CN210465578U

CN210465578U - Lower electrode simulation detection system

Info

Publication number: CN210465578U
Application number: CN201921273571.7U
Authority: CN
Inventors: 梁君; 李东一
Original assignee: Chongqing Zhenbao Industrial Co ltd
Current assignee: Chongqing Zhenbao Technology Co ltd
Priority date: 2019-08-07
Filing date: 2019-08-07
Publication date: 2020-05-05
Anticipated expiration: 2029-08-07

Abstract

The utility model discloses a lower electrode simulation detection system, which comprises a detection box, wherein the detection box is of a hollow structure and is internally provided with a detection chamber; the vacuum pump is used for vacuumizing the detection chamber; and the conductive connector is vertically arranged in the detection chamber, and a detection connection port which is communicated with the conductive connector is arranged on the outer side wall of the detection box. By adopting the scheme, the using environment of the lower electrode is fully simulated, the influence of ambient air, humidity and the like is eliminated, the indexes such as the resistance and the leakage current of the lower electrode are rapidly detected, the detection efficiency and the detection quality are greatly improved, the unqualified lower electrode plate is effectively prevented from being used for production, the yield of later-stage etching products is favorably improved, and meanwhile, safety accidents are reduced.

Description

Lower electrode simulation detection system

Technical Field

The utility model relates to a LCD is carved reaction chamber part field futilely, concretely relates to lower part electrode simulation detecting system.

Background

The lower electrode is widely applied to the dry etching process of flat panel display devices and integrated circuits, and mainly comprises a base material, an aluminum oxide coating on the surface of the base material, a tungsten coating and an electrode rod arranged on the base material, wherein high voltage is mainly introduced through the electrode rod in the using process, the coating structure of the lower electrode is that an electrode layer (tungsten layer) is clamped between an upper insulating layer and a lower insulating layer (aluminum oxide), the electrode layer (tungsten layer) is powered by the conductive rod and static electricity is formed on the surface of the upper insulating layer, and a glass panel needing to be processed is adsorbed and fixed through the generated static electricity. With the progress of technology, the requirement for the insulation of the coating is higher and higher. The lower electrode is in the long-term storage in-process, receives influence such as ambient temperature, humidity easily, for example when the insulating coating on parent metal surface wets or electrode bar self is impaired, then can influence the electrically conductive efficiency of electrode bar greatly, also can increase the leakage current of lower electrode lower part insulating layer to influence product etching quality, whether the urgent need for a quick detection lower part electrode quality equipment up to standard, in order to ensure that it can normally be used for etching production, avoid appearing safety or quality accident.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model provides a lower part electrode simulation detecting system through simulation service environment, and the lower part electrode is detected fast to index such as resistance, leakage current, realizes the short-term test of lower part electrode, ensures the safety in production.

In order to achieve the above purpose, the utility model discloses technical scheme as follows:

the lower electrode simulation detection system is characterized by comprising:

the detection box is of a hollow structure, and a detection chamber is arranged in the detection box;

the vacuum pump is used for vacuumizing the detection chamber;

and the conductive connector is vertically arranged in the detection chamber, and a detection connection port which is communicated with the conductive connector is arranged on the outer side wall of the detection box.

By adopting the structure, in the detection process, the lower electrode is placed in the detection chamber, the electrode rod is in contact with the conductive connector, the detection chamber is vacuumized by the vacuum pump, the vacuum environment in the etching process is simulated, and then the lower electrode is connected with the detection connection port by the insulation resistance tester, is electrified and is detected to be conducted and have electric leakage, so that the lower electrode is rapidly detected.

Preferably, the method comprises the following steps: the indoor heating aluminum plate that has the level setting of detection, leave the clearance between heating aluminum plate's circumference outer fringe and the detection case inside wall, the inside evenly distributed of this heating aluminum plate has the heating rod, be equipped with the heating that switches on with all heating rods on the detection case lateral wall and connect the mouth. By adopting the scheme, on one hand, the heating environment in the etching process is simulated, on the other hand, the lower electrode can be dried, moisture is evaporated, the influence of a damp insulating coating is avoided or weakened, and the accuracy of a detection result is improved.

Preferably, the method comprises the following steps: the position that corresponds conductive contact on the heating aluminum plate is equipped with the mounting hole, conductive contact is located this mounting hole, and it is including from top to bottom just to insulating footstock and the insulator foot that sets up, and wherein the upper surface of insulating footstock flushes with heating aluminum plate's upper surface, there is the metal conducting rod through the vertical supporting of spring on the insulator foot, when the spring is in natural state, the upper end protrusion in the upper surface of insulating footstock of metal conducting rod, heating aluminum plate, the lower extreme of metal conducting rod passes through the electric wire and detects and connects mouthful electric connection. Scheme more than adopting because the lower part electrode is heavier usually, sets up like this and can avoid transferring the in-process at the lower part electrode, takes place the rigidity touching with metal conducting rod, causes the damage to it, ensures simultaneously that the lower part electrode is transferred after, can hug closely with heating aluminum plate, avoids appearing the gap, is favorable to further improving the accuracy of testing result, and metal conducting rod adopts elastic support simultaneously, avoids direct bearing, is favorable to prolonging its life.

Preferably, the method comprises the following steps: insulating footstock and insulating base fixed connection to be equipped with the guide holder between the two, the guide holder has the open installation cavity in upper end, the vertical setting in this installation cavity of metal conducting rod, the position that metal conducting rod upper end is close to its tip have with installation cavity sliding fit's lead the flat dish, on the metal conducting rod was located to the spring housing, both ends respectively with lead flat dish and installation cavity diapire butt about it, when the spring was in natural state, lead the upper surface of flat dish and insulating footstock and flush. By adopting the scheme, the telescopic position of the metal conducting rod is favorably ensured to be fixed, the metal conducting rod is prevented from deflecting, and the electrode rod on the lower electrode can be ensured to be in direct contact with the metal conducting rod.

Preferably, the method comprises the following steps: and the detection box is provided with a ventilation valve communicated with the detection chamber. The air pressure in the detection chamber and the air pressure outside the detection chamber can be quickly balanced, the vacuum environment is eliminated, the detection chamber is convenient to open, and the lower electrode is taken out.

Preferably, the method comprises the following steps: the vacuum pump is provided with a freezer. By adopting the scheme, the vacuum pump can be cooled, and the service life and the working time of the vacuum pump are prolonged.

Preferably, the method comprises the following steps: the detection case is including the box that is the cuboid structure, detect the room shaping on the box, its upper end is uncovered, the box dispose with detect the top cap that the room suited, the box up end is equipped with the sealing washer, the sealing washer is located the circumference outside that detects the room. By adopting the scheme, the detection chamber can be conveniently and rapidly sealed, the sealing performance of the detection chamber is improved, and the detection efficiency is favorably improved.

Preferably, the method comprises the following steps: the both ends of at least one diagonal of box all are equipped with the locating pin, the vertical setting up of locating pin, have on the top cap with the locating pin one-to-one's locating pin hole. By adopting the scheme, the top cover and the box body can be quickly matched and fixed, and the sealing performance of the detection chamber is prevented from being reduced due to the deflection of the top cover.

Preferably, the method comprises the following steps: clamping pieces are symmetrically arranged on the periphery of the box body and used for clamping the top cover and the box body. By adopting the scheme, the top cover and the box body are ensured to be relatively fixed, the stability of the top cover in the detection process is further improved, and the sealing performance is improved.

Preferably, the method comprises the following steps: the detection box is provided with an electric cabinet, the electric cabinet comprises a PLC (programmable logic controller) and a touch screen connected with the PLC, and a transparent observation window is arranged on the detection box. By adopting the scheme, the detection parameters can be adjusted in real time according to the detection condition, the detection accuracy is improved, and the method can adapt to different lower electrodes.

Compared with the prior art, the beneficial effects of the utility model are that:

adopt the utility model provides a lower part electrode simulation detecting system, influence such as environmental air and humidity are got rid of to abundant simulation lower part electrode service environment, and indexes such as short-term test lower part electrode resistance and leakage current improve detection efficiency and detection quality greatly, prevent effectively that unqualified lower part plate electrode from being used for production, are favorable to improving the yields of later stage etching product, reduce the incident simultaneously.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is an isometric view of FIG. 1;

FIG. 3 is a cross-sectional view of FIG. 1;

FIG. 4 is an enlarged view of a portion A of FIG. 3;

FIG. 5 is an exploded view of FIG. 1;

FIG. 6 is a partial enlarged view of FIG. 5 at B;

fig. 7 is a schematic view of a conductive contact mounting structure.

Detailed Description

The present invention will be further described with reference to the following examples and accompanying drawings.

Referring to fig. 1 to 7, the lower electrode simulation test system mainly comprises a test box 1 with a hollow structure, a vacuum pump 2 and a conductive connector 3, as shown in fig. 3 and 5, in the present application, the detection box 1 mainly includes a box body 1a having a substantially rectangular structure, a supporting frame 1c is provided at the bottom of the box body 1a, a detection chamber 10 having a rectangular cross section is provided in the box body 1a, the top of the detection chamber 10 is open, the box body 1a is configured with a top cover 1b, the top cover 1b can completely cover the top of the detection chamber 10, the lower surface of the top cover 1b is a smooth plane, which is convenient for being matched with the upper surface of the box body 1a to realize the sealing of the detection chamber 10, the upper surface of the top cover 1b is provided with reinforcing plates 1b1 distributed longitudinally and longitudinally, and the reinforcing plates 1b1 can prevent the phenomena that the top cover 1b is deformed and deformed to cause vacuum failure and the like in the. The reinforcing plate 1b1 is provided with four symmetrically arranged hanging holes 1b0 to facilitate the hanging of the top cover 1 b.

In this embodiment, in order to realize top cap 1b and box 1a rapid fit, accomplish the sealed to detecting room 10, so all the symmetry is provided with vertical locating pin 15 up at box 1a top four corners, and just be equipped with locating pin hole 16 to locating pin 15's position on top cap 1b, when top cap 1b transfers, only need the locating pin 15 at diagonal both ends to cooperate with corresponding locating pin hole 16, top cap 1b and box 1 a's relative position then realizes fixedly, meanwhile, be equipped with at box 1a upper end terminal surface and be the seal ring 14 of square ring form, seal ring 14 salient is in box 1 a's upper end terminal surface, and be located the circumference outside of detecting room 10, after top cap 1b transfers, under its dead weight effect, its lower surface and seal ring 14 in close contact with, can improve the leakproofness in the detecting room 10 greatly.

Considering that the position of the top cover 1b may be affected by air pressure or environmental vibration, a clamping member 6 is further disposed on the box 1b, as shown in fig. 1 to 4, the clamping member 6 mainly includes a fixed block 60 and a movable block 61, both of which are substantially L-shaped, wherein the lower end of the fixed block 60 is fixedly connected with the box 1a, the lower end of the movable block 61 is hinged to the fixed block 60 through a connecting shaft 62, the movable block 61 can rotate around the connecting shaft 62, when the movable block 61 is in a vertical state, at least a part of the movable block is located right above the top cover 1b, and a locking bolt 63 vertically disposed is disposed on the movable block 61 of the part, so that a certain pressure can be applied to the top cover 1b by screwing the locking bolt 63, so that the top cover 1b is further attached to the box 1a, and the sealing reliability is improved.

The vacuum pump 2 is mainly used for performing a vacuum pumping operation on the detection chamber 10 to simulate a vacuum environment, as shown in fig. 1 and 5, the vacuum pump 2 is communicated with the inside of the detection chamber 10 through a pipeline, correspondingly, a ventilation valve 13 communicated with the inside of the detection chamber 10 is arranged on the outer side wall of the box body 1a, the ventilation valve 13 can be opened or closed to communicate or isolate the detection chamber 10 with the air pressure of the external environment, when the detection process is performed, the ventilation valve 13 is closed, the detection chamber 10 is pumped by the vacuum pump 2, after the detection is completed, the ventilation valve 13 is opened to balance the internal pressure of the detection chamber 10 with the external pressure, so as to rapidly open the top cover 1b, of course, in order to ensure the reliability of the vacuum environment, a vacuum gauge is arranged on the box body 1a, the vacuum gauge can measure the vacuum degree in the detection chamber 10 in real time, and the vacuum³mba。

In addition, in order to prolong the service life of the vacuum pump 2 and the continuous working time of the vacuum pump 2, the refrigerator 5 is further provided for the vacuum pump 2 in the embodiment, and the refrigerator 5 can perform continuous cooling treatment on the vacuum pump 2 according to the temperature of the vacuum pump 2.

Except that the simulation vacuum environment in the detection room 10 in this application, still fully simulate the heating environment, can eliminate insulating coating's the influence of weing simultaneously, as shown in fig. 3 to 7, horizontal supporting has heating aluminum plate 4 in the detection room 10, leave the clearance between heating aluminum plate 4's circumference outer fringe and the lateral wall of detection room 10, so that pipeline distribution connects and wears out, heating aluminum plate 4 inside evenly distributed has many heating rods, the heating rod is parallelly connected to together through many electric wires, be equipped with on the box 1a with heating connection mouth 12, through heating connection mouth 12 can carry out the electrical heating to all heating rods, with the temperature in the improvement detection room 10, thermocouple interface 18 on corresponding box 1a, through thermocouple interface 18 mountable thermocouple, the thermocouple stretches into in the detection room 10, but the temperature in the real-time measurement detection room 10.

The four corners and the edge middle part position of heating aluminum plate 4 still are equipped with fixed orifices 41, and fixed orifices 41 are the effect of fixed hot plate, and the position that corresponds fixed orifices 41 on the diapire of box 1a has set firmly metal cushion 1a0, and heating aluminum plate 4 then fixed stay in metal cushion 1a0 adopts this kind of mode, and the dismouting of being convenient for heating aluminum plate 4 is changed, or is changed etc. to the maintenance of heating rod.

In this embodiment, the conductive connector 3 mainly includes an insulating base 30 and an insulating top seat 31, which are disposed opposite to each other, and a metal conductive rod 33, wherein the insulating base 30 and the insulating top seat 31 are both cylindrical ceramic bodies, the insulating base 30 and the insulating top seat 31 are fixedly connected through a vertically disposed connection column, a mounting hole 40 adapted to the insulating base 30 is disposed at a corresponding position on the heating aluminum plate 4, the conductive connector 3 is movably disposed in the mounting hole 40, an upper surface of the insulating top seat 31 is flush with an upper surface of the heating aluminum plate 40, meanwhile, a guide seat 34 having a columnar structure is disposed between the insulating base and the insulating top seat, an upper end surface of the guide seat 34 is flush with an upper surface of the insulating top seat 31, a mounting cavity 340 having a columnar structure is disposed inside the guide seat 34, an upper end of the mounting cavity 340 is open, the metal conductive rod 33 is movably disposed in the mounting cavity 340 and is coaxial with the mounting cavity 340, the lower extreme of metal conducting rod 33 runs through out the lower surface of heating aluminum plate 4, the position that the upper end of metal conducting rod 33 is close to the tip has the flat dish 330 of leading with installation cavity 340 sliding fit, the cover is equipped with spring 32 on the metal conducting rod 33, the upper and lower both ends of spring 32 respectively with lead the diapire butt of flat dish 330 and installation cavity 340, when spring 32 is in initial condition, when only receiving the gravity compression of metal conducting rod 33 promptly, the upper surface of leading flat dish 330 flushes with the upper surface of heating aluminum plate 40, the upper end of metal conducting rod 33 has the part of outstanding upper surface in heating aluminum plate 40 simultaneously.

When the upper end of the metal conducting rod 33 is pressed, the spring 32 is compressed, the metal conducting rod 33 moves downwards until the end face of the upper end of the metal conducting rod 33 is flush with the upper surface of the heating aluminum plate 40, namely when the electrode rod on the lower electrode is placed on the heating aluminum plate 4 just opposite to the metal conducting rod 33, the metal conducting rod 33 is always kept in a conducting state with the electrode rod under the reaction force of the spring 32, and meanwhile, the situations that a large gap is formed between the lower electrode and the surface of the heating aluminum plate 4, or the stress is uneven and the like are avoided.

Be equipped with on the lateral wall of box 1a and detect and connect mouth 11, detect and connect mouth 11 and pass through the lower extreme electric connection of electric wire and metal conducting rod 33, in the testing process like this, link to each other with detecting and connect mouth 11 through high-power insulation resistance tester, can supply power to lower electrode through metal conducting rod 33 to measure its resistance and leak current size in real time.

In order to improve the accuracy of the simulated environmental parameters in the detection process, the device is further provided with an electric cabinet 7, the electric cabinet 7 is fixedly arranged on a supporting frame 1c, a PLC controller is arranged in the electric cabinet 7 and mainly comprises a vacuum control module, a freezing control module and a temperature control module, the vacuum pump 2 and a vacuum gauge are both connected with the vacuum control module, so that the vacuum control module can adjust the vacuum pressure provided by the vacuum pump 2 in real time according to the parameters of the vacuum gauge, the refrigerating machine 5 is connected with the freezing control module, meanwhile, the vacuum pump 2 is also connected with the freezing control module, so that the working state of the refrigerating machine 5 can be controlled according to the temperature fed back by the vacuum pump 2, the refrigerating efficiency is provided, a thermocouple is connected with the temperature control module, a power supply line connected with the heating port 12 is controlled by the temperature control module, so that the temperature control module can control the current input to the heating rod according to the temperature fed back by the, in order to reach the purpose of accurate control inside temperature, corresponding electric cabinet 7 outward appearance is equipped with touch screen 70, and touch screen 70 and each module interconnect can realize that quick opening of individual module or equipment stops and the settlement of experiment parameter etc..

In order to prevent accidents such as electric leakage, fire and the like in the detection chamber 10 caused by control failure, in the embodiment, the observation window 17 is arranged on the box body 1a, the observation window 17 is positioned on the side wall of the box body 1a and is made of transparent explosion-proof glass, and the internal condition of the detection chamber 10 can be well observed through the observation window 17.

Referring to fig. 1 to 7, during detection, firstly, the electrode rod of the lower electrode is placed into the detection chamber 10 in a downward facing manner, and the electrode rod is ensured to be in facing contact with the metal conductive rod 33, then the top cover 1b is covered, and the top cover 1b is fastened with the box body 1a through the clamping piece 6, so that the detection chamber 10 is sealed.

Then the heating connection port 12 is powered on, the heating aluminum plate 4 is heated through the heating rod, the temperature in the detection chamber 10 can be controlled through a temperature control module in the electric cabinet 7 in the process, the detection requirement is met, meanwhile, the vacuum pump 2 is started, the vacuumizing operation of the detection chamber 10 is completed, the vacuum environment is simulated, the refrigerating machine 5 can be controlled to work according to the requirement in the working process of the vacuum pump 2, the temperature protection of the vacuum pump 2 is realized, finally, the high-power insulation resistance tester is connected with the detection connection port 11, the conduction test is carried out, the resistance, the leakage current and the like of the high-power insulation resistance tester are recorded according to feedback data, the quality evaluation of the lower electrode is completed, after the detection is finished, the ventilation valve 13 is opened, the detection chamber 10 is balanced with the external pressure, then the clamping piece 6 is loosened, the top cover 1b can be lifted away.

Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and the scope of the present invention.

Claims

1. A lower electrode analog detection system, comprising:

the detection box (1) is of a hollow structure, and a detection chamber (10) is arranged in the detection box (1);

a vacuum pump (2) for evacuating the detection chamber (10);

conductive connector (3), its vertical setting in detection room (10), be equipped with on detection case (1) lateral wall and connect mouth (11) with the detection that this conductive connector (3) switched on.

2. The lower electrode analog detection system of claim 1, wherein: detect heating aluminum plate (4) that the level that has in room (10) set up, leave the clearance between the circumference outer fringe of heating aluminum plate (4) and detection case (1) inside wall, this heating aluminum plate (4) inside evenly distributed has the heating rod, be equipped with on detection case (1) lateral wall and refute mouth (12) with the heating that all heating rods switched on.

3. The lower electrode analog detection system of claim 2, wherein: the position that corresponds conductive terminal (3) on heating aluminum plate (4) is equipped with mounting hole (40), conductive terminal (3) are located this mounting hole (40), and it is including upper and lower just insulating footstock (31) and insulator foot (30) to setting up, and wherein the upper surface of insulating footstock (31) flushes with the upper surface of heating aluminum plate (4), there are metal conducting rod (33) through the vertical supporting of spring (32) on insulator foot (30), when spring (32) are in natural state, the upper end protrusion in the upper surface of insulating footstock (31) of metal conducting rod (33), heating aluminum plate (4), the lower extreme of metal conducting rod (33) connects mouth (11) electric connection through electric wire and detection.

4. The lower electrode analog detection system of claim 3, wherein: insulating footstock (31) and insulating base (30) fixed connection to be equipped with guide holder (34) between the two, guide holder (34) have upper end open installation cavity (340), metal conducting rod (33) are vertical to be set up in this installation cavity (340), the position that metal conducting rod (33) upper end is close to its tip have with installation cavity (340) sliding fit's flat dish (330) of leading, on metal conducting rod (33) were located in spring (32) cover, both ends respectively with lead flat dish (330) and installation cavity (340) diapire butt about it, when spring (32) were in natural state, lead the upper surface of flat dish (330) and insulating footstock (31) and flush.

5. The lower electrode analog detection system of claim 1, wherein: and the detection box (1) is provided with a ventilation valve (13) communicated with the detection chamber (10).

6. The lower electrode analog detection system of claim 1, wherein: the vacuum pump (2) is provided with a refrigerator (5).

7. The lower electrode analog detection system of claim 1, wherein: detection case (1) is including box (1a) that is the cuboid structure, detection room (10) shaping is on box (1a), and its upper end is uncovered, box (1a) dispose with top cap (1b) that detection room (10) suited, box (1a) up end is equipped with sealing washer (14), sealing washer (14) are located the circumference outside that detects room (10).

8. The lower electrode analog detection system of claim 7, wherein: both ends of at least one diagonal line of box (1a) all are equipped with locating pin (15), locating pin (15) are vertical to be set up, have on top cap (1b) with locating pin hole (16) of locating pin (15) one-to-one.

9. The lower electrode analog detection system of claim 7, wherein: clamping pieces (6) are symmetrically arranged on the periphery of the box body (1a), and the clamping pieces (6) are used for clamping the top cover (1b) and the box body (1 a).

10. The lower electrode analog detection system of claim 1, wherein: the detection box (1) is provided with an electric cabinet (7), the electric cabinet (7) comprises a PLC (programmable logic controller) and a touch screen (70) connected with the PLC, and a transparent observation window (17) is arranged on the detection box (1).