CN210441340U - Dehumidifying device, air conditioning equipment and photoetching machine - Google Patents
Dehumidifying device, air conditioning equipment and photoetching machine Download PDFInfo
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- CN210441340U CN210441340U CN201921423086.3U CN201921423086U CN210441340U CN 210441340 U CN210441340 U CN 210441340U CN 201921423086 U CN201921423086 U CN 201921423086U CN 210441340 U CN210441340 U CN 210441340U
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Abstract
The utility model provides a hydrofuge device, air conditioning equipment and photoetching machine, the hydrofuge device can dismantle set up in air conditioning equipment's air intake, the control of hydrofuge device gets into the first humidity of air conditioning equipment's air, air conditioning equipment control gets into the second humidity of photoetching machine's air. The utility model provides a moisture removing device which can be detachably arranged at the air inlet of the air conditioning equipment, the structure of the existing air conditioning equipment is not required to be changed, the structure is simple, and the cost is low; and easily operation is implemented, the utility model provides an air conditioning equipment can control the humidity of the air that gets into the photoetching machine, and switch air conditioning equipment can guarantee that the inside humidity of photoetching machine maintains invariably for air humidity maintains invariably, does not have the condition of jump, right photoetching machine internal parts play the guard action.
Description
Technical Field
The utility model relates to a semiconductor equipment makes the field, especially relates to a hydrofuge device, air conditioning equipment and lithography machine.
Background
In a conventional lithography machine, an air conditioning device is usually provided to control the environment of the lithography machine with constant temperature and constant humidity, and the main purpose of temperature and humidity control is to stabilize the temperature and humidity of optical components inside the cavity of the lithography machine.
Especially for the photoetching machine with the reserved moisture exhaust port, when the air conditioning equipment stops working, the moisture exhaust port is used for ensuring that the environment humidity in the cavity of the photoetching machine is not too high, so that the components in the cavity of the photoetching machine are protected. However, for a lithography machine without a reserved moisture exhaust port, there is no guarantee that the internal optical components will not be contaminated by the stop of the operation of the air conditioning equipment.
Therefore, for the lithography machine without a reserved moisture exhaust port, at the moment of starting/stopping the air conditioning equipment, the air humidity in the cavity of the lithography machine is changed greatly, as shown in fig. 1, under a normal condition, the air humidity in the cavity of the lithography machine is about 50%, and at the moment of switching on/off the air conditioning equipment, the air humidity in the cavity of the lithography machine can reach 90% when the air humidity is abnormal; as shown in fig. 2, the degree of contamination of the projection objective (one of the important optical components disposed in the chamber of the lithography machine) is also close to the warning value of 3.8%, and the threshold value of the direct drive shutdown cleaning is 4%, wherein in fig. 2, the ordinate represents the contamination achievement index of the projection objective, the unit is percentage, and the abscissa is a data point, that is: the time points at which data were collected as time passed. In particular, the data point with the abscissa of 2 is the first data after the air conditioner stops working, and the larger the data is, the dirtier the projection objective lens is. Therefore, if the air humidity is not controlled, the high-precision optical components in the cavity of the photoetching machine are easily polluted, so that the working of the photoetching machine is unstable and even down, and the yield of products is difficult to effectively ensure; and in severe cases even damage to the lithography machine. In particular, for optical components such as a stage (wafer stage) and a lens (lens), excessive humidity variation may cause temperature instability inside the lithography machine, affect focus and alignment of exposure, and reduce yield.
Therefore, it is critical to properly control the humidity of the air supplied by the air conditioning apparatus in the lithography machine.
It is to be noted that the information disclosed in this background section is only for enhancement of understanding of the general background of the invention, and should not be taken as an acknowledgement or any form of suggestion that this information constitutes prior art already known to a person skilled in the art.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: in the prior art, the photoetching machine without a reserved moisture exhaust port has the problem of large air humidity change at the moment of starting/stopping the air conditioning equipment.
One of the purposes of the utility model is to provide a hydrofuge device, and the second purpose is to provide an air conditioning equipment, and the third purpose is to provide a lithography machine.
The utility model discloses a following technical scheme realizes:
for the first purpose of realizing foretell, the utility model provides a dehumidifying device for air conditioning equipment, dehumidifying device can dismantle set up in air conditioning equipment's air intake, dehumidifying device control gets into the first humidity of air conditioning equipment's air.
Optionally, when the dehumidifying device is disposed at the air inlet of the air conditioning equipment, the dehumidifying device is in a working state.
Optionally, the air conditioning equipment comprises a humidity control device, and the humidity removal device is used for controlling the second humidity of the air discharged by the air conditioning equipment in cooperation with the humidity control device.
Optionally, when the air conditioning equipment is operated, the humidity control device is in an operating state; when the air conditioning equipment is idle, the humidity control device is in an idle state;
when the air conditioning equipment is to be closed to be opened next time, the dehumidifying device is in a working state.
Optionally, when the air conditioning equipment is to be turned off, removing an air pipe of the air conditioning equipment, and arranging the dehumidifying device at an air inlet of the air conditioning equipment, wherein the dehumidifying device is in a working state until the air conditioning equipment is turned on next time;
and when the air conditioning equipment is to be started, removing the moisture exhausting device, and installing the air pipe to the air inlet of the air conditioning equipment.
Optionally, the dehumidifying means comprises a desiccant.
In order to achieve the second objective, the present invention further provides an air conditioning apparatus for a lithography machine, comprising the dehumidifying apparatus of any one of the above aspects.
Optionally, the air conditioning device is configured to control humidity of air entering the lithography machine cavity from the air conditioning device.
Optionally, the lithography machine further comprises a temperature control device, wherein the temperature control device is used for controlling the temperature of air entering the lithography machine cavity from the air conditioning equipment.
In order to achieve the third objective, the present invention further provides a lithography machine, including any one of the air conditioning apparatuses.
The utility model has the advantages that: the utility model provides a dehumidifying device, which can be detachably arranged at the air inlet of the air conditioning equipment, without changing the structure of the existing air conditioning equipment, and has simple structure and low cost; and the operation is easy to implement, and the first humidity of the air entering the air conditioning equipment can be controlled after the dehumidification treatment is carried out.
The utility model provides an air conditioning equipment can control the humidity of the air that gets into the photoetching machine, and switch air conditioning equipment can guarantee that the inside humidity of photoetching machine maintains invariably for air humidity maintains invariably, does not have the condition of jump, right photoetching machine internal parts play the guard action.
The utility model provides a lithography machine under the condition that does not change the current structure of lithography machine, the inside air humidity of lithography machine is stable, has effectively reduced because air humidity changes the problem that leads to inside high-accuracy optical component to pollute and damage, and its work is more reliable and more stable, can not influence the focus and the alignment of exposure because of humidity changes to the yield of product has been improved.
Drawings
FIG. 1 is a schematic diagram illustrating humidity changes in a photolithography machine cavity at the instant of turning on and turning off an air conditioner of a photolithography machine without a reserved humidity outlet in the prior art;
FIG. 2 is a schematic diagram illustrating a change of a contamination level indicator of an instantaneous projection lens of a projector of an air conditioning device in a lithography machine without a reserved humidity outlet in the prior art;
FIG. 3 is a schematic view of the working principle of the air conditioning apparatus in the working state;
FIG. 4 is a schematic view of the working principle of the air conditioner in an idle state;
FIG. 5 is a schematic structural diagram of a lithography machine according to an embodiment of the present invention;
fig. 6 is a schematic flow chart of a dehumidifying device according to an embodiment of the present invention;
wherein the reference numerals are as follows:
100-photoetching machine, 110-photoetching machine cavity, 120-photoetching machine air outlet and 130-optical component;
200-air conditioning equipment, 210-air conditioning equipment cavity, 220-air conditioning equipment air inlet, 230-filtering device, 240-temperature control device, 250-humidity control device and 260-air supply device;
300-air circulation ducts;
400-moisture removal device.
Detailed Description
The core idea of the utility model is to ensure that the internal environment humidity of the cavity of the photoetching machine is not too high when the air conditioning equipment stops working, thereby protecting the internal parts of the photoetching machine.
In order to realize the above idea, the utility model provides a dehumidifying device for air conditioning equipment, dehumidifying device can dismantle set up in air conditioning equipment's air intake, dehumidifying device control gets into the first humidity of air conditioning equipment's air.
To make the objects, advantages and features of the present invention clearer, a dehumidifying apparatus, an air conditioning apparatus and a lithography machine according to the present invention will be described in detail with reference to fig. 1 to 6. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention. It should be understood that the drawings are not necessarily to scale, showing the particular construction of the invention, and that the illustrative features in the drawings, which are used to illustrate certain principles of the invention, are also somewhat simplified. Specific design features of the invention disclosed herein, including, for example, specific dimensions, orientations, locations, and configurations, will be determined in part by the particular intended application and environment of use. In the embodiments described below, the same reference numerals are used in common between different drawings to denote the same portions or portions having the same functions, and a repetitive description thereof will be omitted. In this specification, like reference numerals and letters are used to designate like items, and therefore, once an item is defined in one drawing, further discussion thereof is not required in subsequent drawings.
The embodiment provides a dehumidifying device 400 for an air conditioner, as shown in fig. 5, the dehumidifying device 400 is detachably disposed at an air inlet 220 of the air conditioner 200, and the dehumidifying device 400 controls a first humidity of air entering the air conditioner 200.
In this embodiment, the air conditioner 200 is preferably an air conditioner 200 inherent to the lithography machine 100, and with continued reference to fig. 5, the air conditioner 200 includes an air conditioner cavity 210 surrounded by a housing, the housing is provided with an air conditioner air inlet 220 communicating with outside air and an air conditioner air outlet (not shown) connected to an air circulation duct 300, and the air circulation duct 300 is used for connecting the air conditioner air outlet and an air inlet (not shown) of the lithography machine 100. Preferably, the air conditioner 200 further comprises an air extracting device (not shown in the figure) disposed at the air inlet 220 of the air conditioner, and an air blowing device 260 disposed inside the cavity 210 of the air conditioner and located at the air outlet of the air conditioner, wherein, in the embodiment, the air extracting device is an air pipe, and the air blowing device 260 is a fan.
The lithography machine 100 includes a lithography machine cavity 110 surrounded by a housing, a plurality of optical components 130 disposed inside the lithography machine cavity 110, and a lithography machine air outlet 120 disposed in the housing of the lithography machine 100 and communicated with the outside air.
In order to maintain the humidity of the air entering the lithography chamber 110 constant, so as to protect the requirement of the optical component 130 for the humidity of the air, preferably, the air conditioner 200 further includes a humidity control device 250 disposed in the air conditioner chamber 210, and the humidity control device 250 controls the humidity of the air entering the lithography chamber 110 to be maintained constant. Further, the air conditioner 200 further comprises a humidity control device 250 disposed in the air conditioner cavity 210, wherein the humidity control device 250 controls the air entering the lithography machine cavity 110 to maintain a constant temperature; still further, the air conditioning equipment 200 further includes a filtering device 230 disposed in the air conditioning equipment cavity 210, and the filtering device 230 cleans air entering the air conditioning equipment cavity 210.
In one embodiment, as shown in fig. 3, when the air conditioning apparatus is in the operating state, the air flow direction is substantially as follows according to the air flow direction indicated by each arrow in the figure:
the tuber pipe passes through air conditioning equipment air intake 220 suction is arrived in the air conditioning equipment cavity 210, the air passes through in proper order filter equipment 230 temperature control device 240 and humidity control device 250 become the clean air that has invariable temperature and invariable humidity, air supply arrangement 260 further with the clean air that has invariable temperature and invariable humidity in the air conditioning equipment cavity 210 passes through air circulation pipeline 300 and sends into the inside of photoetching machine cavity 110, finally, the air warp photoetching machine air outlet 120 discharges photoetching machine cavity 110.
As shown in fig. 4, when the air conditioning apparatus is in the idle state, the air flow direction is substantially as follows according to the air flow direction indicated by each arrow in the figure:
because the humidity control device 250 in the air conditioning cavity 210 does not operate, because the air inlet 220 of the air conditioning device is communicated with the outside air, the high-humidity air enters the inside of the air conditioning cavity 210 through the air inlet 220 of the air conditioning device, and because the air supply device 260 does not operate, the high-humidity air is accumulated in the air conditioning cavity 210; at this time, also, since the air supply device 260 does not operate, the air with high humidity does not enter the lithography chamber 110 through the air circulation duct 300, and the optical components inside the lithography chamber 110 are not contaminated.
However, when the air conditioner 100 resumes operation again, the high humidity air accumulated in the air conditioner may directly enter the lithography machine cavity 110 from the air conditioner cavity 210 through the air circulation duct 300, and especially for a lithography machine without a reserved humidity vent, the high humidity air may contaminate the optical component 130 located inside the lithography machine cavity 110, wherein the monitoring mode of the switching air conditioner is a lithography machine precision test/line width monitor/product actual performance.
In order to solve the above problems without changing the existing structure of the air conditioner and the photolithography machine, the inventors of the present invention have found through intensive research that, as shown in fig. 5, a humidity discharging device 400 is provided, wherein the humidity discharging device 400 is detachably disposed at the air inlet 220 of the air conditioner, and the humidity discharging device controls a first humidity of air entering the air conditioner cavity 210. When the dehumidifying device 400 is disposed at the air inlet 220 of the air conditioning equipment, the dehumidifying device 400 is in a working state; when the dehumidifying apparatus 400 is removed from the air inlet 220 of the air conditioner, the dehumidifying apparatus 400 is in an idle state. Further, the dehumidifying apparatus 400 cooperates with the humidity control apparatus 250 to control the second humidity of the air discharged from the air conditioner 200. Still further, when the air conditioner 200 is operated, the humidity control device 250 is in an operating state; when the air conditioner 200 is idle, the humidity control device 250 is in an idle state; when the air conditioner 200 is to be turned off until the next time it is turned on, the dehumidifying apparatus 400 is in an operating state.
As shown in fig. 6, in order to provide a schematic flow chart of a dehumidifying apparatus using the present embodiment,
when the air conditioning equipment 200 is to be closed, the air pipe arranged at the air inlet 220 of the air conditioning equipment is removed, the dehumidifying device 400 is placed, the dehumidifying device 400 is in a working state, the air conditioning equipment 200 is closed to perform fault treatment, after the fault treatment, the air conditioning equipment 200 is opened, the dehumidifying device 400 is removed from the air inlet 220 of the air conditioning equipment, and the air pipe is reinstalled. Therefore, high-humidity air is prevented from being accumulated in the air conditioning equipment cavity 210, so that the air entering the lithography machine cavity maintains constant humidity, and the optical component 130 in the lithography machine cavity 110 is prevented from being polluted due to overhigh humidity.
In the present embodiment, the dehumidifying device is a desiccant, and particularly, the present invention is not limited to the type of the desiccant, and may be a chemical desiccant or a physical desiccant. Similarly, in other embodiments, the dehumidifying device may be a dehumidifier, but the present invention is not limited thereto.
Therefore, the moisture exhausting device provided by the embodiment does not need to change the structure of the existing air conditioning equipment, and has simple structure and low cost; and the operation is easy, and the humidity of the air entering the air conditioning equipment can be controlled to be kept constant after the dehumidification treatment is carried out.
Still another embodiment further provides an air conditioning device, which is used for the photoetching machine and comprises the dehumidifying device. The air conditioning equipment is used for controlling the humidity of air entering the photoetching machine cavity from the air conditioning equipment. The utility model provides an air conditioning equipment can control the humidity of the air that gets into the photoetching machine, and switch air conditioning equipment can guarantee that the inside humidity of photoetching machine maintains invariably for air humidity maintains invariably, does not have the situation of jump, right photoetching machine internal parts play the guard action.
Still another embodiment further provides a photoetching machine, and the photoetching machine comprises the air conditioning equipment with the dehumidifying device. The utility model provides a lithography machine under the condition that does not change the current structure of lithography machine, the inside air humidity of lithography machine is stable, has effectively reduced because air humidity changes the problem that leads to inside high-accuracy optical component to pollute and damage, and its work is more reliable and more stable, can not influence the focus and the alignment of exposure because of humidity changes to the yield of product has been improved.
In one of them project, niancang S210D/S310F type photoetching machine does not reserve the hydrofuge mouth, thereby can't guarantee that inside optical component can not receive the pollution because of air conditioning equipment' S work stops, has used the utility model provides a hydrofuge device after, reached the hydrofuge effect the same with niancang S220D type photoetching machine that is provided with the hydrofuge mouth, the air humidity that gets into the photoetching machine cavity inside is invariable, does not have unusual jump.
The utility model provides a pair of hydrofuge device, air conditioning equipment and lithography machine explains though with the lithography machine that does not reserve the hydrofuge mouth as the example, obviously, also is suitable for to the lithography machine that reserves the hydrofuge mouth, also is within the protection scope of the utility model.
In summary, the above embodiments have been described in detail for different configurations of a humidity-discharging device, an air conditioner and a lithography machine, and it is understood that the above description is only for the description of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, the present invention includes but is not limited to the configurations listed in the above embodiments, and those skilled in the art can take three steps according to the above embodiments, and any changes and modifications made by those skilled in the art according to the above disclosure belong to the protection scope of the claims.
Claims (10)
1. The utility model provides a dehumidifying device for air conditioning equipment, its characterized in that, dehumidifying device can dismantle set up in air conditioning equipment's air intake, dehumidifying device control gets into the first humidity of air conditioning equipment's air.
2. The dehumidifying device of claim 1, wherein when the dehumidifying device is disposed at the air inlet of the air conditioning apparatus, the dehumidifying device is in an operating state.
3. The dehumidifying device of claim 1 wherein the air conditioning unit includes a humidity control device, the dehumidifying device cooperating with the humidity control device for controlling the second humidity of the air discharged from the air conditioning unit.
4. The dehumidifying device of claim 3 wherein the humidity control means is in an operating state when the air conditioning apparatus is in operation; when the air conditioning equipment is idle, the humidity control device is in an idle state;
when the air conditioning equipment is to be closed to be opened next time, the dehumidifying device is in a working state.
5. The dehumidifying device according to claim 4, wherein when the air conditioner is to be turned off, the air duct of the air conditioner is removed, the dehumidifying device is disposed at the air inlet of the air conditioner, and the dehumidifying device is in an operating state until the air conditioner is turned on next time;
and when the air conditioning equipment is to be started, removing the moisture exhausting device, and installing the air pipe to the air inlet of the air conditioning equipment.
6. The dehumidifying device of any one of claims 1-5 wherein the dehumidifying device comprises a desiccant.
7. An air conditioning apparatus for a lithography machine, comprising the dehumidifying apparatus according to any one of claims 1 to 6.
8. The air conditioning apparatus of claim 7, wherein the air conditioning apparatus is configured to control the humidity of air entering the lithography machine cavity from the air conditioning apparatus.
9. The apparatus of claim 7, further comprising a temperature control device for controlling the temperature of air entering the lithography machine cavity from the apparatus.
10. Lithography machine, characterized in that it comprises an air conditioning apparatus according to any one of claims 7 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921423086.3U CN210441340U (en) | 2019-08-29 | 2019-08-29 | Dehumidifying device, air conditioning equipment and photoetching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921423086.3U CN210441340U (en) | 2019-08-29 | 2019-08-29 | Dehumidifying device, air conditioning equipment and photoetching machine |
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| CN210441340U true CN210441340U (en) | 2020-05-01 |
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| CN201921423086.3U Active CN210441340U (en) | 2019-08-29 | 2019-08-29 | Dehumidifying device, air conditioning equipment and photoetching machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113406864A (en) * | 2021-05-24 | 2021-09-17 | 上海顺灏新材料科技股份有限公司 | Integrated monitoring system and monitoring method for peripheral equipment of photoetching machine |
-
2019
- 2019-08-29 CN CN201921423086.3U patent/CN210441340U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113406864A (en) * | 2021-05-24 | 2021-09-17 | 上海顺灏新材料科技股份有限公司 | Integrated monitoring system and monitoring method for peripheral equipment of photoetching machine |
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