CN210498866U - Device for monitoring cutting air pressure in laser cutting head in real time - Google Patents
Device for monitoring cutting air pressure in laser cutting head in real time Download PDFInfo
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- CN210498866U CN210498866U CN201921180817.6U CN201921180817U CN210498866U CN 210498866 U CN210498866 U CN 210498866U CN 201921180817 U CN201921180817 U CN 201921180817U CN 210498866 U CN210498866 U CN 210498866U
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Abstract
The utility model discloses a device of real-time supervision cutting atmospheric pressure in laser cutting head, it includes protection lens base subassembly, sets up LED mount pad of protection lens base subassembly below, fix the nozzle assembly that blows of LED mount pad lower surface, the LED mount pad middle part is provided with link up from top to bottom and upwards leads to through-hole, the inside air-blowing passageway that protects the lens, be provided with outer fender wind ring, setting in the through-hole keep out the wind intra-annular interior fender wind ring outward, outer fender wind ring circumferential surface be provided with a plurality of with the mouth of blowing of air flow way intercommunication, outer fender wind ring with be formed with between the interior fender wind ring with the annular cavity that blows of the inside air flow way intercommunication of nozzle assembly, still be provided with the monitoring on the LED mount pad the pressure sensor of atmospheric pressure size in the air flow way blows. The utility model discloses both can real time monitoring cut the size of atmospheric pressure, can also clear up the protection lens through the air current of blowing.
Description
[ technical field ] A method for producing a semiconductor device
The utility model belongs to the technical field of laser cutting equipment, especially, relate to a device of real-time supervision cutting atmospheric pressure in laser cutting head.
[ background of the invention ]
During laser dicing, the gas pressure of the assist gas has a large influence on the result of the dicing. The laser cutting machine is focused into a high-density light beam in the form of light, the light beam is transmitted to a working surface to generate enough heat to melt the material, and high-pressure gas coaxial with the light beam directly removes molten metal, so that the purpose of cutting is achieved, which shows that the laser cutting machining is essentially different from the mechanical machining of a machine tool. The laser cutting is to release energy to melt and evaporate a workpiece when a laser beam irradiates the surface of the workpiece so as to achieve the purposes of cutting and carving, has the characteristics of high precision, quick cutting, no limitation on cutting patterns, automatic typesetting, material saving, smooth cut, low processing cost and the like, and is gradually improved or replaced by the traditional metal cutting process equipment.
In the field of laser cutting, the cutting speed and the cutting quality mainly depend on whether the selected cutting parameters are appropriate, and the cutting parameters include laser power, cutting speed, focus position, cutting air pressure and the like. The cutting air pressure is one of the key parameters, and the stability of the cutting air pressure directly determines the quality of cutting. The auxiliary gas must be of sufficient pressure to thoroughly remove the debris from the singulation, and typically when a workpiece is singulated to a lesser thickness, the debris sticking to the workpiece will damage the singulation edges. The auxiliary gas source of the laser cutting head is various and needs an auxiliary detection device to monitor the real-time cutting air pressure of the cutting head in real time. In the laser cutting machine in the prior art, no laser cutting head has the function of monitoring the cutting air pressure in real time.
Therefore, there is a need to provide a new device for real-time monitoring of cutting air pressure in a laser cutting head to solve the above problems.
[ Utility model ] content
A primary object of the present invention is to provide a device for monitoring cutting pressure in a laser cutting head in real time, which can monitor the cutting pressure in real time and can also clean the protective lens by blowing air.
The utility model discloses a following technical scheme realizes above-mentioned purpose: the utility model provides a device of real-time supervision cutting atmospheric pressure in laser cutting head, its includes protection lens holder subassembly, sets up LED mount pad of protection lens holder subassembly below, fix the nozzle assembly that blows of LED mount pad lower surface, LED mount pad middle part is provided with link up from top to bottom and upwards leads to the through-hole of protection lens, the inside is provided with blows the runner, be provided with outer wind ring, set up in the through-hole keep out the intra-annular inner wind ring that keeps out the wind outward, outer wind ring circumferential surface be provided with a plurality of with the mouth of blowing of gas runner intercommunication, outer wind ring with be formed with between the inner wind ring with the annular cavity of blowing of the intra-annular air flue intercommunication of nozzle assembly that blows, still be provided with the monitoring on the LED mount pad the pressure sensor of atmospheric pressure size in the gas runner.
Furthermore, the bottom of the blowing annular cavity is in a sealed state, the upper part of the blowing annular cavity is in an opening structure, cutting auxiliary gas enters the blowing annular cavity through the blowing flow channel, then enters the blowing nozzle assembly after upwards sweeping the protective lens and is sprayed out through the nozzle, and the cutting head is cut to play a role in auxiliary gas cutting protection.
Further, one side of the LED mounting seat is provided with an air faucet mounting block, an air pipe connector is arranged on the air faucet mounting block, and an internal flow passage communicated with the air pipe connector and the air blowing flow passage is formed in the air faucet mounting block.
Furthermore, the protective lens seat assembly comprises a sensor mounting seat and a protective lens seat which is embedded in the lower surface of the sensor mounting seat and can be drawn out in a sliding mode.
Furthermore, one end of the protective lens base is fixedly connected with a front cover plate, and the front cover plate is locked on the sensor mounting base through a locking screw.
Further, the LED mounting seat and the sensor mounting seat are fixed together through screws and pins.
Furthermore, the protective lens is pressed on the protective lens seat through a pressure steel ring.
Further, the outer wind-break ring and the inner wind-break ring are connected together through screw threads.
Furthermore, a general plug seal for sealing the periphery of the protective lens is arranged between the protective lens seat and the LED mounting seat.
Furthermore, the pressure sensor is arranged on a detection flow channel communicated with the air blowing flow channel, and the other end of the detection flow channel is screwed and sealed through a jackscrew.
Compared with the prior art, the utility model relates to a device of real-time supervision cutting atmospheric pressure in laser cutting head's beneficial effect lies in: on the premise of not influencing the rectification effect of the cutting auxiliary gas channel on the auxiliary gas, another cutting auxiliary gas pressure detection channel is opened, and the size and the change of the cutting gas pressure in the cutting process of the cutting head are detected in real time by using a pressure sensor; and through the structural design of outer wind-break ring and interior wind-break ring, order about supplementary cutting gas and upwards sweep the protection lens, played the effect of clearance protection lens, improved the life of protection lens.
[ description of the drawings ]
Fig. 1 is a schematic structural diagram of an embodiment of the present invention;
fig. 2 is an exploded view of the protective lens holder assembly and the LED mount according to the embodiment of the present invention;
fig. 3 is a schematic horizontal sectional structure diagram of an LED mounting base in an embodiment of the present invention;
fig. 4 is a schematic view of a vertical cross-section structure of an LED mounting base and a blowing nozzle assembly according to an embodiment of the present invention;
fig. 5 is a partially enlarged schematic view of a fitting structure of the outer wind-guard ring and the inner wind-guard ring according to the embodiment of the present invention;
the figures in the drawings represent:
100 a device for monitoring cutting air pressure in real time in a laser cutting head; 101 protecting the lens;
1, protecting a lens seat assembly, 11, a sensor mounting seat, 12, a protecting lens seat, 13, a front cover plate, 14, a containing cavity, 15, a pressure steel ring, 16, a universal plug seal and 17, locking screws;
2, an LED mounting seat, 21 through holes, 22 air blowing channels, 23 outer wind-shielding rings, 24 inner wind-shielding rings, 25 air blowing ports, 26 air blowing annular cavities, 27 pressure sensors and 28 jackscrews;
3 a blow nozzle assembly; 4, an air tap mounting block; 5, a gas pipe joint.
[ detailed description ] embodiments
Example (b):
referring to fig. 1 to 5, the present embodiment is a device 100 for monitoring cutting air pressure in a laser cutting head in real time, which includes a protective lens holder assembly 1, an LED mounting base 2 disposed below the protective lens holder assembly 1, and an air blowing nozzle assembly 3 fixed on a lower surface of the LED mounting base 2, wherein a through hole 21 penetrating up and down and passing through the protective lens upward is disposed in the middle of the LED mounting base 2, an air blowing channel 22 is disposed inside the through hole 21, an outer wind blocking ring 23 and an inner wind blocking ring 24 disposed inside the outer wind blocking ring 23 are disposed in the through hole, a plurality of air blowing ports 25 communicated with the air blowing channel 22 are disposed on a circumferential surface of the outer wind blocking ring 23, an air blowing annular cavity 26 communicated with an inner air channel of the air blowing nozzle assembly 3 is formed between the outer wind blocking ring 23 and the inner wind blocking ring 24, and a pressure sensor 27 for monitoring air pressure in the air blowing channel 22 is.
The bottom of the blowing annular cavity 26 is in a sealed state, the upper part of the blowing annular cavity is in an open structure, cutting auxiliary gas enters the blowing annular cavity 26 through the blowing flow channel 22, then enters the blowing nozzle assembly 3 after upwards sweeping the protective lens 101 and is sprayed out through the nozzle, and the cutting head is cut to play a role in auxiliary gas cutting protection.
An air tap mounting block 4 is arranged on one side of the LED mounting seat 2, an air tap 5 is arranged on the air tap mounting block 4, and an internal flow passage (not marked in the figure) for communicating the air tap 5 with the air blowing flow passage 22 is arranged inside the air tap mounting block 4.
The protective lens base assembly 1 comprises a sensor mounting base 11, a protective lens base 12 which is embedded in the lower surface of the sensor mounting base 11 and can be drawn out in a sliding mode, a front cover plate 13 is fixedly connected to one end of the protective lens base 12, and the front cover plate 13 is locked on the sensor mounting base 11 through a locking screw 17. The LED mounting seat 2 and the sensor mounting seat 11 are fixed together through screws and pins. The protective lens holder 12 can be drawn back and forth in a drawer type in the receiving cavity 14 formed by the LED mounting base 2 and the sensor mounting base 11. The protective lens 101 is pressed on the protective lens base 12 through the border steel ring 15.
The outer wind deflector ring 23 is screwed to the inner wind deflector ring 24.
A flood plug seal 16 for sealing the periphery of the protective lens is arranged between the protective lens seat 12 and the LED mounting seat 2.
The pressure sensor 27 is provided on a detection flow passage communicating with the air blowing flow passage 22, and the other end of the detection flow passage is screw-sealed by a jackscrew 28.
The working principle of the device 100 for monitoring the cutting air pressure in real time in the laser cutting head of the embodiment is as follows: cutting auxiliary gas sequentially passes through the gas pipe joint 5, the gas nozzle mounting block 4 and the gas blowing flow channel 22, then enters the gas blowing annular cavity 26 through the outer wind blocking ring 23, performs gas rectification on the cutting auxiliary gas, is blocked by the inner wind blocking ring 24 to turn upwards to perform a sweeping action on the protective lens 101, then enters the gas blowing nozzle assembly 3 and flows out through the nozzle, and plays a role in auxiliary gas cutting protection on cutting head cutting; meanwhile, the other channel of the cutting gas is directly communicated with the pressure sensor 27, and the pressure sensor 27 can monitor the size and the change of the cutting gas pressure in the cutting process of the cutting head in real time.
The beneficial effect of the device 100 for monitoring the cutting air pressure in real time in the laser cutting head of the embodiment lies in: on the premise of not influencing the rectification effect of the cutting auxiliary gas channel on the auxiliary gas, another cutting auxiliary gas pressure detection channel is opened, and the size and the change of the cutting gas pressure in the cutting process of the cutting head are detected in real time by using a pressure sensor; and through the structural design of outer wind-break ring and interior wind-break ring, order about supplementary cutting gas and upwards sweep the protection lens, played the effect of clearance protection lens, improved the life of protection lens.
What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.
Claims (10)
1. The utility model provides a device of real-time supervision cutting atmospheric pressure in laser cutting head which characterized in that: it includes protection lens base subassembly, sets up LED mount pad, the fixing of protection lens base subassembly below the blowing nozzle subassembly of LED mount pad lower surface, LED mount pad middle part is provided with link up from top to bottom and upwards leads to through-hole, the inside of protection lens and is provided with the air blow runner, be provided with outer fender wind ring, setting in the through-hole and be in outer intra-annular interior fender wind ring keeps out wind, outer fender wind ring circumferential surface be provided with a plurality of with the mouth of blowing of air blow runner intercommunication, outer fender wind ring with be formed with between the interior fender wind ring with the annular cavity of blowing of the inside air flue intercommunication of air blow nozzle subassembly, still be provided with the monitoring on the LED mount pad the pressure sensor of atmospheric pressure size in the air blow runner.
2. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 1, wherein: the bottom of the blowing annular cavity is in a sealed state, the upper portion of the blowing annular cavity is in an opening structure, cutting auxiliary gas enters the blowing annular cavity through the blowing flow channel, then enters the blowing nozzle assembly after upwards sweeping the protective lens and is sprayed out through the nozzle, and the cutting head is cut to play a role in auxiliary gas cutting protection.
3. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 1, wherein: an air faucet mounting block is arranged on one side of the LED mounting seat, an air pipe connector is arranged on the air faucet mounting block, and an internal flow passage communicated with the air pipe connector and the air blowing flow passage is formed in the air faucet mounting block.
4. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 1, wherein: the protective lens seat assembly comprises a sensor mounting seat and a protective lens seat which is embedded in the lower surface of the sensor mounting seat and can be drawn out in a sliding mode.
5. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 4, wherein: one end of the protective lens base is fixedly connected with a front cover plate, and the front cover plate is locked on the sensor mounting base through a locking screw.
6. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 4, wherein: the LED mounting seat and the sensor mounting seat are fixed together through screws and pins.
7. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 4, wherein: the protective lens is pressed on the protective lens seat through the pressure steel ring.
8. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 1, wherein: the outer wind-shield ring is in threaded connection with the inner wind-shield ring.
9. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 4, wherein: and a general plug seal for sealing the periphery of the protective lens is arranged between the protective lens seat and the LED mounting seat.
10. The apparatus for real-time monitoring of cutting gas pressure in a laser cutting head of claim 1, wherein: the pressure sensor is arranged on a detection flow channel communicated with the air blowing flow channel, and the other end of the detection flow channel is screwed and sealed through a jackscrew.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201921180817.6U CN210498866U (en) | 2019-07-25 | 2019-07-25 | Device for monitoring cutting air pressure in laser cutting head in real time |
Applications Claiming Priority (1)
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CN201921180817.6U CN210498866U (en) | 2019-07-25 | 2019-07-25 | Device for monitoring cutting air pressure in laser cutting head in real time |
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CN210498866U true CN210498866U (en) | 2020-05-12 |
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CN201921180817.6U Active CN210498866U (en) | 2019-07-25 | 2019-07-25 | Device for monitoring cutting air pressure in laser cutting head in real time |
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2019
- 2019-07-25 CN CN201921180817.6U patent/CN210498866U/en active Active
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