CN210441378U - Ice water system for improving temperature stability - Google Patents
Ice water system for improving temperature stability Download PDFInfo
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- CN210441378U CN210441378U CN201920809342.6U CN201920809342U CN210441378U CN 210441378 U CN210441378 U CN 210441378U CN 201920809342 U CN201920809342 U CN 201920809342U CN 210441378 U CN210441378 U CN 210441378U
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- water supply
- supply portion
- automatic valve
- side water
- secondary side
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Abstract
The utility model discloses an improve temperature stability's frozen water system, including the return water pipeline that connects gradually, side water supply portion, frozen water unit, secondary side water supply portion and supply channel, the end of secondary side water supply portion is provided with automatic valve b, the position that secondary side water supply portion is close to automatic valve b is provided with temperature sensor, return water pipeline still is connected with cooling pipeline's one end, cooling pipeline's the other end is connected on secondary side water supply portion between automatic valve b and the temperature sensor, the last automatic valve an that is provided with of cooling pipeline, side water supply portion, secondary side water supply portion, automatic valve an, automatic valve b and the equal signal connection of temperature sensor are in well accuse room. The utility model discloses when frozen water unit switches, will detect the not up to standard frozen water of temperature through temperature sensor and retrieve the return water pipeline again and refrigerate through the cooling line, form and use the local circulation that the switching unit was the center, remit frozen water supply channel after treating that the temperature is up to standard, improved frozen water system's temperature stability.
Description
Technical Field
The utility model belongs to the technical field of semiconductor production equipment, concretely relates to improve temperature stability's frozen water system.
Background
The ice water system occupies important positions in the temperature control of the semiconductor clean room energy power PCW system and the temperature control of the clean room plant, and the temperature of the PCW system and the stability of the temperature of the semiconductor clean room plant depend on the flow and the temperature of the heat exchange ice water. However, the temperature of the existing ice water system fluctuates when the ice water unit is switched, and the stability of the temperature of the ice water system is affected.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an improve temperature stability's frozen water system has solved present frozen water system and can cause the undulant problem of frozen water system temperature when frozen water unit switches.
The utility model adopts the technical proposal that: the utility model provides an improve temperature stability's frozen water system, is including the return water pipeline, the water supply portion that once inclines, frozen water unit, secondary side water supply portion and the supply channel that connect gradually, the end of secondary side water supply portion is provided with automatic valve b, the position that secondary side water supply portion is close to automatic valve b is provided with temperature sensor, the return water pipeline still is connected with cooling pipeline's one end, cooling pipeline's the other end connect in position between automatic valve b and the temperature sensor on the secondary side water supply portion, the last automatic valve an that is provided with of cooling pipeline, the equal signal connection in the well accuse room of frozen water system of the water supply portion that once inclines, secondary side water supply portion, automatic valve an, automatic valve b and temperature sensor.
The utility model is also characterized in that,
the primary side water supply part comprises two automatic valves and a one-way valve arranged between the two automatic valves; the secondary side water supply part comprises two automatic valves and a one-way valve arranged between the two automatic valves.
The utility model has the advantages that: the utility model discloses an improve temperature stability's frozen water system when frozen water unit switches, will detect the ice water that the temperature is not up to standard through temperature sensor and retrieve the return water pipeline again and refrigerate, form the local circulation that uses the switching unit as the center, treat that the temperature is up to standard and remit the frozen water supply channel again, through increasing two automatic valves and temperature sensor to current frozen water system, can be with hydrology fluctuation control at 0.5 ℃, the temperature stability of frozen water system has been improved, and then be favorable to improving the stability of PCW system temperature and the clean factory building temperature of semiconductor.
Drawings
Fig. 1 is a block diagram of the ice water system for improving temperature stability of the present invention.
In the figure, 1, an ice water unit, 2, a water return pipeline, 3, a water supply pipeline, 4, automatic valves a and 5, automatic valves b and 6, a temperature sensor, 7, a primary side water supply part and 8, a secondary side water supply part are arranged.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
The utility model provides an improve temperature stability's frozen water system's structural diagram is shown in fig. 1, return water pipeline 2 including connecting gradually, side water supply portion 7 once, frozen water unit 1, secondary side water supply portion 8 and supply channel 3, secondary side water supply portion 8's end is provided with automatic valve b5, secondary side water supply portion 8 is close to the position of automatic valve b5 and is provided with temperature sensor 6, return water pipeline 2 still is connected with cooling pipeline's one end, cooling pipeline's the other end is connected in the position between automatic valve b5 and the temperature sensor 6 on secondary side water supply portion 8, be provided with automatic valve a4 on the cooling pipeline, side water supply portion once, secondary side water supply portion, automatic valve a, the equal signal connection of automatic valve b and temperature sensor is in frozen water system's well accuse room. Specifically, the primary-side water supply part 7 includes two automatic valves and a check valve disposed between the two automatic valves; the secondary water supply part 7 includes two automatic valves and a check valve disposed between the two automatic valves. The connection relationship and control process between the primary water supply part 7 and the secondary water supply part 8 and the central control room of the ice water system are all common knowledge in the art, and on the basis of the ice water system, it is a skilled person in the art to add a cooling pipeline and set the automatic valve a4, the automatic valve b5 and the temperature sensor 6 to connect with the central control room for corresponding control, and further description is omitted.
When the water supply device is normally used, the automatic valve and the one-way valve of the primary side water supply part 7 and the secondary side water supply part 8 are controlled to be opened by the central control room, and water in the water return pipeline 2 flows into the water supply pipeline 3 through the ice water unit 1. When the ice water unit 1 is switched, the water flow passing through the ice water unit 1 reaches the standard, so that ice water with unqualified temperature directly enters a water supply system to influence the ice water supply quality. The utility model discloses an add cooling line and automatic valve a4, automatic valve b5 and temperature sensor 6, when frozen water unit 1 switches, through temperature sensor 6's detection, well accuse room is opened automatic valve a4, automatic valve 2 closes, make the temperature ice water not up to standard enter into the return water pipeline through the cooling line, treat that the temperature feeds back to well accuse room through temperature sensor 6 after qualified, through well control remote control automatic valve a4 close, automatic valve b5 opens and carries out normal water supply, do not influence ice water supply quality.
Claims (2)
1. The utility model provides an improve temperature stability's frozen water system, its characterized in that, including the return water pipeline, the side water supply portion that once connect gradually, frozen water unit, secondary side water supply portion and supply channel, the end of secondary side water supply portion is provided with automatic valve b, the position that secondary side water supply portion is close to automatic valve b is provided with temperature sensor, the return water pipeline still is connected with cooling pipeline's one end, cooling pipeline's the other end connect in position between automatic valve b and the temperature sensor on the secondary side water supply portion, the last automatic valve an that is provided with of cooling pipeline, the equal signal connection of side water supply portion, secondary side water supply portion, automatic valve an, automatic valve b and temperature sensor in frozen water system's well accuse room.
2. The ice water system for improving temperature stability of claim 1, wherein the primary side water supply part comprises two automatic valves and a check valve disposed between the two automatic valves; the secondary side water supply part comprises two automatic valves and a one-way valve arranged between the two automatic valves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920809342.6U CN210441378U (en) | 2019-05-31 | 2019-05-31 | Ice water system for improving temperature stability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920809342.6U CN210441378U (en) | 2019-05-31 | 2019-05-31 | Ice water system for improving temperature stability |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210441378U true CN210441378U (en) | 2020-05-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920809342.6U Active CN210441378U (en) | 2019-05-31 | 2019-05-31 | Ice water system for improving temperature stability |
Country Status (1)
| Country | Link |
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| CN (1) | CN210441378U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216147A (en) * | 2021-12-06 | 2022-03-22 | 中国建筑西北设计研究院有限公司 | Internet type multi-heat-source urban low-carbon heat supply system and operation method thereof |
-
2019
- 2019-05-31 CN CN201920809342.6U patent/CN210441378U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216147A (en) * | 2021-12-06 | 2022-03-22 | 中国建筑西北设计研究院有限公司 | Internet type multi-heat-source urban low-carbon heat supply system and operation method thereof |
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