CN210477428U

CN210477428U - Silicon carbide semiconductor slice fixing clamp and slicing machine with same

Info

Publication number: CN210477428U
Application number: CN201921998031.5U
Authority: CN
Inventors: 李晶; 卢红亮; 李勇刚; 蒋镄铠
Original assignee: Sichuan Sichip Micro Technologies Co ltd
Current assignee: Sichuan Sichip Micro Technologies Co ltd
Priority date: 2019-11-18
Filing date: 2019-11-18
Publication date: 2020-05-08
Anticipated expiration: 2029-11-18

Abstract

The application discloses carborundum semiconductor chip mounting fixture, be equipped with first spout on the third mounting panel, be equipped with in the first spout along the gliding first gyro wheel of first spout, first gyro wheel is equipped with a pair ofly, install splint on the first gyro wheel, the second hydraulic stem is installed to one side of splint, install first hydraulic pump on the second hydraulic stem, the fourth mounting panel is all installed to the relative one side of splint, the fifth piston is installed to the lower extreme of fourth mounting panel, install the third piston axle on the fifth piston, install the sixth piston on the third piston axle, install the second gyro wheel mount pad on the sixth piston, install the second pivot on the second gyro wheel mount pad, the second gyro wheel is installed to the periphery of second pivot. The utility model discloses still provide the slicer of installing above-mentioned carborundum semiconductor section mounting fixture. The utility model discloses can improve carborundum semiconductor slice fixed stability, further improve sliced quality.

Description

Silicon carbide semiconductor slice fixing clamp and slicing machine with same

Technical Field

The utility model relates to a technical field of carborundum semiconductor processing especially relates to a carborundum semiconductor section mounting fixture and have slicer of this anchor clamps.

Background

Carborundum, also known as silicon carbide, is produced by high-temperature smelting of quartz sand, petroleum coke, wood dust and other raw materials in a resistance furnace. Silicon carbide also has a rare mineral in nature, morusite. Silicon carbide is also known as carbo-silica. Among the non-oxide high-tech refractory materials such as C, N, B, silicon carbide is the most widely used and economical one, and may be called as corundum or refractory sand. Silicon carbide semiconductor blocks are often cut into slices in the silicon carbide processing process and then processed, and in the prior art, when the silicon carbide semiconductor slices are limited, the efficiency and the quality of the silicon carbide semiconductor slices cannot meet the requirements of actual production due to poor limiting and fixing stability, so that the clamp capable of improving the fixing stability of the silicon carbide semiconductor slices and the slicing machine with good slicing quality are urgently needed to be developed to solve the problems in the prior art.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that overcome prior art not enough and provide a can improve carborundum semiconductor section fixed stability's anchor clamps and slicing machine of good quality.

Solve the technical problem, the utility model discloses take following technical scheme:

the utility model provides a carborundum semiconductor chip mounting fixture, including the third mounting panel, be equipped with first spout on the third mounting panel, be equipped with in the first spout along the gliding first gyro wheel of first spout, first gyro wheel is equipped with a pair ofly, install splint on the first gyro wheel, the second hydraulic stem is installed to one side of splint, the second hydraulic stem is kept away from one side of splint and is installed first hydraulic pump, the fourth mounting panel is all installed to the relative one side of splint, the fifth piston is installed to the lower extreme of fourth mounting panel, the third piston axle is installed to one side that the fourth mounting panel was kept away from to the fifth piston, the sixth piston is installed to one side that the fifth piston was kept away from to the third piston axle, install second gyro wheel mount pad on the sixth piston, install the second pivot on the second gyro wheel mount pad, the second gyro wheel is installed to the periphery of second pivot, be equipped with the third spring between fifth piston and the sixth piston, the third spring cup joints in.

The embodiment of the utility model provides a splint are close to one side of first hydraulic pump and are installed the fourth piston, and the fourth piston is kept away from one side of splint and is installed the second piston axle, and the third piston is installed to one side that the fourth piston was kept away from to the second piston axle, and the third piston is installed at the second hydraulic stem.

The embodiment of the utility model provides a be equipped with the second spring between fourth piston and the third piston, the second spring cup joints the periphery at second piston axle.

The embodiment of the utility model provides a speed reduction cover has been cup jointed to the periphery that the second rolled.

The utility model also provides a slicer, including the section case, the section incasement is equipped with the section chamber, and above-mentioned carborundum semiconductor section mounting fixture is installed to the section intracavity, and first hydraulic pump is installed on the section case, is equipped with the spacing axle sleeve that supplies the second hydraulic stem to run through on the section case, and the third mounting panel is installed at the section intracavity.

The embodiment of the utility model provides a first mounting panel is installed to the upper end of section case, and the battery is installed to first mounting panel one side, and one side that the battery was kept away from to first mounting panel is installed first hydraulic pump, and one side that first mounting panel was kept away from to first hydraulic pump is installed first hydraulic stem, installs the motor mount pad on the first hydraulic stem, installs the motor on the motor mount pad, installs first pivot on the motor, installs in the first pivot and cuts the wheel.

The embodiment of the utility model provides a second mounting panel is equipped with the second spout that sets up along vertical direction, and one side of second mounting panel is equipped with along the gliding slide of second spout, and the motor mount pad is installed on the slide, is equipped with the gliding hasp of restriction slide in the second spout.

The embodiment of the utility model provides a slide is close to one side of motor mount pad and installs first piston, and one side that the slide was kept away from to first piston is installed first piston axle, and one side that first piston was kept away from to first piston axle is installed the second piston, and the second piston is installed on the motor mount pad, is equipped with first spring between first piston and the second piston, and first spring cup joints the periphery at first piston axle.

The embodiment of the utility model provides a both ends of second spout are equipped with the limiting plate.

The utility model has the advantages that: when needs are to silicon carbide semiconductor section, arrange silicon carbide semiconductor block in between the splint, then it is fixed to slide along first spout to realize restricting the silicon carbide semiconductor block by first hydraulic pump drive second hydraulic stem drive splint, when spacing to the silicon carbide semiconductor, realize leading to the silicon carbide semiconductor block by the second gyro wheel, by the fifth piston, the third piston shaft, the in-process of second gyro wheel direction is realized to sixth piston and third spring complex elasticity, the second gyro wheel has the elasticity, the second gyro wheel of elasticity can carry out spacing fixed to the silicon carbide semiconductor block, the spacing stability of silicon carbide semiconductor has effectively been guaranteed.

Other features and advantages of the present invention will be disclosed in more detail in the following detailed description and the accompanying drawings.

Drawings

Fig. 1 is a schematic view of a slicer according to the present invention;

FIG. 2 is a schematic structural view of a fixture for fixing silicon carbide semiconductor slices according to the present invention;

FIG. 3 is an enlarged partial schematic view at A in FIG. 2;

fig. 4 is a side view of the cutting wheel of the microtome of the present invention.

The figures are numbered:

1. a slice box; 2. a first hydraulic pump; 3. a slicing cavity; 4. a storage battery; 5. a first mounting plate; 6. a second hydraulic pump; 7. a first hydraulic lever; 8. a second mounting plate; 9. a slide plate; 10. a motor mounting seat; 11. a motor; 12. cutting wheels; 13. a first rotating shaft; 14. a first piston; 15. a first piston shaft; 16. a first spring; 17. a splint; 18. a third mounting plate; 19. a first chute; 20. a limiting shaft sleeve; 21. a second hydraulic rod; 22. a third piston; 23. a second spring; 24. a second piston shaft; 25. a fourth piston; 26. a second roller mounting seat; 27. a second hydraulic rod; 28. a speed reducing sleeve; 29. a limiting plate; 30. a fourth mounting plate; 31. a fifth piston; 32. a third spring; 33. A third piston shaft; 34. a sixth piston; 35. a second rotating shaft; 36. a second roller; 37. locking; 38. a second chute; 39. a second piston.

Detailed Description

The technical solutions of the embodiments of the present invention are explained and explained below with reference to the drawings of the embodiments of the present invention, but the embodiments described below are only preferred embodiments of the present invention, and not all embodiments. Based on the embodiments in the embodiment, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention.

In the following description, the appearances of the indicating orientation or positional relationship, such as the terms "inner", "outer", "upper", "lower", "left", "right", etc., are only for convenience in describing the embodiments and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.

Referring to fig. 1-4, a silicon carbide semiconductor slice fixing clamp provided in an embodiment of the present invention includes a third mounting plate 18, a first sliding groove 19 is provided on the third mounting plate 18, a first roller 27 sliding along the first sliding groove 19 is provided in the first sliding groove 19, a pair of first rollers 27 is provided, a clamp plate 17 is mounted on the first roller 27, a second hydraulic rod 21 is mounted on one side of the clamp plate 17, a first hydraulic pump 2 is mounted on one side of the second hydraulic rod 21 away from the clamp plate 17, a fourth mounting plate 30 is mounted on the opposite side of the clamp plate 17, a fifth piston 31 is mounted at the lower end of the fourth mounting plate 30, a third piston shaft 33 is mounted on one side of the fifth piston 31 away from the fourth mounting plate 30, a sixth piston 34 is mounted on one side of the third piston shaft 33 away from the fifth piston 31, a second roller mounting seat 26 is mounted on the sixth piston 34, a second rotating shaft 35 is mounted on the second roller mounting seat 26, a second roller 36 is installed on the periphery of the second rotating shaft 35, a third spring 32 is arranged between the fifth piston 31 and the sixth piston 34, and the third spring 32 is sleeved on the periphery of the third piston shaft 33.

The working principle is as follows: when the silicon carbide semiconductor is sliced, the silicon carbide semiconductor block is placed between the clamping plates 17, then the first hydraulic pump 2 drives the second hydraulic rod 2 to drive the clamping plates 17 to slide along the first sliding grooves 19 to limit and fix the silicon carbide semiconductor block, when the silicon carbide semiconductor is limited, the silicon carbide semiconductor block is guided by the second roller 36, the flexibility of the fifth piston 31, the third piston shaft 33, the sixth piston 34 and the third spring 32 is matched with the flexibility to realize the guiding process of the second roller 36, the second roller 36 has the flexibility, the second roller 36 with the flexibility can limit and fix the silicon carbide semiconductor block, and the limiting stability of the silicon carbide semiconductor is effectively guaranteed.

In the present embodiment, a fourth piston 25 is mounted on a side of the clamp plate 17 close to the first hydraulic pump 2, a second piston shaft 24 is mounted on a side of the fourth piston 25 away from the clamp plate 17, a third piston 22 is mounted on a side of the second piston shaft 24 away from the fourth piston 25, and the third piston 22 is mounted on the second hydraulic rod 21. By means of the matched flexibility of the fourth piston 25, the second piston shaft 24 and the third piston 22, when the clamping plate 17 limits the silicon carbide semiconductor block, the clamping plate 17 cannot damage the silicon carbide semiconductor block.

In the present embodiment, a second spring 23 is provided between the fourth piston 25 and the third piston 22, and the second spring 23 is fitted around the outer periphery of the second piston shaft 24. Due to the flexibility of the second spring 23 sleeved on the periphery of the second piston shaft 24, when the clamp plate 17 limits the silicon carbide semiconductor block, the clamp plate 17 cannot damage the silicon carbide semiconductor block.

In this embodiment, the speed reduction sleeve 28 is sleeved on the outer periphery of the second roller 36. The speed reducing sleeve 28 can increase the friction force between the second roller 36 and the silicon carbide semiconductor block, and improve the stability of limiting the silicon carbide semiconductor block.

The utility model provides a slicer, including slicing box 1, be equipped with section chamber 3 in the slicing box 1, install carborundum semiconductor section mounting fixture in the section chamber 3, first hydraulic pump 2 is installed on slicing box 1, be equipped with the spacing axle sleeve 20 that supplies second hydraulic stem 21 to run through on the slicing box 1, third mounting panel 18 is installed in section chamber 3, first mounting panel 5 is installed to slicing box 1's upper end, battery 4 is installed to first mounting panel 5 one side, battery 4's one side is kept away from to first mounting panel 5 is installed second hydraulic pump 6, second hydraulic pump 6 is kept away from one side of first mounting panel 5 and is installed first hydraulic stem 7, install motor mount pad 10 on the first hydraulic stem 7, install motor 11 on the motor mount pad 10, install first pivot 13 on the motor 11, install cutting wheel 12 on the first pivot 13. After the silicon carbide semiconductor block is limited and fixed, the storage battery 4 drives the second hydraulic pump 6 to drive the single machine mounting seat 10 to move in the length direction of the slicing box 1, the motor 11 drives the first rotating shaft 13 to drive the cutting wheel 12 to rotate, the cutting wheel 12 rotates to slice the silicon carbide semiconductor, and the slicing efficiency and quality can be effectively improved through the cooperation of the slicing machine and the clamp.

In this embodiment, the second mounting plate 8 is provided with a second sliding groove 38 arranged along the vertical direction, one side of the second mounting plate 8 is provided with a sliding plate 9 sliding along the second sliding groove 38, the motor mounting seat 10 is mounted on the sliding plate 9, and a lock catch 37 for limiting the sliding of the sliding plate 9 is arranged in the second sliding groove 38. By sliding the slide plate 9 in the second slide groove 38 and controlling the distance between the slide plate 9 and the silicon carbide semiconductor by the lock 37, the slicing requirements of silicon carbide semiconductor blocks of different sizes can be met.

In this embodiment, a first piston 14 is installed on one side of the sliding plate 9 close to the motor mounting seat 10, a first piston shaft 15 is installed on one side of the first piston 14 far from the sliding plate 9, a second piston 39 is installed on one side of the first piston shaft 15 far from the first piston 14, the second piston 39 is installed on the motor mounting seat 10, a first spring 16 is arranged between the first piston 14 and the second piston 39, and the first spring 16 is sleeved on the periphery of the first piston shaft 15. By the first piston 14, the first piston shaft 15, the second piston 39 and the first spring 16, the cutting wheel 12 is realized in slicing, when a clamping wheel or a foreign body is encountered, the cutting wheel 12 is protected by the first piston 14, the first piston shaft 15, the second piston 39 and the first spring 16, and the service life of the cutting wheel 12 is effectively prolonged.

In the present embodiment, the second chute 38 is provided with the stopper plates 29 at both ends. The position of the sliding plate 9 sliding in the second sliding chute 38 is limited by the limit plate 29, and the sliding plate 9 is prevented from sliding out of the second sliding chute 38.

The above only is the preferred embodiment of the present invention, not therefore the limit the patent protection scope of the present invention, all applications the equivalent structure transformation made by the contents of the specification and the drawings of the present invention is directly or indirectly applied to other related technical fields, and all the same principles are included in the protection scope of the present invention.

Claims

1. The silicon carbide semiconductor slice fixing clamp is characterized by comprising a third mounting plate (18), wherein a first sliding groove (19) is formed in the third mounting plate (18), a first roller (27) sliding along the first sliding groove (19) is arranged in the first sliding groove (19), a pair of first rollers (27) is arranged, a clamping plate (17) is arranged on the first roller (27), a second hydraulic rod (21) is arranged on one side of the clamping plate (17), a first hydraulic pump (2) is arranged on one side, far away from the clamping plate (17), of the second hydraulic rod (21), a fourth mounting plate (30) is arranged on one side, opposite to the clamping plate (17), a fifth piston (31) is arranged at the lower end of the fourth mounting plate (30), a third piston shaft (33) is arranged on one side, far away from the fourth mounting plate (30), of the third piston shaft (33) is arranged on one side, far away from the fifth piston (31), of the third piston shaft (34), install second gyro wheel mount pad (26) on sixth piston (34), install second pivot (35) on second gyro wheel mount pad (26), second gyro wheel (36) are installed to the periphery of second pivot (35), are equipped with third spring (32) between fifth piston (31) and sixth piston (34), and third spring (32) cup joint the periphery at third piston axle (33).

2. The silicon carbide semiconductor slice fixing clamp according to claim 1, wherein a fourth piston (25) is mounted on a side of the clamping plate (17) close to the first hydraulic pump (2), a second piston shaft (24) is mounted on a side of the fourth piston (25) far from the clamping plate (17), a third piston (22) is mounted on a side of the second piston shaft (24) far from the fourth piston (25), and the third piston (22) is mounted on the second hydraulic pump (21).

3. The silicon carbide semiconductor slice fixing jig according to claim 1, wherein a second spring (23) is provided between the fourth piston (25) and the third piston (22), and the second spring (23) is fitted around the outer periphery of the second piston shaft (24).

4. The silicon carbide semiconductor slice fixing clamp as claimed in claim 1, wherein a speed reducing sleeve (28) is sleeved on the periphery of the second roller (36).

5. A slicing machine, comprising a slicing box (1), a slicing cavity (3) is arranged in the slicing box (1), a silicon carbide semiconductor slice fixing clamp according to any one of claims 1 to 4 is arranged in the slicing cavity (3), a first hydraulic pump (2) is arranged on the slicing box (1), a limiting shaft sleeve (20) for a second hydraulic rod (21) to penetrate through is arranged on the slicing box (1), and a third mounting plate (18) is arranged in the slicing cavity (3).

6. The slicing machine according to claim 5, wherein a first mounting plate (5) is mounted at the upper end of the slicing box (1), a storage battery (4) is mounted on one side of the first mounting plate (5), a second hydraulic pump (6) is mounted on one side, away from the storage battery (4), of the first mounting plate (5), a first hydraulic rod (7) is mounted on one side, away from the first mounting plate (5), of the second hydraulic pump (6), a motor mounting seat (10) is mounted on the first hydraulic rod (7), a motor (11) is mounted on the motor mounting seat (10), a first rotating shaft (13) is mounted on the motor (11), and a cutting wheel (12) is mounted on the first rotating shaft (13).

7. The slicer according to claim 6, wherein the second mounting plate (8) is provided with a second sliding slot (38) arranged along the vertical direction, one side of the second mounting plate (8) is provided with a sliding plate (9) sliding along the second sliding slot (38), the motor mounting seat (10) is mounted on the sliding plate (9), and the second sliding slot (38) is internally provided with a lock catch (37) for limiting the sliding of the sliding plate (9).

8. The slicer according to claim 7, wherein a first piston (14) is mounted on one side of the sliding plate (9) close to the motor mounting seat (10), a first piston shaft (15) is mounted on one side of the first piston (14) far away from the sliding plate (9), a second piston (39) is mounted on one side of the first piston shaft (15) far away from the first piston (14), the second piston (39) is mounted on the motor mounting seat (10), a first spring (16) is arranged between the first piston (14) and the second piston (39), and the first spring (16) is sleeved on the periphery of the first piston shaft (15).

9. The slicer according to claim 7, wherein the second chute (38) is provided with a limit plate (29) at both ends thereof.