pipe, an overflow pipe is connected to the position, close to the lower position of the liquid inlet pipe orifice, of the outer wall of the top of the sewage treatment box, a first liquid suction pipe is inserted into the top of the precipitation tank, the top end of the first liquid suction pipe is connected to the liquid inlet end of a first water pump, a filter tank is arranged on one side, located in the precipitation tank, of the inside of the sewage treatment, the bottom end of the first liquid outlet pipe is inserted into the top of the filter tank, the bottom of the filter tank is connected with a drain pipe, the bottom of the drain pipe is positioned outside the sewage treatment tank and is connected with a liquid electromagnetic valve, the top of the filter tank is positioned on one side of the first liquid outlet pipe and is inserted with a water pipe, one end of the water pipe penetrates through the outer wall of the sewage treatment tank and is connected with the liquid outlet end of the second water pump, the liquid inlet end pipe body of the second water pump is connected with an external clean water tank, the outer side of the bottom of the filter tank is connected with a third water pump through a pipe body, a reagent treatment tank is arranged inside the sewage treatment tank and is positioned on one side of the third water pump, the liquid outlet pipe of the third water pump is connected with the top of the reagent treatment tank, the outer side of the outer wall of the sewage treatment tank, which is close to the outer side of the top of, a liquid outlet pipe of the fourth water pump is positioned on one side of the sewage treatment tank and is connected with a water tank, and the top of the sewage treatment tank is provided with a peculiar smell cleaning mechanism;

peculiar smell clearance mechanism is including connecting the negative pressure induced air cover on sewage treatment case top, the top of negative pressure induced air cover is connected with first trachea, the air inlet end at the air exhauster is connected to first tracheal one end, the air-out end of air exhauster is connected with the second trachea, the outer wall at the purifying box is connected to the tracheal one end of second, another outer wall connection of purifying box has the third trachea, the outside that is close to the purifying box on the second trachea is provided with first gas solenoid valve, the outside that is close to the purifying box on the third trachea is provided with the gaseous solenoid valve of second.

In a preferred embodiment, the purification box is internally provided with an activated carbon core group, the inside of the purification box is provided with a heater above the activated carbon core group, and the inner wall of the purification box is provided with a heat insulation layer.

In a preferred embodiment, the activated carbon core group comprises uniformly arranged activated carbon core rods, and fixing plates are connected to both ends of the activated carbon core rods.

In a preferred embodiment, the bottom parts of the second water pump and the fourth water pump are respectively provided with a support plate, and the support plates are connected with the outer wall of the sewage treatment tank through bolts.

In a preferred embodiment, the connection between the screen plate and the inner wall of the filter tank is welding, and the bottom of the screen plate is arranged obliquely downwards.

In a preferred embodiment, the outer wall of the purification box is rotatably connected with an access door through a hinge, and a sealing gasket is arranged at the joint of the inner wall of the access door and the purification box.

In a preferred embodiment, a second pipette is arranged between the input end of the fourth water pump and the reagent treatment tank, and sealing rings are arranged at the joints of the outside of the second pipette and the overflow pipe and the inner wall of the sewage treatment tank.

In a preferred embodiment, a through hole is formed in the top of the sewage treatment tank corresponding to the bottom of the negative pressure induced air cover, and the negative pressure induced air cover is connected with the top end of the sewage treatment tank through a bolt.

The utility model discloses a technological effect and advantage:

1. the utility model discloses a cross connection has the filter plate in the inside of filter-tank, the bottom slope of filter plate sets up downwards, be convenient for in the waste water process of falling down lasts carry out multiple filtration to waste water, and through setting up blow off pipe, the liquid solenoid valve, water pipe and second water pump, the feed liquor end body of second water pump is connected with outside clean water basin, when needing to clear up the filter plate, avoid the inside mesh of filter plate to block up and influence the result of use, through starting the second water pump, and open the liquid solenoid valve, use the clear water to wash the top of filter plate through the water pipe, reduce the impurity that filter plate surface adheres to, the trouble of artificially getting out the clearance has been reduced, save time;

2. the utility model discloses a through install peculiar smell clearance mechanism at the top of sewage treatment case, when using, through starting the air exhauster, make the inside of negative pressure induced air cover form the negative pressure, make the peculiar smell that the waste water in the sewage treatment incasement distributes inhale through the negative pressure induced air cover, the peculiar smell in the sewage treatment incasement has been reduced, and through setting up the purifying box, the third trachea, first gas solenoid valve and second gas solenoid valve, and the inside of purifying box is installed active carbon core group, be convenient for carry out purification treatment through the inside of purifying box with the peculiar smell gas of extraction, can adsorb the harmful substance in the peculiar smell waste gas, improve the clearance effect to the peculiar smell, and install the heater in the inside of purifying box, utilize the high temperature regeneration principle of active carbon, make the attachment that adsorbs plump active carbon surface after using for a long time resume activity again after heating desorption, the utilization rate of the active carbon is improved, and the trouble of replacing the active carbon is reduced.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a front view of the present invention.

Fig. 3 is the internal structure schematic diagram of the purifying box of the present invention.

Fig. 4 is a schematic structural view of the activated carbon core assembly of the present invention.

Fig. 5 is an enlarged view of a portion a in fig. 1 according to the present invention.

The reference signs are: 1 sewage treatment box, 2 liquid inlet pipe mouth, 3 grid net cage, 4 liquid inlet pipe, 5 settling tank, 6 overflow pipe, 7 first liquid suction pipe, 8 first water pump, 9 first liquid outlet pipe, 10 filter tank, 11 filter screen plate, 12 blow off pipe, 13 liquid electromagnetic valve, 14 water pipe, 15 second water pump, 16 third water pump, 17 reagent treatment tank, 18 second liquid suction pipe, 19 fourth water pump, 20 water tank, 21 negative pressure induced air cover, 22 first air pipe, 23 exhaust fan, 24 second air pipe, 25 purification box, 26 third air pipe, 27 first gas electromagnetic valve, 28 second gas electromagnetic valve, 29 reagent inlet, 30 control switch, 31 active carbon core group, 32 heater, 251 thermal-protective layer, 311 active carbon core rod, 312 fixed plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a CMP wastewater high-efficiency recovery device for semiconductor factories, which comprises a sewage treatment box 1, wherein the front surface of the sewage treatment box 1 is provided with a control switch 30, the inside of the sewage treatment box 1 is provided with a precipitation tank 5, the top of the sewage treatment box 1 is provided with a liquid inlet pipe orifice 2 above the precipitation tank 5, the outer wall of the sewage treatment box 1 is arranged outside the liquid inlet pipe orifice 2 and is provided with a grid net cage 3, the outer wall of the grid net cage 3 is connected with a liquid inlet pipe 4, the position of the outer wall of the top of the sewage treatment box 1, which is close to the lower part of the liquid inlet pipe orifice 2, is connected with an overflow pipe 6, a first liquid suction pipe 7 is inserted at the top of the precipitation tank 5, the top end of the first liquid suction pipe 7 is connected with the liquid inlet end of a first water pump 8, one side of the inside of the sewage treatment box 1, which is arranged in the precipitation, the connection mode between the filter screen plate 11 and the inner wall of the filter tank 10 is welding, the bottom of the filter screen plate 11 is inclined downwards, the liquid outlet end of the first water pump 8 is connected with a first liquid outlet pipe 9, the bottom end of the first liquid outlet pipe 9 is inserted into the top of the filter tank 10, the bottom of the filter tank 10 is connected with a sewage discharge pipe 12, the bottom of the sewage discharge pipe 12 is positioned outside the sewage treatment tank 1 and is connected with a liquid electromagnetic valve 13, the top of the filter tank 10 is positioned on one side of the first liquid outlet pipe 9 and is inserted with a water pipe 14, one end of the water pipe 14 penetrates through the outer wall of the sewage treatment tank 1 and is connected with the liquid outlet end of the second water pump 15, the liquid inlet end pipe body of the second water pump 15 is connected with an external clean water tank, the outer side of the bottom of the filter tank 10 is connected with a third water pump 16 through a pipe body, one side of the inside of the, the top at reagent treatment tank 17 is connected to the drain pipe of third water pump 16, the top outside that the outer wall of sewage treatment case 1 is close to reagent treatment tank 17 is connected with fourth water pump 19, and the top position department that the outer wall of sewage treatment case 1 is close to fourth water pump 19 is provided with reagent and throws into mouth 29, one side that the drain pipe of fourth water pump 19 is located sewage treatment case 1 is connected with water tank 20, the bottom of second water pump 15 and fourth water pump 19 all is provided with the backup pad, passes through bolted connection between the outer wall of backup pad and sewage treatment case 1, be equipped with second pipette 18 between fourth water pump 19 input and the reagent treatment tank 17, the outside of second pipette 18 and overflow pipe 6 and the inner wall junction of sewage treatment case 1 all are provided with the sealing washer.

As shown in fig. 1-2 and fig. 5, the specific implementation is as follows: when in use, external wastewater firstly enters the interior of the grid net cage 3 through the liquid inlet pipe 4 to complete preliminary filtration and then enters the interior of the sedimentation tank 5 from the liquid inlet pipe orifice 2, an overflow pipe 6 is connected at a position, close to the liquid inlet pipe orifice 2, of the outer wall of the top of the sewage treatment tank 1, so that the influence of high internal water level of the sedimentation tank 5 on other treatment working sections is avoided, then, after the wastewater in the sedimentation tank 5 is stood for a few minutes, the wastewater in the sedimentation tank 5 is pumped into the interior of the filter tank 10 by starting the first water pump 8, the filter screen plate 11 is connected in the filter tank 10 in a staggered manner, the connection mode between the filter screen plate 11 and the inner wall of the filter tank 10 is welding, the bottom of the filter screen plate 11 is obliquely and downwards arranged, so that the wastewater can be continuously filtered in the multiple-down process, and the drain pipe 12 is connected to the bottom of the, the bottom of the sewage discharge pipe 12 is positioned at the outer side of the sewage treatment box 1 and is connected with a liquid electromagnetic valve 13, a water pipe 14 is inserted at one side of the top of the filter tank 10, which is positioned at the first liquid outlet pipe 9, one end of the water pipe 14 penetrates through the outer wall of the sewage treatment box 1 and is connected at the liquid outlet end of a second water pump 15, the liquid inlet end pipe body of the second water pump 15 is connected with an external clean water tank, when the filter screen plate 11 needs to be cleaned, the influence on the use effect caused by the blockage of the inner mesh of the filter screen plate 11 is avoided, the second water pump 15 is started, the liquid electromagnetic valve 13 is opened, the top of the filter screen plate 11 is washed by using clean water through the water pipe 14, impurities attached to the surface of the filter screen plate 11 are reduced, the trouble of taking out and cleaning by people is reduced, the time is saved, the outer side of the bottom of the filter tank 10 is connected with a, the drain pipe of third water pump 16 is connected at the top of reagent treatment tank 17, and the top outside that the outer wall of sewage treatment case 1 is close to reagent treatment tank 17 is connected with fourth water pump 19, and the top position department that the outer wall of sewage treatment case 1 is close to fourth water pump 19 is provided with reagent and throws into mouth 29, is convenient for throw into reagent to the inside of reagent treatment tank 17 and carries out sewage purification.

The peculiar smell cleaning mechanism is installed at the top of the sewage treatment box 1, the peculiar smell cleaning mechanism comprises a negative pressure induced air cover 21 connected to the top end of the sewage treatment box 1, a through hole is formed in the position, corresponding to the bottom of the negative pressure induced air cover 21, of the top of the sewage treatment box 1, the negative pressure induced air cover 21 is connected with the top end of the sewage treatment box 1 through a bolt, the top end of the negative pressure induced air cover 21 is connected with a first air pipe 22, one end of the first air pipe 22 is connected with an air inlet end of an air exhauster 23, an air outlet end of the air exhauster 23 is connected with a second air pipe 24, one end of the second air pipe 24 is connected with the outer wall of a purification box 25, the other outer wall of the purification box 25 is connected with a third air pipe 26, a first air electromagnetic valve 27 is arranged on the second air pipe 24 near the purification box 25, and a second air electromagnetic valve 28 is arranged, the internally mounted of purifying box 25 has active carbon core group 31, and the inside of purifying box 25 is located the top of active carbon core group 31 and installs heater 32, the inner wall of purifying box 25 is provided with insulating layer 251, active carbon core group 31 is including the active carbon plug 311 of even setting, the both ends of active carbon plug 311 all are connected with fixed plate 312, the outer wall of purifying box 25 is connected with the access door through hinge rotation, and the access door inner wall is provided with sealed the pad with the junction of purifying box 25.

As shown in fig. 1 to 4, the specific embodiment is as follows: the peculiar smell cleaning mechanism is arranged at the top of the sewage treatment box 1 and comprises a negative pressure induced air cover 21 connected to the top end of the sewage treatment box 1, a through hole is formed in the position, corresponding to the bottom of the negative pressure induced air cover 21, of the top of the sewage treatment box 1, the negative pressure induced air cover 21 is connected with the top end of the sewage treatment box 1 through a bolt, the negative pressure induced air cover 21 is convenient to install and fix, a first air pipe 22 is connected to the top end of the negative pressure induced air cover 21, one end of the first air pipe 22 is connected with an air inlet end of an exhaust fan 23, an air outlet end of the exhaust fan 23 is connected with a second air pipe 24, when the peculiar smell cleaning mechanism is used, the exhaust fan 23 is started to enable the interior of the negative pressure induced air cover 21 to form negative pressure, so that peculiar smell emitted by waste water in the sewage treatment box 1 is absorbed through the negative pressure induced air cover 21, one end of the second air pipe, a first gas solenoid valve 27 is arranged on the second gas pipe 24 close to the outer side of the purifying box 25, a second gas solenoid valve 28 is arranged on the third gas pipe 26 close to the outer side of the purifying box 25, an activated carbon core group 31 is arranged in the purifying box 25, the activated carbon core group 31 comprises uniformly arranged activated carbon core rods 311, both ends of the activated carbon core rods 311 are connected with fixing plates 312, the extracted odorous gas is conveniently purified through the purifying box 25, the activated carbon core rods 311 can adsorb harmful substances in odorous waste gas, the odor cleaning effect is improved, an access door is rotatably connected to the outer wall of the purifying box 25 through hinges, a sealing gasket is arranged at the joint of the inner wall of the access door and the purifying box 25, a heater 32 is arranged above the activated carbon core group 31 in the purifying box 25, and a heat insulation layer 251 is arranged on the inner wall of the purifying box 25, after using for a long time, the surface adsorption of active carbon plug 311 is full, then causes the adsorption effect to reduce, through closing first gas solenoid valve 27 and second gas solenoid valve 28 to open heater 32, be convenient for carry out heat treatment to the inside of purifying box 25, and then after heating to the uniform temperature, utilize the high temperature regeneration principle of active carbon, resume the activity once more after making the attachment on active carbon surface carry out the desorption, improved the utilization ratio of active carbon, reduced the trouble of changing the active carbon.

The utility model discloses the theory of operation:

referring to the attached drawings 1-2 and 5 of the specification, by connecting the filter screen plates 11 in the filter tank 10 in a staggered manner, arranging the filter screen plates 11 with the bottoms inclined downwards to facilitate continuous multi-filtration treatment of wastewater in the falling process of wastewater, by arranging the drain pipes 12 at the bottom of the filter tank 10, connecting the bottoms of the drain pipes 12 with the liquid electromagnetic valves 13, inserting the water pipes 14 at one side of the first liquid outlet pipe 9 at the top of the filter tank 10, penetrating one ends of the water pipes 14 through the outer wall of the wastewater treatment tank 1 to be connected with the liquid outlet ends of the second water pumps 15, connecting the liquid inlet ends of the second water pumps 15 with the external clean water tank, when the filter screen plates 11 need to be cleaned, avoiding the blockage of the inner meshes of the filter screen plates 11 to influence the use effect, by starting the second water pumps 15 and starting the liquid electromagnetic valves 13, flushing the tops of the filter screen plates 11 with clean water through the water pipes 14, impurities attached to the surface of the filter screen plate 11 are reduced, the trouble of manual taking out and cleaning is reduced, and the time is saved;

further, referring to the attached drawings 1-4 of the specification, by installing the odor cleaning mechanism on the top of the sewage treatment tank 1, when in use, the exhaust fan 23 is started to form negative pressure inside the negative pressure induced air cover 21, so that the odor emitted by the wastewater inside the sewage treatment tank 1 is sucked through the negative pressure induced air cover 21, thereby reducing the odor inside the sewage treatment tank 1, and by arranging the purification tank 25, the third air pipe 26, the first gas solenoid valve 27 and the second gas solenoid valve 28, and installing the activated carbon core group 31 inside the purification tank 25, the extracted odor gas is conveniently purified through the interior of the purification tank 25, thereby being capable of adsorbing harmful substances in the odor waste gas, improving the odor cleaning effect, and installing the heater 32 inside the purification tank 25, utilizing the high temperature regeneration principle of activated carbon, so that the adsorbed attachments on the surface of the activated carbon after long-time use are heated and desorbed again to recover activity, the utilization rate of the active carbon is improved, and the trouble of replacing the active carbon is reduced.

And finally: the above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a high-efficient recovery plant of CMP waste water for semiconductor factory, includes sewage treatment case (1), its characterized in that: the front surface of the sewage treatment box (1) is provided with a control switch (30), a precipitation tank (5) is arranged inside the sewage treatment box (1), a liquid inlet pipe orifice (2) is arranged above the precipitation tank (5) at the top of the sewage treatment box (1), a grid net box (3) is installed on the outer side of the liquid inlet pipe orifice (2) on the outer wall of the sewage treatment box (1), a liquid inlet pipe (4) is connected to the outer wall of the grid net box (3), an overflow pipe (6) is connected to the position, close to the liquid inlet pipe orifice (2), of the outer wall of the top of the sewage treatment box (1), a first liquid suction pipe (7) is inserted into the top of the precipitation tank (5), the top end of the first liquid suction pipe (7) is connected to the liquid inlet end of a first water pump (8), a filter tank (10) is arranged on one side of the precipitation tank (5) inside the sewage treatment box (1), the inside cross connection of filter-tank (10) has filter screen board (11), the play liquid end of first water pump (8) is connected with first drain pipe (9), the top of establishing filter-tank (10) is inserted to the bottom of first drain pipe (9), the bottom of filter-tank (10) is connected with blow off pipe (12), the outside that the bottom of blow off pipe (12) is located sewage treatment case (1) is connected with liquid solenoid valve (13), one side that the top of filter-tank (10) is located first drain pipe (9) is inserted and is equipped with water pipe (14), the outer wall that the one end of water pipe (14) passed sewage treatment case (1) is connected at the play liquid end of second water pump (15), the inlet end body and the outside clean water basin of second water pump (15) are connected, the bottom outside of filter-tank (10) is connected with third water pump (16) through the body, one side that the inside of sewage treatment case (1) is located third water pump (16) is provided with reagent treatment groove (17) ) The liquid outlet pipe of the third water pump (16) is connected to the top of the reagent treatment tank (17), the outer side, close to the top of the reagent treatment tank (17), of the outer wall of the sewage treatment tank (1) is connected with a fourth water pump (19), a reagent feeding opening (29) is formed in the position, close to the upper portion of the fourth water pump (19), of the outer wall of the sewage treatment tank (1), a water tank (20) is connected to one side, located on the sewage treatment tank (1), of the liquid outlet pipe of the fourth water pump (19), and a peculiar smell cleaning mechanism is installed on the top of the sewage treatment tank (1);

peculiar smell clearance mechanism is including connecting negative pressure induced air cover (21) on sewage treatment case (1) top, the top of negative pressure induced air cover (21) is connected with first trachea (22), the air inlet end at air exhauster (23) is connected to the one end of first trachea (22), the air-out end of air exhauster (23) is connected with second trachea (24), the outer wall in purifying box (25) is connected to the one end of second trachea (24), another outer wall connection of purifying box (25) has third trachea (26), the outside that is close to purifying box (25) on second trachea (24) is provided with first gas solenoid valve (27), the outside that is close to purifying box (25) on third trachea (26) is provided with second gas solenoid valve (28).

2. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: the internally mounted of purifying box (25) has active carbon core group (31), and the inside of purifying box (25) is located the top of active carbon core group (31) and installs heater (32), the inner wall of purifying box (25) is provided with insulating layer (251).

3. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 2, wherein: the active carbon core group (31) comprises uniformly arranged active carbon core rods (311), and two ends of each active carbon core rod (311) are connected with fixing plates (312).

4. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: the bottom of the second water pump (15) and the bottom of the fourth water pump (19) are both provided with supporting plates, and the supporting plates are connected with the outer wall of the sewage treatment box (1) through bolts.

5. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: the connection mode between the filter screen plate (11) and the inner wall of the filter tank (10) is welding, and the bottom of the filter screen plate (11) is arranged obliquely downwards.

6. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: the outer wall of purifying box (25) is connected with the access door through hinge rotation, and the junction of access door inner wall and purifying box (25) is provided with sealed the pad.

7. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: a second liquid suction pipe (18) is arranged between the input end of the fourth water pump (19) and the reagent treatment groove (17), and sealing rings are arranged at the joints of the outer parts of the second liquid suction pipe (18) and the overflow pipe (6) and the inner wall of the sewage treatment tank (1).

8. The efficient recovery equipment for CMP wastewater of semiconductor factory according to claim 1, wherein: the top of the sewage treatment box (1) is provided with a through hole corresponding to the bottom of the negative pressure induced air cover (21), and the negative pressure induced air cover (21) is connected with the top end of the sewage treatment box (1) through a bolt.