CN210353184U

CN210353184U - Electronic cigarette atomization chip and electronic cigarette

Info

Publication number: CN210353184U
Application number: CN201920818397.3U
Authority: CN
Inventors: 许磊; 谢东成; 汪进; 彭书峰
Original assignee: Hefei Weina Sensing Technology Co ltd
Current assignee: Hefei Weina Sensing Technology Co ltd
Priority date: 2019-05-31
Filing date: 2019-05-31
Publication date: 2020-04-21
Anticipated expiration: 2029-05-31

Abstract

The utility model provides an electronic cigarette atomization chip and an electronic cigarette, wherein the electronic cigarette atomization chip comprises a base and a cover plate, the base and the cover plate are fixedly matched to form at least one heating cavity, and each heating cavity independently takes oil; a smoke channel is formed at the position of each heating cavity corresponding to the cover plate, and a heating assembly is fixed on the lower surface of each heating cavity corresponding to the base; the oil inlet hole has all been seted up to the chamber wall in every heating chamber. Compared with the traditional atomizing chip, the utility model discloses simple structure, it is small, easily manufacturing in batches, low cost, heating portion are unsettled closed film, and the heat can be better concentrate on this heating region, and thermal high-usage compares prior art, and the consumption reduces by a wide margin, and when atomizing, the tobacco tar is in the bottom in heating chamber and the support membrane even contact of heating part, and thermal mass is little, and temperature variation is fast, and the speed of cooling by heating up is fast.

Description

Electronic cigarette atomization chip and electronic cigarette

Technical Field

The utility model relates to an electron cigarette technique is an electron smog chip and electron cigarette particularly.

Background

The electron smog spinning disk atomiser is the core component of electron cigarette, and tobacco tar is heated in this place, becomes vaporific aerosol and is inhaled by the smoker through the cigarette holder to reach the process of simulation smoking, obtain with the similar experience of smoking cigarette. There are two main types of commercially available atomizing cores: the first is most common to combine cotton with a surrounding metal heating wire or sheet, the cotton is in direct contact with liquid tobacco tar, and when the heating wire is energized, the tobacco tar adsorbed on the cotton is atomized at high temperature; the second one is one ceramic heater comprising porous ceramic and heating wire and soaked directly into tobacco tar, and the ceramic generates heat and atomizes the tobacco tar after being powered on.

Both of the above two main stream atomizers have corresponding drawbacks. For the former, firstly, due to the influence of the structure, the uneven position and shape of the cotton are likely to cause uneven heat distribution on the heating wire or the heating sheet, which leads to the reduction of the atomization effect and uniformity to generate peculiar smell, affect the taste, and even cause the damage of the heating part due to local overheating to cause danger; secondly, in the actual situation, if the tobacco tar adsorbed on the cotton is too little to cause the dry burning and charring of part of the cotton, a lot of tiny particle impurities can be generated, and the impurities can be inhaled into the human body along with the atomized tobacco tar, so that the taste quality is influenced, and the health problem can be brought; in addition, the heating wires or the heating sheets are directly contacted with the tobacco tar, so that metal ions are inevitably sucked into a human body together in the using process, and the health problem is also caused; in addition, the tobacco tar amount inhaled by cotton is not controllable, so that the atomization amount of the tobacco tar is not controllable, and the particle size of aerosol generated by atomization is not controllable, which can seriously affect the taste of the electronic cigarette. For the ceramic atomizer, the ceramic atomizer is a high-temperature-resistant non-toxic material, so that the problems of taste and safety brought by cotton are solved, the intake of metal elements is reduced, and the same problem that the atomizing amount of tobacco tar and the particle size of aerosol are uncontrollable affects the taste; and the ceramic material has poor heat-conducting property, so the atomizer has large volume and needs to be preheated for a long time. In addition to the above drawbacks, both of the above atomizers are bulky and consume high power.

In recent two years, a method for manufacturing an atomization chip based on an MEMS technology has been proposed to solve some of the disadvantages of the atomizer with a cotton core and a ceramic core, for example, patent (CN108158040A) reports an MEMS electronic cigarette chip which generates heat uniformly and a manufacturing method thereof, which has the advantage of uniform heat generation, and helps to solve the problems of poor sense and inhalation safety risk caused by uneven heating of a heating element and direct contact with smoke liquid in the prior art, but the MEMS electronic cigarette chip is similar to the ceramic atomization core in fundamental working principle, and passively absorbs oil from an oil storage cavity by using the oil absorption characteristic of a porous material, and the oil absorption amount is uncontrollable; and it needs to heat the whole silicon chip, and the power consumption is high. There is also an electronic cigarette with a fog generator as reported in the patent (CN108514158A), which has the advantage of sucking the tobacco tar into the heating channel by capillary action, so that the tobacco tar can be heated more uniformly and sufficiently, and this way, although the uniformity of sucking the tobacco tar is improved to some extent, still belongs to passive oil feeding, and if the channel is not smooth enough or has some impurity particles, bubbles are easily generated; in addition, along with the consumption of the tobacco tar, the tobacco tar liquid level in the oil storage cavity can drop, the surface tension of a contact surface can be influenced, and the tobacco tar liquid level can be separated from a capillary channel when the liquid level further drops, so that the capillary action is invalid, and the tobacco tar can not be sucked; in addition, the heating wires are distributed in the silicon grooves, and more heat can be conducted away by the silicon substrate during heating, so that the heating power consumption is large.

To sum up, among the prior art, there are the uncontrollable problem of high, the heating of consumption, atomization effect in the atomizing chip.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide a low power, the heating is even, controllable atomizing effect's atomizing chip.

The utility model discloses an above-mentioned technical problem is solved to following technical scheme:

an electronic cigarette atomization chip comprises a base and a cover plate, wherein the base and the cover plate are fixedly matched to form at least one heating cavity, and each heating cavity independently feeds oil; the cover plate is provided with smoke channels with the same number as the heating cavities, and each smoke channel is used for communicating the heating cavities with the outside; a heating assembly is fixed on the lower surface of each heating cavity corresponding to the position of the base; the oil inlet has all been seted up to the chamber wall in every heating chamber, every the heating chamber passes through the oil inlet and independently communicates with the outside.

Preferably, the base comprises a first substrate, and the first substrate is a semiconductor; depositing a support film on the lower surface of the first substrate, wherein at least one first micro cavity is etched on the upper surface; the bottom wall of the first micro cavity is the support membrane; the heating assembly is arranged on the lower surface of the support film, and the insulating layer is coated outside the heating assembly.

Preferably, the cover plate is a semiconductor plate-shaped structure, after the cover plate is bonded and fixed with the upper surface of the first substrate, the first micro cavity forms the heating cavity, and the smoke channel is formed at the position of the heating cavity corresponding to the cover plate;

or the cover plate is of a thin film structure, covers the first substrate and covers the first micro cavity, the first micro cavity forms the heating cavity, and the smoke channel is formed at the position of the heating cavity corresponding to the thin film structure;

or the cover plate comprises a second substrate, and the second substrate is a semiconductor; a filter membrane is deposited on the upper surface of the second substrate, and second micro cavities corresponding to the first micro cavities in position and quantity are etched on the lower surface of the second substrate; the top wall of the second micro-chamber is the filter membrane; after the second substrate and the first substrate are fixed, the first micro cavity and the second micro cavity form the heating cavity; the smoke channel is etched on the filtering membrane; the smoke channel is composed of a plurality of micropores.

Preferably, the oil inlet hole is formed in one or more of the first substrate, the second substrate and the cover plate with the plate-shaped structure.

Preferably, the heating assembly is formed by uniformly winding one or more heating wires in a vortex shape, and the plurality of heating wires are respectively and independently powered; the planar area of the heating area formed by the heating assembly is approximately equal to the area of the bottom of the corresponding heating cavity.

Preferably, the heating assembly comprises n metal wires made of the same material, n is an integer greater than 1, the n metal wires are independent from each other and spirally wound on the lower surface of the bottom wall of the heating cavity to form a plurality of concentric circles or concentric polygonal frames approximately, wherein m metal wires are temperature sensors, and the temperature sensors and the concentric circles or the concentric polygonal frames of the heating wires are arranged in a staggered mode in the same plane; m is more than or equal to 1 and less than n; n-m metal wires are used as heating wires.

Aiming at the chip, the invention also provides an electronic cigarette which comprises a cigarette rod, wherein a cigarette holder is fixed at one end of the cigarette rod; an oil tank and an atomization chip are fixed in the cigarette rod; the atomization chip is the atomization chip; the atomization chip is positioned between the oil tank and the cigarette holder; an oil supply device is fixed between the atomizing chip and the oil tank; the heating cavity is communicated with an oil tank through an oil feeding device.

Preferably, the system further comprises a control system; the control system comprises

The output end of the flow sensor is connected with the input point of the controller, and the input end of the flow sensor is connected with the power supply;

the output end of the smoke quality sensor is connected with the input point of the controller, and the input end of the smoke quality sensor is connected with the power supply;

the output end of the active oil supply device is connected with the input end of the smoke generating device, and the input end of the active oil supply device is connected with the output end of the oil tank;

the smoke output end of the smoke generating device is communicated with the cigarette holder;

the input end of the controller is respectively connected with the output ends of the flow sensor and the smoke quality sensor, and the output end of the controller is connected with the input end of the power management module;

and the output end of the power supply is electrically connected with the input ends of the flow sensor, the smoke quality sensor, the active oil supply device and the smoke generating device respectively.

Preferably, the atomizing chip is packaged in the tube shell; the tube shell is provided with an opening which communicates the smoke channel with the cigarette holder.

Preferably, the opening is transversely spanned with a connection, and the flow sensor and the smoke mass sensor are fixed on the connecting rod. The utility model has the advantages that:

(1) compared with the traditional atomization chip, the invention has simple structure, small volume, easy batch manufacture and low cost; the atomization chip can be provided with a plurality of heating cavities, and each heating cavity independently feeds oil; can select to give the heating chamber fuel feeding of different quantity according to smoker's hobby and demand to reach the atomization effect of different intensity, the working mode is changeable, and atomization intensity, efficiency are controllable adjustable.

(2) The semiconductor is adopted as the substrate, the processing technology is simple, the miniaturization of the chip can be realized, the heat loss is reduced, and the power is reduced; the problems of dry burning, charring, core pasting and the like can be avoided, and the safety risk is greatly reduced. In addition, the heating assembly and the tobacco tar are in an isolated state, so that the leakage of metal elements is avoided, the phenomenon that metal ions are sucked along with the tobacco tar by a human body in the use process is avoided, and the tobacco tar is healthy and safe.

(3) The metal wires are uniformly distributed on the planar film in the heating area by adopting a vortex winding mode, the temperature uniformity and consistency are good, the atomization temperature of each part can be ensured to be basically consistent, and the atomization uniformity is enhanced; for the scheme of multiple groups of heating wires, different optional working modes can be provided by simultaneously supplying power to one group of multiple groups of heating wires, under different working modes, the heating temperature and the heating rate are different, the atomizing rate and the atomizing intensity are different, and a smoker can adjust the heating wires according to the own requirements and preferences; the concentration of atomizing smog can only be roughly changed through simply adjusting the power of electron cigarette to current technique, the utility model discloses an adjustment mode is more controllable and accurate.

(4) The electronic cigarette adopts the initiative oil feeding device to realize the oil feed, and the oil feed volume is controllable, satisfies the not equidimension demand to smog.

(5) The utility model discloses a flow sensor and smog mass sensor's cooperation is used, realized that the controller gives the function of oil mass with level smog mass sensor testing result automatic control heating power and initiative according to the flow sensor testing result, really realized the real-time detection control of control circuit to the system, really realized the system intellectuality, according to actual demand control heating power and give the oil mass, make and to reach the best matching state between the two, avoid appearing heating power too high and give the untimely dry combustion method problem of oil or heating power and can't provide the core problem of best quality smog inadequately, simultaneously the utility model discloses a low power dissipation, duration is strong, can the energy saving, has fine social effect.

Drawings

Fig. 1 is a schematic view of the overall structure of an atomizing chip in embodiment 1 of the present invention;

FIG. 2 is a schematic view of the base structure of FIG. 1;

FIG. 3 is a schematic top view of the structure of FIG. 2;

FIG. 4 is a schematic diagram of the cover plate structure shown in FIG. 1;

FIG. 5 is a schematic top view of the structure of FIG. 4;

FIG. 6 is a bottom view of the structure of FIG. 4;

fig. 7 is a schematic view of the overall structure of an atomizer having another structure according to embodiment 1 of the present invention;

fig. 8 is a schematic structural diagram of a first embodiment of the present invention;

fig. 9 is a schematic structural view of a second embodiment of the present invention in embodiment 1;

fig. 10 is a schematic structural view of a third embodiment of the present invention in embodiment 1;

fig. 11 is a schematic structural view of a second embodiment of the present invention in embodiment 1;

fig. 12 is a schematic structural view of a fifth base according to embodiment 2 of the present invention;

fig. 13 is a schematic structural view of a heating assembly in the fifth embodiment of the present invention 2;

fig. 14 is a schematic top view of a base according to embodiment 2 of the present invention;

fig. 15 is a schematic structural view of a cover plate in embodiment 2 of the present invention;

fig. 16 is a schematic top view of a cover plate according to embodiment 2 of the present invention;

fig. 17 is a schematic bottom view of a cover plate according to embodiment 2 of the present invention;

fig. 18 is a schematic view of the overall structure of an atomizer in embodiment 3 of the present invention;

fig. 19 is a schematic structural view of a package case according to embodiment 3 of the present invention;

fig. 20 is a schematic top view of the package in embodiment 3 of the present invention;

fig. 21 is a schematic bottom view of a package according to embodiment 3 of the present invention;

fig. 22 is a schematic view of an overall structure of an electronic cigarette in embodiment 4 of the present invention;

fig. 23 is a block diagram of the overall structure of the control system according to embodiment 4 of the present invention;

fig. 24 is a control circuit structure diagram of the controller according to embodiment 4 of the present invention;

fig. 25 is a control schematic block diagram of the control system according to embodiment 4 of the present invention;

fig. 26 is a diagram of a target BP neural network structure according to embodiment 4 of the present invention.

Detailed Description

In order to further understand and appreciate the structural features and advantages of the present invention, preferred embodiments and the accompanying drawings are described in detail as follows:

example 1

As shown in fig. 1, 2 and 3, an electronic cigarette atomizing chip comprises: atomizing chip base 1, apron 2. The base 1 is a heating part of an atomizing chip and is composed of a first silicon substrate 11 and a support film 12; a first micro-cavity 31 having a concave shape on the upper surface of the first silicon substrate 11; a support membrane 12 is fixed on the lower surface of the first silicon substrate 11, and a heating component 4 formed by coiling a metal wire is arranged on the lower surface of the support membrane 12; the heating component 4 is covered with a layer of insulating isolation film 13, and the outside of the insulating isolation film 13 is provided with a lead-out pin of the metal wire 4. In this example, a platinum wire was used as the wire.

The cover plate 2, as shown in fig. 4, 5 and 6, is composed of a second silicon substrate 21 and a filter film 22; the lower surface of the second silicon substrate 21 is configured with a concave second micro-cavity 32, and the upper surface is deposited with the filter membrane 22; the second micro-cavities 32 correspond to the first micro-cavities 31 in number and position. The upper surface of the base 1 and the lower surface of the cover 2 are bonded together to form a complete atomizer chip, as shown in fig. 1. The concave first micro-cavity 31 and the second micro-cavity 32 form a heating cavity 3 for the tobacco tar. The position of the filtering membrane 22 corresponding to the heating cavity 3 is provided with a porous structure to form a smoke channel 23, and the aperture of the smoke channel 23 with the porous structure is 100-1000 nm. Each heating cavity can independently feed oil, and the oil inlet hole 24 can be opened on the first silicon substrate 11, the second silicon substrate 21, or both the first silicon substrate 11 and the second silicon substrate 21. This embodiment is opened only on the second silicon substrate 21. The support membrane of heating chamber bottom is unsettled, and the heat can be better concentrate on this heating region, and thermal high-usage compares prior art, and the consumption reduces by a wide margin, and when atomizing, the tobacco tar is in the bottom in heating chamber and the support membrane even contact of heating position, and the thermal mass is little, and temperature variation is fast, and the rate of rising temperature and cooling is fast.

As shown in fig. 7, the silicon substrate may be replaced with a metal substrate provided with a silicon-containing layer, a metal oxide substrate provided with a silicon-containing layer, a ceramic substrate provided with a silicon-containing layer, the support film 12, the heating element 4 and the insulating isolation film 13 may be prepared based on the silicon-containing layer, and if a metal substrate or a ceramic substrate is used, a thermal insulation layer, for example, an anodic aluminum oxide layer, may be formed between the substrate and the silicon-containing layer. At this time, the porous anodized aluminum layer is used for heat insulation, the atomizing chip base 1 does not need to be provided with the cavity 31, and after the base 1 and the cover plate 2 are bonded, the cavity formed between the second micro cavity 32 and the insulating isolation film 13 is the heating cavity 3. In the embodiment, the smoke channel formed by the porous structure arranged on the isolating membrane 13 effectively controls the particle size of the atomized aerosol, enhances the consistency of aerosol particles and is beneficial to ensuring the smoking impression of smokers; and the splashing caused by oil explosion can be prevented, and the safety is improved.

The wires may be in any group;

the first scheme is as follows: as shown in fig. 8, one wire 41 is used as a heating wire, and the uniformity of the temperature of the heating area is better;

scheme II: an odd number of groups of wires (more than one group), as shown in fig. 9, taking three groups of wires as an example, on the basis of one group of wires in the scheme, two groups of

wires

42 and 43 are respectively spirally wound from two ends 51 and 52 of a central blank of the wire 41 along respective paths, and a group of separated

blank spiral areas

53 and 54 are respectively added between the

wires

42 and 43;

for more groups of metal wires, only winding wires are added along the

blank vortex areas

53 and 54 according to the generation method of the three groups of metal wires;

the third scheme is as follows: even groups of metal wires (more than one group) are removed, a group of metal wires in the middle is removed, and symmetrical metal adding groups are reserved; as shown in fig. 10, taking two sets of wires as an example, under the premise of three sets of wires in the second scheme, the middle set is removed to obtain two sets of

wires

42 and 43, and the two sets of

wires

42 and 43 have the same or different spacing.

The coiled metal wire is approximately formed into a plurality of concentric circles or concentric polygon frames, the number of the sides of the polygons is more than 4 in order to ensure the heating uniformity, and the polygons are preferably axisymmetric, centrosymmetric and rotationally symmetric figures.

For multiple sets of wires, two working sub-solutions are provided:

sub-scheme A: all the metal wires are used as heating wires, and by simultaneously electrifying one or more groups of the plurality of groups of heating wires, taking three groups of

heating wires

41, 42 and 43 as an example, electrifying one or more of the

heating wires

41, 42 and 43, five working modes can be adjusted: 42 or 43; 41 work alone; 42 and 41 are operated simultaneously or 41 and 43 are operated simultaneously; 42 and 43 operate simultaneously; 42. 41 and 43 are operated simultaneously;

and B, a sub-scheme: any one group of Pt metal wires is used as a temperature sensor, and other metal wires are used as heating wires; taking three groups of heating wires as an example, wherein 42 and 43 are used as heating wires, 41 is used as a Pt temperature sensor, and by supplying power to one or two of 42 and 43 at the same time, three working modes can be provided: 42 or 43; 42 and 43 work simultaneously, and 41 is used as a temperature sensor to carry out feedback regulation and control on the power supply voltage, so that the atomization temperature is more stable, and the atomization effect is more stable.

For the scheme of a plurality of groups of heating wires, each group of heating wires is independently powered. If set up multistage heating switch on the tobacco rod of electron cigarette, the one-level corresponds a set of heater strip power supply, and the second grade corresponds two sets of heater strip power supplies, analogizes in proper order. The control switch is of conventional construction and will not be described in detail herein.

In the first to third schemes, the

first silicon substrate

11, 21 is high-resistance monocrystalline silicon with the crystal orientation <100> and the thickness of 400-one-micron, the resistivity of the high-resistance monocrystalline silicon is more than 10 Ω · cm, and the support film 12 is a single-layer film or a composite film of silicon oxide/silicon nitride; the thickness of the support membrane 12 is 2-5 microns; the filter membrane 22 is a single-layer membrane or a composite membrane of silicon oxide/silicon nitride; the thickness of the filter membrane 22 is 1-2 microns; the front surface of the support membrane 12 is provided with a metal heating wire 4; the thickness of the metal heating wire 4 is 200-400 nm; the metal heating wire 4 is made of one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr); the isolation film 14 is a single-layer film or a composite film of silicon oxide/silicon nitride; the thickness of the isolation film 14 is 300-500 nm; the pore size of the smoke channel 23 with the porous structure is 100-1000 nanometers.

And the scheme is as follows: as shown in fig. 11, the filter membrane 22 is directly formed on the back surface of the atomizing chip mount 1, and the oil inlet 24 is formed in the first silicon substrate 11 of the atomizing chip mount 1.

In the fourth scheme, the first silicon substrate 11 and the second silicon substrate 21 are high-resistance monocrystalline silicon with the crystal orientation <100> and the thickness of 400-600 microns, and the resistivity of the high-resistance monocrystalline silicon is greater than 10 Ω · cm; the support film 12 is a single-layer film or a composite film of silicon oxide/silicon nitride; the thickness of the support film (12) is 2-5 microns; the filter membrane 22 is a single-layer membrane or a composite membrane of silicon oxide/silicon nitride; the thickness of the filter membrane 22 is 1-2 microns; the front surface of the support membrane 12 is provided with a metal heating wire 4; the thickness of the metal heating wire 4 is 200-400 nm; the metal heating wire 4 is made of one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr); the isolation film 13 is a single-layer film or a composite film of silicon oxide/silicon nitride; the thickness of the isolation film 13 is 300-500 nm; the pore size of the smoke channel 23 of the porous structure is 100-1000 nm.

The working principle is as follows: the metal heating wire 4 on the atomizing chip base 1 is used for heating the tobacco tar at high temperature to form atomized aerosol; the atomizing chip porous cover plate 2 is used as a filtering device for atomized aerosol; the porous structure 23 on the support membrane 22 only allows aerosol particles with the particle size smaller than the pore size to pass through, and blocks aerosol particles with large particle size and other impurities; the oil inlet 24 is used for adding tobacco tar.

Example 2

And a fifth scheme: as shown in fig. 12-17, the chip can be further designed to have a plurality of independent heating cavities, for example, 4 heating cavities are in a 2 × 2 array, the first micro cavity 31 and the second micro cavity 32 of the atomizing chip base 1 can also be designed in an array form, for example, a 2 × 2 array, after the base 1 and the cover plate 2 are bonded, 4 mutually independent heating cavities are formed, and correspondingly, 4 heating plates are connected in series on the lower surface of the support film to form

heating regions

61, 62, 63 and 64 corresponding to the 4 heating cavities; the filter membrane is provided with 4 smoke channels 23 of porous structure. One smoke channel 23 for each heating chamber 3. Each heating chamber has an independent oil inlet 24.

The number of the heating wire structures and the number of the heating areas can be any number; scheme two and scheme three are equally applicable to scheme five.

A plurality of heating chamber accessible different tiny-oil pump oil intakes, every tiny-oil pump can be controlled alone (if open and close of the corresponding tiny-oil pump of through control valve control, control switch can set up in the individuality of electron cigarette, for opening 1 tiny-oil pump if one-level is markd, the second grade is markd for opening 2 tiny-oil pumps, so on, because of prior art, not shown in the figure), according to user's demand, the tiny-oil pump of optional different quantity is opened, with the oil input that satisfies different grades, thereby satisfy user's different demands.

With respect to example 1 and example 2, there is also provided a preparation method:

the preparation method of the atomization chip based on the schemes I, III and V comprises the following steps:

step 1, preparing an atomization chip base (1):

(a) depositing a single or composite film of silicon oxide/silicon nitride, i.e., a support film 12, on the lower surface of the first silicon substrate (sheet) by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD), the total thickness of which is 2-5 μm;

(b) photoetching the front surface, depositing 200-400 nm metal by adopting magnetron sputtering coating or electron beam evaporation coating, and removing the photoresist and stripping to form a metal heating wire;

(c) depositing a silicon oxide/silicon nitride single layer or composite film on the metal heating wire by Plasma Enhanced Chemical Vapor Deposition (PECVD) or low-pressure chemical vapor deposition (LPCVD), wherein the total thickness is 300-500 nm;

(d) photoetching the upper surface of a first silicon substrate, then releasing a sealing film through anisotropic etching liquid (KOH solution or TMAH solution) of silicon and forming a first micro cavity 31, namely an atomizing chip base (1);

step 2, preparing the porous cover plate 2 of the atomizing chip:

(e) depositing a single layer or a composite film of silicon oxide/silicon nitride, i.e., a filter membrane, on the upper surface of a second silicon substrate (sheet) by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD), the total thickness of which is 1-2 μm;

(f) photoetching the filtering membrane, and etching a micropore array by adopting Reactive Ion Etching (RIE), wherein the aperture is 100-1000 nm;

(g) photoetching the lower surface of the second silicon substrate, releasing the closed porous film through anisotropic etching solution release (KOH solution or TMAH solution) of silicon, and forming a concave micro-cavity, namely the porous cover plate 2 of the atomizing chip;

step 3, preparing an electronic cigarette MEMS atomization chip:

(h) closely contacting the upper surface of the atomizing chip base with the lower surface of the atomizer porous cover plate, and bonding the upper surface of the atomizing chip base and the lower surface of the atomizer porous cover plate together through a bonding process;

(i) scribing the wafer obtained in the step (h) by using a scribing machine to obtain a single chip;

(j) drilling the single chip obtained in the step (i) to obtain the controllable MEMS atomization chip;

the preparation method of the electronic cigarette MEMS atomization chip based on the fourth scheme comprises the following steps:

(k) depositing a single layer or a composite film of silicon oxide/silicon nitride on a first silicon substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD) to a total thickness of 2-5 microns;

(l) Photoetching the front surface, depositing 200-400 nm metal by adopting magnetron sputtering coating or electron beam evaporation coating, and removing the photoresist and stripping to form a metal heating wire;

(m) depositing a single layer or a composite film of silicon oxide/silicon nitride on the metal heating wire by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD), wherein the total thickness is 300-500 nm;

(n) performing photolithography on the upper surface of the first silicon substrate, and then releasing the sealing film by using anisotropic etching solution (KOH solution or TMAH solution) of silicon to form a first micro chamber 31;

(o) depositing a single or composite film of silicon oxide/silicon nitride on a second silicon substrate by Plasma Enhanced Chemical Vapor Deposition (PECVD) or Low Pressure Chemical Vapor Deposition (LPCVD), the total thickness being 1-2 microns;

(p) photoetching the front surface, and etching a micropore array by adopting Reactive Ion Etching (RIE), wherein the aperture is 100-1000 nm;

(q) closely contacting the upper surface of the first silicon substrate obtained in the step (n) with the lower surface of the second silicon substrate obtained in the step (p), and bonding the upper surface and the lower surface together through a bonding process;

(r) scribing the wafer obtained in the step (q) by using a scribing machine to obtain a single chip;

(s) drilling the single chip obtained in the step (r) to obtain the MEMS atomization chip of the electronic cigarette;

of course, the through holes of the steps j and t can also be formed by wet etching of the step g; the supporting film of the steps a and k is a single-layer or composite film of silicon oxide/silicon nitride; the filtering membrane in the step e and the filtering membrane in the step o are single-layer or composite membranes of silicon oxide/silicon nitride; the isolating film in the step c and the step m is a single-layer or composite film of silicon oxide/silicon nitride; d, the metal is one or more of platinum/titanium (Pt/Ti), gold/titanium (Au/Ti), platinum/chromium (Pt/Cr) and gold/chromium (Au/Cr); the corrosive liquid of the steps d, g and n is potassium hydroxide solution (KOH solution) or tetramethyl ammonium hydroxide solution (TMAH solution).

Example 3

The utility model discloses still provide the atomizer, including atomizing chip and atomizing chip's package tube 50, package tube 50 can be for cylindrical, also can be for the prismatic type, and the shell cross sectional shape of main electrical apparatus cigarette is convenient for assemble can. The present embodiment provides a package 50 having a square cross-section. As shown in fig. 18-21, the encapsulating tube comprises a tube shell wall 570, an inner cavity 520, a welding spot 540 at the bottom of the inner cavity 520, an open structure 550 at the top of the inner cavity, micro-pores 560 at the bottom of the tube shell, and a contact electrode 580 at the bottom of the tube shell, wherein the open structure 550 is used as an outlet of aerosol; one end of the oil delivery micro-pipe 530 is connected with the oil inlet 24 of the atomizing chip through the micro-hole 560, and the other end is connected with the oil delivery micro-oil pump.

Packaging the atomized chip: after the atomizing chip is clamped in the inner cavity 520 according to a conventional structure (the packaging structure is the prior art, and is not described in detail here), the electrode on the atomizing chip is aligned and contacted with the welding point 540 in the cavity 520 of the packaging tube shell, one end of the welding oil delivery micro-pipeline 530 is inserted into the oil inlet 24, and the other end is exposed from the micro-hole 560 at the bottom of the packaging tube shell 520 and connected with the oil delivery micro-oil pump to complete a single atomizer.

Example 4

An electronic cigarette, as shown in fig. 22, includes a cigarette rod, a cigarette holder 71 is disposed at one end of a cavity 91 in the cigarette rod, a cigarette holder outlet 72 is disposed on the cigarette holder 71, the cigarette holder 71 and the cigarette rod cavity 91 are detachably or openably connected, such as screwed connection, clamping connection, etc., the connection structure is a conventional structure, and details thereof are not described herein. The tobacco stem cavity 91 is internally provided with an encapsulated atomizing chip and micro oil pumps 610 and 620. The packaged atomizing chip is close to the cigarette holder 71, the atomizing chip is fixedly connected with the

micro-oil pumps

610 and 620 through the oil delivery micro-pipeline 530, and the contact electrode 580 at the bottom of the packaging tube shell of the atomizing chip is connected with the interface of the heating voltage control unit in the cigarette rod cavity 91. The micro oil pumps 610 and 620 are both connected to the oil storage chamber 8.

As shown in fig. 20, the MEMS gas sensor and the MEMS flow sensor are both disposed between the air outlet of the atomizing chip 5 and the mouthpiece. This embodiment is fixed at the package housing open structure 550. A connecting rod 5501 is fixed in a crossing mode at the position of the open structure 550, and the MEMS gas sensor and the MEMS flow sensor are fixed on the connecting rod and connected with the signal processing circuit through leads. The MEMS gas sensor and the MEMS flow sensor are positioned on the smoke circulation path, so that signals can be fully collected conveniently.

The number of tiny-oil pumps is different according to the number of heating chambers, and the heating chamber in this embodiment is 1, has two inlet ports, so is equipped with 2 tiny-oil pumps. If the heating chambers are 2 × 2 arrays designed according to the fifth scheme, 8 micro oil pumps are needed, or 1 micro oil pump is communicated with 4 heating chambers through 8 branch pipes, and the branch pipes are provided with control valves, so that the purpose that the heating chambers can be independently controlled is met.

In this embodiment, the relation of connection of oil tank, tiny-oil pump, atomizer and tobacco rod can adopt the detachable mode to fix, is convenient for change. If the inner cavity of the cigarette rod is designed into a plurality of sections, each section corresponds to the structure of the oil tank, the micro-oil pump and the atomizer and is designed with a corresponding clamping structure.

In this embodiment, because the structural constraint of atomizer, need design into the mounting structure who has certain angle with tobacco rod and cigarette holder, make the electron cigarette when using, the tobacco rod is in slope or vertical state, guarantees tobacco tar and heating surface contact.

In a preferred embodiment, the electronic cigarette further comprises an LED indicator 13 disposed at an end of the tobacco rod cavity 11 remote from the mouthpiece 12. The electronic cigarette display device is used for displaying whether the electronic cigarette is opened or not and simultaneously displaying an alarm.

In this embodiment, a control system is further provided, as shown in fig. 23, including:

the flow sensor is an MEMS flow sensor and is used for collecting smoke flow and outputting smoke flow data; a single-time flow preset value is preset in the MEMS flow sensor; the MEMS flow sensor compares the currently acquired smoke flow data with a single flow preset value, if the current acquired smoke flow data is larger than the single flow preset value, the smoke flow data is sent to the controller so as to screen data mistransmission caused by external reasons such as slight shaking of the electronic cigarette.

This embodiment uses a MEMS flow sensor instead of a conventional electret diaphragm and barometric pressure sensor. The MEMS flow sensor can accurately measure the flow velocity of air in the cavity. When a user inhales, air in the cavity of the electronic cigarette flows, the change of the air flow rate is sensed by the MEMS flow sensor, and then the MEMS flow sensor converts the fine changes into an electric signal which can be recognized by the signal controller and transmits the electric signal to the signal controller.

At the initial stage of starting the control system, after the controller receives smoke flow data for the first time, the power supply is controlled to supply power to the smoke quality sensor, the active oil supply device and the smoke generating device, and the control system formally enters a working state.

The smoke quality sensor, the present embodiment, adopts a MEMS gas sensor, and is configured to collect smoke quality and output smoke quality data. The MEMS gas sensor is preset with a quality preset value, compares the acquired current smoke quality data with the quality preset value, and sends the data to the controller when the data is smaller than the preset value. When a user begins to smoke, the MEMS gas sensor detects a specific gas such as CO in the gas₂To detect the quality of the aerosol-generating gas and to convert the sensed concentration into an electrical signal that can be recognized by the signal controller and transmitted to the controller.

As shown in fig. 24, the controller includes a control circuit and a single chip microcomputer. The control circuit includes:

the bridge measuring circuit is connected with the output end of the MEMS flow sensor and used for converting the resistance change signal output by the MEMS flow sensor into an analog voltage signal, and specifically comprises the following steps: the R1, the R2 and the MEMS flow sensor form a bridge measuring circuit, a Wheatstone bridge circuit is formed by two fixed resistors and a fixed voltage, and the R5 forms a partial pressure measuring circuit of the MEMS gas sensor. The filter circuits R3, C1, R4, C2, R6 and C3 form three filter circuits, and the three filter circuits are connected with the output end of the bridge measuring circuit to simply filter the front-section measuring output value and avoid noise interference. The output is connected with the ADS1115 chip to convert the analog signal into the digital signal, and finally the digital signal is transmitted to the single chip microcomputer through the IIC bus. The power supply is provided with a plurality of low-dropout linear regulator chips for converting the battery voltage into proper voltage to supply power to each part; the power supply outputs voltage according to the instruction of the single chip microcomputer and supplies power to the MEMS flow sensor, the MEMS gas sensor, the smoke generating device and the active oil supply device. The power supply comprises an operational amplifier, and a voltage negative feedback circuit is formed by the operational amplifier and resistors R7 and R8 and is used for detecting whether the working state of the smoke generating device is normal or not, maintaining proper heating power and feeding back the result to the control circuit.

The single chip microcomputer is used for controlling the whole system, a health monitoring module is written in advance, the total smoke flow inhaled in unit time is counted, the interference on the smoke volume of a user in specified time is carried out, and the health of the user is protected to the maximum extent. And simultaneously, a target BP neural network algorithm is written in for fitting according to the smoke flow data, the smoke quality data and the total smoke flow in unit time to obtain the control voltage of the flow sensor and the smoke quality sensor, so that the system is reasonably and effectively controlled.

And the health monitoring module is used for receiving and counting the total smoke flow in unit time. The health monitoring module is preset with an alarm preset value, the total smoke flow in unit time is compared with the alarm preset value, if the total smoke flow in unit time is larger than the alarm preset value, a working voltage adjusting signal and an alarm signal are sent out, and the single chip microcomputer controls the power supply to respectively output voltage to the active oil feeding device and the smoke generating device according to the working voltage adjusting signal. The cigarette filter is used for intervening the smoking amount of a user within a set time, and the health of the user is protected to the maximum extent.

As shown in fig. 26, the training process of the target BP neural network is as follows: constructing a sample set according to the smoke flow data, the smoke quality data and the health flow data, and dividing the sample set into a training set and a testing set;

training a pre-constructed target BP neural network by using a training set until convergence; testing the converged BP neural network by using the test set, judging whether the accuracy of the converged BP neural network is greater than or equal to a preset threshold value, and if so, taking the converged BP neural network as a target BP neural network; if not, the weight and the hyper-parameters of the parameters in the BP neural network are adjusted, and the BP neural network which is constructed in advance by training with a training set is returned to be executed until convergence.

In this embodiment, the active oil supply device 25 is a micro oil pump, and is controlled by the control circuit to actively absorb oil. The smoke generating device 26 is an atomizer, and an oil inlet cavity of the atomizer is communicated with an oil outlet of the micro oil pump 25.

As shown in fig. 25, the control system of the present embodiment has the following control principles: the control system comprises three closed-loop controls:

firstly, in order to avoid the influence of air flow velocity fluctuation and bring bad user experience, only when the smoke flow data detected by the MEMS flow sensor 21 is larger than a single flow preset value, the user is considered to start to inhale, and the interference false alarm is avoided. The single chip microcomputer rapidly senses the change, the power supply is controlled to adjust the voltage of the active oil supply device and the voltage of the smoke generating device, meanwhile, the health monitoring module and the smoke quality sensor start to work, and the other two closed loops start.

For the closed loop of the health monitoring module, after the control circuit identifies the effective flow, the control circuit records the flow to the corresponding register, when a user inhales smoke with too much flow in a certain time period, the alarm system is started, a corresponding processing mode is input to the singlechip, and the working voltage is regulated and controlled.

For the closed loop of the smoke quality detection, when smoke is generated, the smoke quality sensor can carry out real-time detection, and when the detection value does not meet the requirement of the optimal quality, the control circuit can control the working voltage of the active oil supply device and the smoke generation device. Meanwhile, the MEMS flow sensor continuously works to detect the air flow in the system in real time, the single chip microcomputer can synthesize the output of the three closed loops to perform algorithm fitting, and the working voltage of each part of the system is accurately controlled in real time, so that the system works in the best state, the smoke quantity meeting the requirements of users is rapidly generated on the premise of ensuring the smoke quality, and meanwhile, the electric quantity and the smoke quantity can be saved.

The target BP neural network algorithm written in advance in the single chip microcomputer is shown in fig. 26:

in the present algorithm, there are three signal inputs: smoke flow data, smoke quality data, health flow data. After 3 data are input, carrying out neural network operation, wherein L1 is an input layer, and L2-Ln are hidden layers, firstly, the algorithm forwards propagates the data from the input layer to the hidden layers according to preset values, fitting is carried out, a two-output result is obtained, then, the result is reversely propagated, the error between the calculation and three input values is calculated, the preset values are adjusted, and iteration is carried out repeatedly, so that the optimal output value is obtained: an active oil supply voltage and a smoke generator voltage. In the algorithm, a typical two-output neural network algorithm is used, the weight preset value of the algorithm needs to be obtained by continuously performing experiment fitting according to the actual characteristics of the MEMS flow sensor and the smoke quality detection sensor, the algorithm has strong pertinence, the operation time of the algorithm can be reduced, the accuracy of a processing result is rapidly improved, and the algorithm cannot be easily copied.

In the specific work, when a user inhales for the first time, the MEMS flow sensor 21 responds quickly, the bridge measuring circuit measures the change of the MEMS flow sensor, the ADS1115 chip converts the analog voltage change into a digital signal which is convenient to transmit, then the single chip microcomputer controls the active oil supply device to actively absorb the smoke oil amount of the matching result to the smoke oil containing cavity in the smoke generating device according to the response result of the MEMS flow sensor, corresponding smoke is generated, the MEMS gas sensor starts to work, the quality of the smoke generated at this time is detected, data are transmitted to the single chip microcomputer through the measuring circuit and the signal conversion circuit, the system can completely run after the first inhalation, and the MEMS flow sensor, the MEMS gas sensor and the health monitoring module preset in the control circuit start to work simultaneously. When the user inhales again, the MEMS flow sensor transmits the flow information of the inspiration again to the single chip microcomputer, the single chip microcomputer judges that the inspiration flow reaches the pre-designed threshold value instead of air fluctuation, the actual flow value of the inspiration flow is stored in the specified register, the flow values are superposed, and when the actual flow value does not accord with the pre-set requirement of the health monitoring module, the health monitoring module generates corresponding processing signals. Meanwhile, the single chip microcomputer inputs flow information generated by a current inspiration MEMS flow sensor, quality information generated by a previous MEMS gas sensor and processing signals of the health monitoring module into a target BP neural network algorithm written in advance, the most accurate processing result is quickly obtained by fitting three input values, then the controller controls the power supply to quickly adjust the system according to the algorithm response result, for example, after the flow superposition value exceeds a value preset by the health monitoring module within a specified time, in order to ensure the health of a user, the single chip microcomputer can quantitatively zoom the heating voltage and the oil amount within unit time according to the proportion, the smoke generation amount is reduced on the premise of ensuring the smoke quality, and meanwhile, the LED lamp 13 can be started to flash different color lights to remind the user of paying attention to the health problem; in addition, when the working state of the electronic cigarette meets the requirements of the health monitoring module, the electronic cigarette starts to work normally, if a user increases the suction force, the MEMS flow sensor can quickly sense the change, meanwhile, the MEMS gas sensor can quickly detect the quality of the generated smoke, the single chip can perform fitting according to the result, the heating voltage and the oil supply amount are accurately increased according to the fitting result, and the smoke amount meeting the requirements of the user is quickly generated on the premise of ensuring the quality of the generated smoke; when a user inhales air suddenly through a small opening, the MEMS flow sensor can quickly sense the change, meanwhile, the MEMS gas sensor can quickly detect the quality of generated smoke, the single chip can be fitted according to the result, the heating voltage and the oil supply amount are accurately reduced according to the fitting result, the smoke amount meeting the requirements of the user is quickly generated on the premise of ensuring the quality of the generated smoke, and meanwhile, electric energy and smoke oil can be saved, so that the heating power and the active oil supply amount can be optimally matched due to the fact that the MEMS flow sensor and the MEMS gas sensor are used for integrally detecting the system in real time, and a neural network algorithm written in the interior in advance, the problems that the heating power is too high and the oil supply is not enough and the smoke with the optimal quality cannot be provided are avoided, the system is more intelligent, and the user can obtain the optimal taste experience, meanwhile, the electric energy and the tobacco tar can be saved, and the social value and the economic value are very high. In addition, in order to ensure that the working voltage of the smoke generating device and the active oil feeding device is stable, the power supply carries out feedback regulation through a feedback circuit to maintain the working voltage to be stable, so that the active oil feeding amount and the heating power reach the best matching, and the smoke amount which can meet the requirements of users can be generated quickly.

The embodiment also provides an electronic cigarette smoke quality and flow control method, which comprises the following steps:

firstly, acquiring smoke flow data by adopting an MEMS flow sensor, wherein a single-time flow preset value is preset on the MEMS flow sensor; the MEMS flow sensor compares the currently acquired smoke flow data with a single flow preset value, and if the currently acquired smoke flow data is larger than the single flow preset value, the smoke flow data is sent to the controller;

after the controller receives the smoke flow data for the first time, the controller controls the power supply to supply power to the smoke quality sensor, the active oil supply device and the smoke generating device, and the system is formally started;

the MEMS gas sensor is used for collecting the smoke quality and outputting smoke quality data, and the MEMS gas sensor can detect the quality of smoke generated by the smoke generating device. When a user begins to smoke, the MEMS gas sensor detects the quality of the aerosol-generating gas by detecting the concentration of a particular gas, such as CO2, in the gas and converts the sensed concentration into an electrical signal that can be recognized by the signal controller and transmitted to the controller;

the controller comprises a control circuit and a singlechip. The control circuit comprises a bridge measuring circuit, is connected with the output end of the MEMS flow sensor and is used for converting resistance change signals output by the MEMS flow sensor into analog voltage signals, and specifically comprises the following steps: the R1, the R2 and the MEMS flow sensor form a bridge measuring circuit, a Wheatstone bridge circuit is formed by two fixed resistors and a fixed voltage, and the R5 forms a partial pressure measuring circuit of the MEMS gas sensor. The filter circuits R3, C1, R4, C2, R6 and C3 form three filter circuits, and the three filter circuits are connected with the output end of the bridge measuring circuit to simply filter the front-section measuring output value and avoid noise interference. The output is connected with the ADS1115 chip to convert the analog signal into the digital signal, and finally the digital signal is transmitted to the single chip microcomputer through the IIC bus. The power supply is provided with a plurality of low-dropout linear regulator chips for converting the battery voltage into proper voltage to supply power to each part; the power supply outputs voltage according to the instruction of the single chip microcomputer and supplies power to the MEMS flow sensor, the MEMS gas sensor, the smoke generating device and the active oil supply device. The power supply comprises an operational amplifier, and a voltage negative feedback circuit is formed by the operational amplifier and resistors R7 and R8 and is used for detecting whether the working state of the smoke generating device is normal or not, maintaining proper heating power and feeding back the result to the control circuit.

And the health monitoring module is used for counting the total smoke flow in unit time. The health monitoring module is preset with an alarm preset value, the total smoke flow in unit time is compared with the alarm preset value, if the total smoke flow in unit time is larger than the alarm preset value, a working voltage adjusting signal and an alarm signal are sent out, and the single chip microcomputer controls the power supply to respectively output voltage to the active oil feeding device and the smoke generating device according to the working voltage adjusting signal. The cigarette filter is used for intervening the smoking amount of a user within a set time, and the health of the user is protected to the maximum extent.

The training process of the target BP neural network comprises the following steps: constructing a sample set according to the smoke flow data, the smoke quality data and the health flow data, and dividing the sample set into a training set and a testing set;

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the principles of the present invention may be applied to any other embodiment without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides an electron smog chip which characterized in that: the oil feeding device comprises a base and a cover plate, wherein the base and the cover plate are fixedly matched to form at least one heating cavity, and each heating cavity independently feeds oil; the cover plate is provided with smoke channels with the same number as the heating cavities, and each smoke channel is used for communicating the heating cavities with the outside; a heating assembly is fixed on the lower surface of each heating cavity corresponding to the position of the base; the oil inlet has all been seted up to the chamber wall in every heating chamber, every the heating chamber passes through the oil inlet and independently communicates with the outside.

2. The electronic cigarette atomization chip of claim 1, wherein: the base comprises a first substrate, and the first substrate is a semiconductor; depositing a support film on the lower surface of the first substrate, wherein at least one first micro cavity is etched on the upper surface; the bottom wall of the first micro cavity is the support membrane; the heating assembly is arranged on the lower surface of the support film, and the insulating layer is coated outside the heating assembly.

3. An electronic aerosolization chip according to claim 2, wherein: the cover plate is of a semiconductor plate-shaped structure, after the cover plate is bonded and fixed with the upper surface of the first substrate, the first micro cavity forms the heating cavity, and the smoke channel is formed at the position of the heating cavity corresponding to the cover plate;

4. An electronic aerosolization chip according to claim 3, wherein: the oil inlet hole is formed in one or more of the first substrate, the second substrate and the cover plate with the plate-shaped structure.

5. An electronic cigarette aerosolization chip according to any one of claims 1 to 4, wherein: the heating assembly is formed by uniformly winding one or more heating wires in a vortex shape, and the plurality of heating wires are respectively and independently powered; the planar area of the heating area formed by the heating assembly is approximately equal to the area of the bottom of the corresponding heating cavity.

6. An electronic aerosolization chip according to claim 5, wherein: the heating assembly comprises n metal wires made of the same material, n is an integer larger than 1, the n metal wires are mutually independent and spirally wound on the lower surface of the bottom wall of the heating cavity to form a plurality of concentric circles or concentric polygon frames approximately, wherein the m metal wires are temperature sensors, and the temperature sensors and the concentric circles or the concentric polygon frames of the heating wires are arranged in a staggered mode in the same plane; m is more than or equal to 1 and less than n; n-m metal wires are used as heating wires.

7. An electronic cigarette, characterized in that: comprises a tobacco rod, wherein one end of the tobacco rod is fixed with a cigarette holder; an oil tank and an atomization chip are fixed in the cigarette rod; the atomizing chip is the atomizing chip of any one of claims 1 to 6; the atomization chip is positioned between the oil tank and the cigarette holder; an oil supply device is fixed between the atomizing chip and the oil tank; the heating cavity is communicated with an oil tank through an oil feeding device.

8. The electronic cigarette of claim 7, wherein: the system also comprises a control system; the control system comprises

9. The electronic cigarette of claim 8, wherein: the atomizing chip is packaged in the tube shell; the tube shell is provided with an opening which communicates the smoke channel with the cigarette holder.

10. The electronic cigarette of claim 9, wherein: the opening is transversely spanned with a connection, and the flow sensor and the smoke mass sensor are fixed on the connecting rod.