CN210523014U - Quick tracking device for mechanical resonance frequency of ultrasonic transducer - Google Patents
Quick tracking device for mechanical resonance frequency of ultrasonic transducer Download PDFInfo
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- CN210523014U CN210523014U CN201920250766.3U CN201920250766U CN210523014U CN 210523014 U CN210523014 U CN 210523014U CN 201920250766 U CN201920250766 U CN 201920250766U CN 210523014 U CN210523014 U CN 210523014U
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Abstract
The utility model relates to an supersound technical field, for the device and the method of quick pursuit transducer mechanical resonance frequency. The utility model discloses ultrasonic transducer mechanical resonance frequency's quick tracer comprises piezoelectric ultrasonic transducer, voltage sensor, current sensor, matching inductance, D class power amplifier, arbitrary waveform generator DDS, microprocessor, examine phase circuit, peak detection circuit, amplification filter circuit, and microprocessor control DDS outputs sinusoidal drive signal, drives piezoelectric ultrasonic transducer through D class power amplifier; meanwhile, the current sensor collects the current of the piezoelectric ultrasonic transducer, and the voltage sensor collects the voltage at two ends of the piezoelectric ultrasonic transducer; the two paths of sampling signals are filtered, filtered and amplified by a filtering and amplifying circuit; and calculating the complex admittance of the transducer at the moment, and judging the resonance state of the transducer so as to demodulate the mechanical resonance frequency of the transducer. The utility model discloses mainly be applied to the ultrasonic detection occasion.
Description
Technical Field
The utility model relates to an supersound technical field, especially an ultrasonic transducer mechanical resonance frequency's quick tracer.
Background
Piezoelectric ultrasonic transducers are widely used in the field of ultrasonic technology due to their advantages of low cost, small size, high power, etc. The key technology is to perform frequency tracking on the ultrasonic transducer to obtain higher output efficiency. The piezoelectric ultrasonic transducer has a plurality of characteristic frequencies, such as resonance frequency, anti-resonance frequency, series resonance frequency, parallel resonance frequency and the like, wherein the series resonance frequency is the mechanical resonance frequency of the transducer, has maximum power output and minimum heat productivity, and is the optimal working frequency. Since the resonant frequency and the series resonant frequency are relatively close and easy to track, many researchers drive the ultrasonic transducer by replacing the series resonant frequency with the resonant frequency, but the ultrasonic transducer is not the optimal working frequency, the ultrasonic transducer mostly has a higher quality factor, and a slight frequency error can greatly reduce the output power of the ultrasonic transducer. In addition, due to uncertainty of production, processing and materials, the resonant frequencies of different transducers are different, and factors such as temperature, rigidity and load can also cause the frequency characteristics of the piezoelectric transducer to change, so that the working performance of the ultrasonic system can be ensured only by tracking the series resonant frequency of the piezoelectric transducer in real time.
At present, most frequency tracking systems are realized in a phase-locked mode, and in the mode, firstly, the resonant frequency and the mechanical resonant frequency of a transducer of a tuned matching circuit are adjusted to be the same frequency, and then, the phase difference of voltage and current is locked near zero by methods of PID control, zero phase detection and the like, so that the aim of tracking the mechanical resonant frequency is fulfilled. Firstly, the adopted static matching circuit only takes effect at a single frequency point, and when the parameters of the transducer change due to factors such as environment and the like, the matching circuit fails; secondly, the phase-locked method also has the problems of anti-resonant frequency tracking, lock losing and the like. The scholars at home and abroad propose to carry out tuning matching by adopting a dynamic matching mode, but the matching system becomes complicated and difficult to realize, and the cost and the volume are increased.
In addition, as a frequency tracking method, there are a sequential search method, a binary search method, a golden section search method, and the like. The sequential search method is most widely used but has the slowest speed, and dozens to hundreds of times of searching are needed for tracking the resonant frequency. In comparison, the dichotomy and the golden section greatly improve the frequency tracking efficiency, but still require about ten iterations. For high-precision ultrasonic systems with fast load change, the real machining or contact time is only tens of milliseconds, and the mechanical resonance frequency of the transducer needs to be tracked more quickly to ensure the machining quality.
Disclosure of Invention
For overcoming the deficiencies of the prior art, the utility model discloses to piezoelectric type ultrasonic transducer's characteristics, provided a device and method of tracking transducer mechanical resonance frequency fast. The utility model adopts the technical scheme that the quick tracking device of the mechanical resonance frequency of the ultrasonic transducer consists of a piezoelectric ultrasonic transducer, a voltage sensor, a current sensor, a matching inductor, a D-type power amplifier, an arbitrary waveform generator DDS, a microprocessor, a phase detection circuit, a peak detection circuit and an amplification filter circuit, wherein the microprocessor controls the DDS to output a sinusoidal driving signal and drives the piezoelectric ultrasonic transducer matched with the matching inductor after the DDS is amplified by the D-type power amplifier; meanwhile, the current sensor collects the current of the piezoelectric ultrasonic transducer, and the voltage sensor collects the voltage at two ends of the piezoelectric ultrasonic transducer; the two paths of sampling signals are filtered, filtered and amplified by a filtering and amplifying circuit; the filtered and amplified signals pass through a phase detection circuit and a peak value detection circuit respectively to obtain the phase difference between voltage and current and the peak values of the voltage and the current; the phase difference and the peak value signals are sampled by a microprocessor for three times at a certain frequency interval delta omega to obtain three groups of data containing driving frequency and complex admittance, so that the mechanical resonance frequency of the transducer is demodulated.
Near the resonant frequency, the equivalent circuit of the piezoelectric ultrasonic transducer is that a first resistor, a first capacitor and a first inductor are connected in series, a resistor and a capacitor are connected in parallel and then connected in parallel with the first resistor, the first capacitor and the first inductor which are connected in series, and the complex admittance Y is as follows:
Y＝G+Bj＝1/R0+jωC0+1/[R1+j(ωL1-1/ωC1)]
＝{1/R0+ω2C1 2R1/[(1-ω2L1C1)2+ω2C1 2R1 2]}+j{ωC0+(1-ω2L1C1)ωC1/[(1-ω2L1C1)2+ω2C1 2R1 2]}. (1)
wherein ω is the drive frequency, G is the conductance, B is the susceptance, and G and B are respectively:
the relationship between the voltage u across the transducer and the current i through the transducer is as follows:
i＝u·Y＝u·|Y|∠θ (4)
the relationship between the voltage peak I, the current peak U, the phase difference θ and the admittance | Y | is:
wherein R is0、C0Respectively the resistance value and the capacitance value, L, of the parallel-connected resistor and capacitor1、C1、R1Respectively, the inductance value, the capacitance value and the resistance value of the first inductor, the first capacitor and the first resistor, and the admittance, the conductance and the resistance of the transducer at the moment are calculated by the formulas (5), (6) and (7)And (4) susceptance.
A method for quickly tracking the mechanical resonance frequency of ultrasonic transducer includes such steps as setting the initial drive angular frequency omega0The microprocessor controls the DDS to generate angular frequency omega0The driving signal is amplified into a high-voltage power signal by a class-D power amplifier, the piezoelectric ultrasonic transducer after tuning matching electric matching is driven, a current signal i flowing through the piezoelectric ultrasonic transducer is acquired by a current sensor, a voltage signal u flowing through the piezoelectric ultrasonic transducer is acquired by a voltage sensor, the signals i and u are subjected to signal amplification by an amplifying and filtering circuit and noise and harmonic are filtered, and further, the voltage and current signals after amplifying and filtering are respectively subjected to a phase detection circuit and a peak value detection circuit to obtain a peak value U, I of voltage and current and a phase angle theta between the voltage and current; the mechanical resonance frequency of the transducer is demodulated.
Near the resonant frequency, the equivalent circuit of the piezoelectric ultrasonic transducer is that a first resistor, a first capacitor and a first inductor are connected together in series, a resistor and a capacitor are connected in parallel and then connected in parallel with the first resistor, the first capacitor and the first inductor which are connected in series, and R is0、 C0Respectively the resistance value and the capacitance value, L, of the parallel-connected resistor and capacitor1、C1、R1The specific process of demodulating the mechanical resonance frequency of the transducer is respectively the inductance value, the capacitance value and the resistance value of the first inductor, the first capacitor and the first resistor:
1) at an initial set frequency ω0For the initial frequency driving the transducer, the point P is obtained by sampling0(ω0，G0，B0)；
2) At a frequency omega1＝ω0-Δω、ω2＝ω0+ delta omega drives the transducer to obtain a sampling point P1(ω1，G1，B1)、P2(ω2，G2，B2) Δ ω is the frequency step;
3) correcting the sampling point to obtain three points P on the admittance circle of the same transducer0、P1a、P2a；
4) Three-point conversion from circleThe energy device admits the coordinates (x, y) of the center of the circle, and calculates R from the coordinates of the center of the circle1、C0；
5) Calculating C from the formula1And L1C1To obtain the mechanical resonance frequency fsAnd drives the transducer at this frequency.
Further, the transducer complex admittance Y is:
Y＝G+Bj＝1/R0+jωC0+1/[R1+j(ωL1-1/ωC1)]
＝{1/R0+ω2C1 2R1/[(1-ω2L1C1)2+ω2C1 2R1 2]}+j{ωC0+(1-ω2L1C1)ωC1/[(1-ω2L1C1)2+ω2C1 2R1 2]}. (1)
wherein ω is the drive frequency, G is the conductance, B is the susceptance, and G and B are respectively:
the relationship between the voltage u across the transducer and the current i through the transducer is as follows:
i＝u·Y＝u·|Y|∠θ (4)
the relationship between the voltage peak I, the current peak U, the phase difference θ and the admittance | Y | is:
the admittance, conductance and susceptance of the transducer at the moment can be calculated by the formulas (5), (6) and (7);
the method for quickly tracking the mechanical resonance frequency of the transducer comprises the following steps:
obtained from formulae (2) and (3):
(G-1/R0-1/2R1)2+(B-ωC0)2＝(1/2R1)2(8)
equation (8) shows that the admittance variation of the transducer is approximated by a circle c0Indicating that the center of the circle is: (1/R)0+1/2R1，ωC0)， R0Because the resistance is larger and neglected, the center of the circle is abbreviated as: (1/2R)1，ωC0) It can be seen that the center of the admittance circle is not a fixed value, and the ordinate thereof changes with the change of the driving frequency ω, thereby causing the admittance circle to actually move up and down, with the same frequency interval, with the frequency ω respectively0、ω1、ω2Driving the transducer, where ω1＝ω0-Δω、ω2＝ω0+ Δ ω, three sets of data are sampled: (omega)0，G0，B0)、(ω1，G1，B1)、(ω2，G2，B2) Respectively correspond to the point P0、P1、P2Respectively on the circle c0、c1、c2Up, due to the up-and-down translation of the admittance circle, P should be aligned1、P2Is corrected to obtain P0On the same circle P1a、P2aEasy to obtain P0、P1a、P2aThe coordinates of (a) are: p0：(G0，B0)、P1a：(G1，B1-ΔωC0)、P2a：(G2，B2-ΔωC0). From the three points on the circle, the center coordinates O (x, y) can be determined, from the center coordinates (1/2R)1，ωC0) Obtaining:
R1＝1/2x (9)
C0＝y/ω0(10)
ignore R0Obtained by the formulas (2) and (3):
formula (12) is L1And C1The relationship between the two points P is substituted into the collected two points P1(ω1，G1，B1)、P2(ω2，G2，B2) Obtaining:
obtaining by solution:
the mechanical resonance frequency fsComprises the following steps:
the mechanical resonance frequency of the transducer is calculated from equation (16) and the transducer is driven at this frequency.
The utility model discloses a characteristics and beneficial effect are:
(1) the mechanical resonance frequency of the ultrasonic transducer can be directly tracked, and the power output efficiency of the transducer can be improved instead of driving at the resonance frequency or other frequencies;
(2) the mechanical resonant frequency of the transducer is tracked by utilizing the admittance circle, so that tracking failure or error tracking caused by failure of a matching tuning circuit is avoided, and the defects of a phase-locked method and a zero-phase method are overcome;
(3) the frequency tracking speed is high, only one-step iteration is needed at the fastest speed, the mechanical resonance frequency can be demodulated by sampling admittance information of three frequency points, and the tracking speed is greatly improved compared with methods such as a sequential searching method and a binary searching method.
(4) The method has strong adaptability, and can adjust the iteration times according to the noise so as to find a compromise method between the tracking speed and the tracking precision to adapt to the requirements of different occasions.
In conclusion, compare with other ultrasonic transducer resonant frequency tracking methods, the utility model has the advantages of adaptability is strong, frequency tracking precision is high, tracking speed is fast, can trail series resonance frequency.
Description of the drawings:
FIG. 1 is a schematic diagram of a system for rapidly tracking the mechanical resonant frequency of a transducer.
Fig. 2 is an equivalent circuit of the piezoelectric transducer.
Fig. 3 is an admittance circle of the transducer in a cubic sampling.
Fig. 4 is a flow chart of an algorithm for mechanical resonance frequency tracking.
In fig. 1, a 1-bit current sensor, a voltage sensor, a piezoelectric ultrasonic transducer, a tuning matching inductor, a class D power amplifier, a random waveform generator (DDS), a microprocessor, a phase detection circuit, a peak detection circuit, and an amplification filter circuit are shown as 1, 2, 3, 4, and 10, respectively.
In FIG. 2, L1Is a dynamic inductor, C1Is a dynamic capacitor, R1Is a dynamic resistance, C0Is a static capacitance, R0For the static resistance, i is the current through the transducer and u is the voltage across the transducer.
In FIG. 3, the conductance G is plotted on the abscissa and the susceptances B, P are plotted on the ordinate0、P1、P2Three points obtained for sampling are respectively positioned on the circle c0、c1、c2Upper, P0、P1a、P2aAre three points after compensation and are all positioned on a circle c0Upper, circle c0The circle center is O (x, y), wherein x is 1/2R1，y＝ωC0Radius of 1/2R1。
Detailed Description
The utility model discloses a technical scheme be, a method of tracking transducer mechanical resonance frequency fast, its system structure chart is shown in fig. 1, by piezoelectric ultrasonic transducer, voltage sensor, current sensor, match inductance, D class power amplifier, arbitrary waveform generator (DDS), microprocessor, examine phase circuit, peak detection circuit, enlarge filter circuit and constitute. The operation process is as follows: the microprocessor controls the DDS to output a sinusoidal driving signal with a certain frequency, and the sinusoidal driving signal is amplified by the D-type power amplifier to drive the piezoelectric ultrasonic transducer matched by the matching inductor; meanwhile, a current sensor collects current flowing through the transducer, and a voltage sensor collects voltage at two ends of the transducer; the two paths of sampling signals are filtered to remove noise and harmonic waves through a filtering amplification circuit and are amplified in a certain proportion; the filtered and amplified signals pass through a phase detection circuit and a peak value detection circuit respectively to obtain the phase difference between voltage and current and the peak values of the voltage and the current; the phase difference and the peak value signals are sampled by the microprocessor, the complex admittance of the transducer at the moment is calculated, and the resonance state of the transducer is judged. Sampling three times at a certain frequency interval delta omega to obtain three groups of data containing driving frequency and complex admittance, thereby demodulating the mechanical resonance frequency of the transducer.
The complex admittance calculation method mentioned above is as follows:
in the vicinity of the resonant frequency, the equivalent circuit of the piezoelectric ultrasonic transducer is shown in fig. 2, and the complex admittance Y thereof is:
Y＝G+Bj＝1/R0+jωC0+1/[R1+j(ωL1-1/ωC1)]
＝{1/R0+ω2C1 2R1/[(1-ω2L1C1)2+ω2C1 2R1 2]}+j{ωC0+(1-ω2L1C1)ωC1/[(1-ω2L1C1)2+ω2C1 2R1 2]}. (1)
wherein ω is the drive frequency, G is the conductance, B is the susceptance, and G and B are respectively:
the relationship between the voltage u across the transducer and the current i through the transducer is as follows:
i＝u·Y＝u·|Y|∠θ (4)
the relationship between the voltage peak I, the current peak U, the phase difference θ and the admittance | Y | is:
the admittance, conductance and susceptance of the transducer at this time can be calculated from equations (5), (6) and (7).
The method for fast tracking of the mechanical resonance frequency of the transducer mentioned above is as follows:
from formulas (2) and (3):
(G-1/R0-1/2R1)2+(B-ωC0)2＝(1/2R1)2(8)
equation (8) shows that the admittance variation of the transducer can be approximately represented by a circle, such as circle c shown in FIG. 30. The center of the circle is: (1/R)0+1/2R1，ωC0) Disclosure of the inventionIn the normal case of R0Because the resistance is larger and neglected, the center of the circle can be abbreviated as: (1/2R)1，ωC0) It follows that the center of the admittance circle is not a constant value, and its ordinate changes with the change of the driving frequency ω, resulting in the admittance circle actually translating up and down, e.g. c1、c2. At the same frequency interval, at frequencies ω 0 and ω, respectively1、ω2Driving the transducer, where ω1＝ω0-Δω、ω2＝ω0+ Δ ω, three sets of data are sampled: (omega)0，G0，B0)、(ω1，G1，B1)、 (ω2，G2，B2) Respectively corresponding to the point P in FIG. 30、P1、P2Respectively on the circle c0、c1、c2Up, due to the up-and-down translation of the admittance circle, P should be aligned1、P2Is corrected to obtain P0On the same circle P1a、P2aEasy to obtain P0、P1a、P2aThe coordinates of (a) are: p0：(G0，B0)、P1a：(G1，B1-ΔωC0)、P2a：(G2，B2-ΔωC0). From the three points on the circle, the center coordinates O (x, y) can be determined, from the center coordinates (1/2R)1，ωC0) Obtaining:
R1＝1/2x (9)
C0＝y/ω0(10)
ignore R0The following formulas (2) and (3) can be obtained:
formula (12) is L1And C1The relationship between the two points P is substituted into the collected two points P1(ω1，G1，B1)、P2(ω2，G2，B2) Obtaining:
obtaining by solution:
the mechanical resonance frequency fsComprises the following steps:
the mechanical resonance frequency of the transducer is calculated from equation (16) and the transducer is driven at this frequency.
The algorithm implementation process of the mechanical resonance frequency is shown in fig. 4, and the process is as follows:
1) at an initial set frequency ω0For the initial frequency driving the transducer, the point P is obtained by sampling0(ω0，G0，B0)；
2) At a frequency omega1＝ω0-Δω、ω2＝ω0+ delta omega drives the transducer to obtain a sampling point P1(ω1，G1，B1)、P2(ω2，G2，B2)；
3) Correcting the sampling point to obtain three points P on the same admittance circle0、P1a、P2a；
4) The coordinates (x, y) of the center of the circle of the admittance circle are obtained from three points on the circle, and R is calculated from the coordinates of the center of the circle1、C0；
5) Calculating C from the formula1And L1C1To obtain the mechanical resonance frequency fsAnd drives the transducer at this frequency.
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
A method for quickly tracking the mechanical resonant frequency of a transducer is implemented as follows:
first, an initial drive angular frequency ω is set0In fig. 1, a microprocessor 7 controls an arbitrary waveform generator (DDS)6 to generate an angular frequency ω0The driving signal is amplified into a high-voltage power signal by a class-D power amplifier 5, the piezoelectric ultrasonic transducer 3 matched with the tuning matching circuit 4 is driven, a real-time current signal i is acquired by a current sensor 1, a real-time voltage signal u is acquired by a voltage sensor 2, the signals i and u are subjected to signal amplification by an amplifying and filtering circuit 10, noise and harmonic waves are filtered, and further, the amplified and filtered voltage and current signals are respectively subjected to a phase detection circuit 8 and a peak value detection circuit 9 to obtain peak values U, I of voltage and current and a phase angle theta between the voltage and current. In the vicinity of the resonant frequency, the equivalent circuit of the piezoelectric ultrasonic transducer is shown in fig. 2, and the complex admittance Y thereof is:
Y＝G+Bj＝1/R0+jωC0+1/[R1+j(ωL1-1/ωC1)]
＝{1/R0+ω2C1 2R1/[(1-ω2L1C1)2+ω2C1 2R1 2]}+j{ωC0+(1-ω2L1C1)ωC1/[(1-ω2L1C1)2+ω2C1 2R1 2]}. (1)
wherein ω is the drive frequency, G is the conductance, B is the susceptance, and G and B are respectively:
the relationship between the voltage u across the transducer and the current i through the transducer is as follows:
i＝u·Y＝u·|Y|∠θ (4)
the relationship between the voltage peak I, the current peak U, the phase difference θ and the admittance | Y | is:
from formulas (2) and (3):
(G-1/R0-1/2R1)2+(B-ωC0)2＝(1/2R1)2(8)
the trajectory is a circle, as shown in fig. 3.
From equations (5), (6) and (7), the transducer's current admittance Y, conductance G can be calculated0And susceptance B0Thereby obtaining a first sampling point P0(ω0，G0，B0) The admittance circle is as c in FIG. 30The center of the circle is: (1/R)0+1/2R1，ωC0) In the normal case R0Because the resistance is larger and neglected, the center of the circle can be abbreviated as: (1/2R)1，ωC0) Therefore, it can be seen that the center of the admittance circle is not a fixed value, and the ordinate of the admittance circle changes with the change of the driving frequency ω, thereby causing the admittance circle to actually move up and down.
Further, the driving frequency is adjusted to ω1＝ω0-Δω、ω2＝ω0+ Δ ω at angular frequency ω1、ω2Respectively driving the transducers, and sampling and calculating according to the method to obtain a second sampling point P and a third sampling point P1(ω1，G1，B1)、P2(ω2，G2，B2) Respectively located on the circle c of FIG. 31、c2The above. For convenient calculation, point P is pointed1、P2Correcting to obtain P1a：(G1，B1-ΔωC0)、P2a：(G2，B2-ΔωC0) Easy to obtain P0、P1a、P2aLocated on the same circle c0The above. From the three points on the circle, the coordinates (x, y) of the center of the circle can be obtained, and the coordinates (1/2R) of the center of the circle can be obtained1，ωC0) Obtaining:
R1＝1/2x (9)
C0＝y/ω0(10)
ignore R0From (2) and (3), it is possible to obtain:
formula (12) is L1And C1The relationship between the two points P is substituted into the collected two points P1(ω1，G1，B1)、P2(ω2，G2，B2) Obtaining:
obtaining by solution:
the mechanical resonance frequency fsComprises the following steps:
the mechanical resonance frequency f of the transducer is calculated from equation (16)sAnd drives the transducer at this frequency.
The algorithm implementation process of the mechanical resonance frequency is shown in fig. 4, and the process is as follows:
1) at an initial set frequency ω0For the initial frequency driving the transducer, the point P is obtained by sampling0(ω0，G0，B0)；
2) At a frequency omega1＝ω0-Δω、ω2＝ω0+ delta omega drives the transducer to obtain a sampling point P1(ω1，G1，B1)、P2(ω2，G2，B2)；
3) Correcting the sampling point to obtain three points P on the same admittance circle0、P1a、P2a；
4) The coordinates (x, y) of the center of the circle of the admittance circle are obtained from three points on the circle, and R is calculated from the coordinates of the center of the circle1、C0；
5) Calculating C from the formula1And L1C1To obtain the mechanical resonance frequency fsAnd drives the transducer at this frequency.
Through the steps, the mechanical resonance frequency f of the transducer can be quickly trackeds. It can be seen that the steps only carry out three times of sampling and admittance calculation, and the tracking speed of the mechanical resonance frequency is greatly improved. Meanwhile, the tracking process does not depend on the zero phase, but directly detects the phase difference, and can avoid the tracking failure caused by the failure of the tuning matching circuit. Furthermore, the tracking accuracy depends on the initial drive angular frequency ω0And the size of the frequency interval Δ ω, ω is carefully adjusted empirically and experimentally0And Δ ω, the frequency tracking accuracy can be greatly improved. In addition, when the requirement of tracking accuracy is high, the accuracy can be improved by tracking for multiple times, namely, the tracking result of the first time is used as the initial frequency of the second time, and the process is carried outThe frequency tracking is performed twice or for many times, so that the frequency tracking precision can be greatly improved.
Claims (1)
1. A quick tracking device for the mechanical resonance frequency of an ultrasonic transducer is characterized by comprising a piezoelectric ultrasonic transducer, a voltage sensor, a current sensor, a matching inductor, a D-type power amplifier, an arbitrary waveform generator DDS, a microprocessor, a phase detection circuit, a peak detection circuit and an amplification filter circuit, wherein the microprocessor controls the DDS to output a sinusoidal driving signal and drives the piezoelectric ultrasonic transducer matched with the matching inductor after the sinusoidal driving signal is amplified by the D-type power amplifier; meanwhile, the current sensor collects the current of the piezoelectric ultrasonic transducer, and the voltage sensor collects the voltage at two ends of the piezoelectric ultrasonic transducer; the two paths of sampling signals are filtered, filtered and amplified by a filtering and amplifying circuit; the filtered and amplified signals pass through a phase detection circuit and a peak value detection circuit respectively to obtain the phase difference between voltage and current and the peak values of the voltage and the current; the phase difference and peak signals are sampled by the microprocessor.
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