CN210486508U - Movable furnace door sealing structure - Google Patents
Movable furnace door sealing structure Download PDFInfo
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- CN210486508U CN210486508U CN201921517229.7U CN201921517229U CN210486508U CN 210486508 U CN210486508 U CN 210486508U CN 201921517229 U CN201921517229 U CN 201921517229U CN 210486508 U CN210486508 U CN 210486508U
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- guide rail
- rail module
- furnace door
- sealing structure
- door sealing
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Abstract
The utility model discloses a movable furnace gate seal structure, include: the X-direction guide rail module is used for guiding the furnace mouth in and out direction; the Y-direction guide rail module is a guide rail module in the horizontal direction, and the horizontal direction is vertical to the in-out direction and is used for guiding the X-direction guide rail module; the frame body is arranged on an X-direction sliding seat of the X-direction guide rail module; the connecting plate is arranged on the frame body and is a vertical spring plate; the bearing seats are respectively arranged at the upper end and the lower end of the spring plate; the connecting shafts are correspondingly arranged on the corresponding bearing seats one by one through joint bearings and extend towards the furnace mouth in a hanging manner; and the furnace door is fixedly arranged on the connecting shaft. The foundation the utility model discloses a movable furnace gate seal structure easily realizes reliably sealing.
Description
Technical Field
The utility model relates to a movable furnace gate seal structure.
Background
With the great development of the third-generation semiconductor and new material industry, materials such as gallium nitride, graphene and the like are mature at the application end and can be applied to the fields of display, laser projection, illumination, electricians and electronics, aerospace and the like, but the high preparation cost of raw materials becomes a significant obstacle limiting the rapid popularization and application of the materials, so that the improvement of the production efficiency and the production quality and the improvement of the automation level of equipment so as to reduce the cost become important directions for the development of the equipment.
The weight of the furnace door is usually positively correlated with the size of the furnace door, the larger-size furnace door inevitably has larger weight, and in the opening and closing process, because the larger weight generates larger bending moment on a supporting structure for supporting the furnace door, the supporting structure deforms, the furnace door cannot be aligned, the furnace door needs to be adjusted and debugged for many times, otherwise, the sealing failure is easy to occur. In the process, the opening and closing speed of the oven door is inevitably low, and the opening and closing of the oven door for one time of the oven door with larger size usually needs more than 3 min. The optimal strategy for the sealing of the oven door structure is therefore to be able to align itself automatically. In addition, the existing special large-size furnace door, especially the vertically-installed furnace door, generally adopts a structure similar to a gate valve, the structure is complex, the manufacturing and maintenance cost is high, and a low-cost structure is urgently needed to be found.
The biggest problem of the furnace door with the structure of the sliding door and the gate valve is that the door plate or the gate valve cannot independently form the sealing of a furnace opening after being in place, and the better sealing can be realized only by a certain amount of movement in the direction of the door to be opened or closed, which is relatively difficult to realize under the condition.
Chinese patent document CN201873750U discloses a novel opening and closing door of PECVD equipment, which provides a structure of an opening and closing door of ordinary rotation type PECVD equipment, a door of indirect rotation type PECVD equipment, and further provides a novel opening and closing door of PECVD equipment, wherein the latter door is driven by a rodless cylinder, a guide rail is arranged in the driving direction, the rodless cylinder drives a moving arm, the moving arm installs the door through a joint bearing, thereby after the moving arm carries the door in place, the coaxiality between the door and the furnace body can be adjusted through the joint bearing, in other words, the structure easily realizes the accurate coaxiality between the door and the furnace body, but the structure lacks the normal movement of the door, how to realize the relative reliable sealing is relatively difficult.
Chinese patent document CN109373763A discloses an oven door structure for a diffusion oven, which provides an oven door connecting rod that is guided by a slide rail, thus acting as a sliding door as a whole. The end part of the furnace door connecting rod is provided with a supporting plate, the furnace door body is arranged on the furnace door connecting rod through an elastic bolt, the elastic bolt is wholly equivalent to an elastic guide pillar, and after the furnace door body is pushed in place through the furnace door connecting rod, the elastic bolt pushes the furnace door body to move in the normal direction, so that the furnace door body can be pressed on the furnace door. Therefore, it can be understood that before the furnace door body is not in place, the elastic bolt is in a compression state, and because how the elastic bolt is in the compression state is not disclosed, the elastic bolt is pressed by the furnace body in the pushing process of the furnace door body, namely, the furnace body door body and the furnace body are in a friction state, so that the service life of the furnace door body is influenced, and larger noise can be generated.
Disclosure of Invention
An object of the utility model is to provide an easily realize reliable sealed movable furnace gate seal structure, and this movable furnace gate seal structure is suitable for the quick switch furnace gate.
In an embodiment of the utility model, a movable furnace gate seal structure is provided, include:
the X-direction guide rail module is used for guiding the furnace mouth in and out direction;
the Y-direction guide rail module is a guide rail module in the horizontal direction, and the horizontal direction is vertical to the in-out direction and is used for guiding the X-direction guide rail module;
the frame body is arranged on an X-direction sliding seat of the X-direction guide rail module;
the connecting plate is arranged on the frame body and is a vertical spring plate;
the bearing seats are respectively arranged at the upper end and the lower end of the spring plate;
the connecting shafts are correspondingly arranged on the corresponding bearing seats one by one through joint bearings and extend towards the furnace mouth in a hanging manner; and
and the furnace door is fixedly arranged on the connecting shaft.
Optionally, the part of the connecting shaft exposed out of the bearing seat is provided with a shaft shoulder at the end where the bearing seat is located, and a given distance is reserved between the shaft shoulder and the bearing seat;
and an adjusting shim is sleeved on the shaft section determined by the given distance so as to limit the rotation angle of the joint bearing.
Optionally, the part of the frame body for connecting with the connecting plate is provided with a groove;
the middle part of the connecting plate is supported on the notch and is connected to the groove bottom by a screw in the normal direction of the groove bottom.
Alternatively, the screw hole fitted on the groove bottom is an elongated hole extending in the up-down direction.
Optionally, the rack body comprises:
the fixed seat is fixed on the X-direction sliding block;
the vertical frame is fixed on the fixed seat to determine the vertical height;
and the transverse frame is fixedly connected to the upper end of the vertical frame and is parallel to the Y-direction guide rail, and the overhanging direction is the direction in which the Y-direction guide rail module points to the oven door.
Optionally, a diagonal brace or a right-angled triangle reinforcing plate is arranged between the transverse frame and the vertical frame.
Optionally, a limit switch for limiting the oven door is arranged at one end of the guide rail of the X-direction guide rail module, which is far away from the oven door.
Optionally, a grating scale is fitted to the X-guide rail module or a rotary encoder is fitted at the output shaft of the motor driving the X-guide rail module to control the position of the X-slide in a closed loop.
Optionally, a linear scale is fitted to the Y-track module or a rotary encoder is fitted at the output shaft of the motor driving the Y-track module to control the position of the Y-slide in a closed loop.
Optionally, the driving mechanisms of the X-guide rail module and the Y-guide rail module are both nut-screw mechanisms.
The utility model discloses an in the embodiment, at first the X is to the drive that the guide rail module provided the furnace gate normal direction, and the furnace gate normal direction is the business turn over direction of fire door mouth promptly, under this condition, when needs move the furnace gate open the fire door regional, the furnace gate can with the fire door based on the X to the guide rail module and at first fully break away from with the furnace body to the furnace gate can not produce the motion with the furnace body when the motion of Y to the guide rail module and interfere. When the furnace mouth needs to be sealed, the X-direction guide rail module can provide sealing force and state maintenance. Furthermore, the furnace door is assembled on the frame body through the connecting plate, the frame body is arranged on the X-direction sliding seat, and when the furnace door is contacted with the furnace opening, the connecting plate made of the spring plate begins to deform to gradually increase the pre-pressure, so that the driving mechanism of the X-direction guide rail module is not subjected to rigid impact, and relatively reliable sealing is facilitated to be formed.
Drawings
Fig. 1 is a schematic front view of a sealing structure of a movable furnace door in one embodiment.
Fig. 2 is a left side view structural schematic diagram of a sealing structure of a movable furnace door in one embodiment.
Fig. 3 is an enlarged view of a portion a of fig. 2.
Fig. 4 is an enlarged view of a portion B of fig. 2.
In the figure: 1. the furnace door comprises a furnace door body, 2 parts of fasteners, 3 parts of connecting plates, 4 parts of elongated holes, 5 parts of screws, 6 parts of connecting plates, 7 parts of slotted plates, 8 parts of cross frames, 9 parts of vertical frames, 10 parts of lightening holes, 11 parts of fasteners, 12 parts of an X-direction sliding seat, 13 parts of an X-direction guide rail, 14 parts of a Y-type sliding seat, 15 parts of an X-direction motor, 16 parts of a Y-direction motor, 17 parts of a base, 18 parts of a Y-direction motor, 19 parts of a limit switch, 20 parts of a bearing seat and 21 parts of a connecting shaft. L. given distance.
Detailed Description
The utility model discloses an in the embodiment, the guide rail that X is to guide rail module and Y is to guide rail module used is linear guide to all provide the guide of horizontal direction, the guide direction mutually perpendicular of X to guide rail module and Y to guide rail module. The Y-direction guide rail module is vertical to the direction of the furnace door 1, and provides the transformation between a first position where the furnace door 1 is aligned with the furnace opening and a second position which is separated from the alignment and is far away from the furnace opening. The guiding direction of the X-direction guide rail module is parallel to the normal direction of the oven door 1, and the cover closing and opening actions are provided.
The traditional cover closing and opening actions of the furnace door 1 mostly adopt rigid actions, and the damage to a furnace opening, the furnace door 1 and a driving mechanism of an X-direction guide rail module is large. The embodiment of the utility model provides an in, adopt to have elastic connecting plate 3, the power of closing the lid in the lid process is crescent, also allows to close the lid process and has the error, and the existence of error is minimum to the actuating mechanism injury of fire door, furnace gate 1 and the X-direction guide rail module.
To the utility model discloses activity furnace gate seal structure in the embodiment, X wherein to the guide rail module include X to guide rail 13 and with X to guide rail 13 cooperation and form the vice X of X to slide 12 of X to the guide rail to and drive X to slide 12 along X to the X of guide rail 13 operation to actuating mechanism. The Y-direction guide module comprises a Y-direction guide rail 16, a Y-direction slide 14 which is matched with the Y-direction guide rail 16 to form a Y-direction guide rail pair, and a Y-direction driving mechanism which drives the Y-direction slide to move along the Y-direction guide rail.
The X-guide rail 13 is fixed to the Y-slide 14, and may be attached by, for example, rail bolts or by direct welding.
The X-direction sliding seat 12 is an installation base body of the frame body, the frame body is used for installing the furnace door 1, the furnace door 1 and the frame body are assembled through the connecting plate 3 made of a spring plate, and when the furnace door 1 is pressed in the normal direction, the spring plate can deform to play a buffering role.
Furthermore, in fig. 1, the coupling plate 3 is substantially an elongated plate with round heads at two ends, the long side of the elongated plate is vertical, a bearing seat 20 is respectively installed at the upper end and the lower end of the elongated plate, the bearing seats 20 are preferably installed on the coupling plate 3 in a riveting manner, and the connection is performed by selective welding, and in some embodiments, bolts can also be used.
In the structure shown in fig. 1, as can be seen from the back of the oven door 1, each bearing housing 20 is fitted with 4 rivet holes, which can be mounted on a spring plate using riveting.
In some embodiments, the bearing seat 20 has a shaft head, and the coupling plate 3 has a shaft head hole aligned with the shaft head hole, and the shaft head hole can be in interference fit, so as to improve the assembling reliability of the bearing seat 20.
The bearing seat 20 is adapted with a knuckle bearing to provide a connecting shaft 21, as shown in fig. 2, a left end of the connecting shaft 21 in fig. 2 is fixedly connected with the oven door 1, and a right end of the connecting shaft 21 is installed in the bearing seat 20 through the knuckle bearing, so that the oven door 1 has a certain self-adaptive centering capability due to the existence of the knuckle bearing.
When using knuckle bearings, although the centering flexibility of the oven door 1 is improved, the knuckle bearings at the same time make the oven door 1 too free, so that in a preferred embodiment, see the description fig. 3, it can be seen in fig. 3 that the portion of the connecting shaft 21 in the figure, which exposes the bearing block 20, has a shoulder at the end of the bearing block 20, which shoulder is at a given distance L from the bearing block 20.
Furthermore, an adjusting shim is sleeved on the shaft section determined by the given distance L to limit the rotation angle of the joint bearing.
Regarding the adjusting shim, an elastic shim can be used, and the larger the deflection angle of the connecting shaft 21 is, the larger the elastic force provided by the elastic shim is, so that the rotation angle of the connecting shaft 21 can be effectively restrained, and further the oven door 1 is restrained so as not to be too free.
The given distance L can be adapted to the thicknesses of 3-6 elastic gaskets, and the appropriate number of elastic gaskets can be selected according to the free amount of adaptation.
In the construction shown in fig. 2 and 4, the portion of the frame body for connection with the hitch plate 3 has a slot, i.e. the portion shown in fig. 1, in which the elongated hole 4 is provided.
Accordingly, as shown in figures 1 and 2, the coupling plate 3 is supported in the middle of the slot and is connected to the bottom of the slot by means of screws 5 normal to the slot bottom, with a slight deformation of the coupling plate 3, obviously due to the presence of the slot, in the opposite direction to the deformation of the coupling plate 3 caused by the reaction of the oven door 1 by the oven mouth.
The long hole 4 can also be a round hole, and the adoption of the long hole 4 is beneficial to fine adjustment of the upper and lower positions of the furnace door 1 so as to be better aligned with the furnace door. Accordingly, the elongated hole 4 can be cut at the bottom of the groove. The elongated hole 4 extends in the vertical direction.
In the figure 1, the frame body mainly comprises a vertical frame 9 and a horizontal cross frame 8, the cross frame 8 and the vertical frame 9 can form an integral structure or can be fixedly connected by a split structure, and the cross frame 8 and the vertical frame 9 are connected into a whole in a riveting mode.
Wherein, the lower part of the vertical frame 9 is provided with a fixed seat, and the fixed seat and the X-direction sliding seat 12 form fixed connection by adopting a bolt or screw connection mode.
In fig. 1, the Y-guide 16 is located at the lower side of the oven door 1, and the vertical frame 9 has a given height such that the cross frame 8 is located at a position approximately at the same height as the middle of the oven door 1.
The transverse frame 8 is fixedly connected with the upper end of the vertical frame 9 and is parallel to the Y-direction guide rail 16, and the overhanging direction is the direction of the Y-direction guide rail module pointing to the oven door 1.
Furthermore, an inclined strut or a right-angled triangle reinforcing plate is arranged between the transverse frame 8 and the vertical frame 9, the reinforcing plate is directly triangular in the figure, the upper right-angled edge is fixedly connected with the transverse frame 8 or integrated with the transverse frame 8, and the right-angled edge is fixedly connected with the vertical frame 9 or integrated with the vertical frame 9.
The triangular reinforcing plate is provided with lightening holes. In addition, the vertical frame 9 adopts a frame rod structure or a structure that the frame rods are matched with the plate body, and lightening holes 10 can be opened on the plate body part.
In the structure shown in fig. 2, the guide rail of the X-direction guide rail module, i.e. the X-direction guide rail 13 in the figure, is provided with a limit switch 19 at the end away from the oven door 1 for limiting the oven door 1, so as to prevent the X-direction slide 12 from overtravel.
Further, a grating scale is provided to be adapted to the X-guide rail module or a rotary encoder is provided at an output shaft of a motor driving the X-guide rail module to control the position of the X-slide 12 in a closed loop.
Similarly, a linear scale is provided for the Y-track module or a rotary encoder is provided at the output shaft of the motor driving the Y-track module to control the position of the Y-slide 13 in a closed loop.
The grating is used for directly measuring directly moving parts, such as an X-slide 12 and a Y-slide 14, and can be fixed on the side of the X-guide 13.
For the rotary encoder, the rotation amount of the rotary member is directly measured, and the rotation amount may be directly fitted to output shafts of the X-direction motor 15 and the Y-direction motor 18, for example, or may be mounted at a shaft end of a lead screw, for example.
Correspondingly, the driving mechanisms of the X-direction guide rail module and the Y-direction guide rail module are both nut screw mechanisms, and the transmission precision is high. The X-direction motor 15 and the Y-direction motor 18 may be stepping motors or servo motors.
Claims (10)
1. A movable furnace door sealing structure is characterized by comprising:
the X-direction guide rail module is used for guiding the furnace mouth in and out direction;
the Y-direction guide rail module is a guide rail module in the horizontal direction, and the horizontal direction is vertical to the in-out direction and is used for guiding the X-direction guide rail module;
the frame body is arranged on an X-direction sliding seat of the X-direction guide rail module;
the connecting plate is arranged on the frame body and is a vertical spring plate;
the bearing seats are respectively arranged at the upper end and the lower end of the spring plate;
the connecting shafts are correspondingly arranged on the corresponding bearing seats one by one through joint bearings and extend towards the furnace mouth in a hanging manner; and
and the furnace door is fixedly arranged on the connecting shaft.
2. The movable furnace door sealing structure according to claim 1, wherein the portion of the connecting shaft exposed out of the bearing seat has a shoulder at the end of the bearing seat, and the shoulder is spaced from the bearing seat by a given distance;
and an adjusting shim is sleeved on the shaft section determined by the given distance so as to limit the rotation angle of the joint bearing.
3. The movable furnace door sealing structure according to claim 1, wherein the frame body has a groove at a portion for connecting with the coupling plate;
the middle part of the connecting plate is supported on the notch and is connected to the groove bottom by a screw in the normal direction of the groove bottom.
4. The movable furnace door sealing structure according to claim 3, wherein the screw hole fitted to the groove bottom is an elongated hole extending in the up-down direction.
5. The movable oven door sealing structure according to claim 1, wherein the rack body comprises:
the fixed seat is fixed on the X-direction sliding block;
the vertical frame is fixed on the fixed seat to determine the vertical height;
and the transverse frame is fixedly connected to the upper end of the vertical frame and is parallel to the Y-direction guide rail, and the overhanging direction is the direction in which the Y-direction guide rail module points to the oven door.
6. The movable furnace door sealing structure according to claim 5, wherein a diagonal brace or a right-angled triangle reinforcing plate is arranged between the cross frame and the vertical frame.
7. The movable furnace door sealing structure according to claim 1, wherein the guide rail of the X-direction guide rail module is provided with a limit switch for limiting the position of the furnace door at the end away from the furnace door.
8. The movable furnace door sealing structure according to claim 1 or 7, characterized in that a grating scale is provided to the X-direction rail module or a rotary encoder is provided at an output shaft of a motor driving the X-direction rail module to control the position of the X-direction slider in a closed loop.
9. The movable furnace door sealing structure according to claim 1, wherein a grating scale is provided to be adapted to the Y-guide rail module or a rotary encoder is provided at an output shaft of a motor driving the Y-guide rail module to control the position of the Y-slide in a closed loop.
10. The movable furnace door sealing structure according to claim 1, wherein the driving mechanisms of the X-direction guide rail module and the Y-direction guide rail module are both nut-screw mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921517229.7U CN210486508U (en) | 2019-09-12 | 2019-09-12 | Movable furnace door sealing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921517229.7U CN210486508U (en) | 2019-09-12 | 2019-09-12 | Movable furnace door sealing structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210486508U true CN210486508U (en) | 2020-05-08 |
Family
ID=70539920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921517229.7U Active CN210486508U (en) | 2019-09-12 | 2019-09-12 | Movable furnace door sealing structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210486508U (en) |
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2019
- 2019-09-12 CN CN201921517229.7U patent/CN210486508U/en active Active
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Address after: 250119 area a, building 13, Sino German Industrial Park, 8 Zidong Avenue, Tianqiao District, Jinan City, Shandong Province Patentee after: Shandong Liguan microelectronics equipment Co., Ltd Address before: 250119 Shandong Province Flyover District of Ji'nan City Shun Hing Sangzi Town Road No. 66 Ji'nan new materials industry science and Technology Park Building 1, 1 floor West Patentee before: JINAN LIGUAN ELECTRONIC TECHNOLOGY Co.,Ltd. |