CN210378997U - Wafer processing is with push-and-pull boat adjusting device - Google Patents
Wafer processing is with push-and-pull boat adjusting device Download PDFInfo
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- CN210378997U CN210378997U CN201920966522.5U CN201920966522U CN210378997U CN 210378997 U CN210378997 U CN 210378997U CN 201920966522 U CN201920966522 U CN 201920966522U CN 210378997 U CN210378997 U CN 210378997U
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Abstract
The utility model discloses a wafer processing push-pull boat adjusting device, which comprises a push-pull boat bottom plate, wherein an adjusting component is arranged on the lower part of one side surface of the push-pull boat bottom plate, the adjusting component comprises a supporting top block and a first positioning bolt, the supporting top block is welded and fixed on the lower part of one side surface of the push-pull boat bottom plate, a first adjusting screw rod is arranged in the middle of the supporting top block, the first positioning bolt is arranged on one side surface of a connecting plate, an angle adjusting component is arranged on one side surface of an upper splint, the angle adjusting component comprises a sleeve, a fixed ball head pressing seat, a spring, a ram and a supporting seat, the ram is arranged in the sleeve, one end of the ram is movably clamped in the fixed ball head pressing seat, one end of the sleeve is fixedly connected on one side surface of the supporting seat, the fixed ball head pressing seat is fixedly connected on one, meanwhile, the angle of the sealing door can be adjusted, and the application range is expanded.
Description
Technical Field
The utility model relates to a wafer processing technology field, in particular to wafer processing is with push-and-pull boat adjusting device.
Background
During the operation of the diffusion furnace for processing the wafer, the matched push-pull boat sends the wafer into the diffusion furnace through the bearing paddle, and the wafer is taken out of the diffusion furnace after the technological process. The front and back, left and right horizontal angles, left and right horizontal positions and the overall height, namely the three-dimensional state of the bearing paddle for placing the wafer of the push-pull boat need to be adjusted.
However, push-and-pull boat among the prior art because its altitude mixture control is usually through bolt positioning adjustment, and regulation stability is not good, the operation of the operating personnel of being not convenient for, and the angle of sealing door can't finely tune simultaneously, can't adjust according to the fire door position, uses the limitation big.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a wafer processing is with push-and-pull boat adjusting device, in order to solve above-mentioned technique in the push-and-pull boat, because its altitude mixture control is usually adjusted through bolt location, regulation stability is not good, the operation personnel operation of being not convenient for, the angle of sealing door can't finely tune simultaneously, can't adjust according to fire door position, uses the big problem of limitation, the technical scheme of the utility model is that:
a push-pull boat adjusting device for wafer processing comprises a push-pull boat bottom plate, a connecting plate, a horizontal fixing plate, a lower clamping plate, an upper clamping plate, a pallet bottom plate and a square tube, wherein the connecting plate is arranged on one side surface of the push-pull boat bottom plate, the horizontal fixing plate is welded and fixed on the bottom end surface of the connecting plate, an adjusting component is arranged on the lower portion of one side surface of the push-pull boat bottom plate and comprises a supporting top block and a first positioning bolt, the supporting top block is welded and fixed on the lower portion of one side surface of the push-pull boat bottom plate, a first adjusting screw rod is arranged in the middle of the supporting top block, a first positioning bolt is mounted on one side surface of the connecting plate, the connecting plate is fixedly connected with the push-pull boat bottom plate through the first positioning bolt, the lower clamping plate is arranged on the upper side surface of the pallet bottom plate, the upper, the utility model discloses a take-up mechanism, including punch holder, pallet bottom plate, horizontal fixed plate, punch holder, ram, cantilever bar, ram, spring, platform, stand, frame, punch holder, the suit spring on the lateral surface of punch holder.
Preferably, a threaded hole is formed in the middle of the supporting top block, a first adjusting screw is connected in the threaded hole through threads, and the upper end of the first adjusting screw is attached to the lower side of the connecting plate.
Preferably, one side of the connecting plate is connected with the push-pull boat bottom plate through a second positioning bolt.
Preferably, a first adjusting bolt, a second adjusting bolt and a third adjusting bolt are sequentially installed on the surface of one side of the horizontal fixing plate, and the first adjusting bolt and the third adjusting bolt are symmetrically arranged on two sides of the second adjusting bolt.
Preferably, the height adjusting assembly comprises a square guide pillar, a second adjusting screw and a rear supporting block, the square guide pillar is fixedly connected to one side of the upper end face of the base plate of the stand, the second adjusting screw is installed in the middle of the square guide pillar, the upper end of the second adjusting screw penetrates through the rear supporting block, and the rear supporting block is fixedly connected with the upper clamp plate through a screw.
Preferably, the compressing assembly comprises an adjusting block, a guide nut, an adjusting column, a pressing plate and a rotating shaft, the adjusting block is arranged on one side surface of the upper clamping plate, the guide nut is inlaid on the surface of the bottom end of the adjusting block, the adjusting column is connected to one side surface of the bottom plate of the stand through the adjusting column, the upper end of the adjusting column is connected with the guide nut through threads, the pressing plate is located on the upper side of the upper clamping plate, and the pressing plate is connected with the adjusting block through the rotating shaft in a rotating mode.
Preferably, the cover plate is installed in the middle of the upper clamping plate, the sealing plate is installed at the lower end of the cover plate, the middle of the sealing plate is fixedly connected with the square pipe through screws, and the two sides of the sealing plate are attached to the surface of the square pipe through O-shaped sealing rings.
Preferably, the rotating shaft is rotatably connected with the adjusting block through a deep groove ball bearing, an elastic check ring for the shaft is sleeved on the rotating shaft outside the deep groove ball bearing, a fixed plug is arranged on one side face of the adjusting block, a counter bore is formed in one side face of the plug, a threaded hole is formed in one side face of the rotating shaft, a screw is installed in the counter bore, and one end of the screw is meshed in the threaded hole.
Preferably, one end of the square pipe is fixedly connected with one end of the sealing door through a corrugated pipe.
By adopting the technical scheme, because the supporting jacking block, the first positioning bolt and the first adjusting screw are added, the height of the connecting plate can be adjusted by an operator through the first adjusting screw, the height of the horizontal fixing plate is adjusted by the connecting plate, and the displacement of the connecting plate is fixed through the first positioning bolt, so that the height can be quickly adjusted, and the adjusting difficulty is greatly reduced.
Owing to added sleeve pipe, fixed bulb and pressed seat, spring, ram and supporting seat for can finely tune the angle of sealing door according to fire door position, be convenient for sealing door seals the fire door, has improved the application scope of this device, the utility model discloses can quick height-adjusting, can adjust the angle of sealing door simultaneously, enlarged application range.
Drawings
FIG. 1 is a three-dimensional structure of the present invention;
fig. 2 is a schematic front sectional view of the middle horizontal fixing plate of the present invention;
fig. 3 is a schematic right sectional view of a bottom plate of the middle stand of the present invention;
fig. 4 is a schematic top view of the upper clamping plate of the present invention;
FIG. 5 is an enlarged schematic view of the structure at A in FIG. 3;
fig. 6 is an enlarged schematic view of a portion B in fig. 4.
In the figure, 1-push-pull boat bottom plate, 2-connecting plate, 3-first positioning bolt, 4-horizontal fixing plate, 5-lower clamping plate, 6-square guide post, 7-first adjusting bolt, 8-second adjusting bolt, 9-third adjusting bolt, 10-adjusting block, 11-square tube, 12-sleeve, 13-upper clamping plate, 14-supporting top block, 15-second positioning bolt, 16-stand bottom plate, 17-pressing plate, 18-second adjusting screw, 19-rear supporting block, 20-guide nut, 21-adjusting column, 22-corrugated tube, 23-sealing door, 24-fixed ball pressure seat, 25-spring, 26-ram, 27-supporting seat, 28-cover plate, 29-sealing plate, 30-O-shaped sealing ring, 31-rotating shaft, 32-deep groove ball bearing, 33-elastic retainer ring for shaft and 34-plug.
Detailed Description
The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Please refer to fig. 1-6, which illustrate a push-pull boat adjusting device for wafer processing, comprising a push-pull boat bottom plate 1, a connecting plate 2, a horizontal fixing plate 4, a lower plate 5, an upper plate 13, a stand bottom plate 16 and a square tube 11, wherein the connecting plate 2 is disposed on a side surface of the push-pull boat bottom plate 1, the horizontal fixing plate 4 is welded and fixed on a bottom surface of the connecting plate 2, an adjusting assembly is disposed on a lower portion of a side surface of the push-pull boat bottom plate 1, the adjusting assembly comprises a supporting top block 14 and a first positioning bolt 3, the supporting top block 14 is welded and fixed on a lower portion of a side surface of the push-pull boat bottom plate 1, a first adjusting screw is disposed in a middle portion of the supporting top block 14, the first positioning bolt 3 is mounted on a side surface of the connecting plate 2, the connecting plate 2 is fixedly connected with the push-pull boat bottom plate 1 through the, an upper clamp plate 13 is arranged on the upper side of the upper clamp plate 13, one side of the upper clamp plate 13 is connected with one side of a lower clamp plate 5 through a height adjusting component, the other side of the upper clamp plate 13 is connected with the other side of the lower clamp plate 5 through a pressing component, a stand bottom plate 16 is fixed on the upper side surface of a horizontal fixing plate 4, a square tube 11 is arranged in a cavity between the lower clamp plate 5 and the lower clamp plate 5, an angle adjusting component is arranged on one side surface of the upper clamp plate 13, one end of the angle adjusting component is connected with a sealing door 23, the angle adjusting component comprises a sleeve 12, a fixed ball head pressing seat 24, a spring 25, a ram 26 and a supporting seat 27, the ram 26 is arranged in the sleeve 12, one end of the ram 26 is movably clamped in the fixed ball head pressing seat 24, one end of the sleeve 12 is fixedly connected on one side surface of the, it is convenient to finely adjust the angle of the sealing door 23.
A threaded hole is formed in the middle of the supporting top block 14, a first adjusting screw is connected in the threaded hole through threads, the upper end of the first adjusting screw is attached to the lower side of the connecting plate 2, and the guidance quality of the first adjusting screw during moving is improved.
One side of the connecting plate 2 is connected with the push-pull boat bottom plate 1 through a second positioning bolt 15, and firmness of the connecting plate 2 during fixing is further improved.
A first adjusting bolt 7, a second adjusting bolt 8 and a third adjusting bolt 9 are sequentially installed on the surface of one side of the horizontal fixing plate 4, the first adjusting bolt 7 and the third adjusting bolt 9 are symmetrically arranged on two sides of the second adjusting bolt 8, and therefore the horizontal position can be adjusted conveniently.
Height adjusting assembly includes square guide pillar 6, second adjusting screw 18 and back supporting block 19, and 6 fixed connection of square guide pillar are in 16 up end one side of stand bottom plate, and 6 mid-mounting second adjusting screw 18 of square guide pillar, and the 18 upper ends of second adjusting screw run through back supporting block 19, and back supporting block 19 passes through screw and punch holder 13 fixed connection, is convenient for adjust the height of punch holder 13.
Compress tightly the subassembly and include regulating block 10, guide nut 20, adjust post 21, clamp plate 17 and pivot 31, regulating block 10 sets up 13 side surfaces on the punch holder, guide nut 20 inlays on the 10 bottom surfaces of regulating block, adjust post 21 through connection at 16 side surfaces of pallet bottom plate, and adjust the 21 upper end of post and be connected with guide nut 20 through the screw thread, clamp plate 17 is located 13 upsides of punch holder, and clamp plate 17 rotates with regulating block 10 through pivot 31 to be connected, be convenient for compress tightly square pipe 11.
Referring to fig. 5, a cover plate 28 is installed in the middle of the upper clamp plate 13, a sealing plate 29 is installed at the lower end of the cover plate 28, the middle of the sealing plate 29 is fixedly connected with the square tube 11 through a screw, and two sides of the sealing plate 29 are attached to the surface of the square tube 11 through O-rings 30, so that the attachment degree of the connection between the square tube 11 and the upper clamp plate 13 is improved, and the sealing performance is improved.
Referring to fig. 6, a rotating shaft 31 is rotatably connected with an adjusting block 10 through a deep groove ball bearing 32, a shaft elastic retainer ring 33 is sleeved on the rotating shaft 31 outside the deep groove ball bearing 32, a plug 34 is fixed on one side surface of the adjusting block 10, a countersunk hole is formed in one side surface of the plug 34, a threaded hole is formed in one side surface of the rotating shaft 31, a screw is installed in the countersunk hole, one end of the screw is engaged in the threaded hole, the stability of the rotating shaft 31 is improved, meanwhile, the angle of the rotating shaft 31 is convenient to limit, the fixing of the rotating shaft 31 is realized by screwing the screw, the rotating shaft 31 is prevented from rotating after adjustment, and the stability is.
The working principle is as follows: the horizontal fixing plate 4 and the stand bottom plate 16 can be adjusted back and forth through the first adjusting bolt 7, the second adjusting bolt 8 and the third adjusting bolt 9, the first adjusting bolt 7 and the third adjusting bolt 9 are simultaneously screwed, the position horizontal position of the horizontal fixing plate is further adjusted, then the second locking bolt 8 is screwed to position the horizontal fixing plate, after the adjustment is finished, the second adjusting screw 18 and the nut on the adjusting column 21 are screwed to enable the horizontal fixing plate 4 and the stand bottom plate 16 to be firmly connected, the first adjusting screw is rotated to move upwards along the supporting top block 14, the first adjusting screw drives the connecting plate 2 to move upwards, the connecting plate 2 drives the horizontal fixing plate 4 to move upwards, when the connecting plate 2 moves to a designated height, the first positioning bolt 3 and the second positioning bolt 15 are screwed, the first positioning bolt 3 and the second positioning bolt 15 fix the connecting plate 2 on the push-pull boat bottom plate 1, accomplish the regulatory function of height, in the reuse process, press seat 24 through fixed bulb through sealing door 23 and rotate around ram 26, ram 26 can remove in sleeve pipe 12 simultaneously, ram 26 is under spring 25's elastic force effect simultaneously, adjust ram 26's position, after sealing door 23 adjusts to suitable angle, seal the fire door through sealing door 23, cup joint spherical gasket on 19 upside 18 in addition, can be at the angle between certain angle within range clamp plate 17 and the square guide pillar 6, cooperate deep groove ball bearing 32 and the bulb on the regulation post 21 top in the regulating block 10 again, come the front and back of regulation oar, the left and right sides gradient, in order to guarantee the quartz boat level on the oar.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.
Claims (9)
1. The utility model provides a wafer processing is with push-and-pull boat adjusting device, includes push-and-pull boat bottom plate (1), connecting plate (2), horizontal fixing plate (4), lower plate (5), punch holder (13), stand bottom plate (16) and square pipe (11), its characterized in that: the connecting plate (2) is arranged on one side surface of the push-pull boat bottom plate (1), the horizontal fixing plate (4) is fixedly welded on the bottom end surface of the connecting plate (2), the lower part of one side surface of the push-pull boat bottom plate (1) is provided with an adjusting component, the adjusting component comprises a supporting top block (14) and a first positioning bolt (3), the supporting top block (14) is fixedly welded on the lower part of one side surface of the push-pull boat bottom plate (1), the middle part of the supporting top block (14) is provided with a first adjusting screw rod, the first positioning bolt (3) is installed on one side surface of the connecting plate (2), the connecting plate (2) is fixedly connected with the push-pull boat bottom plate (1) through the first positioning bolt (3), the lower clamping plate (5) is arranged on the upper side surface of the stand bottom plate (16), the upper clamping plate (13) is arranged on the upper side of the upper clamping plate (13), and one side of the upper clamping plate (, the other side of the upper clamping plate (13) is connected with the other side of the lower clamping plate (5) through a pressing component, the stand bottom plate (16) is fixed on the upper side surface of the horizontal fixing plate (4), a square tube (11) is installed in a cavity between the lower clamping plate (5) and the lower clamping plate (5), an angle adjusting component is installed on one side surface of the upper clamping plate (13), one end of the angle adjusting component is connected with a sealing door (23), the angle adjusting component comprises a sleeve (12), a fixed ball head pressing seat (24), a spring (25), a ram (26) and a supporting seat (27), the ram (26) is installed in the sleeve (12), one end of the ram (26) is movably clamped in the fixed ball head pressing seat (24), one end of the sleeve (12) is fixedly connected to one side surface of the supporting seat (27), and the fixed ball head pressing seat (24) is fixedly connected to one side surface of the sealing door (, the outer side surface of the ram (26) is sleeved with a spring (25).
2. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: the middle part of the supporting top block (14) is provided with a threaded hole, the threaded hole is connected with a first adjusting screw rod through threads, and the upper end of the first adjusting screw rod is attached to the lower side of the connecting plate (2).
3. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: one side of the connecting plate (2) is connected with the push-pull boat bottom plate (1) through a second positioning bolt (15).
4. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: the surface of one side of the horizontal fixing plate (4) is sequentially provided with a first adjusting bolt (7), a second adjusting bolt (8) and a third adjusting bolt (9), and the first adjusting bolt (7) and the third adjusting bolt (9) are symmetrically arranged on two sides of the second adjusting bolt (8).
5. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: the height adjusting assembly comprises a square guide pillar (6), a second adjusting screw rod (18) and a rear supporting block (19), the square guide pillar (6) is fixedly connected to one side of the upper end face of the stand bottom plate (16), the second adjusting screw rod (18) is installed in the middle of the square guide pillar (6), the upper end of the second adjusting screw rod (18) penetrates through the rear supporting block (19), and the rear supporting block (19) is fixedly connected with the upper clamping plate (13) through a screw.
6. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: compress tightly the subassembly and include regulating block (10), guide nut (20), regulation post (21), clamp plate (17) and pivot (31), regulating block (10) set up at punch holder (13) side surface, guide nut (20) are inlayed on regulating block (10) bottom surface, regulation post (21) through connection is at stand bottom plate (16) side surface, and is connected through screw thread and guide nut (20) on regulation post (21), clamp plate (17) are located punch holder (13) upside, and clamp plate (17) rotate through pivot (31) and regulating block (10) and are connected.
7. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: go up splint (13) middle part installation apron (28), apron (28) lower extreme installation closing plate (29), closing plate (29) middle part is through screw and square pipe (11) fixed connection, closing plate (29) both sides are through O type sealing washer (30) and square pipe (11) surface laminating.
8. The push-pull boat adjusting device for wafer processing as claimed in claim 6, wherein: the utility model discloses a deep groove ball bearing, including pivot (31), regulating block (10), set up countersunk hole on the pivot (31) in the deep groove ball bearing (32) outside, pivot (31) are connected through deep groove ball bearing (32) and rotation of regulating block (10), cup joint epaxial circlip (33) on the pivot (31) in the deep groove ball bearing (32) outside, fixed end cap (34) on regulating block (10) a side, set up the screw hole on end cap (34) a side, the downthehole mounting screw of countersunk hole, screw one end meshing is in the threaded hole.
9. The push-pull boat adjusting device for wafer processing as claimed in claim 1, wherein: one end of the square pipe (11) is fixedly connected with one end of the sealing door (23) through a corrugated pipe (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920966522.5U CN210378997U (en) | 2019-06-26 | 2019-06-26 | Wafer processing is with push-and-pull boat adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920966522.5U CN210378997U (en) | 2019-06-26 | 2019-06-26 | Wafer processing is with push-and-pull boat adjusting device |
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| Publication Number | Publication Date |
|---|---|
| CN210378997U true CN210378997U (en) | 2020-04-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920966522.5U Active CN210378997U (en) | 2019-06-26 | 2019-06-26 | Wafer processing is with push-and-pull boat adjusting device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113202388A (en) * | 2021-04-29 | 2021-08-03 | 北京北方华创微电子装备有限公司 | Semiconductor heat treatment equipment |
| CN113937047A (en) * | 2021-09-29 | 2022-01-14 | 重庆航伟光电科技有限公司 | But system level packaging of plane fine setting welds anchor clamps |
| CN113937047B (en) * | 2021-09-29 | 2024-06-21 | 重庆航伟光电科技有限公司 | System-in-package welding fixture capable of achieving plane fine adjustment |
-
2019
- 2019-06-26 CN CN201920966522.5U patent/CN210378997U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113202388A (en) * | 2021-04-29 | 2021-08-03 | 北京北方华创微电子装备有限公司 | Semiconductor heat treatment equipment |
| CN113937047A (en) * | 2021-09-29 | 2022-01-14 | 重庆航伟光电科技有限公司 | But system level packaging of plane fine setting welds anchor clamps |
| CN113937047B (en) * | 2021-09-29 | 2024-06-21 | 重庆航伟光电科技有限公司 | System-in-package welding fixture capable of achieving plane fine adjustment |
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