CN210394503U

CN210394503U - Sputtering equipment for processing integrated circuit

Info

Publication number: CN210394503U
Application number: CN201920986971.6U
Authority: CN
Inventors: 李子考; 凡永亮
Original assignee: Yancheng Huayu Photoelectric Technology Co ltd
Current assignee: Yancheng Huayu Photoelectric Technology Co ltd
Priority date: 2019-06-27
Filing date: 2019-06-27
Publication date: 2020-04-24
Anticipated expiration: 2029-06-27

Abstract

The utility model provides a sputtering equipment of integrated circuit processing usefulness relates to the integrated circuit field. The sputtering equipment for processing the integrated circuit comprises a support frame, wherein one side of the support frame comprises a forward and reverse rotating motor, a first rotating wheel, a belt, a fixing plate and a through hole. This sputtering equipment of integrated circuit processing usefulness, through the revolving stage that sets up, and the spout, the direction slide bar, the limiting plate, the slider, the connecting plate, the fixed block, the pull ring, the pull rod, the cooperation setting of grip block and spring, make the staff when needs processing integrated circuit board, can stimulate the pull ring earlier, thereby make the pull ring can pass through fixed block pulling pull rod, thereby make the pull rod can stimulate the grip block, thereby make the fixed block that is promoted can stimulate the connecting plate, thereby make the connecting plate can stimulate the slider, thereby make the slider can the horizontal slip on the direction slide bar, thereby make the slider that is promoted can extrude the spring, thereby make the spring can shrink.

Description

Sputtering equipment for processing integrated circuit

Technical Field

The utility model relates to an integrated circuit technical field specifically is a sputtering equipment of integrated circuit processing usefulness.

Background

Compared with the sputtering equipment in the prior art, particularly the sputtering equipment for processing the integrated circuit, when the sputtering equipment is used, a worker needs to place the integrated circuit board on the workbench of the sputtering equipment, and the integrated circuit board in the center cannot be well fixed and stabilized by the workbench of the existing sputtering equipment in the using process, so that the sputtering equipment for processing the integrated circuit is provided for solving the problem.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The not enough to prior art, the utility model provides a sputtering equipment of integrated circuit processing usefulness possesses advantages such as can be with the integrated circuit board clamping stability that needs processing, has solved among the prior art sputtering equipment's workstation can not be fine with the stable problem of integrated circuit board centre gripping.

(II) technical scheme

For the above-mentioned integrated circuit board centre gripping that possesses and to need processing stabilizes the purpose, the utility model provides a following technical scheme: the utility model provides a sputtering equipment that integrated circuit processing was used, includes the support frame, one side of support frame is including positive reverse motor, first runner, belt, fixed plate and through-hole, one side of fixed plate is connected with the right side of support frame, one side of positive reverse motor is connected with the right side of fixed plate, the middle part of first runner and the output shaft of positive reverse motor, the inboard of belt is connected with the outside of first runner, the through-hole is located the upper portion setting on support frame right side.

The middle part of support frame is including bull stick, pivot and second runner, one side of pivot is connected with the middle part of support frame, the lower extreme of bull stick is connected with the middle part of pivot, the middle part of second runner is connected with the middle part of bull stick.

The top of the rotating rod comprises a rotating table, and the bottom of the rotating table is connected with the upper end of the rotating rod.

Furthermore, one side of the rotary table comprises a sliding groove and a guide sliding rod, the sliding groove is arranged in the middle of one side of the rotary table, and one end of the guide sliding rod is connected with one side of the inner wall of the sliding groove.

Furthermore, the direction slide bar includes limiting plate and slider, one side of limiting plate is connected with the other end of direction slide bar, the middle part of slider is connected with the middle part of direction slide bar.

Furthermore, the top of slider is including connecting plate and fixed block, the bottom of connecting plate is connected with the top of slider, the bottom of fixed block is connected with the top of slider.

Furthermore, the fixed block includes pull ring, pull rod and grip block, one side of pull ring is connected with one side of fixed block, the one end of pull rod is connected with the opposite side of fixed block, one side of grip block is connected with the other end of pull rod.

Furthermore, one side of the guide sliding rod comprises a spring, and the inner side of the spring is connected with one side of the guide sliding rod.

(III) advantageous effects

Compared with the prior art, the utility model provides a sputtering equipment of integrated circuit processing usefulness possesses following beneficial effect:

1. the sputtering equipment for processing the integrated circuit is characterized in that the sputtering equipment comprises a rotary table, a sliding groove, a guide sliding rod, a limiting plate, a sliding block, a connecting plate, a fixed block, a pull ring, a pull rod, a clamping plate and a spring, wherein the rotary table is arranged, the sliding groove, the guide sliding rod, the limiting plate, the sliding block, the connecting plate, the fixed block, the pull ring and the spring are arranged in a matched manner, so that a worker can firstly pull the pull ring when needing to process the integrated circuit board, the pull ring can pull the pull rod through the fixed block, the pull rod can pull the clamping plate, the pulled fixed block can pull the connecting plate, the connecting plate can pull the sliding block, the sliding block can slide left and right on the guide sliding rod, the spring can be extruded by the pulled sliding block, the spring can contract, the sliding block can slide in the sliding groove, the clamping plate can be pulled, the, therefore, the integrated circuit board to be processed can be clamped stably, and the problem that a workbench of sputtering equipment in the prior art cannot clamp the integrated circuit board stably is solved.

2. This sputtering equipment that integrated circuit processing was used, support frame through setting up, and just reverse motor, first runner, the belt, the fixed plate, the through-hole, the bull stick, the apparatus further comprises a rotating shaft, the cooperation setting of second runner and revolving stage, make the staff open just reverse motor after, just reverse motor can rotate first runner through the output shaft, thereby make first runner can rotate the belt, thereby make the belt can be continuous output in the through-hole, thereby make the belt can drive the second runner and rotate, thereby make the second runner can drive the bull stick and rotate, thereby make the bull stick can rotate in the pivot, thereby make the pivot can drive the revolving stage and rotate, thereby make pivoted revolving stage can drive integrated circuit board and rotate, thereby make the integrated circuit board that needs processing can be according to the required various angles of rotation of user, thereby effectively make integrated circuit board be convenient for processing.

Drawings

FIG. 1 is a sectional view of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is an enlarged view of the point A in FIG. 1;

fig. 4 is an enlarged view of the position B in the structure diagram 1 of the present invention.

The device comprises a support frame 1, a forward and reverse rotation motor 2, a first rotating wheel 3, a belt 4, a fixing plate 5, a through hole 6, a rotating rod 7, a rotating shaft 8, a second rotating wheel 9, a rotating table 10, a sliding chute 11, a guide sliding rod 12, a limiting plate 13, a sliding block 14, a connecting plate 15, a fixing block 16, a pull ring 17, a pull rod 18, a clamping plate 19 and a spring 20.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

As shown in fig. 1-4, the embodiment of the utility model provides a sputtering equipment that integrated circuit processing used, including support frame 1, one side of support frame 1 is including positive reverse motor 2, first runner 3, belt 4, fixed plate 5 and through-hole 6, one side of fixed plate 5 and the right side fixed connection of support frame 1, one side of positive reverse motor 2 and the right side fixed connection of fixed plate 5, the middle part of first runner 3 and the output shaft fixed connection of positive reverse motor 2, the inboard of belt 4 cup joints with the outside of first runner 3, the upper portion that through-hole 6 is located support frame 1 right side is seted up.

The middle part of support frame 1 is including bull stick 7, pivot 8 and second runner 9, and one side of pivot 8 and the middle part embedding of support frame 1, and the lower extreme of bull stick 7 is pegged graft with the middle part of pivot 8, and the middle part of second runner 9 and the middle part fixed connection of bull stick 7.

The top of the rotating rod 7 comprises a rotating platform 10, the bottom of the rotating platform 10 is fixedly connected with the upper end of the rotating rod 7, one side of the rotating platform 10 comprises a sliding chute 11 and a guide sliding rod 12, the middle part of the sliding chute 11, which is positioned at one side of the rotating platform 10, is opened, one end of the guide sliding rod 12 is fixedly connected with one side of the inner wall of the sliding chute 11, the guide sliding rod 12 comprises a limiting plate 13 and a sliding block 14, one side of the guide sliding rod 12 comprises a spring 20, the inner side of the spring 20 is sleeved with one side of the guide sliding rod 12, one side of the limiting plate 13 is fixedly connected with the other end of the guide sliding rod 12, the middle part of the sliding block 14 is slidably connected with the middle part of the guide sliding rod 12, the top of the sliding block 14 comprises a connecting plate 15 and a fixed block 16, the bottom of the connecting plate 15 is fixedly connected with the top of, one side of the pull ring 17 is fixedly connected with one side of the fixed block 16, one end of the pull rod 18 is fixedly connected with the other side of the fixed block 16, and one side of the clamping plate 19 is fixedly connected with the other end of the pull rod 18.

When the integrated circuit board processing device is used, when an operator needs to process an integrated circuit board, the operator can firstly pull the pull ring 17, so that the pull ring 17 can pull the pull rod 18 through the fixed block 16, so that the pull rod 18 can pull the clamping plate 19, so that the pulled fixed block 16 can pull the connecting plate 15, so that the connecting plate 15 can pull the slider 14, so that the slider 14 can slide left and right on the guide slide rod 12, so that the pulled slider 14 can extrude the spring 20, so that the spring 20 can contract, so that the slider 14 can slide in the sliding groove 11, so that the clamping plate 19 can be pulled open, so that after the integrated circuit board is placed on the rotary table 10, the operator gradually loosens the pull ring 17, so that the clamping plates 19 can be clamped at two sides of the integrated circuit board, so that the integrated circuit board to be processed can be stably clamped, and after the operator starts the forward and reverse rotation motor 2, just reversing motor 2 can rotate first runner 3 through the output shaft, thereby make first runner 3 can rotate belt 4, thereby make belt 4 can be in continuous output in through-hole 6, thereby make belt 4 can drive second runner 9 and rotate, thereby make second runner 9 can drive bull stick 7 and rotate, thereby make bull stick 7 can rotate in pivot 8, thereby make pivot 8 can drive revolving stage 10 and rotate, thereby make pivoted revolving stage 10 can drive the integrated circuit board and rotate, thereby make the integrated circuit board that needs processing can be according to the required various angles of rotation of user, thereby make integrated circuit board convenient to process.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Sputtering equipment of integrated circuit processing usefulness, including support frame (1), its characterized in that: one side of the support frame (1) comprises a forward and reverse rotation motor (2), a first rotating wheel (3), a belt (4), a fixing plate (5) and a through hole (6), one side of the fixing plate (5) is connected with the right side of the support frame (1), one side of the forward and reverse rotation motor (2) is connected with the right side of the fixing plate (5), the middle of the first rotating wheel (3) is connected with an output shaft of the forward and reverse rotation motor (2), the inner side of the belt (4) is connected with the outer side of the first rotating wheel (3), and the through hole (6) is arranged at the upper part of the right side of the support frame (1);

the middle part of the support frame (1) comprises a rotating rod (7), a rotating shaft (8) and a second rotating wheel (9), one side of the rotating shaft (8) is connected with the middle part of the support frame (1), the lower end of the rotating rod (7) is connected with the middle part of the rotating shaft (8), and the middle part of the second rotating wheel (9) is connected with the middle part of the rotating rod (7);

the top of the rotating rod (7) comprises a rotary table (10), and the bottom of the rotary table (10) is connected with the upper end of the rotating rod (7).

2. The sputtering apparatus for integrated circuit processing according to claim 1, wherein: one side of the rotary table (10) comprises a sliding groove (11) and a guide sliding rod (12), the sliding groove (11) is arranged in the middle of one side of the rotary table (10), and one end of the guide sliding rod (12) is connected with one side of the inner wall of the sliding groove (11).

3. The sputtering apparatus for integrated circuit processing according to claim 2, wherein: the guide sliding rod (12) comprises a limiting plate (13) and a sliding block (14), one side of the limiting plate (13) is connected with the other end of the guide sliding rod (12), and the middle of the sliding block (14) is connected with the middle of the guide sliding rod (12).

4. The sputtering apparatus for integrated circuit processing according to claim 3, wherein: the top of the sliding block (14) comprises a connecting plate (15) and a fixing block (16), the bottom of the connecting plate (15) is connected with the top of the sliding block (14), and the bottom of the fixing block (16) is connected with the top of the sliding block (14).

5. The sputtering apparatus for integrated circuit processing according to claim 4, wherein: the fixed block (16) comprises a pull ring (17), a pull rod (18) and a clamping plate (19), one side of the pull ring (17) is connected with one side of the fixed block (16), one end of the pull rod (18) is connected with the other side of the fixed block (16), and one side of the clamping plate (19) is connected with the other end of the pull rod (18).

6. The sputtering apparatus for integrated circuit processing according to claim 2, wherein: one side of the guide sliding rod (12) comprises a spring (20), and the inner side of the spring (20) is connected with one side of the guide sliding rod (12).