CN210448391U - Filter device - Google Patents

Abstract

The utility model provides a filtering equipment, filtering equipment includes: the filtering device comprises a barrel, a cooling device, a filter element assembly, a vibration module, an air inlet and an air outlet, wherein part of the cooling device is arranged in the barrel, the filter element assembly is arranged in the cooling device, the vibration module is arranged on the filter element assembly, and gas in the filtering equipment enters the barrel from the air inlet and is discharged from the air outlet after passing through the cooling device and the filter element assembly. The technical scheme of this application has effectively solved among the prior art frequently change the filter equipment and has reduced the problem of equipment operating efficiency.

Description

Filter device

Technical Field

The utility model relates to a semiconductor field particularly, relates to a filtration equipment.

Background

The tail gas of Metal-organic Chemical Vapor Deposition (MOCVD) equipment contains a large amount of mixture of macromolecular granular phosphorus deposits and phosphorus reaction solid byproducts. If the mixture of these phosphorus deposits and solid by-products of the phosphorus reaction is not prevented, these toxic and harmful substances are released into the atmosphere and cause environmental pollution. And solid substances in the toxic and harmful substances can block the vacuum pump.

The mixture of a large amount of macromolecular particle phosphorus deposits and the solid-state accessory substance of phosphorus reaction generally passes through monolayer or multilayer filter equipment in the tail gas to detach the solid particle who contains in the reaction tail gas, tail gas processing apparatus's filter core material generally is non-woven fabrics or stainless steel net, prolongs people along with equipment running time, and solid particle deposits gradually in the tail gas in the filter, reaches certain deposit degree after, and the filter core of filter need be changed in order to satisfy the stable requirement of reaction chamber pressure when equipment grows. When the filter element of the filter is replaced, the MOCVD equipment needs to stop producing for hours, the filter device is detached and replaced independently, and the operation efficiency of the equipment is reduced and the production yield is influenced by frequently replacing the filter device.

SUMMERY OF THE UTILITY MODEL

A primary object of the present invention is to provide a filter apparatus to solve the problem of frequent replacement of the filter device in the prior art to reduce the operation efficiency of the apparatus.

In order to achieve the above object, the utility model provides a filtering device, filtering device includes: the filtering device comprises a barrel, a cooling device, a filter element assembly, a vibration module, an air inlet and an air outlet, wherein at least part of the cooling device is arranged in the barrel, the filter element assembly is arranged in the cooling device, the vibration module is arranged on the filter element assembly, and gas in the filtering equipment enters the barrel from the air inlet and is discharged from the air outlet after passing through the cooling device and the filter element assembly.

Further, cooling device includes casing and cooling line, and the cooling line encircles on the casing outer wall, has the interval between cooling line and the barrel, and filter element group spare sets up in the casing, has the interval between the inner wall of vibration module and casing.

Further, the vibration module includes a switch and a vibrator.

Further, the filter device further comprises a first fastener, and the vibration module is mounted at the bottom of the filter element assembly through the first fastener.

Further, the filter device also comprises a vibration reduction structure, and the vibration reduction structure is arranged between the shell and the filter element assembly.

Further, the vibration reduction structure comprises a flange and a metal corrugated pipe, the flange is connected with the filter element assembly, one end of the metal corrugated pipe is connected to the inner wall of the shell, and the other end of the metal corrugated pipe is connected to the flange.

Further, the filter element assembly comprises a filter element group, a first plate body and a second plate body, the first plate body and the second plate body are respectively located at two ends of the filter element group, the first plate body and the second plate body are connected through a second fastener, and the filter element group, the first plate body and the second plate body are connected through flanges on the first plate body.

Further, the casing includes casing and lower casing, and corrugated metal pipe's one end is connected on the inner wall of last casing, and the cooling line encircles in the outside of casing down, and the bottom of casing is open end down, and filtration equipment still includes the drain pan, and the drain pan is located the bottom of barrel, has the interval between drain pan and the lower casing, and the one end and the last casing detachably of barrel are connected, and the other end and the drain pan detachably of barrel are connected.

Further, the number of the filtering devices is multiple, the air inlets of the filtering devices are communicated, and the air outlets of the filtering devices are communicated, or the air outlet of one filtering device in two adjacent filtering devices in the plurality of filtering devices is communicated with the air inlet of the other filtering device.

Further, filtration equipment still includes the protection dustcoat, and the outside at a plurality of filter equipment is established to the protection dustcoat cover, and filtration equipment still includes the air exhaust device that sets up at the protection dustcoat outside, and the inside cavity and the air exhaust device intercommunication of protection dustcoat.

Use the technical scheme of the utility model, filtration equipment includes filter equipment. The filtering apparatus includes: the filtering device comprises a cylinder body, a cooling device, a filter element assembly, a vibration module, an air inlet and an air outlet. At least part of the cooling device is arranged in the cylinder, the filter element assembly is arranged in the cooling device, and the vibration module is arranged on the filter element assembly. The gas in the filtering equipment enters the cylinder from the gas inlet and is exhausted from the gas outlet after passing through the cooling device and the filter element assembly. Like this, when the solid-state material in the gas passes through cooling device, cooling device can cool off solid-state material for the solid-state material condensation of gasification deposits in the barrel, and the solid-state material that does not deposit filters it through filter element group spare again, and the discharge is at last outside the barrel. In this application, the filter element assembly is in a vibrating state under the action of the vibration module. Like this, through the vibration that the vibration module produced, can shake off the adnexed deposit on the filter element group spare surface, strengthened the filter capacity of filter element group spare, improved filtration equipment work efficiency to the maintenance cycle of filtration equipment has been prolonged. Therefore, the technical scheme of this application has effectively solved among the prior art and has changed the problem that filter device reduces equipment operating efficiency frequently.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 shows a schematic perspective view of an embodiment of a filter device according to the invention;

FIG. 2 shows a schematic front view of the filter unit and the cart of the filter apparatus of FIG. 1;

FIG. 3 shows a schematic partial cross-sectional view of a filter device and a cart of the filter apparatus of FIG. 1;

FIG. 4 shows a schematic view of the gas flow direction in the filtering means of the filtering apparatus of FIG. 1;

fig. 5 shows a schematic perspective view of a cooling device of the filter apparatus of fig. 1;

FIG. 6 shows a schematic perspective view of the filter element assembly of the filter apparatus of FIG. 1;

FIG. 7 shows a perspective view of the protective enclosure of the filtration apparatus of FIG. 1; and

fig. 8 shows a schematic view of the communication of two filtering means according to another embodiment of the filtering apparatus according to the present invention.

Wherein the figures include the following reference numerals:

10. a filtration device; 11. an air inlet; 12. an exhaust port; 13. double-ended calipers; 14. an air inlet connecting flange; 15. an exhaust connecting flange; 16. a first fastener; 30. a barrel; 41. a vibration module; 42. a vibration reduction structure; 421. a flange; 422. a metal bellows; 50. a cooling device; 51. a housing; 511. an upper housing; 512. a lower housing; 52. a cooling pipeline; 521. a water inlet; 522. a water outlet; 60. a filter element assembly; 61. a filter element group; 611. a filter element; 62. a first plate body; 63. a second plate body; 64. a third plate body; 70. a protective outer cover; 71. a first cover body; 72. a second cover body; 80. a bottom case; 90. carrying out vehicle supporting; 91. a support plate; 92. a bracket; 93. a support wheel; 94. shock attenuation lower margin.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

Unless specifically stated otherwise, the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

As shown in fig. 1, 3 and 4, the filtering apparatus of the present embodiment includes a filtering device 10. The filter device 10 includes a cylinder 30, a cooling device 50, a filter element assembly 60, a vibration module 41, an air inlet 11, and an air outlet 12. At least a portion of the cooling device 50 is disposed within the barrel 30 and the filter cartridge assembly 60 is disposed within the cooling device 50. The vibration module 41 is disposed on the filter element assembly 60. The air in the filtering device enters the cylinder 30 from the air inlet 11, passes through the cooling device 50 and the filter element assembly 60, and is exhausted from the air outlet 12.

With the technical solution of the present embodiment, the filtering apparatus includes a filtering device 10, which includes a cylinder 30, a cooling device 50, a filter element assembly 60, a vibration module 41, an air inlet 11, and an air outlet 12. When the solid substance in the gas passes through the cooling device 50, the cooling device 50 can cool the solid substance, so that the gasified solid substance is condensed and deposited in the cylinder 30, and the undeposited solid substance is filtered by the filter element assembly 60 and finally discharged out of the cylinder 30. In this embodiment, the filter element assembly 60 is in a vibrating state by the vibrating module 41. In this way, the vibration generated by the vibration module 41 can shake off the attached deposits on the surface of the filter element assembly 60, thereby enhancing the filtering capability of the filter element assembly 60, improving the working efficiency of the filtering apparatus, and prolonging the maintenance period of the filtering apparatus. Therefore, the technical scheme of the embodiment effectively solves the problem that the running efficiency of the equipment is reduced by frequently replacing the filter device in the prior art.

The solid matter in this example is a mixture of macromolecular particulate phosphorus deposits and solid by-products of the phosphorus reaction or a solid arsenic compound.

As shown in fig. 2 to 5, in the present embodiment, the cooling device 50 includes a housing 51 and a cooling line 52. The cooling line 52 is wound around the outer wall of the housing 51 with a space between the cooling line 52 and the drum 30. Thus, the above-described interval allows the cooling line 52 to be located in the space formed between the cylinder 30 and the housing 51. The setting of casing 51 can be separated cooling pipeline 52 and filter element group spare 60, like this, forms cooling space between casing 51 and the barrel 30, and the cooling pipeline 52 of being convenient for carries out the cooling action to the solid state material in the gas earlier, forms filtering space between casing 51 and the filter element group spare 60, and the filter element group spare 60 of being convenient for carries out the filtering action to the solid state material in the gas again. Therefore, the different spaces enable the gases not to interfere with each other in the filtering process, and the filtering effect of the filtering device 10 can be ensured. The intake port 11 is provided on a side wall of the cylinder 30, and the exhaust port 12 is provided on a top wall of the housing 51. The air inlet 11 and the air outlet 12 are respectively located at different positions of the two filtering devices 10, so that the air inlet 11 and the air outlet 12 do not interfere with each other, and air inlet and air outlet are convenient. The filter cartridge assembly 60 is disposed within the housing 51 with a space between the vibration module 41 and the inner wall of the housing 51. Thus, the above-described interval causes the vibration module 41 to vibrate in a certain area, and the influence of the vibration module 41 on the cooling device 50 is reduced.

As shown in fig. 3 and 4, in the present embodiment, the vibration module 41 includes a switch and a vibrator. In the on state of the switch, the vibrator operates to drive the filter element assembly 60 in a vibrating state, and in the off state of the switch, the vibrator stops to bring the filter element assembly 60 to a stationary state. Like this, switch and bobbing machine cooperation easy operation, it is convenient to maintain, has practiced thrift the human cost greatly, and then makes the filter equipment can increase the productivity output value of MOCVD equipment in effectual time.

As shown in fig. 3 and 4, in the present embodiment, the filter device 10 further includes a first fastener 16, and the vibration module 41 is mounted to the bottom of the filter element assembly 60 by the first fastener 16. Thus, there is a sufficient installation space between the filter device 10 and the housing 51 to facilitate installation of the vibration module 41.

As shown in fig. 3 and 4, in the present embodiment, the filter device 10 further includes a vibration dampening structure 42, the vibration dampening structure 42 being disposed between the housing 51 and the filter element assembly 60. The vibration reduction structure 42 is configured to effectively reduce interference of the vibration of the filter element assembly 60 with the cooling device 50.

As shown in fig. 3 and 4, in the present embodiment, the vibration damping structure 42 includes a flange 421 and a metal bellows 422. The flange 421 is connected to the cartridge module 60. The flange 421 is thus provided to facilitate the connection of the metal bellows 422 to the filter element assembly 60. One end of the metal bellows 422 is connected to the inner wall of the housing 51, and the other end of the metal bellows 422 is connected to the flange 421. The metal bellows 422 can work in the high temperature environment of the filter device 10, and meet the use requirements. Meanwhile, the metal corrugated pipe 422 has certain elasticity, so that the impact of the vibration of the filter element assembly 60 on the shell 51 can be effectively reduced, and the stability of the filtering setting work is improved.

As shown in fig. 3, 4 and 6, in the present embodiment, the filter element assembly 60 includes a filter element group 61 and a first plate 62 and a second plate 63, and the first plate 62 and the second plate 63 are respectively located at both ends of the filter element group 61. Filter element group 61, first plate 62, and second plate 63 are attached by a second fastener. The flange 421 is attached to the first plate 62. The filter element group 61 is convenient for workers to replace or clean the filter element group 60. In addition, the gas can be subjected to primary filtration through the filter element group 61, so that the gas meets the emission standard.

As shown in fig. 6, in the present embodiment, the filter element group 61 includes two arranged in the central axis direction of the cylinder 30. A third plate 64 is connected between the two filter element groups 61. Each filter element pack 61 includes eight filter elements 611. The two filter element groups 61 increase the filter area of the filter element 611 so that the filter element group 60 can filter more solid material. Third plate 64 is configured to hold and seal cartridge 611 such that cartridge 611 can be joined to first plate 62 and second plate 63. In other embodiments not shown in the figures, the number of filter element groups is not limited to two, and may be three, four or more, and likewise, the number of filter elements is not limited to eight, and may be two, three, four, seven, nine or more. In addition, be connected with the third plate body between two adjacent filter element groups in a plurality of filter element groups, the effect of fixed and sealed filter core can be played to the third plate body like this.

In this embodiment, the filter element is made of stainless steel wire and has a filtration grade of about 50 μm. The filtering capacity of the filter element can be ensured, and then the gas can meet the emission standard.

As shown in fig. 3 to 5, in the present embodiment, the filtering apparatus further includes a bottom case 80, the housing 51 includes an upper housing 511 and a lower housing 512, the bottom of the lower housing 512 is an open end, and the bottom case 80 is located at the bottom of the drum 30. Like this casing 51, barrel 30 and drain pan 80 form gaseous filter space of filtration jointly between the three, and the filtering equipment of being convenient for filters gas, and the drain pan 80 is located the bottom of barrel 30 simultaneously and is convenient for barrel 30 and drain pan 80 can collect the solid-state material of the sediment after the cooling. The bottom case 80 and the lower case 512 have a space therebetween, and the space facilitates the passage of gas between the bottom case 80 and the lower case 512. One end of the metal bellows 422 is connected to the inner wall of the upper housing 511, and the one end of the metal bellows 422 and the upper housing 511 may be connected by a fastener or may be connected by welding. The cooling pipe 52 is surrounded on the outer side of the lower case 512, so that the lower case 512 is convenient for fixing the cooling pipe 52, and in addition, the cooling pipe 52 is longer, so that the lower case 512 inside the cooling pipe 52 has enough cooling space to cool more solid substances, and at the same time, more solid substances can be deposited into the bottom case 80. One end of the cylinder 30 is detachably connected to the upper case 511, and the other end of the cylinder 30 is detachably connected to the bottom case 80. This facilitates removal and installation when cleaning or replacing the device within the filter apparatus 10. The above-mentioned detachable connection means connection by the double-headed caliper 13 or bolt and screw connection.

As shown in fig. 5, in the present embodiment, the cooling line 52 is preferably a cooling water pipe. During the operation of the filtering device 10, cold water at about 15 ℃ is introduced from the water inlet 521 of the cooling pipeline 52, passes through the cooling water pipeline, and is discharged from the water outlet 522 of the cooling pipeline 52.

As shown in fig. 1 and 7, in the present embodiment, the filtering apparatus further includes a protective housing 70, the protective housing 70 covers the plurality of filtering devices 10, the filtering apparatus further includes an air extractor disposed outside the protective housing 70, and the internal cavity of the protective housing 70 is communicated with the air extractor. Thus, on the one hand, the inner cavity of the protective outer cover 70 can provide a negative pressure environment, and the solid substance is prevented from leaking when the sealing performance is poor, so that harm is caused to a human body. On the other hand, the protective cover 70 can protect the filter device 10 from damage.

As shown in fig. 1 and 7, in the present embodiment, the shield case 70 includes a first case 71 and a second case 72, and the first case 71 is pivotably connected with respect to the second case 72. The pivotal connection described above provides for convenient operation by the worker. The pivotal connection of the present embodiment is achieved by means of a pivot and snap fit. Of course, the pivotal connection may not be limited to the above-described manner, as long as the first cover 71 can be opened and closed with respect to the second cover 72, which is within the protection scope of the present embodiment. In this way, the first cover 71 can be opened with respect to the second cover 72 to mount the filter device 10, thereby protecting the filter device 10.

In this embodiment, the filter apparatus is part of the vacuum system of the MOCVD tool and is located at the front end of the vacuum pump. The air extraction means external to the protective enclosure 70 is preferably a vacuum pump.

As shown in fig. 1 to 3, in the present embodiment, there are two filter devices 10, and the air inlets 11 of the filter devices 10 communicate with each other, and the air outlets 12 of the filter devices 10 communicate with each other. The communication mode can increase the pumping speed of the vacuum pump, so that the two filtering devices 10 can filter more solid substances, and the solid substances can be effectively prevented from being exhausted to the atmosphere through the vacuum pump. Meanwhile, the service cycle of the filtering device can be prolonged, and the service life of the filtering equipment is further prolonged. In other embodiments not shown in the figures, the filter means may be three, four or more.

As shown in fig. 1 to 3, in the present embodiment, the filtering apparatus further includes a cart 90, and two filtering devices 10 are detachably attached to the cart 90. The cart 90 is capable of supporting two filter assemblies 10. The cart 90 includes a pallet 91, a bracket 92, and a support wheel 93, the bracket 92 is disposed on the pallet 91, the support wheel 93 is disposed at the bottom of the pallet 91, and two filter devices 10 are detachably attached to the pallet 91. In this way, the cart 90 is able to move two filter assemblies 10 into and out of the protective housing 70, facilitating maintenance of two filter assemblies 10.

As shown in fig. 2 to 4, in the present embodiment, a shock absorbing anchor 94 is provided on the supporting plate 91, and one end of the shock absorbing anchor 94 is connected to the supporting plate 91 and the other end thereof can contact the ground. In the case where the two first filtering devices 10 are operated, the shock-absorbing anchor 94 is provided to prevent the cart 90 from moving, so that the filtering apparatus can be stably operated. Specifically, the bottom case 80 is fixed to the cart 90, the cylinder 30 is coupled to the bottom case 80 by the double-headed calipers 13, one end of the metal bellows 422 is installed in the upper case 511, the other end of the metal bellows 422 is coupled to the top of the filter element assembly 60, and the vibration module 41 is installed at the bottom of the filter element assembly 60. The vibration module 41 mounted on the cooling device 50 is put into the cylinder 30 together with the metal bellows 422. The filter element assembly 60 and the cooling device 50 are connected together by screws and bolts. The upper housing 511 is connected to the upper portion of the cylinder 30 by the double-headed caliper 13. After the two filtering devices 10 are installed at opposite positions, the two filtering devices 10 are connected through the air inlet connecting flange 14 and the air outlet connecting flange 15 in sequence, the air inlet 11 is communicated with the air inlet connecting flange 14, and the air outlet 12 is communicated with the air outlet connecting flange 15. The shock absorbing anchor 94 is installed for use when the pallet 90 is positioned. Finally, the protective outer cover 70 is mounted on the periphery of the cart 90.

As shown in fig. 1 to 7, the specific working process of this embodiment is as follows:

two filter devices 10 are fixed to a cart 90, and the two filter devices 10 are carried into the shield case 70 by the cart 90. The air inlets 11 of the two filtering devices 10 are communicated with the tail gas pipeline of the equipment outside the filtering equipment, and the air outlets 12 of the two filtering devices 10 are communicated with the vacuum pump outside the filtering equipment. The gas simultaneously enters the right filter device 10 from the gas inlet 11 of the right filter device 10 (on the right in fig. 3) and the left filter device 10 from the gas inlet 11 of the left filter device 10 (on the left in fig. 3). The gas enters from top to bottom along the cooling space between the cylinder 30 and the cooling pipeline 52 and then flows upwards from the bottom of the lower shell 512, and the gas enters the inside of the filter element group 61 from bottom to top through the outside of the filter element group 61 along the filtering space between the lower shell 512 and the filter element group 61. In this process, the solid substance in the gas is cooled by the cooling space and then deposited, the deposited solid substance falls on the inner wall of the cylinder 30 and the inner wall of the bottom case 80, and the solid substance in the gas passes through the filtering space and then adheres to the surfaces of the plurality of filter elements 611 and the inner wall of the bottom case 80. Under the action of the vibration module 41, the deposits attached to the surfaces of the filter elements 611 can be shaken off, and the effect of the filter elements 611 for filtering solid substances in the gas is enhanced. Meanwhile, under the action of the vibration reduction structure 42, the interference of the vibration of the filter element assembly 60 to the cooling device 50 can be effectively reduced. The filtered gas is discharged to the atmosphere or to a detection device connected to the outside of the filtering device by the vacuum pump through the exhaust port 12 of the two filtering devices 10.

As shown in fig. 8, in another embodiment of the filtering apparatus, the same as the filtering process of the filtering device of the above-described embodiment, the difference from the above-described embodiment is that the air outlet 12 of one filtering device 10 (located at the right in fig. 8) of the adjacent two filtering devices 10 communicates with the air inlet 11 of the other filtering device 10 (located at the left in fig. 8).

In particular, in another embodiment, the right filter device 10 and the left filter device 10 are fixed to a cart (not shown) through which the two filter devices are fed into a protective housing (not shown). The air inlet 11 of the right filter device 10 is connected to the exhaust pipeline of the equipment outside the filter equipment, and the air outlet 12 of the left filter device 10 is connected to the vacuum pump outside the filter equipment. The gas enters the right filter device 10 from the gas inlet 11 of the right filter device 10, and the gas enters the left filter device 10 from the gas outlet 12 of the right filter device 10. In the process, gas enters from top to bottom along the cooling space between the cylinder and the cooling pipeline and then flows upwards from the bottom of the lower shell, and then enters the inside of the filter element group from bottom to top through the outside of the filter element group along the filtering space between the lower shell and the filter element group. In the process, the solid substances in the gas are cooled by the cooling space and then deposited, the deposited solid substances can fall on the inner wall of the cylinder body and the inner wall of the bottom shell, and the solid substances in the gas can be attached to the surfaces of the filter elements and the inner wall of the bottom shell after passing through the filtering space. Under the effect of vibration module, can shake off the deposit that adheres to on a plurality of filter core surfaces, strengthen the effect of solid-state material in a plurality of filter core filtration gas. Meanwhile, under the action of the vibration reduction structure, the interference of the vibration of the filter element assembly on the cooling device can be effectively reduced. The filtered gas is discharged to the atmosphere or to a detection device connected to the outside of the filtering device by the vacuum pump through the exhaust port 12 of the filtering apparatus 10 on the left side.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, and in the case of not making a contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be interpreted as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and if not stated otherwise, the terms have no special meaning, and therefore, the scope of the present invention should not be construed as being limited.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A filtration apparatus, comprising:

filter equipment (10), including barrel (30), cooling device (50), filter element group spare (60), vibration module (41), air inlet (11) and gas vent (12), at least part cooling device (50) set up in barrel (30), filter element group spare (60) set up in cooling device (50), vibration module (41) set up on filter element group spare (60), gaseous follow in the filtration equipment air inlet (11) enter into extremely in barrel (30), pass through cooling device (50) reach behind filter element group spare (60) by gas vent (12) discharge.

2. The filtering apparatus according to claim 1, wherein the cooling device (50) comprises a housing (51) and a cooling line (52), the cooling line (52) surrounding the outer wall of the housing (51), the cooling line (52) being spaced from the drum (30), the filter element assembly (60) being disposed within the housing (51), the vibration module (41) being spaced from the inner wall of the housing (51).

3. The filtering device according to claim 2, characterized in that the vibration module (41) comprises a switch and a vibrator.

4. The filtering apparatus according to claim 1, wherein the filtering device (10) further comprises a first fastener (16), the vibration module (41) being mounted at the bottom of the filter element assembly (60) by means of the first fastener (16).

5. The filter apparatus of claim 2, wherein the filter device (10) further comprises a vibration dampening structure (42), the vibration dampening structure (42) being disposed between the housing (51) and the filter element assembly (60).

6. A filter device according to claim 5, wherein the vibration reduction structure (42) comprises a flange (421) and a metal bellows (422), the flange (421) being connected to the filter element assembly (60), one end of the metal bellows (422) being connected to the inner wall of the housing (51), the other end of the metal bellows (422) being connected to the flange (421).

7. A filtering device according to claim 6, characterized in that said filter element group (60) comprises a filter element group (61) and a first plate body (62) and a second plate body (63), said first plate body (62) and said second plate body (63) being located at the two ends of said filter element group (61), respectively, said filter element group (61), said first plate body (62) and said second plate body (63) being connected by means of a second fastening means, said flange (421) being connected on said first plate body (62).

8. The filtering apparatus according to claim 6, wherein the housing (51) comprises an upper housing (511) and a lower housing (512), one end of the metal bellows (422) is connected to an inner wall of the upper housing (511), the cooling pipe (52) surrounds an outer side of the lower housing (512), a bottom of the lower housing (512) is an open end, the filtering apparatus further comprises a bottom case (80), the bottom case (80) is located at a bottom of the cartridge (30), a space is provided between the bottom case (80) and the lower housing (512), one end of the cartridge (30) is detachably connected to the upper housing (511), and the other end of the cartridge (30) is detachably connected to the bottom case (80).

9. The filtering apparatus according to claim 1, wherein the filtering device (10) is plural, the air inlet (11) of each filtering device (10) is communicated, the air outlet (12) of each filtering device (10) is communicated, or the air outlet (12) of one filtering device (10) of two adjacent filtering devices (10) of the plural filtering devices (10) is communicated with the air inlet (11) of the other filtering device (10).

10. A filter device according to claim 1, further comprising a protective housing (70), the protective housing (70) being arranged outside the plurality of filter means (10), the filter device further comprising air extraction means arranged outside the protective housing (70), the internal cavity of the protective housing (70) being in communication with the air extraction means.

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