CN210403653U - Scanning electron microscope in non-magnetic environment - Google Patents
Scanning electron microscope in non-magnetic environment Download PDFInfo
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- CN210403653U CN210403653U CN201921813544.4U CN201921813544U CN210403653U CN 210403653 U CN210403653 U CN 210403653U CN 201921813544 U CN201921813544 U CN 201921813544U CN 210403653 U CN210403653 U CN 210403653U
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Abstract
The utility model relates to a no magnetic environment scanning electron microscope, include: the sample table is used for placing a sample; an electron source for generating an electron beam; the condenser is used for carrying out first-stage convergence on the electron beams generated by the electron source; the magnetic lens is arranged between the condenser lens and the sample stage; the distance between a pole shoe of the magnetic lens and a sample on the sample stage is 100mm-200mm, and the magnetic lens is used for carrying out secondary convergence on the electron beams converged by the condenser lens; the electrostatic lens is arranged between the magnetic lens and the sample stage and is used for focusing the electron beams converged by the magnetic lens; and an electronic detector. According to the scanning electron microscope in the nonmagnetic environment, the distance between the pole shoe of the magnetic lens and the sample on the sample stage is set to be 100-200 mm, so that the magnetic sample is not influenced by the magnetic field of the magnetic lens, and the original magnetized state of the magnetic sample on the sample stage is effectively kept.
Description
Technical Field
The utility model relates to an electron microscope technical field especially relates to a no magnetic environment scanning electron microscope.
Background
Scanning electron microscopy is an important microscopic tool for observing the microstructure and composition of materials at the micro-and nano-scale. The scanning electron microscope focuses electron beams to a nanometer size through a multistage magnetic lens, deflects the surface of a sample through a coil for scanning, receives signals such as secondary electrons, back scattering electrons, X rays, transmission electrons and the like generated after the electron bombardment, performs signal processing through an electronic circuit, and generates a material structure and component nanometer-scale microscopic image in a computer. The scanning electron microscope electron illumination system generally comprises a condenser lens and a magnetic objective lens system, wherein a magnetic objective lens close to a sample excites a magnetic field in a magnetic pole shoe through a coil, and electrons are focused by the magnetic field and are incident to the sample.
The magnetic objective lens of the traditional scanning electron microscope is composed of magnetic lenses, the magnetic objective lens is processed into the magnetic lenses through magnetic materials capable of generating high magnetic fields, electron beams focused by a condenser lens are further focused to form nanoscale electron beams, and the nanoscale electron beams are irradiated on a sample to be scanned and observed; meanwhile, in order to obtain the maximum magnification, the distance between the sample and the pole shoe of the magnetic lens is only 0.5mm-10 mm. Because the magnetic objective lens is made of a strong magnetic field material, the magnetic field of the magnetic objective lens can influence the magnetic state of the magnetic sample, so that the traditional scanning electron microscope cannot observe the magnetic structure of the magnetic sample; and because of the strong magnetic field of the magnetic objective, if the sample is a powder magnetic sample, the magnetic powder is attracted by the strong magnetic field and distributed on the pole shoe of the magnetic objective, so that the magnetic objective is damaged.
SUMMERY OF THE UTILITY MODEL
Accordingly, there is a need to provide a scanning electron microscope without magnetic environment, which is directed to the problems of the conventional technology.
A nonmagnetic environment scanning electron microscope, comprising:
the sample table is used for placing a sample;
an electron source for generating an electron beam;
the condenser is used for carrying out first-stage convergence on the electron beams generated by the electron source;
the magnetic lens is arranged between the condenser lens and the sample stage; the distance between a pole shoe of the magnetic lens and a sample on the sample stage is 100mm-200mm, and the magnetic lens is used for carrying out secondary convergence on the electron beams converged by the condenser lens;
the electrostatic lens is arranged between the magnetic lens and the sample stage and is used for focusing the electron beams converged by the magnetic lens; and
and the electron detector is used for receiving scattered electrons, secondary electrons and transmission electrons generated by the fact that the electron beams are focused by the electrostatic lens and then projected to the sample.
According to the scanning electron microscope in the nonmagnetic environment, the distance between the pole shoe of the magnetic lens and the sample on the sample stage is set to be 100-200 mm, so that the distance between the pole shoe of the magnetic lens and the sample on the sample stage is increased, meanwhile, the electrostatic lens is used for finally focusing an electron beam and is close to the magnetic sample on the sample stage, the normal magnifying observation function of the scanning electron microscope in the nonmagnetic environment is obtained, the magnetic sample is not influenced by the magnetic field of the magnetic lens, the original magnetization state of the magnetic sample on the sample stage is effectively guaranteed, and the magnetic structure signal of the magnetic sample can be obtained through the electronic detector. The magnetic nano powder sample can be observed with high resolution of conventional structure, appearance and components, and can not be attracted by the magnetic field of the magnetic lens to destroy the working state of the scanning electron microscope in a non-magnetic environment when the magnetic nano powder sample is not in a strong magnetic field environment.
In one embodiment, the device further comprises a sample chamber and a lens barrel, wherein the lens barrel is arranged on the sample chamber and is communicated with the sample chamber; the sample stage and the electronic detector are arranged in the sample chamber; the electron source, the condenser lens, the magnetic lens and the electrostatic lens are all arranged in the lens barrel.
In one embodiment, the device further comprises a vacuum system, wherein the vacuum system is communicated with the sample chamber and the lens barrel.
In one embodiment, the distance between the electrostatic lens and the sample on the sample stage is 0.5mm-10 mm.
In one embodiment, the distance between the pole shoe of the magnetic lens and the sample on the sample stage 20 is 100 mm.
In one embodiment, the electron beam source further comprises a high voltage power source electrically connected to the electron beam source.
In one embodiment, the system further comprises a signal processing system, a computer and a display, wherein the signal processing system is electrically connected with the electronic detector and the computer, and the computer is electrically connected with the display.
In one embodiment, the number of the collecting mirrors is multiple, and the collecting mirrors are oppositely arranged at intervals along the projection direction of the electron beam.
In one embodiment, the number of the electrostatic lenses is multiple, and the multiple electrostatic lenses are arranged at intervals along the projection direction of the electron beam.
In one embodiment, the number of the electrostatic lenses is two, and the two electrostatic lenses are oppositely arranged at intervals along the projection direction of the electron beam.
Drawings
Fig. 1 is a schematic view of the scanning electron microscope in a non-magnetic environment of the present invention.
The meaning of the reference symbols in the drawings is:
the system comprises a sample room 10, a sample stage 20, a lens barrel 30, an electron source 40, a condenser lens 50, a magnetic lens 60, an electrostatic lens 70, an electron detector 80, a vacuum system 90, a signal processing system 100, a computer 110, a display 120, an electron beam 130 and a high-voltage power supply 140.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully below. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Referring to fig. 1, a scanning electron microscope in a non-magnetic environment according to an embodiment of the present invention includes a sample stage 20, an electron source 40, a condenser 50, a magnetic lens 60, an electrostatic lens 70, and an electron detector 80. The sample stage 20 is used for placing a sample. An electron source 40 is disposed opposite the sample stage 20, and the electron source 40 is used to generate an electron beam 130. The condenser 50 is disposed between the electron source 40 and the sample stage 20, and the condenser 50 is used for performing a first-stage convergence on the electron beam 130 generated by the electron source 40. The magnetic lens 60 is arranged between the condenser lens 50 and the sample stage 20, the distance between a pole shoe of the magnetic lens 60 and a sample on the sample stage 20 is 100mm-200mm, and the magnetic lens 60 is used for carrying out secondary convergence on the electron beam 130 converged by the condenser lens 50. The electrostatic lens 70 is arranged between the magnetic lens 360 and the sample stage 20, and the electrostatic lens 70 is used for focusing the electron beam 130 focused by the magnetic lens 60; the electron detector 80 is used for receiving the electron beam 130, which is focused by the electrostatic lens 70 and then projected onto the sample on the sample stage 20 to generate scattered electrons, secondary electrons and transmission electrons.
When the scanning electron microscope is used in a nonmagnetic environment, the method comprises the following steps:
1. the sample is placed on the sample stage 20.
2. The electron source 40 generates an electron beam 130, and the electron source 40 generates the electron beam 130 and projects the beam toward the condenser lens 50.
3. The condenser lens 50 performs a first-order convergence on the electron beam 130 generated by the electron source 40.
4. The magnetic lens 60 performs a second-stage convergence on the electron beam 130 converged by the condenser lens 50.
5. The electrostatic lens 70 focuses the electron beam 130 focused by the magnetic lens 60, and the electron beam 130 is projected onto the sample on the sample stage 20 after the secondary focusing to generate scattered electrons, secondary electrons and transmission electrons;
6. the electron detector 80 receives scattered electrons, secondary electrons, and transmitted electrons generated on the sample.
In the scanning electron microscope in the nonmagnetic environment, the distance between the pole shoe of the magnetic lens 60 and the sample on the sample stage 20 is set to be 100mm-200mm to increase the distance between the pole shoe of the magnetic lens 60 and the sample on the sample stage 20, and meanwhile, the electrostatic lens 70 is used for finally focusing the electron beam 130 and is close to the magnetic sample on the sample stage 20, so that the scanning electron microscope in the normal nonmagnetic environment has an enlarged observation function, the magnetic sample is not influenced by the magnetic field of the magnetic lens 60, the original magnetization state of the magnetic sample on the sample stage 20 is effectively ensured, and a magnetic structure signal of the magnetic sample can be obtained through the electronic detector 80. The magnetic nano powder sample can be observed with high resolution of conventional structure, appearance and components, and can not be attracted by the magnetic field of the magnetic lens 60 to destroy the working state of the scanning electron microscope in a non-magnetic environment when the magnetic nano powder sample is not in a strong magnetic field environment.
It should be noted that the range of the magnetic field of the magnetic lens 60 influencing the magnetic sample on the sample stage 20 is approximately 0mm to 10mm, so that the distance between the pole shoe of the magnetic lens 60 and the sample on the sample stage 20 is set to 100mm to 200mm, thereby effectively preventing the magnetic strength of the magnetic lens 60 from influencing the magnetic sample on the sample stage 20. In the present embodiment, the distance between the pole piece of the magnetic lens 60 and the sample on the sample stage 20 is 100 mm.
Furthermore, the scanning electron microscope in the nonmagnetic environment further comprises a sample room 10 and a lens barrel 30, wherein the lens barrel 30 is arranged on the sample room 10 and is communicated with the sample room 10; the sample stage 20 is arranged in the sample chamber 10; the electron source 40, the condenser lens 50, the magnetic lens 60, and the electrostatic lens 70 are all disposed within the lens barrel 30.
Furthermore, the scanning electron microscope in the nonmagnetic environment further comprises a vacuum system 90, the vacuum system 90 is communicated with the sample chamber 10 and the lens barrel 30, and the vacuum system 90 is used for vacuumizing the sample chamber 10 and the lens barrel 30 so as to ensure that the interior of the sample chamber 10 and the interior of the lens barrel 30 are in a vacuum state, which is favorable for ensuring the detection precision of the sample.
In some embodiments, the electron beam source 10 is an electron gun.
In some embodiments, the scanning electron microscope without magnetic environment further comprises a high voltage power source 140, the high voltage power source 140 is electrically connected to the electron beam source 10, and the high voltage power source 140 provides a high voltage to the electron beam source 10.
The number of the condenser lenses 20 is multiple, and the condenser lenses 20 are arranged at intervals along the projection direction of the electron beam 130 so as to realize multiple first-stage convergence on the electron beam 130 generated by the electron source 40; in the present embodiment, the two condenser lenses 20 are disposed at intervals in the projection direction of the electron beam 130.
The number of the electrostatic lenses 70 is plural, and the plural electrostatic lenses 70 are oppositely arranged at intervals along the projection direction of the electron beam 130 to realize the second-stage convergence of the electron beam 130 for plural times. Specifically, in the present embodiment, the number of the electrostatic lenses 70 is two, and the two electrostatic lenses 70 are oppositely disposed at intervals along the projection direction of the electron beam 130.
In some embodiments, the distance between the electrostatic lens 70 and the sample on the sample stage 20 is 0.5mm to 10 mm. Further, the distance between the electrostatic lens 70 and the sample on the sample stage 20 is 10 mm.
In some embodiments, the scanning electron microscope without magnetic environment further includes a signal processing system 100, a computer 110 and a display 120, the signal processing system 100 is electrically connected to the electron detector 80 and the computer 110, the computer 110 is electrically connected to the display 120, scattered electrons, secondary electrons and transmitted electrons generated by the electron beam 130 projected onto the sample are received by the electron detector 80 and output to the computer 110 through the signal processing system 100, and the display 120 is used for displaying the detection data.
The utility model discloses a no magnetism environment scanning electron microscope, establish to 100mm-200mm through the distance between the pole shoe with magnetic lens 60 and the sample on sample platform 20, distance between the pole shoe with increase magnetic lens 60 and the sample on sample platform 20, be used for last focusing electron beam 130 and be close to the magnetic sample on sample platform 20 through electrostatic lens 70 simultaneously, outside in order to obtain the normal no magnetism environment scanning electron microscope enlarged observation function, make the magnetic sample not influenced by the magnetic field of magnetic lens 60, effectively ensure that the magnetic sample on sample platform 20 keeps original magnetization state, accessible electronic detector 80 acquires the magnetism structure signal of magnetic sample. The magnetic nano powder sample can be observed with high resolution of conventional structure, appearance and components, and can not be attracted by the magnetic field of the magnetic lens 60 to destroy the working state of the scanning electron microscope in a non-magnetic environment when the magnetic nano powder sample is not in a strong magnetic field environment.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. A scanning electron microscope for a nonmagnetic environment, comprising:
the sample table is used for placing a sample;
an electron source for generating an electron beam;
the condenser is used for carrying out first-stage convergence on the electron beams generated by the electron source;
the magnetic lens is arranged between the condenser lens and the sample stage; the distance between a pole shoe of the magnetic lens and a sample on the sample stage is 100mm-200mm, and the magnetic lens is used for carrying out secondary convergence on the electron beams converged by the condenser lens;
the electrostatic lens is arranged between the magnetic lens and the sample stage and is used for focusing the electron beams converged by the magnetic lens; and
and the electron detector is used for receiving scattered electrons, secondary electrons and transmission electrons generated by the fact that the electron beams are focused by the electrostatic lens and then projected to the sample.
2. The nonmagnetic environment scanning electron microscope of claim 1, further comprising a sample chamber and a lens barrel disposed on and in communication with the sample chamber; the sample stage and the electronic detector are arranged in the sample chamber; the electron source, the condenser lens, the magnetic lens and the electrostatic lens are all arranged in the lens barrel.
3. The magnetic-free environment scanning electron microscope of claim 2, further comprising a vacuum system, wherein the vacuum system is in communication with the sample chamber and the lens barrel.
4. The nonmagnetic environment scanning electron microscope of claim 1, wherein the distance between the electrostatic lens and the sample on the sample stage is 0.5mm to 10 mm.
5. The nonmagnetic environment scanning electron microscope of claim 1, wherein the distance between the pole piece of the magnetic lens and the sample on the sample stage is 100 mm.
6. The nonmagnetic environment scanning electron microscope of claim 1, further comprising a high voltage power supply electrically connected to the electron beam source.
7. The nonmagnetic environment scanning electron microscope of claim 1, further comprising a signal processing system, a computer and a display, the signal processing system electrically connecting the electronic detector and the computer, the computer electrically connecting the display.
8. The nonmagnetic environment scanning electron microscope of claim 1, wherein the number of the condenser lenses is plural, and the plural condenser lenses are arranged at intervals in the projection direction of the electron beam.
9. The nonmagnetic environment scanning electron microscope of claim 1, wherein the number of the electrostatic lenses is plural, and the plural electrostatic lenses are arranged at intervals in an opposite direction along a projection direction of the electron beam.
10. The nonmagnetic environment scanning electron microscope of claim 9, wherein the number of the electrostatic lenses is two, and the two electrostatic lenses are oppositely arranged at intervals along the projection direction of the electron beam.
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| CN201921813544.4U CN210403653U (en) | 2019-10-25 | 2019-10-25 | Scanning electron microscope in non-magnetic environment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112378937A (en) * | 2020-11-16 | 2021-02-19 | 重庆大学 | Horizontal insertion type electronic probe and detection method |
| CN114200504A (en) * | 2021-12-13 | 2022-03-18 | 中国核动力研究设计院 | Electron beam generator for simulating beta radiation source and testing method |
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2019
- 2019-10-25 CN CN201921813544.4U patent/CN210403653U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112378937A (en) * | 2020-11-16 | 2021-02-19 | 重庆大学 | Horizontal insertion type electronic probe and detection method |
| CN114200504A (en) * | 2021-12-13 | 2022-03-18 | 中国核动力研究设计院 | Electron beam generator for simulating beta radiation source and testing method |
| CN114200504B (en) * | 2021-12-13 | 2024-04-30 | 中国核动力研究设计院 | Electron beam generator for simulating beta radiation source and testing method |
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