CN210506508U

CN210506508U - Rotary target head with oil filling groove structure

Info

Publication number: CN210506508U
Application number: CN201921175712.1U
Authority: CN
Inventors: 徐小明; 周梦荣; 丛峰
Original assignee: Suzhou Victory Precision Manufacture Co Ltd
Current assignee: Suzhou Victory Precision Manufacture Co Ltd
Priority date: 2019-07-25
Filing date: 2019-07-25
Publication date: 2020-05-12
Anticipated expiration: 2029-07-25

Abstract

The utility model discloses a rotary target head with an oil injection groove structure, which comprises a shaft sleeve, an insulating base, a sealing seat, a target cylinder fixing nut and a target cylinder fixing part; the insulating base is sleeved on the shaft sleeve and arranged on the film coating machine; the sealing seat is arranged on the insulating base; a target cylinder fixing nut is arranged on the shaft sleeve at the lower part of the insulating base; the lower end part of the shaft sleeve is provided with a target cylinder fixing part; at least one oil seal is arranged in the sealing seat; the oil seal is in interference fit with the shaft sleeve; a gasket is arranged on the oil seal; a gap is formed between the gasket and the shaft sleeve; and an oil filling groove is formed in the sealing seat, and lubricating oil flows to the lip of the oil seal through the oil filling groove. The design of the oil injection groove can prolong the service life of the dynamic seal of the target head of the film coating machine and improve the sealing performance; the oil injection process is simple and convenient, the maintenance operation time is shortened, and the maintenance cost is saved; the machine downtime risk is reduced, and the comprehensive efficiency of the film coating machine is improved.

Description

Rotary target head with oil filling groove structure

Technical Field

The utility model relates to a be applied to rotatory target head that has oiling groove structure on coating machine platform.

Background

On a magnetron sputtering coating machine, a plane target or a rotating target is often adopted as a twin target in the industry, in the mechanism design of the rotating target, a plurality of ways are adopted for rotating seal, one of the ways is a way of using an oil seal as a carrier to realize dynamic seal, the service life is generally about 3 months, because friction exists between a lip of the oil seal and a fixed shaft, oil is usually added for lubrication during assembly, but because of the vacuum environment of a sputtering chamber, the oil added during assembly is easy to be lost, the oil cannot be added again during subsequent production, dry friction is started between the lip and the fixed shaft, the seal of the oil seal fails, the service life of the oil seal is short, and then the target head begins to leak air over time, finally the target head is repaired after breakdown, the maintenance operation time is long, and the production is influenced.

Disclosure of Invention

The utility model discloses the purpose is: the utility model provides a be provided with the oil filler tank on the target head, realize outside oil filler point oiling can flow on the oil blanket lip of inside to alleviate the friction between lip and the fixed axle, great extension the life of oil blanket, reduced the risk of gas leakage, also practice thrift the maintenance cost simultaneously, improve the comprehensive efficiency of coating machine platform.

The technical scheme of the utility model is that: a rotary target head with an oil injection groove structure comprises a shaft sleeve, an insulating base, a sealing seat, a target cylinder fixing nut and a target cylinder fixing piece; the insulating base is sleeved on the shaft sleeve and arranged on the film coating machine; the sealing seat is arranged on the insulating base; a target cylinder fixing nut is arranged on the shaft sleeve at the lower part of the insulating base; the lower end part of the shaft sleeve is provided with a target cylinder fixing part; at least one oil seal is arranged in the sealing seat; the oil seal is in interference fit with the shaft sleeve; a gasket is arranged on the oil seal; a gap is formed between the gasket and the shaft sleeve; an oil filling groove is formed in the sealing seat, and externally added lubricating oil flows to a lip of the oil seal through the oil filling groove.

Preferably, the oil filling groove comprises a through hole and a vertical groove; the through holes are radially arranged on the sealing seat; and the inner side wall of the sealing seat is provided with an axial vertical groove which is vertical to the through hole and is intersected with the through hole.

Preferably, the through hole is a stepped hole.

Preferably, a gasket groove is radially provided on the gasket at the oil filler groove.

Preferably, at least one bearing is arranged inside the seal holder.

Preferably, a mechanical sealing device is arranged in the shaft sleeve.

Preferably, a water pipe assembly is arranged in the shaft sleeve.

The utility model has the advantages that:

1. the service life of the dynamic seal of the target head of the coating machine is prolonged, and the sealing performance is improved;

2. the oil injection process is simple and convenient, the maintenance operation time is shortened, and the maintenance cost is saved;

3. the machine downtime risk is reduced, and the comprehensive efficiency of the film coating machine is improved.

Drawings

The invention will be further described with reference to the following drawings and examples:

FIG. 1 is a schematic diagram of the main structure of a rotary target head with an oil filling tank structure;

FIG. 2 is an enlarged view taken at A in FIG. 1;

FIG. 3 is a schematic top view of a sealing seat of a rotary target with an oil filling groove structure according to the present invention;

FIG. 4 is a schematic cross-sectional view taken along the line B-B in FIG. 3;

FIG. 5 is a schematic cross-sectional view taken along the line C-C in FIG. 3;

FIG. 6 is a schematic front view of a rotary target head gasket with a grease groove structure according to the present disclosure;

FIG. 7 is a schematic top view of a rotary target head gasket with oil groove structure according to the present disclosure;

wherein: 1. a shaft sleeve; 2. an insulating base; 3. a sealing seat; 4. a target cylinder fixing nut; 5. a target cylinder mount; 11. a mechanical seal device; 12. a water tube assembly; 31. oil sealing; 32. a gasket; 33. a through hole; 34. a vertical groove; 35. a gasket groove; 36. and a bearing.

Detailed Description

Example (b):

as shown in fig. 1-7, a rotary target with an oil filling groove structure comprises a shaft sleeve 1, an insulating base 2, a sealing seat 3, a target cylinder fixing nut 4 and a target cylinder fixing piece 5; the insulating base 2 is sleeved on the shaft sleeve 1 and arranged on the film coating machine; the sealing seat 3 is arranged on the insulating base 2; a target cylinder fixing nut 4 is arranged on the shaft sleeve 1 at the lower part of the insulating base 2; the lower end part of the shaft sleeve 1 is provided with a target cylinder fixing part 5; at least one oil seal 31 is arranged in the sealing seat 3; the oil seal 31 is in interference fit with the shaft sleeve 1; a gasket 32 is arranged on the oil seal 31; a gap exists between the gasket 32 and the shaft sleeve 1; an oil filling groove is formed in the sealing seat 3, and lubricating oil flows to a lip of the oil seal 31 through the oil filling groove; the oil filling groove comprises a through hole 33 and a vertical groove 34; the through hole 33 is radially arranged on the sealing seat 3; the inner side wall of the sealing seat 3 is provided with an axial vertical groove 34 which is vertical to and intersected with the through hole 33; the through hole 33 is a stepped hole; a gasket groove 35 is radially arranged on the gasket 32 at the oil filling groove, so that lubricating oil can flow to the lip of the oil seal 31 at the inner part; at least one bearing 36 is arranged inside the sealing seat 3 and used for rotating; a mechanical sealing device 11 is arranged in the shaft sleeve 1; a water pipe assembly 12 is arranged in the shaft sleeve 1.

In this example, two oil seals 31, two bearings 36; the clearance between the gasket 32 and the shaft sleeve 1 is 2 mm; the large hole of the stepped hole is an M8 internal threaded hole, and the vertical groove is a milled groove with the diameter of 6 mm; because the gasket 32 has a step, in order to enable the oil to continuously flow to the lip of the internal oil seal, a plane is milled on one side of the gasket to form a gasket groove 35, and the gasket groove 35 is 10mm wide and 2mm deep. Can pour into lubricating oil from the step hole of oiling groove into, lubricating oil flows down packing ring 32 along perpendicular recess 34, then can flow on the lip of oil blanket 31 along the clearance through packing ring groove 35 groove, has just so realized also can add oil lubrication to oil blanket 31 when not shutting down, avoids oil blanket 31 dry friction, increases the life of oil blanket, avoids the target head gas leakage, needn't die down and maintains, practices thrift the maintenance cost.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical concepts of the present invention be covered by the claims of the present invention.

Claims

1. The utility model provides a rotatory target head with oiling groove structure which characterized in that: comprises a shaft sleeve, an insulating base, a sealing seat, a target cylinder fixing nut and a target cylinder fixing piece; the insulating base is sleeved on the shaft sleeve and arranged on the film coating machine; the sealing seat is arranged on the insulating base; a target cylinder fixing nut is arranged on the shaft sleeve at the lower part of the insulating base; the lower end part of the shaft sleeve is provided with a target cylinder fixing part; at least one oil seal is arranged in the sealing seat; the oil seal is in interference fit with the shaft sleeve; a gasket is arranged on the oil seal; a gap is formed between the gasket and the shaft sleeve; an oil filling groove is formed in the sealing seat, and externally added lubricating oil flows to a lip of the oil seal through the oil filling groove.

2. The rotary target head with the oil filler groove structure as claimed in claim 1, wherein: the oil filling groove comprises a through hole and a vertical groove; the through holes are radially arranged on the sealing seat; and the inner side wall of the sealing seat is provided with an axial vertical groove which is vertical to the through hole and is intersected with the through hole.

3. The rotary target head with the oil filler groove structure as claimed in claim 2, wherein: the through hole is a step hole.

4. The rotary target head with the oil filler groove structure as claimed in claim 1, wherein: and a gasket groove is radially arranged on the gasket at the oil filling groove.

5. The rotary target head with the oil filler groove structure as claimed in claim 1, wherein: at least one bearing is arranged inside the sealing seat.

6. The rotary target head with the oil filler groove structure as claimed in claim 1, wherein: and a mechanical sealing device is arranged in the shaft sleeve.

7. The rotary target head with the oil filler groove structure as claimed in claim 1, wherein: and a water pipe assembly is arranged in the shaft sleeve.