CN210410057U - Tail gas treatment device of chemical vapor deposition furnace - Google Patents
Tail gas treatment device of chemical vapor deposition furnace Download PDFInfo
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- CN210410057U CN210410057U CN201920341918.0U CN201920341918U CN210410057U CN 210410057 U CN210410057 U CN 210410057U CN 201920341918 U CN201920341918 U CN 201920341918U CN 210410057 U CN210410057 U CN 210410057U
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Abstract
The tail gas treatment device of the chemical vapor deposition furnace is characterized in that the upper end of a tail gas pipeline is communicated with a furnace body of the chemical vapor deposition furnace; the lower end of the tail gas pipeline of the sandwich structure is communicated with the inlet of the tar collecting tank. The outlet of the tar collecting tank is communicated with the inlet of the scrubbing tank through a circulating pipeline. The baffle that a plurality of spirals were arranged distributes at this tail gas pipeline inner circumference surface to intercept layer upon layer and block the high temperature reaction tail gas that comes out by chemical vapor deposition stove, make tar, dust and carbon black etc. in most tail gas become solid-state condensation on baffle or tail gas pipeline wall by the gaseous state, prevent that during by-products such as a large amount of tar are inhaled vacuum system fast, keep vacuum system can long-time continuous operation.
Description
Technical Field
The invention relates to a chemical vapor deposition furnace, in particular to a device for treating tail gas of the chemical vapor deposition furnace.
Background
The carbon-based composite material is a composite material with special performance, and the main preparation method is a chemical vapor deposition process, wherein a carbon fiber preform is placed in a working area of a chemical vapor deposition furnace, the working area is heated to 900-; the rest part is discharged from the working area of the chemical vapor deposition furnace in a gaseous state and becomes tail gas to enter an exhaust system.
The exhaust system of the chemical vapor deposition furnace generally comprises an exhaust pipeline, a tar tank, a servo valve, a stop valve, a vacuum pump and the like. The most initial exhaust system is provided with circulating cooling water, so that the temperature of tail gas is gradually reduced when the tail gas passes through the exhaust system; along with the rapid reduction of the temperature of the tail gas, except that the part of hydrocarbons with small molecular weight which are difficult to liquefy in the tail gas are discharged in a gas form, the part of the hydrocarbon tail gas with large molecular weight is liquefied into tar with large viscosity, even solid tar particles, which are attached to the inner walls of devices such as a pipeline, a valve, a vacuum pump and the like of an exhaust system, the tail gas pipeline is easily blocked, the valve is blocked, the pumping efficiency of the vacuum pump is reduced, and the normal production is forced to stop after hundreds of hours of accumulation, at the moment, the furnace is stopped to disassemble the pipeline, a hair drier or a heating rod is used for heating to melt the tar and naturally flow out, and an organic solvent is also used for cleaning the tar when necessary. The situation is not obviously relieved after the circulating cooling water of the exhaust system is turned off through improvement at the later stage.
In order to eliminate the adverse effect of pollutants such as tar in tail gas on the chemical vapor deposition furnace, Beijing Baimu aircraft material high-tech company discloses ' a chemical vapor deposition furnace tail gas treatment device ' in the utility model with the patent number of 201120435175.7, the device utilizes the mode of two-stage cooling and three-stage filtration to realize the treatment of by-products in the chemical vapor deposition furnace, certain purification treatment effect has been played, but because there are silk screen filter jar and active carbon filter jar in the device, the device is after operation a period, silk screen filter jar and active carbon filter jar are very easy to be blocked up, lead to the interior gas of furnace can't be taken out smoothly, the continuous operation effect is not ideal enough.
The invention discloses a three-stage filtering system for a gas phase CVI furnace in the invention creation with the application number of 201110356140.9 by the company Limited in the research institute of the xi' an electric furnace, the device adopts a mode of condensing and absorbing an additional filter bag by a condensing plate and filtering by two stages of activated carbon to realize the purifying effect, the condensing plate in the device is quickly polluted after condensing and absorbing impurities, the condensing efficiency is quickly reduced, and the condensing bag and the activated carbon filtering device are also easily blocked to influence the continuous operation of the filtering device.
The invention discloses a tail gas treatment device for a chemical vapor deposition furnace in the invention creation with the application number of CN201120435175.7 by Beijing Baimu navigation material high-tech company, and the device is designed to be composed of a multistage condensation tank and an active carbon filter tank, and the continuous operation of the filter device is influenced because the condensation bag and the active carbon filter device are easy to be blocked.
The invention discloses a tail gas treatment device for a chemical vapor deposition furnace, which is designed in the invention creation with the application number of CN201210078238.7 of the Xian aviation braking science and technology Limited company, and the device is a filtering device consisting of a tar filter with a net structure and a corrugated pipe, wherein the device can not completely filter tar in tail gas, and the tar can pollute a vacuum pump after long-time work to influence the air extraction efficiency.
The invention discloses a CVI furnace tail gas treatment device in the invention creation with the application number of CN201410211473.6 by the Xian aviation braking technology Co., Ltd, which designs a centrifugal separation system consisting of an exhaust pipe dome, a guide fan and a separation cone, and utilizes the centrifugal screening effect of vortex motion to separate macromolecular impurities in tail gas so as to achieve the aim of purifying the tail gas.
Disclosure of Invention
In order to overcome the defects of complex structure and influence on the separation effect of macromolecular hydrocarbon substances in the prior art, the invention provides a tail gas treatment device of a chemical vapor deposition furnace.
The invention comprises a tail gas pipeline, a tar collecting tank, a baffle plate and a gas washing tank. Wherein:
the upper end of the tail gas pipeline is communicated with an orifice at the upper part of the chemical vapor deposition furnace body; the lower end of the tail gas pipeline is communicated with the inlet of the tar collecting tank. The outlet of the tar collecting tank is communicated with the inlet of the scrubbing tank through a circulating pipeline. And the outlet of the washing gas tank is communicated with a vacuum pump. The shell of the tail gas pipeline is of a sandwich structure. The lower end of the interlayer is provided with a circulating heating oil inlet, and the upper end of the interlayer is provided with a circulating heating oil outlet. The interval between two internal surfaces of tail gas pipeline casing intermediate layer is 10 ~ 20 mm. A plurality of spirally arranged baffles are distributed on the inner circumferential surface of the tail gas pipeline.
The baffle plates are all flat plates, one end of each baffle plate is a fixed branch end, the other end of each baffle plate is a cantilever end, the end face of each fixed branch end is arc-shaped, the radius of each arc is the same as the inner radius of the tail gas pipeline, the fixed branch ends of the baffle plates are fixedly welded on the inner circumferential surface of the tail gas pipeline, an included angle α of 45 degrees is formed between each cantilever end of each baffle plate and each fixed branch end, the surface of each baffle plate is an inclined surface of 45 degrees, and the inclined direction of each inclined surface is the lower end in the tail gas pipeline.
The length of each baffle is three fifths of the inner diameter of the tail gas pipeline, and the width of each baffle is one fourth of the perimeter of the inner surface of the tail gas pipeline. The distance between the adjacent side surfaces of the two circumferentially adjacent baffles is zero, so that the vertical distance between the axially adjacent baffles is the same as the length of the baffles.
And engine oil at the temperature of 60-80 ℃ is introduced into the interlayer of the tail gas pipeline in a circulating manner.
And vacuum pump oil is filled in the washing gas tank. And the outlet of the circulating pipeline connected with the tar collecting tank and the scrubbing tank is positioned below the oil level of the vacuum pump oil.
The tar collecting tank and the gas washing tank are both sealed tanks.
The invention aims to avoid the problems that the production is forced to be stopped due to the fact that a pipeline is blocked by tar condensation, and impurities such as tar, dust and the like which are not condensed on the pipeline easily enter a vacuum pumping system of a chemical vapor deposition furnace to pollute the pipeline or block the pipeline, so that the air suction efficiency of a vacuum pump is reduced, the pressure in the chemical vapor deposition furnace cannot be effectively ensured, the deposition efficiency is reduced, and the product quality is influenced, so that the original tail gas filtering device of the chemical vapor deposition furnace needs to be improved, and the continuous working time of the chemical vapor deposition furnace is prolonged.
According to the invention, high-temperature reaction tail gas from the chemical vapor deposition furnace is intercepted and blocked by the baffle layer, kinetic energy is rapidly reduced, most of tar, dust, carbon black and the like in the tail gas are changed into solid state from gaseous state and are condensed on the baffle or the wall of a tail gas pipeline, and a large amount of byproducts such as tar and the like are prevented from being rapidly sucked into a vacuum system to pollute a vacuum pump and influence the air extraction efficiency; then, hot industrial oil such as engine oil is introduced into the interlayer of the interlayer tail gas pipeline, the interlayer tail gas pipeline is made of metal materials, the heat transfer effect is good, the industrial oil can be heated to 60-80 ℃ through an external heating system to melt tar, meanwhile, the industrial oil can continuously be heated by utilizing an external power system to circularly flow, byproducts such as tar and the like condensed on the interlayer tail gas pipeline and the baffle can flow into the tar collecting tank below along the baffle in the interlayer tail gas pipeline after being heated to reach the melting point, the tail gas pipeline is similar to a condensing pipe commonly used in chemical experiments, the action principle is the same, namely, the substances to be collected are firstly heated to a gas state, then the temperature of the collected substances is reduced to be below the melting point and is higher than the freezing point through low-temperature liquid of the interlayer of the condensing pipe, therefore, the purpose of collection is achieved, the tail gas pipeline of the invention plays a role of a condensation pipe, the circulating heating oil plays a role of low-temperature liquid, and the substances to be collected are byproducts such as tar in the tail gas. In addition, the top of the tar collecting tank is additionally provided with an opening, the scrubbing tank is connected with the tar collecting tank, the scrubbing tank is used for intercepting the final carbon black and the residual tar which is not condensed, the scrubbing tank is a sealing device, and vacuum pump oil is filled in the scrubbing tank. According to the principle of 'similar compatibility', hydrocarbon substances in vacuum pump oil and tail gas belong to organic substances, so that the vacuum pump oil can effectively absorb the hydrocarbon substances in the tail gas of the chemical vapor deposition furnace, after the tail gas containing tar is pumped into the vacuum pump oil of the gas washing box through the pumping force of a vacuum pump, macromolecular hydrocarbon substances such as tar, carbon black and the like in the tail gas can be completely absorbed and intercepted by the vacuum pump oil, and the residual micromolecular hydrocarbon substances are in a gas state at normal temperature and can be pumped away by the vacuum pump after being absorbed too soon, but the vacuum system cannot be polluted, so that the purpose of purifying the tail gas is achieved.
The wall of the tail gas pipeline has an automatic heating function, so that tar can be prevented from being condensed and blocked.
The plurality of baffles which are spirally distributed are welded on the inner wall of the tail gas pipeline, so that a large amount of tail gas impurities can be intercepted, and the problem that a common filter is easy to block can be solved.
The invention can intercept all solid dust impurities and redundant tar substances in the tail gas, ensure that a vacuum-pumping system of the chemical vapor deposition furnace is not polluted, and can continuously run for a long time.
In the prior art, the chemical vapor deposition furnace is stopped for about 150 hours to disassemble the pipeline for cleaning due to the blockage of a tail gas pipeline and other reasons, which is very inconvenient, and frequent furnace stopping can seriously affect the product quality and delay the production period of a product, the device can ensure that the continuous service time of the chemical vapor deposition furnace reaches more than 1000 hours under the normal use condition, and the problems of the blockage of the tail gas pipeline, the clamping stagnation of a valve and the like can not occur, the reduction of the pumping efficiency of a vacuum pump is basically controlled within 10 percent, the problems of the blockage of the tail gas pipeline due to the tar and the pollution of the vacuum pump in the original chemical vapor deposition process and the reduction of the pumping efficiency caused by the blockage of the tar and the reduction of the production efficiency are solved, the aim of automatic cleaning is fulfilled.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
FIG. 2 is a schematic cross-sectional view of an exhaust duct with a sandwich layer according to the present invention
FIG. 3 is a top view of the layered exhaust duct of the present invention
1. Chemical vapor deposition furnace body, 2 tail gas pipeline, 3 tar collecting tank, 4 baffle, 5 gas washing tank, 6 circulating heating oil inlet, 7 circulating heating oil outlet
Detailed Description
The embodiment provides a system device for treating tail gas of a chemical vapor deposition furnace, aiming at the problems of the existing method for cleaning tar in the production process of the chemical vapor deposition process and short continuous operation time.
The embodiment comprises a chemical vapor deposition furnace body 1, a tail gas pipeline 2, a tar collecting tank 3, a baffle 4, a gas washing tank 5, a circulating heating oil inlet 6 and a circulating heating oil outlet 7. Wherein:
as shown in fig. 1, the upper end of the tail gas pipeline 2 is communicated with an orifice at the upper part of the chemical vapor deposition furnace body 1; the lower end of the tail gas pipeline 2 is communicated with the inlet of the tar collecting tank 3. The outlet of the tar collecting tank 3 is communicated with the inlet of the scrubber tank 5 through a circulating pipeline. And the outlet of the washing gas tank is communicated with a vacuum pump.
The shell of the tail gas pipeline 2 is of a sandwich structure. The lower end of the interlayer is provided with a circulating heating oil inlet 6, and the upper end of the interlayer is provided with a circulating heating oil outlet 7. The interval between two internal surfaces of tail gas pipeline casing intermediate layer is 10 ~ 20 mm.
The tail gas pipeline comprises a tail gas pipeline, a plurality of baffles 4 made of stainless steel are distributed on the inner circumferential surface of the tail gas pipeline, the baffles are all flat plates, one end of each flat plate is a fixed support end, the other end of each flat plate is a cantilever end, the end face of each fixed support end is arc-shaped, the radius of each arc is the same as the inner radius of the tail gas pipeline, the fixed support ends of the baffles are fixedly welded on the inner circumferential surface of the tail gas pipeline, a 45-degree included angle α is formed between the cantilever end of each baffle and the fixed support end, the surface of each baffle is a 45-degree inclined plane, the inclined direction of each inclined plane is the lower end of the tail gas pipeline, the length of each baffle is three fifths of the inner diameter of the tail gas pipeline 2, the width of each baffle is one fourth of the inner surface of the tail gas pipeline 2, the arrangement mode of the baffles on the inner circumferential surface of the tail gas pipeline is spiral, the distance between the adjacent side surfaces of the two baffles in the circumferential direction is zero.
The circulating heating oil inlet 6 of the tail gas pipeline 2 is communicated with the outlet of an external circulating oil tank and is pressurized and circulated through an oil pump, and the circulating heating oil outlet 7 of the tail gas pipeline is communicated with the inlet of the circulating oil tank. And (3) introducing 60-80 ℃ of engine oil into the interlayer of the tail gas pipeline in a circulating manner to heat the tar byproduct attached to the inner surface of the tail gas pipeline, so that the tar byproduct is melted and has good fluidity and enters the tar collecting tank 3 along the pipeline.
And vacuum pump oil is filled in the washing gas tank 5. The outlet of the circulating pipeline connected with the tar collecting tank 3 and the scrubbing tank 5 is positioned below the oil level of the vacuum pump oil. The top of the gas washing tank 5 is connected with a vacuum pump through a pipeline, and under the action of the vacuum pump, tail gas flowing out of the tail part of the chemical vapor deposition furnace body 1 enters the tar collecting tank 3 through the tail gas pipeline 2 and then enters the gas washing tank.
The tar collecting tank 3 and the gas washing tank 5 are both sealed tanks.
By the reaction tail gas that 1 afterbody of chemical vapor deposition stove flowed out can by baffle 4 intercepts layer upon layer and blocks, and this reaction tail gas's kinetic energy descends rapidly, and the temperature can descend to the room temperature rapidly, and the macromolecular hydrocarbon material in most tail gas, like tar and carbon black become solid-state condensation by the gaseous state baffle 4 or on the pipe wall of tail gas pipeline 2, prevent that byproducts such as a large amount of tars from being inhaled vacuum system fast, polluting the vacuum pump and influencing pumping efficiency. The heated engine oil is circularly introduced into the interlayer of the tail gas pipeline 2, and is continuously heated by an external heating system; the engine oil is discharged from the circulating heating oil outlet 7. Because the tail gas pipeline 2 with the interlayer is made of a metal material, the heat transfer effect is good, the engine oil can be heated to 60-80 ℃ through an external heating system according to the tar melting point, and after the engine oil which is circulated and continuously heated, tar byproducts condensed on the inner surface of the tail gas pipeline 2 and the baffle 4 can flow into the tar collecting tank 3 after being heated to reach the melting point. The tar collection tank 3 with the gas washing jar 5 is connected, is equipped with vacuum pump oil in this gas washing jar, and the surplus tail gas that is not intercepted by tail gas pipeline 2 can flow into under the effect of vacuum pump oil in the gas washing jar 5 dress, makes the carbon black in this surplus tail gas and the surplus tar macromolecular hydrocarbon material that does not condense down completely absorbed by vacuum pump oil, is gaseous micromolecular hydrocarbon material in the surplus tail gas followed by the vacuum pump 5 top export is taken away.
Claims (6)
1. A chemical vapor deposition furnace tail gas treatment device is characterized by comprising a tail gas pipeline, a tar collecting tank, a baffle plate and a gas washing tank; wherein:
the upper end of the tail gas pipeline is communicated with an orifice at the upper part of the chemical vapor deposition furnace body; the lower end of the tail gas pipeline is communicated with the inlet of the tar collecting tank; the outlet of the tar collecting tank is communicated with the inlet of the scrubbing tank through a circulating pipeline; the outlet of the scrubbing tank is communicated with a vacuum pump; the shell of the tail gas pipeline is of a sandwich structure;
the lower end of the interlayer is provided with a circulating heating oil inlet, and the upper end of the interlayer is provided with a circulating heating oil outlet; the distance between the two inner surfaces of the interlayer of the exhaust pipeline shell is 10-20 mm; a plurality of spirally arranged baffles are distributed on the inner circumferential surface of the tail gas pipeline.
2. The chemical vapor deposition furnace tail gas treatment device according to claim 1, wherein the plurality of baffles are all flat plates, one end of each baffle is a fixed support end, the other end of each baffle is a cantilever end, the end face of each fixed support end is arc-shaped, the radius of each arc is the same as the inner radius of the tail gas pipeline, the fixed support ends of the baffles are welded and fixed on the inner circumferential surface of the tail gas pipeline, an included angle α of 45 degrees is formed between the cantilever ends of the baffles and the fixed support ends, the surfaces of the baffles are 45-degree inclined surfaces, and the inclined surfaces are the lower ends in the tail gas pipeline.
3. The chemical vapor deposition furnace exhaust gas treatment device according to claim 1, wherein each of the baffles has a length of three-fifths of an inner diameter of the exhaust gas duct and a width of one-fourth of a circumference of an inner surface of the exhaust gas duct; the distance between the adjacent side surfaces of the two circumferentially adjacent baffles is zero, so that the vertical distance between the axially adjacent baffles is the same as the length of the baffles.
4. The chemical vapor deposition furnace tail gas treatment device as claimed in claim 1, wherein engine oil with a temperature of 60-80 ℃ is circulated in the tail gas pipeline interlayer.
5. The chemical vapor deposition furnace tail gas treatment device according to claim 1, wherein the inside of the purge tank is filled with vacuum pump oil; and the outlet of the circulating pipeline connected with the tar collecting tank and the scrubbing tank is positioned below the oil level of the vacuum pump oil.
6. The chemical vapor deposition furnace tail gas treatment device according to claim 1, wherein the tar collection tank and the scrubber tank are sealed tanks.
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| CN201920341918.0U CN210410057U (en) | 2019-03-18 | 2019-03-18 | Tail gas treatment device of chemical vapor deposition furnace |
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| CN201920341918.0U CN210410057U (en) | 2019-03-18 | 2019-03-18 | Tail gas treatment device of chemical vapor deposition furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109806718A (en) * | 2019-03-18 | 2019-05-28 | 西安航空制动科技有限公司 | A kind of device handling chemical vapor deposition stove tail gas |
| CN114181001A (en) * | 2021-12-24 | 2022-03-15 | 内蒙古工业大学 | Passive ventilation type aerobic composting reactor device and use method thereof |
-
2019
- 2019-03-18 CN CN201920341918.0U patent/CN210410057U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109806718A (en) * | 2019-03-18 | 2019-05-28 | 西安航空制动科技有限公司 | A kind of device handling chemical vapor deposition stove tail gas |
| CN114181001A (en) * | 2021-12-24 | 2022-03-15 | 内蒙古工业大学 | Passive ventilation type aerobic composting reactor device and use method thereof |
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