CN210513579U - Airtight screening test fixture - Google Patents
Airtight screening test fixture Download PDFInfo
- Publication number
- CN210513579U CN210513579U CN201921743237.3U CN201921743237U CN210513579U CN 210513579 U CN210513579 U CN 210513579U CN 201921743237 U CN201921743237 U CN 201921743237U CN 210513579 U CN210513579 U CN 210513579U
- Authority
- CN
- China
- Prior art keywords
- screening test
- empty room
- airtight
- vacuum chamber
- real empty
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
The utility model discloses an airtight screening test fixture, it includes the support frame, install real empty room on the support frame, install plenum chamber, locking part on the support frame, one side at real empty room top is equipped with the leak detector interface, the opposite side at real empty room top is equipped with real empty room gas vent, the plenum chamber has the pipe wall, one side that is close to in real empty room on the pipe wall is provided with the gas vent, one side of keeping away from in real empty room on the pipe wall is equipped with the air inlet, locking part is used for locking the work piece that awaits measuring between plenum chamber. The utility model provides an airtight screening test frock can cooperate and wear cabin spare to carry out airtight screening test, realizes its air tightness performance of accurate measurement when not damaging the sealed face of cabin spare, can realize quick, the airtight screening test of high accuracy.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to an airtight screening test technical field, it is specific relates to an airtight screening test frock for submarine communication equipment.
[ background of the invention ]
At present, in the submarine communication industry, the sealing of internal devices is a technical difficulty, the sealing performance of a submarine device body must be ensured while the normal photoelectric transmission is ensured, and the sealing performance is generally realized by adopting cabin penetrating pieces.
Because underwater devices in the field of submarine communication are high in cost and high in maintenance difficulty, the reliability of each part of the underwater device must be guaranteed in the production process of products, and particularly the test of the sealing reliability of a core sealing structure (such as a cabin penetrating part) of the underwater device is particularly critical.
When a common test method is used, the sealing groove of the cabin penetrating piece is easily damaged, sealing failure is caused, and the reliability of the whole product cannot be guaranteed. Therefore, the tool capable of preventing the sealing surface of the cabin penetrating piece from being damaged during testing is designed and invented, and the tool has very important significance.
[ Utility model ] content
The utility model aims at providing an airtight screening test frock suitable for use the sealing washer to carry out airtight performance screening test of sealed crossing cabin spare.
In order to achieve the above main object, the utility model provides an airtight screening test tool, which comprises a support frame; the vacuum chamber is arranged on the support frame, one side of the top of the vacuum chamber is provided with a leak detector interface, and the other side of the top of the vacuum chamber is provided with a vacuum chamber exhaust port; the inflation chamber is arranged on the support frame and is provided with a pipe wall, an exhaust port is arranged on one side, close to the vacuum chamber, of the pipe wall, and an air inlet is arranged on one side, far away from the vacuum chamber, of the pipe wall; and the locking component is used for locking the workpiece to be measured between the plenum chamber and the vacuum chamber.
Therefore, the utility model provides a pair of airtight screening test fixture, from up by the support frame in proper order down, plenum chamber and real empty room are constituteed, from up being equipped with the helium air inlet down in proper order on the pipe wall of plenum chamber, the helium gas vent, real empty room's top is equipped with leak detector interface and real empty room gas vent respectively, above-mentioned structure passes through leak detector interface and the cooperation of helium mass spectrometer leak detector, can cooperate and wear the cabin spare to carry out airtight screening test, realize its gas tightness performance of accurate measurement when not damaging and wear the sealed face of cabin spare, can realize fast, the airtight screening test of high accuracy.
The further scheme is that a first sealing groove is radially formed in one surface, attached to the bottom of the workpiece to be tested, of the top of the inflation chamber.
In a further aspect, a first seal ring is disposed in the first seal groove.
Therefore, the top of the plenum chamber is provided with a sealing groove, and the sealing between the plenum chamber and the bottom of the workpiece to be measured is ensured by installing a sealing ring in the sealing groove.
The further scheme is that a second sealing groove is radially formed in one surface, attached to the top of the workpiece to be detected, of the bottom of the vacuum chamber.
In a further aspect, a second seal ring is disposed in the second seal groove.
Therefore, the bottom of the vacuum chamber is provided with a sealing groove, and the sealing of the vacuum chamber and the top of the workpiece to be measured is ensured by installing a sealing ring in the sealing groove.
In a further aspect, the locking member is a locking screw.
Therefore, the workpiece to be measured is connected with the plenum chamber and the vacuum chamber through the locking screws.
[ description of the drawings ]
Fig. 1 is a schematic structural view of an embodiment of the airtight screening test fixture of the present invention.
Fig. 2 is a schematic structural diagram of a plenum chamber in an embodiment of the airtight screening test tool of the present invention.
Fig. 3 is a schematic structural view of a vacuum chamber in an embodiment of the airtight screening test fixture of the present invention.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention.
The utility model discloses an airtight screening test frock mainly is applied to submarine communication equipment's airtight performance screening test, particularly relates to the airtight performance screening test frock of crossing cabin spare, is particularly useful for using the sealing washer to carry out the airtight performance screening test of sealed crossing cabin spare, uses this frock cooperation helium mass spectrometer leak detector can detect the leak rate of 10-10mba.l/s magnitude of order.
Referring to fig. 1 to 3, the utility model discloses an airtight screening test fixture, including support frame 1, install real empty room 7 on support frame 1, install plenum chamber 2 on support frame 1, locking part 6, one side at real empty room 7 top is equipped with leak detector interface 8, the opposite side at real empty room 7 top is equipped with real empty room gas vent 9, plenum chamber 2 has the pipe wall, one side that is close to in real empty room 7 on the pipe wall is provided with gas vent 4, one side of keeping away from in real empty room 7 on the pipe wall is equipped with air inlet 3, locking part 6 is used for locking the work piece 5 that awaits measuring between plenum chamber 2 and the real empty room 7.
In this embodiment, a first sealing groove (not shown) is radially formed in a surface of the top of the inflation chamber 2, which is attached to the bottom of the workpiece 5 to be measured, and a first sealing ring (not shown) is disposed in the first sealing groove. It can be seen that the top of the plenum chamber 2 is provided with a sealing groove, and the sealing between the plenum chamber 2 and the bottom of the workpiece 5 to be measured is ensured by installing a sealing ring in the sealing groove.
In this embodiment, a second sealing groove (not shown) is radially formed in a surface of the bottom of the vacuum chamber, which is attached to the top of the workpiece to be measured, and a second sealing ring (not shown) is disposed in the second sealing groove. It can be seen that the bottom of the vacuum chamber 7 is provided with a sealing groove, and the sealing between the vacuum chamber 7 and the top of the workpiece 5 to be measured is ensured by installing a sealing ring in the sealing groove.
Specifically, the workpiece 5 to be tested in this embodiment is a cabin penetrating member, the airtight screening test tool is respectively composed of a support frame 1, a plenum chamber 1 and a vacuum chamber 7, the plenum chamber 1 is located on the support frame 1, the cabin penetrating member to be tested is placed above the plenum chamber 1, and the vacuum chamber 7 is located above the cabin penetrating member to be tested. Therefore, the penetration piece to be tested is positioned between the plenum chamber 1 and the vacuum chamber 7, and the two sides of the penetration piece to be tested are in sealed contact with the plenum chamber 1 and the vacuum chamber 7 through rubber sealing rings.
Wherein, from up being helium air inlet, helium gas vent down respectively on 1 locular wall in plenum chamber, the top in plenum chamber 1 is equipped with first seal groove for match rubber seal and in order to ensure sealedly, can guarantee promptly through first sealing washer and the sealed contact of crossing cabin spare that awaits measuring.
Wherein, the top of real empty room 7 is equipped with leak detector interface 8 and real empty room gas vent 9, and it is connected with the leak detector through leak detector interface 8, and the bottom of real empty room 7 is equipped with the second seal groove, and the sealed face of crossing cabin spare that awaits measuring can be avoided to this seal groove, guarantees when guaranteeing not damaging the sealed face of crossing cabin spare with real empty room 7 sealed. Preferably, the first sealing ring and the second sealing ring are both O-shaped sealing rings made of rubber.
Preferably, the locking member 6 is a locking screw. It can be seen that the pieces to be tested are connected to the plenum chamber 2 and the vacuum chamber 7 by locking screws.
Preferably, the universal wheels are further arranged below the supporting frame, so that the supporting frame is convenient to move and is conveniently applied to various occasions.
Therefore, the utility model provides a pair of airtight screening test fixture, from up being followed by support frame 1 in proper order, plenum chamber 2 and real empty room 7 are constituteed, from up being equipped with the helium air inlet down in proper order on plenum chamber 2's the pipe wall, the helium gas vent, real empty room 7's top is equipped with leak detector interface 8 and real empty room gas vent 9 respectively, above-mentioned structure passes through leak detector interface 8 and the cooperation of helium mass spectrometer leak detector, can cooperate and wear the cabin piece and carry out airtight screening test, realize its gas tightness of accurate measurement when not damaging and wear the sealed face of cabin piece, can realize fast, the airtight screening test of high accuracy.
It should be noted that the above is only the preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto, and all the insubstantial modifications made by using the design concept of the present invention also fall within the protection scope of the present invention.
Claims (6)
1. The utility model provides an airtight screening test fixture which characterized in that includes:
a support frame;
the vacuum chamber is arranged on the support frame, one side of the top of the vacuum chamber is provided with a leak detector interface, and the other side of the top of the vacuum chamber is provided with a vacuum chamber exhaust port;
the inflation chamber is arranged on the support frame and is provided with a pipe wall, an exhaust port is arranged on one side, close to the vacuum chamber, of the pipe wall, and an air inlet is arranged on one side, far away from the vacuum chamber, of the pipe wall;
and the locking component is used for locking the workpiece to be measured between the plenum chamber and the vacuum chamber.
2. The airtight screening test fixture of claim 1, wherein:
the top of the plenum chamber is attached to one surface of the bottom of the workpiece to be detected, and a first sealing groove is radially formed in the surface of the bottom of the workpiece to be detected.
3. The airtight screening test fixture of claim 2, wherein:
a first sealing ring is arranged in the first sealing groove.
4. The airtight screening test fixture of claim 3, wherein:
and a second sealing groove is radially formed in one surface of the bottom of the vacuum chamber, which is attached to the top of the workpiece to be detected.
5. The airtight screening test fixture of claim 4, wherein:
and a second sealing ring is arranged in the second sealing groove.
6. The airtight screening test fixture of any one of claims 1 to 5, wherein:
the locking component is a locking screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921743237.3U CN210513579U (en) | 2019-10-17 | 2019-10-17 | Airtight screening test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921743237.3U CN210513579U (en) | 2019-10-17 | 2019-10-17 | Airtight screening test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210513579U true CN210513579U (en) | 2020-05-12 |
Family
ID=70573072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921743237.3U Active CN210513579U (en) | 2019-10-17 | 2019-10-17 | Airtight screening test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210513579U (en) |
-
2019
- 2019-10-17 CN CN201921743237.3U patent/CN210513579U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2017166837A1 (en) | Online seal inspection apparatus, multi-section sealed cavity machining device and method | |
| CN203679805U (en) | Blank workpiece positioning air tightness detecting device | |
| CN203490035U (en) | A vacuum actuator online detecting apparatus | |
| CN109738129A (en) | The method for detecting conduit tube component air-tightness | |
| CN204964151U (en) | Quick leak detection system of automobile parts ordinary pressure | |
| CN203432757U (en) | Airtightness detection device for sealed wire holder | |
| CN213902768U (en) | Helium leak detection tool | |
| CN210513579U (en) | Airtight screening test fixture | |
| CN103439061B (en) | A kind of seal wiring seat air tightness detection apparatus | |
| CN208672247U (en) | A kind of air-leakage test jig | |
| CN116558719A (en) | Leakage detection device and method for electrostatic chuck assembly | |
| CN110553797A (en) | shell airtightness detection tool | |
| CN212539546U (en) | Automatic proportioning device for gas | |
| CN204514553U (en) | A kind of helium mass spectrometer leak detector detects the large device leaked | |
| CN211678854U (en) | Flange leakage test machine | |
| CN210981691U (en) | Tightness detection device suitable for semiconductor quartz tube | |
| CN210863059U (en) | Shell airtightness detection tool | |
| CN206772511U (en) | A kind of generator cylinder block casting pressure testing/detecting device | |
| CN221860305U (en) | Glass measurement jig and glass measurement equipment | |
| CN205919936U (en) | Novel automatic equipment of flange detects device | |
| CN205826235U (en) | A kind of sealing device for cavity series products sealing propertytest | |
| CN216483721U (en) | Air tightness valve detection clamp | |
| CN210953221U (en) | Pressure sensor pressure chamber testing device | |
| CN217637807U (en) | Nuclear power plant containment wall coating sealing test device | |
| CN221280581U (en) | Leakage detection device for laser welding seam of pressure transmitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |