CN210511058U - Automatic feeding equipment for photoresist production - Google Patents

Automatic feeding equipment for photoresist production Download PDF

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Publication number
CN210511058U
CN210511058U CN201921368667.1U CN201921368667U CN210511058U CN 210511058 U CN210511058 U CN 210511058U CN 201921368667 U CN201921368667 U CN 201921368667U CN 210511058 U CN210511058 U CN 210511058U
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CN
China
Prior art keywords
feeding
box
conveying
pipe
photoresist production
Prior art date
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Active
Application number
CN201921368667.1U
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Chinese (zh)
Inventor
周国波
陈武档
赖艺珠
梁荣增
宋里千
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujian Shuguang Semiconductor Materials Co ltd
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Fujian Shuguang Semiconductor Materials Co ltd
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Priority to CN201921368667.1U priority Critical patent/CN210511058U/en
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Abstract

The utility model provides an automatic feed equipment for photoresist production, including feeding case, conveying pipeline, unloading case, conveying pipe, the feeding case is used for being sent to the material in the conveying pipeline just, and inside the conveying pipeline sent the material to the unloading case, the conveying pipe both ends are connected with feeding case and unloading case respectively and are used for the transported substance material, and the pedestal mounting can reach effectually carry the unloading case with solid material at feeding case lower extreme, and the device. In, also can be effectual carry the workbin down with liquid, powerful, convenient to use.

Description

Automatic feeding equipment for photoresist production
Technical Field
The utility model relates to a photoresist production technical field specifically is an automatic feed equipment for photoresist production.
Background
The photoresist is one of the key materials for fine pattern processing in the microelectronic technology, and particularly, the development of large-scale and ultra-large-scale integrated circuits in recent years greatly promotes the research, development and application of the photoresist.
The feeding equipment for producing the photoresist has simple function and single use mode, can automatically feed materials together, and is inconvenient to use.
SUMMERY OF THE UTILITY MODEL
The utility model provides an automatic feed equipment for photoresist production to solve the problem of proposing among the above-mentioned background art.
The utility model provides a technical problem adopt following technical scheme to realize:
the utility model provides an automatic feed equipment for photoresist production, includes feeding case, conveying pipeline, blanking box, conveying pipe, and the feeding pipe is used for sending the material to in the conveying pipeline, and inside the conveying pipeline sent the material to the blanking box, the conveying pipe both ends are connected with feeding case and blanking box respectively and are used for carrying the material, and pedestal mounting is at feeding case lower extreme.
Further, the upper end of the feeding box is provided with a feeding hole, a partition plate is arranged inside the feeding box, a discharging device is arranged on the right side of the partition plate, the lower end of the discharging device is provided with a slope, a guide chute is arranged on the right side of the slope and arranged in the connecting block, the connecting block is fixedly connected with the conveying pipeline, the rear end of the feeding box is provided with a rotating motor, and the rotating motor is connected with the discharging device.
Further, the rear end of the conveying pipeline is provided with a motor box, the feeding motor is installed inside the motor box, the front end of the feeding motor is provided with a rotary rod, the outer side of the rotary rod is provided with a rotary piece, the rotary piece is spirally wound on the outer side of the rotary rod, and the right end of the rotary rod is arranged inside a discharging box.
Furthermore, a blanking groove is formed in the bottom of the blanking box, a blanking pipe is arranged at the bottom of the blanking groove, a supporting column is arranged on the right side of the blanking box, and the supporting column is fixedly connected with the motor box.
Furthermore, the front end of the feeding pipe is connected with a transverse feeding pipe, one side of the transverse feeding pipe is connected with a feeding hole on the feeding box, a pressure pump is arranged on the feeding pipe, and the bottom of the pressure pump is connected with the base through a support rod.
Further, discharge device includes the plectrum, revolves tooth and chain, feeding incasement portion both sides all are equipped with soon the tooth, and the tooth of revolving of single face is right triangle distribution in feeding incasement portion one side, revolves and connects through the bull stick between the tooth, revolves the tooth and is connected with feeding incasement portion rotation, revolves the tooth outside and is equipped with the chain, and the laminating of tooth is revolved with one side to the chain, is connected with the plectrum between the different side chains, and the plectrum is the triangular prism shape, revolves the tooth outside and is connected with the rotating electrical machines.
Furthermore, a filter screen is arranged in the material conveying hole.
Compared with the prior art, the beneficial effects of the utility model are that:
1. can arrange solid material in the conveying pipeline and then convey convenient to use through discharge device.
2. Can arrange liquid material in the conveying pipeline and then convey convenient to use through the conveying pipe.
3. The device can enough convey the solid material and also can convey the liquid material, powerful, convenient to use, and can not cause the wasting of resources.
Drawings
FIG. 1 is a block diagram of the present invention;
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the specific drawings.
As shown in figure 1 of the drawings, in which,
the utility model provides an automatic feed equipment for photoresist production, includes feeding case 1, conveying pipeline 3, blanking box 5, conveying pipe 62, feeding case 1 is used for sending the material to conveying pipeline 3 in, and conveying pipeline 3 sends the material to inside blanking box 5, conveying pipe 62 both ends are connected with feeding case 1 and blanking box 5 respectively and are used for carrying the material, and base 7 installs at feeding case 1 lower extreme.
The feeding device is characterized in that a feeding hole 11 is formed in the upper end of the feeding box 1, a partition plate 12 is arranged inside the feeding box 1, a discharging device is arranged on the right side of the partition plate, a slope 13 is arranged at the lower end of the discharging device, a guide chute 14 is arranged on the right side of the slope 13, the guide chute 14 is arranged in a connecting block 30, the connecting block 30 is fixedly connected with a conveying pipeline 3, a rotating motor 2 is arranged at the rear end of the feeding box 1, and the rotating motor 2 is connected.
3 rear ends of conveying pipeline are equipped with motor case 4, and material loading motor 41 is installed inside motor case 4, and material loading motor 41 front end is equipped with bull stick 31, and the bull stick 31 outside is equipped with rotor 32, and rotor 32 is the spiral and surrounds the bull stick 31 outside, and the bull stick 31 right-hand member is equipped with inside the workbin 5 down.
The bottom of the blanking box 5 is provided with a blanking groove 31, the bottom of the blanking groove 31 is provided with a blanking pipe 52, the right side of the blanking box 5 is provided with a pillar 42, and the pillar 42 is fixedly connected with the motor box 4.
The front end of the feeding pipe 62 is connected with a transverse feeding pipe 63, one side of the transverse feeding pipe 63 is connected with a feeding hole 64 on the feeding box 1, the feeding pipe 62 is provided with a pressure pump 6, and the bottom of the pressure pump 6 is connected with the base 7 through a support rod 61.
Discharge device includes plectrum 23, revolves tooth 21 and chain 22, the inside both sides of feeding case 1 all are equipped with soon tooth 21, and the single face revolves tooth 21 and is right triangle distribution in feeding case 1 inside one side, revolves and connects through the bull stick between the tooth 21, revolves tooth 21 and is connected with feeding case 1 internal rotation, revolves the tooth outside and is equipped with chain 22, and tooth 21 laminating is revolved with one side to chain 22, is connected with plectrum 23 between the different side chains 22, and plectrum 23 is the triangular prism shape, revolves the tooth 21 outside and is connected with rotating electrical machines 2.
A filter screen is arranged in the material conveying hole 64.
The material enters the feed box 1 and the discharge device operates to discharge solid material from the ramp 13 into the chute 14 and then by the rotating spinner 32 into the interior of the discharge box for delivery and liquid material through the feed tube 62 into the interior of the discharge box.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (7)

1. The utility model provides an automatic feed equipment for photoresist production, includes feeding case, conveying pipeline, unloading case, conveying pipe, its characterized in that: the feeding box is used for conveying materials into the conveying pipe, the conveying pipe conveys the materials into the discharging box, two ends of the conveying pipe are respectively connected with the feeding box and the discharging box and used for conveying the materials, and the base is installed at the lower end of the feeding box.
2. An automatic feeding apparatus for photoresist production according to claim 1, wherein: the feeding box upper end is equipped with the feed inlet, and feeding incasement portion is equipped with the baffle, and the baffle right side is equipped with discharge device, and the discharge device lower extreme is equipped with the slope, and the slope right side is equipped with the baffle box, and the baffle box is established in the connecting block, connecting block and conveying pipeline fixed connection, and the feeding box rear end is equipped with the rotating electrical machines, and the rotating electrical machines is connected with discharge device.
3. An automatic feeding apparatus for photoresist production according to claim 1, wherein: the utility model discloses a material conveying device, including conveying pipeline, motor case, rotor, feed bin.
4. An automatic feeding apparatus for photoresist production according to claim 1, wherein: the bottom of the blanking box is provided with a blanking groove, the bottom of the blanking groove is provided with a blanking pipe, the right side of the blanking box is provided with a support column, and the support column is fixedly connected with the motor box.
5. An automatic feeding apparatus for photoresist production according to claim 1, wherein: the front end of the feeding pipe is connected with a transverse feeding pipe, one side of the transverse feeding pipe is connected with a material conveying hole in the feeding box, a pressure pump is arranged on the feeding pipe, and the bottom of the pressure pump is connected with the base through a supporting rod.
6. An automatic feeding apparatus for photoresist production according to claim 2, wherein: the discharging device comprises a shifting piece, rotary teeth and a chain, wherein the rotary teeth are arranged on two sides of the interior of the feeding box, the rotary teeth on one side are distributed on one side of the interior of the feeding box in a right-angled triangular mode, the rotary teeth are connected with each other through a rotating rod, the rotary teeth are rotatably connected with the interior of the feeding box in a rotating mode, the chain is arranged on the outer side of the rotary teeth, the chain is attached to one side of the rotary teeth in a rotating mode, the shifting piece is connected between different side chains in a triangular prism shape, and the outer side of the rotary.
7. An automatic feeding apparatus for photoresist production according to claim 5, wherein: and a filter screen is arranged in the material conveying hole.
CN201921368667.1U 2019-08-22 2019-08-22 Automatic feeding equipment for photoresist production Active CN210511058U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921368667.1U CN210511058U (en) 2019-08-22 2019-08-22 Automatic feeding equipment for photoresist production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921368667.1U CN210511058U (en) 2019-08-22 2019-08-22 Automatic feeding equipment for photoresist production

Publications (1)

Publication Number Publication Date
CN210511058U true CN210511058U (en) 2020-05-12

Family

ID=70590924

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201921368667.1U Active CN210511058U (en) 2019-08-22 2019-08-22 Automatic feeding equipment for photoresist production

Country Status (1)

Country Link
CN (1) CN210511058U (en)

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