CN210448145U - Tail gas treatment and collection device - Google Patents

Abstract

The utility model relates to an environmental protection technical field provides a tail gas treatment collection device, including handling the cavity, establish the cooling cavity in the handling cavity, the tail gas input port of handling the cavity with cooling cavity intercommunication, the cooling cavity is equipped with a set of cooling part respectively along the both sides of tail gas input direction, be equipped with in the cooling cavity and scrape the plate, scrape the plate with the tangent setting of inner wall of cooling cavity, the cooling cavity is through collecting the pipeline and collecting the cavity intercommunication. Through in letting in the cooling chamber of processing chamber with the tail gas that produces in the MOCVD technology, the cooling piece of its both sides carries out the subcooling to the tail gas in the cooling chamber, condenses the noxious material in the tail gas into solid particulate matter, scrapes the plate spare through the setting, hangs the collection to the noxious material of attaching to on the cooling chamber inner wall, effectively reduces the emission of noxious material, environmental protection.

Description

Tail gas treatment and collection device

Technical Field

The utility model relates to an environmental protection technical field especially relates to a tail gas treatment collection device.

Background

With the development of semiconductor production and photovoltaic production process technologies, vapor phase epitaxial growth technology is gradually becoming the mainstream technology in the production process thereof. Meanwhile, a new vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth, namely the MOCVD process (metal organic compound chemical vapor deposition).

MOCVD uses organic compounds of III group and II group elements and hydrides of V group and VI group elements as crystal growth source materials, and carries out vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow various thin layer single crystal materials of III-V group and II-VI group compound semiconductors and multi-element solid solutions thereof, wherein the source materials used for MOCVD growth are inflammable, explosive and toxic substances. The MOCVD reaction gas is mostly thermally decomposed after passing through the reaction chamber, but a part of the MOCVD reaction gas is not completely decomposed, so that untreated exhaust gas cannot be discharged into the atmosphere.

After the tail gas is heated and decomposed by a high-temperature pyrolysis furnace in the tail gas treatment process, toxic substances are collected and treated, and four common treatment methods are adopted: 1) filtering the waste gas after high-temperature pyrolysis by using silicone oil or potassium permanganate solution; 2) carrying out chemical filtration treatment on the waste gas by using a filter flask filled with sulfuric acid, water and sodium hydroxide; 3) performing adsorption treatment on the cooled solid adsorbent; 4) and (5) performing water spraying treatment. The methods 1) and 2) above require the use of a large amount of chemicals, and are not suitable for large-scale MOCVD process production; the method 3) needs to replace the filter element timely to influence the production time of the MOCVD production equipment; the above 4) method requires the use of a large amount of water resources, easily produces a large amount of polluted water, and requires secondary treatment of toxic polluted water.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model aims at providing a tail gas treatment collection device to solve the unable problem of effective processing of the tail gas that contains the toxic substance that produces in the production of current MOCVD technology.

(II) technical scheme

In order to solve the technical problem, the utility model provides a tail gas treatment collection device, including handling the cavity, establish the cooling cavity in the handling cavity, the tail gas input port of handling the cavity with the cooling cavity intercommunication, the cooling cavity is equipped with a set of cooling part respectively along the both sides of tail gas input direction, be equipped with in the cooling cavity and scrape the plate, scrape the plate with the tangent setting of inner wall of cooling cavity, the cooling cavity is through collecting pipeline and collection cavity intercommunication.

The scraping plate comprises an Archimedes spiral scraping plate body, and a plurality of supporting rods are uniformly arranged on the Archimedes spiral scraping plate body along the circumferential direction.

The center end of the Archimedes spiral scraping piece is connected with the collecting pipeline, and a notch matched with the Archimedes spiral scraping piece is formed in the collecting pipeline.

The device further comprises a driving motor, the driving end of the driving motor is connected with a central shaft of the hollow rotating platform, and a turntable of the hollow rotating platform is connected with the end part of the collecting pipeline.

Wherein, still include nitrogen gas pipeline, nitrogen gas pipeline's one end is installed on sealed protecting cover, nitrogen gas pipeline with collect the pipeline intercommunication.

Wherein, the cooling piece includes many cooling coil and a plurality of cooling fin, many the cooling coil is parallelly connected.

The collecting pipeline is communicated with the collecting cavity through a gas-solid conveying pipeline, and an anti-backflow guide sheet is arranged in the gas-solid conveying pipeline.

The gas-solid collecting device comprises a collecting chamber, a gas-solid conveying pipeline, a coaming, a grid and a collecting cavity, wherein the collecting chamber is internally provided with the coaming matched with the gas-solid conveying pipeline, the upper end of the coaming is connected with the top side of the collecting chamber, the lower end of the coaming is arranged in a suspension manner, the two sides of the coaming are respectively provided with the grid, the lower end of the grid is connected with the bottom side of the collecting chamber, and.

Wherein, one side of the collection chamber is provided with an exhaust gas output pipeline.

The device also comprises a support frame, and the processing chamber is arranged on the support frame.

(III) advantageous effects

The utility model provides a pair of tail gas treatment collection device, through let in the cooling chamber in the processing chamber with the tail gas that produces in the MOCVD technology, the cooling piece of its both sides carries out the subcooling to the tail gas in the cooling chamber, condenses the noxious material in the tail gas into solid particulate matter, scrapes the plate through the setting, hangs the collection to the noxious material that adheres to on the cooling chamber inner wall, effectively reduces the emission of noxious material, environmental protection.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.

Fig. 1 is a schematic structural view of a tail gas treatment and collection device according to an embodiment of the present invention;

fig. 2 is a sectional view of a tail gas treatment and collection device according to an embodiment of the present invention;

fig. 3 is a sectional view of a cooling chamber of an exhaust gas treatment collection device according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a scraping plate member of the tail gas treatment and collection device according to the embodiment of the present invention;

fig. 5 is a cross-sectional view of a nitrogen conveying pipeline of the tail gas treatment and collection device of the embodiment of the present invention;

fig. 6 is a schematic structural diagram of a collecting chamber of the tail gas treatment collecting device according to the embodiment of the present invention.

In the figure, 1: a processing chamber; 2: a tail gas input port; 3: a collection chamber; 4: a support frame; 5: a cooling chamber; 6: a cooling member; 7: a wiper blade member; 8: a cooling coil; 9: cooling the fins; 10: a collection pipe; 11: a nitrogen gas delivery pipe; 12: a sealing shield; 13: an anti-backflow guide plate; 14: an exhaust gas output pipe; 15: archimedes spiral doctor blade; 16: a support bar; 17: cutting; 18: a drive motor; 19: a hollow rotating platform; 20: rotating the pipeline; 21: a gas-solid delivery conduit; 22: enclosing plates; 23: a grid.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the present invention, unless otherwise specified, "plurality", and "plural" mean two or more, and "several", and "several groups" mean one or more.

As shown in fig. 1 and fig. 2, the embodiment of the utility model provides a tail gas treatment collection device, including processing chamber 1, establish cooling chamber 5 in processing chamber 1, cooling chamber 5 set up the number and can design according to processing chamber 1's size and actual need. The tail gas input port 2 and the cooling chamber 5 intercommunication of processing cavity 1, the both sides of cooling chamber 5 along tail gas input direction are equipped with a set of cooling part 6 respectively, are equipped with scraper blade 7 in the cooling chamber 5, and scraper blade 7 sets up with the inner wall of cooling chamber 5 is tangent, and cooling chamber 5 passes through collecting pipe 10 and collects cavity 3 intercommunication.

It can be understood that, as shown in fig. 3, in this embodiment, three cooling chambers 5 are disposed in the processing chamber 1, the tail gas input port 2 is disposed on the left side of the processing chamber 1 along the horizontal direction, and the three cooling chambers 5 are all horizontally and uniformly disposed in the processing chamber 1 along the tail gas input direction, so that the tail gas entering the processing chamber 1 can be uniformly dispersed, and the processing effect is improved. The two sides of each cooling chamber 5, namely the upper and lower sides of the cooling chamber 5 in this embodiment, are respectively provided with four cooling members 6, so as to perform low-temperature cooling condensation on the toxic substances in the exhaust gas in the corresponding cooling chamber 5. It can be understood that the number of the cooling members 6 is not four as in the present embodiment, and a plurality of cooling members 6 may be provided according to actual needs, and the installation positions of the cooling members 6 are not limited to the upper and lower sides of the cooling chamber 5, and may also be installed at other positions of the cooling chamber 5, so as to achieve the purpose of cooling the cooling chamber 5.

Further, as shown in fig. 4, the scraper member 7 includes an archimedes screw blade 15, and a plurality of support rods 16 are uniformly arranged on the archimedes screw blade 15 along the circumferential direction. It can be understood that the archimedes ' helical blades 15 are arranged tangentially to the inner wall of the cooling chamber 5, in this embodiment, the archimedes ' helical blades 15 are right-handed helical blades, and can scrape off solid toxic particles deposited and adhered on the inner wall of the cooling chamber 5 after clockwise rotation, and the height of the archimedes ' helical blades 15 is consistent with the height of the cooling chamber 5. The four support rods 16 are uniformly distributed on the Archimedes spiral scraping blade 15 along the circumferential direction of the Archimedes spiral scraping blade 15, and play a role in supporting the whole Archimedes spiral scraping blade 15 to keep the shape, and simultaneously ensure that the Archimedes spiral scraping blade 15 only slightly deforms in the rotating process and does not influence the scraping work of the Archimedes spiral scraping blade 15. It is worth mentioning that the number of support bars 16 can be set according to the actual size of the archimedes' screw blade 15 to achieve an optimal support.

Wherein, the central end of the Archimedes spiral scraping blade 15 is connected with the collecting pipeline 10, and the collecting pipeline 10 is provided with a notch 17 matched with the Archimedes spiral scraping blade 15. The collecting pipeline 10 penetrates through the whole treatment chamber 1 along the direction perpendicular to the tail gas conveying direction, a notch 17 is formed in the collecting pipeline 10 corresponding to each cooling chamber 5, and under the rotating scraping action of the Archimedes spiral scraping blades 15, the scraped solid particles are pushed to the central end along the Archimedes spiral scraping blades 15 from outside to inside, enter the collecting pipeline 10 through the notch 17 and fall into the collecting chamber 3.

Further, as shown in fig. 5, a driving motor 18 is further included, a driving end of the driving motor 18 is connected with a central shaft of a hollow rotating platform 19, and a turntable of the hollow rotating platform 19 is connected with an end of the collecting pipe 10. Specifically, the driving end of the driving motor 18 is connected to the central shaft of the hollow rotary platform 19, so as to transmit the rotary power. The outer side of the upper end of the rotary pipeline 20 is in interference fit with a power output hole of a turntable of the hollow rotary platform 19, so that the rotary pipeline 20 and the hollow rotary platform 19 synchronously rotate; the lower end of the rotary pipeline 20 is welded with the upper end of the collecting pipeline 10 to realize synchronous rotation of the collecting pipeline 10, the central end of the Archimedes spiral scraper 15 is welded with the collecting pipeline 10 to realize rotation of the Archimedes spiral scraper 15, and therefore the driving motor 18 drives the Archimedes spiral scraper 15 to rotate. In the present embodiment, the drive motor 18 is preferably a servo drive motor.

Wherein, still include nitrogen gas pipeline 11, the one end of nitrogen gas pipeline 11 is installed on sealed guard 12, and realizes that nitrogen gas pipeline 11 and collection pipeline 10 communicate. The nitrogen conveying pipeline 11 is arranged along the vertical direction, namely perpendicular to the tail gas conveying direction, and is used for conveying nitrogen into the processing chamber 1 and providing certain power for tail gas flowing. A plurality of backflow-preventing guide vanes 13 are arranged in the nitrogen conveying pipeline 11 to prevent the gas-solid mixture in the cooling chamber 5 from flowing back into the nitrogen conveying system. It can be understood that the lower end of the nitrogen conveying pipeline 11 is hermetically mounted on the sealing shield 12, so as to ensure the sealing property of the sealing shield 12, so that the pressure of the nitrogen entering the processing chamber 1 is moderate, the pressure of the nitrogen is greater than the pressure of the gas in the processing chamber 1 and less than the pressure of the tail gas at the tail gas input port 2, and the normal operation of the whole tail gas processing technology is ensured. In other embodiments of the present invention, the nitrogen gas delivery pipe 11 and the collection pipe 10 can be directly connected without being connected by the rotary pipe 20.

In this embodiment, the lower end gas outlet of the nitrogen gas conveying pipeline 11 is welded at the opening on the sealed shield 12, the turntable of the hollow rotating platform 19 is arranged on the inner side of the sealed shield 12, the turntable corresponds to the nitrogen gas conveying pipeline 11, and the collecting pipeline 10 is inserted into the power output hole of the turntable, so that the connection and communication between the collecting pipeline 10 and the nitrogen gas conveying pipeline 11 are realized.

Wherein a hollow rotary platform 19 is arranged on the upper side of the sealed shield 12, and the lower end of the nitrogen conveying pipeline 11 is communicated with the collecting pipeline 10 through a rotary pipeline 20. The nitrogen gas delivery pipe 11, the power output hole of the turntable of the hollow rotary platform 19, the rotary pipe 20 and the collecting pipe 10 are located on the same axis.

Specifically, the center shaft of the hollow rotary platform 19 is installed on the outer side of the sealing shield 12, the turntable of the hollow rotary platform 19 is installed on the inner side of the sealing shield 12, and two sealing rings are arranged between the turntable and the sealing shield 12, so that the sealing connection between the turntable and the nitrogen conveying pipeline 11 and the sealing shield 12 is ensured. The outer side of the upper end of the rotating pipeline 20 is in interference fit with a power output hole of a turntable of the hollow rotating platform 19 in the sealed shield 12, and the upper end of the rotating pipeline 20 is communicated with the lower end of the nitrogen conveying pipeline 11, so that nitrogen is conveyed into the rotating pipeline 20.

It will be appreciated that the nitrogen delivery duct 11 is fixed to the upper side of the sealed shroud 12, without rotating; the rotary pipe 20 is in transmission connection with a turntable of a hollow rotary platform 19 arranged in the sealed shield 12, so as to realize synchronous rotation with the driving motor 18, and further drive the collection pipe 10 to rotate.

Further, the cooling element 6 comprises a plurality of cooling coils 8 and a plurality of cooling fins 9, wherein the plurality of cooling coils 8 are connected in parallel. Specifically, four cooling elements 6 are arranged in parallel and are connected with the same cooling liquid input pipeline and the same cooling liquid output pipeline.

In this embodiment, every cooling member 6 includes three cooling coil 8 and twenty layers of cooling fin 9, cooling coil 8 is established along tail gas direction of delivery horizontal disc, three cooling coil 8 stack along vertical direction, the vertical setting of cooling fin 9, every cooling fin 9 is connected with three cooling coil 8 respectively, twenty layers of cooling fin 9 evenly set up along tail gas direction of delivery, improve the stable strength of cooling member 6, improve the area of contact of cooling member 6 and cooling cavity 5 simultaneously, guarantee the cooling effect, the improvement is to the cooling condensation effect of toxic substance in the tail gas.

Further, as shown in fig. 6, the collecting pipe 10 is communicated with the collecting chamber 3 through a gas-solid conveying pipe 21, and a backflow-preventing guide vane 13 is arranged in the gas-solid conveying pipe 21. Specifically, the lower extreme of collecting pipe 10 passes through ring flange and gas-solid conveying pipe 21 sealing connection, and the lower extreme of gas-solid conveying pipe 21 passes through the ring flange and collects the sealed intercommunication of cavity 3, realizes carrying the poisonous solid particle material in the collecting pipe 10 to in collecting the cavity 3. A plurality of anti-backflow guide vanes 13 are uniformly arranged in the gas-solid conveying pipeline 21 along the vertical direction and used for preventing gas-solid substances from flowing back into the processing chamber 1. It should be noted that the anti-backflow guide plate 13 is of a funnel-shaped structure, two ends of the anti-backflow guide plate are open, and the diameters of the anti-backflow guide plate 13 along the gas flow direction are sequentially reduced, so that smooth circulation of gas or solid particulate matters is ensured, and backflow of the gas or solid particulate matters is effectively prevented.

Wherein, be equipped with the bounding wall 22 with gas-solid conveying pipeline 21 adaptation in the collection cavity 3, the upper end of bounding wall 22 is connected with the top side of collecting cavity 3, and the unsettled setting of lower extreme of bounding wall 22 for in concentrating the gas-solid mixture of carrying among the gas-solid conveying pipeline 21 whereabouts to the lower extreme department space of bounding wall 22, prevent to float at will in collecting cavity 3.

Wherein, the both sides of bounding wall 22 are equipped with grid 23 respectively, and the lower extreme of grid 23 is connected with the bottom side of collecting chamber 3, and the upper end of grid 23 is unsettled, and one side of collecting chamber 3 is equipped with waste gas output pipeline 14. It can be understood that the gas-solid mixture is conveyed into the collecting chamber 3 by the gas-solid conveying pipeline 21 under the blowing power of nitrogen, and under the action of the enclosing plate 22, the gas-solid mixture is directionally collected on the bottom side wall of the collecting chamber 3 below the enclosing plate 22, so that the gas-solid mixture is effectively prevented from floating in the collecting chamber 3, and toxic solid particles are directionally collected; continue to collect the gas-solid mixture, nitrogen gas wherein blows the effect to poisonous solid particle, and then poisonous solid particle gets into between the grid 23 by the unsettled department of bounding wall 22 lower extreme, and waste gas upwards flows along the vertical direction of grid 23, finally discharge by exhaust gas output pipeline 14, change by relevant staff after the solid noxious material in collecting cavity 3 reaches certain quality, this in-process, because the upper end of bounding wall 22 is connected with the top side of collecting cavity 3, so waste gas can't get into in the gas-solid pipeline 21 by collecting cavity 3, guarantee the normal collection of gas-solid mixture.

Further, the device also comprises a support frame 4, the processing chamber 1 is arranged on the upper side of the support frame 4, a sealing shield 12 is arranged on the upper side of the processing chamber 1, and the sealing shield 12 is used for ensuring the sealing connection between the nitrogen gas conveying pipeline 11 and the rotating pipeline 20 and ensuring the pressure of the introduced nitrogen gas so as to provide enough flow force. The collecting chamber 3 is arranged at the lower side of the supporting frame 4, and four supporting legs are arranged at the bottom side of the supporting frame 4 to realize stable supporting.

The utility model provides a pair of tail gas treatment collection device, through let in the cooling chamber in the processing chamber with the tail gas that produces in the MOCVD technology, the cooling piece of its both sides carries out the subcooling to the tail gas in the cooling chamber, condenses the noxious material in the tail gas into solid particulate matter, scrapes the plate through the setting, scrapes the noxious material of attaching to on the cooling chamber inner wall and gets the collection, effectively reduces the emission of noxious material, the environmental protection.

The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. The utility model provides a tail gas treatment collection device, its characterized in that, includes processing chamber (1), establish cooling chamber (5) in processing chamber (1), the tail gas input port of processing chamber (1) with cooling chamber (5) intercommunication, cooling chamber (5) are equipped with a set of cooling part (6) respectively along the both sides of tail gas input direction, be equipped with in cooling chamber (5) and scrape plate spare (7), scrape plate spare (7) with the tangent setting of inner wall of cooling chamber (5), cooling chamber (5) are through collecting pipeline (10) and collecting chamber (3) intercommunication.

2. The exhaust gas treatment collecting device according to claim 1, characterized in that the scraper member (7) comprises an archimedes screw scraper (15), and a plurality of support bars (16) are uniformly arranged on the archimedes screw scraper (15) along the circumferential direction.

3. The exhaust gas treatment collecting device according to claim 2, characterized in that the central end of the archimedes screw blade (15) is connected to the collecting duct (10), and the collecting duct (10) is provided with a cut (17) adapted to the archimedes screw blade (15).

4. The exhaust gas treatment collection device of claim 3, further comprising a drive motor (18), wherein a drive end of the drive motor (18) is connected with a central shaft of a hollow rotary platform (19), and a rotary disc of the hollow rotary platform (19) is connected with an end of the collection pipe (10).

5. The exhaust gas treatment collection device of claim 4, further comprising a nitrogen gas delivery pipe (11), one end of the nitrogen gas delivery pipe (11) being mounted on the sealed shield (12), the nitrogen gas delivery pipe (11) being in communication with the collection pipe (10).

6. The exhaust gas treatment collection device of claim 1, wherein the cooling member (6) comprises a plurality of cooling coils (8) and a plurality of cooling fins (9), and the plurality of cooling coils (8) are connected in parallel.

7. The tail gas treatment and collection device according to claim 1, wherein the collection pipe (10) is communicated with the collection chamber (3) through a gas-solid conveying pipe (21), and a backflow-preventing guide piece (13) is arranged in the gas-solid conveying pipe (21).

8. The tail gas treatment and collection device according to claim 7, wherein a surrounding plate (22) adapted to the gas-solid conveying pipeline (21) is arranged in the collection chamber (3), the upper end of the surrounding plate (22) is connected with the top side of the collection chamber (3), the lower end of the surrounding plate (22) is arranged in a suspended manner, grids (23) are respectively arranged on two sides of the surrounding plate (22), the lower ends of the grids (23) are connected with the bottom side of the collection chamber (3), and the upper ends of the grids (23) are suspended.

9. The exhaust gas treatment collection device of claim 8, wherein an exhaust gas outlet duct (14) is provided on one side of the collection chamber (3).

10. The exhaust gas treatment collection device according to any one of claims 1 to 9, further comprising a support frame (4), wherein the treatment chamber (1) is mounted on the support frame (4).

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