CN210524780U - Centrifugal rotary polishing mechanism for hard and brittle material edge - Google Patents
Centrifugal rotary polishing mechanism for hard and brittle material edge Download PDFInfo
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- CN210524780U CN210524780U CN201921091530.6U CN201921091530U CN210524780U CN 210524780 U CN210524780 U CN 210524780U CN 201921091530 U CN201921091530 U CN 201921091530U CN 210524780 U CN210524780 U CN 210524780U
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Abstract
The utility model belongs to the polishing equipment field of hard brittle material, concretely relates to hard brittle material edge centrifugation rotation polishing mechanism. The device comprises a circular upper mounting plate, wherein a circular lower mounting plate is connected with the upper mounting plate above the circular upper mounting plate through four vertical rotating shafts uniformly distributed on the circumferential outer edge, and each rotating shaft is provided with a polishing head; four swing arms are arranged on the top surface of the upper mounting plate, one end of each swing arm is connected with the top end of the rotating shaft, and the other end of each swing arm is connected with a balancing weight through a centrifugal arm; a spring fixing rod is arranged beside the top of each rotating shaft and connected with the adjacent swing arms through springs, and the stretching amount of each spring is the same; the rotating mechanism is connected with the upper mounting plate through a rotating driving shaft; the hard brittle material carrying disc is arranged right below the lower mounting plate and is connected with the rotary lifting mechanism. The utility model discloses be suitable for different technology demands. The centrifugal rotary polishing mode is adopted, the impact force on the edge of the hard and brittle material is small, no inertia impact exists, and the processed surface has better quality.
Description
Technical Field
The utility model belongs to the polishing equipment field of hard brittle material, concretely relates to hard brittle material edge centrifugation rotation polishing mechanism.
Background
Hard brittle materials are widely used in various fields, wherein hard brittle materials represented by wafers are the main substrate materials for manufacturing very large scale integrated circuits, and with the rapid development of the semiconductor industry, the precision requirements on the substrate materials are higher and higher, and particularly, the outer circle surface state of the wafers is stricter and stricter. At present, the edge of a hard and brittle material is mostly polished by a mechanochemical method, and a polishing solution and a polishing cloth are used to realize the process of chemical mechanical polishing under specific process conditions. The traditional edge polishing method is similar to a grinding wheel mechanism, the shape of the grinding wheel is fixed, and feeding is realized by a motor and an air cylinder during polishing, the edge polishing method has the defects that the force is not uniform, and the surface quality is influenced during edge polishing due to the fluctuation and inertia of the motor and the air cylinder during starting and stopping.
Disclosure of Invention
The utility model discloses the technical problem that needs to solve is, overcomes not enough among the prior art, provides a hard brittle material edge centrifugation rotation polishing mechanism.
In order to solve the technical problem, the utility model discloses a solution is:
a centrifugal rotary polishing mechanism for the edge of a hard and brittle material comprises a polishing head, a rotating mechanism, a rotary lifting mechanism and a swinging hinge mechanism;
the swinging hinge mechanism comprises a circular upper mounting plate and a swinging arm, the circular lower mounting plate is connected with the upper mounting plate through four vertical rotating shafts uniformly distributed on the circumferential outer edge, and each rotating shaft is provided with a polishing head mounting seat; the projectile head is of an arc-shaped structure, one end of the projectile head is connected with the projectile head mounting seat through a projectile head fixing plate, and the other end of the projectile head is a free end; four swing arms are arranged on the top surface of the upper mounting plate, one end of each swing arm is connected with the top end of the rotating shaft, and the other end of each swing arm is connected with a balancing weight through a vertical centrifugal arm; a spring fixing rod is arranged beside each rotating shaft on the top surface of the upper mounting plate and is connected with an adjacent swing arm through a spring, and the stretching amount of each spring is the same;
the rotating mechanism is connected with the upper mounting plate through a rotating driving shaft;
the hard brittle material carrying disc is arranged right below the lower mounting plate and is connected with the rotary lifting mechanism, and the rotary lifting mechanism can drive the hard brittle material carrying disc to lift and rotate, so that the hard brittle material passes through the lower mounting plate and is in contact polishing with the polishing head. As an improvement, the rotating shaft is connected with the upper mounting plate and the lower mounting plate through bearings.
As an improvement, the swing arm is connected with the rotating shaft through a set screw and an inner hexagonal socket head cap screw.
As an improvement, a plastic equal-height block is arranged between each projectile head mounting seat and the upper mounting plate.
As an improvement, the end part of the hard and brittle material carrying disc is provided with a sucking disc, a vacuum pipeline is arranged in the hard and brittle material carrying disc, and the lower end part of the hard and brittle material carrying disc is provided with a vacuum rotary joint.
As an improvement, polishing cloth is adhered to the inner side wall of the polishing head. Go up the mounting panel and link to each other with the rotation driving axle, the rotation driving axle is fixed in last frame, and a synchronous pulley is fixed through the tensioning sleeve to the end of rotation driving axle, and synchronous pulley passes through the belt and links to each other with the hold-in range on the motor output shaft, drives the rotation of whole throwing head through the motor.
The hard and brittle material and the projectile head relatively rotate, the projectile head position is not fixed, and the special swing hinge mechanism can realize the expansion and closing actions of the projectile head, and the specific principle is as follows: when the projectile head is still, under the tension of the spring, the projectile head is outwards far away from the edge of the hard and brittle material; when the polishing head starts to rotate at a certain angular speed, under the action of the swing arm and the balancing weight, when the rotating speed is gradually increased and the centrifugal force is greater than the tensile force of the spring, the polishing head starts to approach the edge of the hard and brittle material until the edge is attached, the polishing pad is attached to the polishing head, and the purpose of edge polishing can be achieved through the relative rotating motion of the polishing pad and the hard and brittle material.
Compared with the prior art, the utility model has the technical effects that:
1. the utility model provides a hard and brittle material edge centrifugation rotation polishing mechanism, polishing process's polishing effort can be adjusted through rotational speed and balancing weight, is suitable for different technology demands.
2. The utility model discloses a centrifugal rotatory polishing's mode, the impact force to hard brittle material edge is smaller, does not have inertial impact, and the surface quality who processes out is better.
Drawings
FIG. 1 is a top view of an edge centrifugal rotary polishing mechanism for a hard and brittle material;
FIG. 2 is a front view of a hard and brittle material edge centrifugal rotary polishing mechanism;
FIG. 3 is a partial cross-sectional view of an edge centrifugal spin polishing mechanism for a hard and brittle material;
FIG. 4 is a cross-sectional view of a hard and brittle material edge centrifugal spin polishing mechanism A-A;
FIG. 5 is a cross-sectional view of a hard and brittle material edge centrifugal rotary polishing mechanism B-B;
FIG. 6 is a schematic diagram of the driving of a hard and brittle material edge centrifugal rotary polishing mechanism;
FIG. 7 is a schematic view of a spin-up mechanism in an edge centrifugal spin polishing mechanism for hard and brittle materials.
Reference numerals: 1-swing arm, 2-upper mounting plate, 3-rotating shaft, 4-spring, 5-spring fixing rod, 6-inner hexagonal socket head screw, 7-set screw, 8-centrifugal arm, 9-balancing weight, 10-lower mounting plate, 11-countersunk head screw, 12-support, 13-polishing head fixing plate, 14-polishing head, 15-polishing cloth, 16-polishing head mounting seat, 17-hard brittle material, 18-bearing, 19-equal-height block, 20-set screw, 21-polishing head rotating motor, 22-synchronous belt, 23-synchronous belt wheel, 24-adjusting screw, 25-upper frame, 26-rotating driving shaft, 27-hard brittle material sucker, 28-transmission gear and 29-carrying disc rotating motor, 30-lower frame, 31-linear motion assembly, 32-screw rod assembly, 33-fixing plate, 34-lifting gear transmission assembly, 35-lifting motor and 36-vacuum rotary joint.
Detailed Description
The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.
A centrifugal rotary polishing mechanism for the edge of a hard and brittle material comprises a polishing head and is characterized by further comprising a rotating mechanism, a rotary lifting mechanism and a swinging hinge mechanism;
as shown in fig. 1, the swing hinge mechanism includes a circular upper mounting plate 2 and a swing arm 1, a circular lower mounting plate 10 is connected with the upper mounting plate 2 through four vertical rotating shafts 3 uniformly distributed on the circumferential outer edge, and each rotating shaft 3 is provided with a polishing head mounting seat 16. One end of the projectile 14 is connected with the projectile mounting seat 16 through the projectile fixing plate 13, and the other end is a free end; the swing arms 1 are four and are fixed on the rotating shaft 3 through set screws 7 and hexagon socket head cap screws 6, and the rotating shaft 3 is fixed on the upper mounting plate 2. The swing arm 1 is connected with a spring 4, the spring 4 is fixed on a spring fixing rod 5, and the spring 4 is in a stretching state in a free state, so that the spring 4 can pull the swing arm 1 to move towards the axis direction.
As shown in fig. 2, a cantilever 8 is connected to the end of the swing arm 1, and a weight 9 is fixed below the cantilever 8. Cantilever 8, balancing weight 9 and swing arm 1 connect into a whole, and the simultaneous movement just can drive swing arm 1 and break away from the effort of spring and rotate to the direction of keeping away from the axle center under the centrifugal force effect when whole mechanism is rotatory.
As shown in fig. 3 and 4, which are partial sectional views and a-a sectional view, the peen mount 16 and the spindle 3 are fixed together by the set screw 20, and two planes are milled on the spindle 3, and the positions of the planes are used for locking the set screw 20, so that the spindle 3 and the peen mount 16 can rotate together. The projectile head 14 is of an arc-shaped structure, polishing cloth 15 is attached to the inner side arc of the projectile head 14, one end of the projectile head 14 is installed on a projectile head installation seat 16, and then the projectile head is fixed through a projectile head fixing plate 13. When the swing arm 1 rotates outwards, the rotating shaft 3 is driven to rotate inwards together with the throwing head 14. When the swing arm 1 rotates by a large angle, the projectile 14 can approach the inner side infinitely until the projectile finally abuts against the hard and brittle material 17 at the rotation center. The projectile head 14, the rotating shaft 3 and the swing arm 1 form an approximate Z shape.
As shown in the cross-sectional view B-B of fig. 5, the connecting place of the rotating shaft 3 and the upper mounting plate 2, the lower mounting plate 10 is provided with a bearing 18, and a plastic equal-height block 19 is arranged between each of the projectile head mounting seats 16 and the upper mounting plate 2, so as to adjust the position of the projectile head and control the clearance of the projectile head mounting seats in the up-and-down movement.
As shown in fig. 6 and 7, the upper mounting plate 2 is connected to a rotary driving shaft 26, the driving shaft 26 is fixed to the upper frame 25, the polishing head rotating motor 21 drives the synchronous pulley 23 to rotate through the synchronous belt 22, and the synchronous belt 23 is fixed to the end of the rotary driving shaft 26 through a tension sleeve. The end part of the hard and brittle material carrying disc is provided with a sucking disc 27, a vacuum pipeline is arranged in the sucking disc 27, the lower end part of the hard and brittle material carrying disc is provided with a vacuum rotary joint 36, the sucking disc can rotate, and a sucking disc rotating motor 29 drives a transmission gear 28 to drive a sucking disc main shaft to rotate;
the rotary lifting mechanism comprises a lower frame 30, and a hard and brittle material carrying disc is arranged at the top of the lower frame 30 and used for placing hard and brittle materials; a transmission shaft is arranged below the hard and brittle material carrying disc, a carrying disc rotating motor 29 is arranged in the lower frame 30, and the carrying disc rotating motor 29 is connected with the transmission shaft through a transmission gear 28;
the linear motion assembly 31 comprises a guide shaft and a bearing seat, the top end of the vertical guide shaft is arranged on the lower end face of the lower rack 30 through the bearing seat, the middle part of the guide shaft is provided with a fixing plate 33, the fixing plate 33 is connected with the guide shaft through a bearing, and a plurality of equal-height columns are arranged between the fixing plate 33 and the lower end face of the lower rack 30; a screw rod is further arranged between the fixed plate 33 and the lower bottom surface of the lower frame 30, a screw nut is fixedly arranged on the fixed plate, and the lifting motor 35 is arranged on the fixed plate 33 and drives the screw nut through a lifting gear transmission assembly 34; the guide shaft and the bottom end of the screw rod are fixedly arranged on the bottom plate. The fixing plate 33 is fixed to other components, so that the lifting motor drives the screw nut to rotate, thereby driving the bearing seat and the guide shaft in the linear motion component 31 to move relatively, and further driving the lower frame 30 to move vertically.
The utility model discloses a theory of operation does: when the mechanism is static, the swing arm 1 can rotate clockwise (viewing angle shown in fig. 3) under the action of the tension of the spring 4 to drive the throwing head 14 to rotate clockwise, and the throwing head is far away from the central area at the moment, so that enough feeding space is reserved for the hard and brittle materials, and the hard and brittle materials can smoothly pass through the 4 throwing heads 14 to a specified position. When the throwing head rotates at a certain angular speed under the driving of the rotating mechanism, the swing arm 1 starts to rotate anticlockwise (as shown in figure 3) under the action of centrifugal force, and after the centrifugal force is greater than the pulling force of the spring 4, the swing arm 1 can drive the throwing head 14 to rotate anticlockwise, and the throwing head 14 is close to the central area until all 4 throwing heads 14 cling to the hard brittle material to hold the whole excircle. According to the technological parameters, the hard and brittle materials can be lifted and rotated in a direction opposite to that of the head throwing mechanism at a certain angular speed by rotating the lifting mechanism, the edge is polished by using the friction force generated by relative motion, and the friction force can be realized by changing the rotating speed of the head throwing 14 or the weight balancing block 9.
Finally, it is to be noted that the above-mentioned embodiments are only specific embodiments of the present invention. Obviously, the present invention is not limited to the above embodiments, and many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.
Claims (7)
1. A centrifugal rotary polishing mechanism for the edge of a hard and brittle material comprises a polishing head and is characterized by further comprising a rotating mechanism, a rotary lifting mechanism and a swinging hinge mechanism;
the swinging hinge mechanism comprises a circular upper mounting plate and a swinging arm, the circular lower mounting plate is connected with the upper mounting plate through four vertical rotating shafts uniformly distributed on the circumferential outer edge, and each rotating shaft is provided with a polishing head mounting seat; the projectile head is of an arc-shaped structure, one end of the projectile head is connected with the projectile head mounting seat through a projectile head fixing plate, and the other end of the projectile head is a free end; four swing arms are arranged on the top surface of the upper mounting plate, one end of each swing arm is connected with the top end of the rotating shaft, and the other end of each swing arm is connected with a balancing weight through a vertical centrifugal arm; a spring fixing rod is arranged beside each rotating shaft on the top surface of the upper mounting plate and is connected with an adjacent swing arm through a spring, and the stretching amount of each spring is the same;
the rotating mechanism is connected with the upper mounting plate through a rotating driving shaft;
the hard brittle material carrying disc is arranged right below the lower mounting plate and is connected with the rotary lifting mechanism, and the rotary lifting mechanism can drive the hard brittle material carrying disc to lift and rotate, so that the hard brittle material passes through the lower mounting plate and is in contact polishing with the polishing head.
2. The polishing mechanism of claim 1, wherein the shaft is coupled to the upper mounting plate and the lower mounting plate via bearings.
3. The polishing mechanism as recited in claim 1 wherein the swing arm is coupled to the shaft by a set screw and a socket head cap screw.
4. The polishing mechanism as recited in claim 1, wherein a plastic contour block is disposed between each of the polishing head mounts and the upper mount.
5. The polishing mechanism as recited in claim 1 wherein the hard brittle material carrier plate has a suction cup at an end thereof, a vacuum line therein, and a vacuum swivel at a lower end thereof.
6. The polishing mechanism as recited in claim 1, wherein a polishing cloth is adhered to an inner side wall of the polishing head.
7. The polishing mechanism as recited in claim 1, wherein the rotating mechanism comprises a motor, the motor is fixed on the upper frame, the bottom end of the rotating driving shaft is connected with the upper mounting plate, and the top end of the rotating driving shaft passes through and is fixed on the upper frame through a bearing; the top end of the rotary driving shaft is fixed with a synchronous belt wheel through a tensioning sleeve, and the synchronous belt wheel is connected with a synchronous belt on the output shaft of the motor through a belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921091530.6U CN210524780U (en) | 2019-07-12 | 2019-07-12 | Centrifugal rotary polishing mechanism for hard and brittle material edge |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921091530.6U CN210524780U (en) | 2019-07-12 | 2019-07-12 | Centrifugal rotary polishing mechanism for hard and brittle material edge |
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| CN210524780U true CN210524780U (en) | 2020-05-15 |
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| CN201921091530.6U Active CN210524780U (en) | 2019-07-12 | 2019-07-12 | Centrifugal rotary polishing mechanism for hard and brittle material edge |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114833715A (en) * | 2022-03-01 | 2022-08-02 | 浙江富芯微电子科技有限公司 | Silicon carbide wafer polishing device and method |
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2019
- 2019-07-12 CN CN201921091530.6U patent/CN210524780U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114833715A (en) * | 2022-03-01 | 2022-08-02 | 浙江富芯微电子科技有限公司 | Silicon carbide wafer polishing device and method |
| CN114833715B (en) * | 2022-03-01 | 2024-04-16 | 浙江富芯微电子科技有限公司 | Silicon carbide wafer chemical polishing device and method |
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